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7545842 |
Pre-ionizer for pulsed gas-discharge laser
In a CO 2 laser a pre-ionizer is assembled in a flange configured to be attached to a laser-gas enclosure of the laser over an aperture in a wall of the enclosure. An aperture in the base of the...
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7542502 |
Thermal-expansion tolerant, preionizer electrode for a gas discharge laser
A corona-discharge type, preionizer assembly for a gas discharge laser is disclosed. The assembly may include an electrode and a hollow, dielectric tube that defines a tube bore. In one aspect, the...
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7477673 |
Arrangement for generating extreme ultraviolet radiation based on an electrically operated gas discharge
The object of the invention in an arrangement for generating extreme ultraviolet radiation based on an electrically operated gas discharge is to reduce the time required for charging the electrodes...
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7124059 |
Managing maintenance for an item of equipment
A method and system for maintaining an item of equipment supports the provision of predictive maintenance in a manner which eliminates or reduces downtime of the equipment. The method includes...
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7050475 |
Waveguide laser
A laser waveguide, where the laser waveguide can be formed by electrodes and at least one sidewall in a manner allowing a more compact structure than previously provided. Protrusions in the...
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6999490 |
Discharge igniter for a waveguide CO2 laser
A waveguide gas laser includes an enclosure filled with a lasing gas. A ceramic block is provided with one or more waveguide channels. At least one of the waveguide channels includes an open region...
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6987790 |
Excimer or molecular fluorine laser with several discharge chambers
Precise timing control can be obtained for a gas discharge laser, such as an excimer or molecular fluorine laser, using a timed trigger ionization. Instead of using a standard approach to control...
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6963596 |
Pre-ionizer for RF-energized gas laser
A pre-ionizing arrangement for a gas laser includes two ceramic-jacketed ionizer electrodes extending into an enclosure including spaced-apart slab electrodes of the laser and a lasing gas at...
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6950453 |
Pulser driven, helium free transversely excited atmospheric-pressure (TEA) CO2 laser
A novel and inexpensive excitation circuit based on a single switch and a single source drives helium-free TEA CO 2 lasers, mini to conventional types, providing low divergent output. By varying...
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6757315 |
Corona preionization assembly for a gas laser
A preionization device for a gas laser includes an internal preionization electrode having a dielectric housing around it such that the preionization device is of corona type. The internal...
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6714576 |
Excimer laser and method of operating an excimer laser
The present invention relates to an excimer laser comprising a charging circuit including a parallel connection of a storage capacitor (C B ) with a series connection of a reoscillation inductance...
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6700908 |
Device for avoiding sliding discharges in pre-ionization in a gas laser with corona discharge
The present invention is a device for avoiding sliding discharges in pre-ionization in a gas laser with corona discharge. The invention uses a pair of main electrodes provided in a closed gas...
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6671302 |
Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser
A device for use with a repetitively pulsed gas laser provides self-initiated UV preliminary ionization of the active volume of a laser, which has extended high-voltage and grounded electrodes...
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6654402 |
Corona preionization electrode unit for use in gas laser apparatus
A corona preionization electrode unit for use in gas laser apparatus, wherein the electric field for corona discharge is concentrated, and ultraviolet radiation is not blocked, and further the...
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6650679 |
Preionization arrangement for gas laser
A preionization device for a gas laser comprises an internal preionization electrode having a dielectric housing around it and an external preionization electrode displaced from the dielectric...
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6643312 |
ArF excimer laser device and a fluoride laser device
An ArF excimer laser device and a fluoride laser device for exposure which is structured so that primary current that infuses energy from a magnetic pulse compression circuit to discharge...
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RE38054 |
Reliable, modular, production quality narrow-band high rep rate F2 laser
The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz or greater. Replaceable modules include...
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6535540 |
Discharge device for pulsed laser
In a preionization discharge circuit 10, when a switch SW 14 is turned on, an electric current i 10 from a constant current source 13 flows through a loop of a coil L 12, en electrode 11 A...
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6529539 |
Molecular light emission device
Injection efficiency is greatly improved by chemically bonding an organic light emission molecule to an electrode, so as to realize a high efficiency light emission type of flat panel display and a...
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6507596 |
Gas laser apparatus
The amount of pre-ionization by the pre-ionization electrode provided on the gas outflow side of the main discharge space, out of at least one pair of pre-ionization electrodes, is adjusted so as...
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6480519 |
Gas laser device that emits ultraviolet rays
To reduce the cross-sectional area of a discharge circuit loop in the excitation circuit of a gas laser device that discharges ultraviolet rays, thereby reducing the inductance and enhancing the...
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6465965 |
Method and system for energy conversion using a screened-free-electron source
A method and device for providing power to a load are disclosed. A beam of free electrons is directed from a free-electron source, such as an electron gun, into an enclosing conductive surface. The...
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6456643 |
Surface preionization for gas lasers
An excimer or molecular fluorine laser includes one or more sliding surface discharge preionization units each including an elongated preionization electrode spaced from one or more associated...
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6442185 |
All-metal, DC excited laser with RF pre-ionization
The present invention provides a novel and improved technique for achieving a combined RF-DC gas discharge in the optical cavity of the gas laser. The combination of the fast pre-ionization with...
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6400741 |
Emission timing control apparatus for pulsed laser
An emission timing control apparatus for a pulsed laser including a magnetic pulse compression circuit having a switching section for carrying out a switching operation to connect and disconnect a...
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6229837 |
Metal-vapor pulsed laser
The present invention provides a novel metal-vapor pulsed laser capable of being manufactured without using a large-sized laser tube or an expensive discharging circuit. The output and the...
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6198761 |
Coaxial laser pulser with solid dielectrics
A pulser with solid dielectrics including a pulse compressor and pulse transformer apparatus, which is able to produce short bursts of electrical energy at high voltage utilizing a coaxial...
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6167065 |
Compact discharge pumped soft x-ray laser
An extremely compact soft x-ray and/or extreme ultraviolet laser is disclosed that can be repetitively fired within short time intervals. The laser generates a plasma within a capillary (3) by...
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6055259 |
Cartridge excimer laser system
A new cartridge excimer laser system and method for generating an excimer laser beam using the system are provided. The system utilizes a cartridge (10) which contains a halogen-noble gas mixture...
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6018537 |
Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser
The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz or greater. Replaceable modules include...
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5892788 |
Gas laser with dual plasma mixing
A gas laser includes an enclosure forming a first chamber, a second chamber and a lasing chamber which communicates through a first opening to the first chamber and through a second opening to the...
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5875207 |
Discharge arrangement for pulsed gas lasers
The description relates to a discharge device (1) for pulsed gas lasers in which there are laser electrodes (8, 9) in the space (15) between which discharges with intense UV emission are produced...
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5818865 |
Compact excimer laser insulator with integral pre-ionizer
A pre-ionizing system in which the pre-ionizer elements are integral with the cathode insulating plate is provided. The cathode insulating plate includes a recessed region machined into the front...
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5790582 |
Laser oscillator
The invention relate to a laser oscillator containing at least one pair of main electrodes within a laser tube. In accordance with the first invention, a downstream one of the main electrodes...
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5771258 |
Aerodynamic chamber design for high pulse repetition rate excimer lasers
An excimer laser chamber capable of arc-free operation at repetitive pulse rates of 1 kHz or greater is provided. The chamber balances the electrode design criteria required to produce a...
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5754581 |
Differential impedance discharge for plasma generation
A method and apparatus for generating uniform, transverse-electrical discharges in gaseous media between two principal discharge electrodes is described. At least one of the electrodes is segmented...
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5754579 |
Laser gas controller and charging/discharging device for discharge-excited laser
A first object is to stabilize output of laser light. In order to achieve the first object, if it is detected by an output detection means (15) that the output (E) of laser light (La) has departed...
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5719896 |
Low cost corona pre-ionizer for a laser
An anode and an a cathode in a gas laser, such as an excimer laser, are spaced in a first direction. A voltage difference between these members produces an electrical discharge which ionizes gasses...
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5708676 |
Discharge excitation type pulse laser apparatus
A discharge excitation type pulse laser apparatus includes main discharge electrodes and and an auxiliary discharge electrode. In order to make a voltage pulse applied to the auxiliary discharge...
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5682400 |
Supersonic and subsonic laser with high frequency discharge excitation
Disclosed is a gas laser utilizing high frequency discharge excitation in the area of sonic or supersonic/subsonic transfer gas flow. The laser uses various types of gases and mixtures of gases as...
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5596593 |
Orthogonal RFDC transverse excited gas laser
A gas laser having a housing including a discharge region that contains a lasing gas medium, a pair of DC electrodes having primary surfaces facing toward the discharge region, the primary surfaces...
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5528613 |
Laser apparatus utilizing a magnetically enhanced electrical discharge with transverse AC stabilization
This invention is an improvement on U.S. Pat. No. 4,755,999, titled, "Laser Apparatus Utilizing a Magnetically Enhanced Electrical Discharge." That patent describes a method of forming a thin, flat...
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5438587 |
Preionizer for laser assembly
A preionization assembly is adapted for use with a laser including a laser vessel, a high voltage electrode and a ground electrode defining a discharge region extending longitudinally within the...
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5426661 |
Pulsed laser discharge stabilization
Low power discharge preionizers, or species, are provided by a ionizable species generator that preconditions a laser gas to eliminate arcing in lasers, such as pulsed (high repetition rate)...
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5373528 |
Laser apparatus having a rectangular section
According to the present invention there is provided a laser apparatus capable of efficient oscillation with an excitation power source with comparatively low frequency, wherein discharge is...
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5347531 |
Transverse discharging excitation pulse laser oscillator apparatus
This invention relates to a transverse discharge pumping type pulse laser oscillating device including an electron capturing gas, especially to the configuration of preliminary ionization...
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5345465 |
Apparatus and method for guiding an electric discharge
A device for generating and guiding an electric discharge current including a first electrode, second electrode and a material arranged between the first and second electrode. The device uses a...
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5337330 |
Pre-ionizer for a laser
An anode and a cathode in a laser are spaced in a first direction. A voltage difference between these members produces an electrical discharge which ionizes gases in the laser to react chemically...
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5313487 |
Discharge excitation gas laser apparatus
At least two types of preionization systems are provided at a backside of one of a pair of primary electrodes which are disposed in a spaced opposed relation with respect to each other for causing...
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5313486 |
Discharge excitation pulsed laser oscillation device
A pulsed transversely excited gas laser device includes a pair of main electrodes having main surfaces opposing each other across a main discharge gap and extending along the optical axis of the...
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