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Document Title |
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7586969 |
Method for discriminating anomaly in gas composition and discharge excitation type gas laser oscillator
A discharge excitation type gas laser oscillator has a discharge excitation unit for exciting a laser gas by discharge in a discharge tube to generate induced emission of laser light, a...
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7586968 |
Heater-attached alkali-encapsulated cell and alkali laser apparatus
An alkali-encapsulated cell internally having an alkali metal vapor G encapsulated is provided with first and second heaters 11, 12 . The alkali-encapsulated cell 10 has first and second end...
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7583718 |
Optical mounting scheme for waveguide lasers and waveguide laser incorporating the same
Certain example embodiments of this invention relate to waveguide lasers (e.g., RF-excited waveguide lasers). Certain example embodiments of this invention provide an optical mounting scheme for...
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7583717 |
Laser system
A laser discharge, where the laser discharge can be formed by electrodes and at least one sidewall in a manner allowing a more compact structure than previously provided. Protrusions in the...
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7577177 |
Multi-path laser system
A laser chamber is provided that increases power, initiation, and discharge efficiency over single chamber lasers by providing a multi-fold laser chamber, protrusions, discharge segmentation and...
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7529285 |
Frequency stabilised gas laser
A method for the frequency stabilization of a gas laser with a laser tube ( 1 ), in stable operation includes a continuous operation control procedure with the following steps:
Operating the...
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7480323 |
Laser tube with external adjustable reactance for a gas discharge RF-excited laser
A laser device is provided. The laser device includes a laser tube, oscillator circuitry, and a compensating reactive component that is arranged in parallel with the laser tube.
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7460577 |
RF laser
An RF excited gas laser including an offset V-shaped laser cavity. The laser includes a first and second ceramic body portions with the laser cavity at least partially defined by the ceramic body...
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7453918 |
Pulsed RF high pressure CO2 lasers
An improved laser system includes a sealed-off, RF excited, diffusion cooled, high pressure, short pulsed, high peak power waveguide and slab CO 2 laser that avoids problems typically associated...
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7372202 |
Phase locked microdischarge array and AC, RF or pulse excited microdischarge
The invention is directed to a method and apparatus for phase-locking microdischarge device arrays and an ac, rf, or pulse-excited microdischarge. The invention provides output from a non-laser...
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7342948 |
Blower used for laser oscillator
In an laser oscillator ( 100 ), a blower ( 10, 20, 120 ) for circulating a laser medium between an electric discharge tube ( 102 ) and a circulating passage ( 104 ) includes: a casing ( 12 ) having...
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7274722 |
CO2 slab laser
CO 2 slab laser having a gas-filled tubular housing, sealed off at both ends by end pieces, which accommodates two overlapping electrodes extending into the tubular housing and mirrors arranged in...
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7263116 |
Dielectric coupled CO2 slab laser
A slab laser includes two elongated electrodes arranged spaced apart and face-to-face. Either one or two slabs of a solid dielectric material extend along the length of the electrodes between the...
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7251263 |
Capillary discharge x-ray laser
A compact, high repetition rate, extreme ultraviolet/soft x-ray laser and method for generating such radiation are described. Excitation of the gaseous or vaporous lasing medium is achieved by...
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7230965 |
Anodes for fluorine gas discharge lasers
Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first...
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7215695 |
Discharge excitation type pulse laser apparatus
For the purpose of providing a discharge excitation type pulse laser apparatus capable of reducing disturbance of the discharge space caused by shock waves, the discharge excitation type pulse...
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7203217 |
Narrow band electric discharge gas laser having improved beam direction stability
An electric discharge, narrow band gas laser with improvements in wavelength stability. Improvements result from reduced laser beam directional fluctuations or fast correction of those...
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7190708 |
Annealed copper alloy electrodes for fluorine containing gas discharge lasers
An excimer laser with a laser chamber containing a circulating laser gas containing fluorine and long-life, annealed, copper alloy electrodes. Electrode lifetime is increased by annealing them...
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7167499 |
Very high energy, high stability gas discharge laser surface treatment system
A gas discharge laser crystallization apparatus and method for performing a transformation of a crystal makeup or orientation in the substrate of a workpiece is disclosed which may comprise, a...
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7130324 |
Axial flow type gas laser oscillator
A gas laser oscillator achieving a substantial increase in laser output is provided. This gas laser oscillator includes a permeable screen plate at a position of a laser gas passage and can...
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7099365 |
Oscillation method and device of fluorine molecular laser
An oscillation method and a device of fluorine molecular laser with narrow spectral line width are provided. For this purpose, the device includes main electrodes ( 14, 15 ) for performing main...
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7065122 |
Wire-wound apparatus and high-voltage pulse generating circuit using wire-wound apparatus
Electric field easing members (corona rings) for easing concentration of electric fields caused at edges of a core are disposed between the core and a winding to form a gap so to allow the presence...
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7058111 |
Arrangements for increasing sputter life in gas discharge tubes
A gas discharge tube, such as a ring laser gyroscope, includes a block, a cathode, and an anode. At least a portion of the block is maintained at a reference potential. The cathode may be biased at...
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7046705 |
Gas laser transmitter
A laser oscillator comprises a discharge tube for exciting laser medium, at least a pair of mirrors disposed along an optical axis of laser light emitted by the laser gas excited inside the...
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7023893 |
Low-pressure axial direction excitation type F2 laser oscillator
An axial direction excitation type F 2 laser apparatus comprises a discharge tube consisting of an insulating cylinder and metal electrodes at both ends of thereof, and a reflecting mirror or a...
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6963595 |
Automatic gas control system for a gas discharge laser
An automatic F 2 laser gas control, for a modular high repetition rate ultraviolet gas discharge laser. The laser gas control includes techniques, monitors, and processor for monitoring the F 2 ...
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6944200 |
Laser oscillator
A support unit for supporting an OPM holder so as to be perpendicular to a laser beam axis is disposed in the lower part of the OPM holder. A rotary shaft is inserted into the support unit and...
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6934313 |
Method of making channel-aligned resonator devices
A method of making permanent adjustments to the resonant cavity of a laser device in order to match its free spectral range to a specified frequency interval involves monitoring the optical output...
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6931046 |
High power laser having a trivalent liquid host
A laser having a lasing chamber and a semiconductor pumping device with trivalent titanium ions dissolved in a liquid host within the lasing chamber. Since the host is a liquid, it can be removed...
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6928093 |
Long delay and high TIS pulse stretcher
A method and apparatus for laser light pulse stretching is disclosed which may comprise a beam splitter in the path of a laser output light pulse beam; selected to pass a first percent of the...
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6920170 |
Orthogonally excited-type laser oscillator
Plate springs as coupling members can absorb deformation of an oscillator case due to heat and do not transmit the deformation to two optical bases constituting an optical resonator, and it is...
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6914927 |
Laser discharge chamber passivation by plasma
Methods and apparatus are provided for cleaning and passivating laser discharge chambers with plasmas. In one embodiment, an oxygen based plasma is formed in a plasma source external to the laser...
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6895030 |
Laser oscillating device
A support unit ( 20 a ) for supporting an OPM holder ( 15 a ) so as to be vertical to the laser beam axis is disposed in the lower part of the OPM holder ( 15 a ). A rotary shaft ( 19 ) is inserted...
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6894586 |
Radial bulk annular resonator using MEMS technology
A MEMS resonator includes an annular resonator body defined by an inner radius and an outer radius, a first electrode positioned within the inner radius and spaced from the resonator body, and a...
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6859482 |
Modular gas laser discharge unit
A laser discharge unit is provided. The discharge unit includes an elongated electrode plate, an elongated high voltage electrode, and an elongated ground electrode. Both the high voltage electrode...
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6856639 |
High power slab type gas laser
A gas laser comprises a pair of elongated electrodes arranged to define a discharge region between two opposing surfaces of said elongated electrodes, wherein the discharge region defines a...
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6853667 |
Electrode design to extend sputter life of a ring laser gyroscope
A gas discharge tube such as a ring laser gyroscope includes a block. A cathode has an inwardly extending foot that engages the block. Additionally, or alternatively, an insulator is arranged to...
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6847672 |
Laser gas supply path structure in an exposure apparatus
A gas supply path structure forms a fluid path for allowing a laser gas to flow into or out of a pair of fluid inlet and outlet 11 a and a laser gas is controlled to a predetermined subsonic...
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6847671 |
Blower for gas laser
A tangential blower for use in a gas discharge laser is provided provides improved homogeneity of laser gas flow through the discharge region of the laser. A flange which supports adjacent blower...
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6834066 |
Stabilization technique for high repetition rate gas discharge lasers
Method and system for providing stabilization techniques for high repetition rate gas discharge lasers with active loads provided in the discharge circuitry design which may include a resistance...
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6804285 |
Gas supply path structure for a gas laser
A gas supply path structure forms a fluid path for allowing a laser gas to flow into or out of a pair of fluid inlet and outlet 11 a and a laser gas is controlled to a predetermined subsonic...
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6804284 |
Optical element holding and extraction device
An optical element holding and extraction device is provided. The device includes an optical element, an optical element holder having a tubular gripping portion and a tubular extraction portion...
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6798814 |
Gas discharge laser, method of operating a gas discharge laser, and use of a sintered filter
The invention relates to a gas discharge laser including a discharge tube ( 1 ), in which a gas is present and which has at least one aperture ( 19 ) through which a laser beam emerges or at which...
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6798812 |
Two chamber F2 laser system with F2 pressure based line selection
The present invention provides an injection seeded modular gas discharge laser system capable of producing high quality pulsed laser beams at pulse rates of about 4,000 Hz or greater and at pulse...
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6788722 |
High power waveguide laser
The above discussed and other drawbacks and deficiencies of the prior art are overcome or alleviated by a laser of the present invention. In accordance with the present invention the laser...
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6782029 |
Dedusting unit for a laser optical element of a gas laser and method for assembling
A dedusting unit for a laser optical element is provided. The dedusting unit comprises a high-voltage duct comprising a high-voltage conducting core having a first end and a second end and an...
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6768765 |
High power excimer or molecular fluorine laser system
An excimer or molecular fluorine laser system includes a discharge tube filled with a gas mixture, multiple electrodes within the discharge tube and connected to a discharge circuit for energizing...
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6693944 |
Sputtering metal ion laser
Internal mirror sputtering metal ion lasers are disclosed which employ laser mirrors and a resonator internal to and integral with the laser plasma tube. Preferred lasers use silver, copper, gold...
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6674780 |
Gas drawing/refilling and sealing structure for gas laser
A gas drawing/refilling and sealing structure for a laser gas storage container of the present invention includes a sealed container and a blocking member, wherein the body of the container is...
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6665327 |
Gas laser device
A spiral-type guide member having a spiral channel extending about an open center portion is provided adjacent the gas inlet end of the laser discharge tube of a gas laser assembly. This guides the...
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