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7873093 |
Method and apparatus for carrying out a laser operation and use of a quick-change filter in such a laser operation
A method and apparatus for carrying out a laser operation, wherein a laser source is provided, wherein lasing gas is supplied from at least one lasing gas source to the laser source for the...
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7835414 |
Laser gas injection system
A method and apparatus are disclosed which may comprise predicting the gas lifetime for a gas discharge laser light source for a photolithography process, the light source comprising a halogen...
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7819945 |
Metal fluoride trap
A method for making a metal fluoride trap including: assembling a precipitation tube assembly including a plurality of precipitation tubes supported between a first tube end support and a second...
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7664154 |
Gas laser oscillator and gas laser beam machine
A pressure of a laser gas in an enclosure (7) is detected by a gas pressure sensor (12), and a pressure comparison circuit (13) determines whether the thus-detected pressure is normal or anomalous....
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7595463 |
Laser processing machine with monitoring of gas atmosphere and operating gases
A laser processing machine includes a measuring cell into which gas to be analyzed can flow, a means for decoupling diagnostic radiation from the laser radiation provided for material processing of...
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7580439 |
Gas laser oscillator
A gas laser oscillator appropriately detecting a clogging of a laying pipe of a sub ejection apparatus is disclosed. The gas laser oscillator according to the present invention includes a laser gas...
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7551661 |
Gas laser oscillator
A gas laser oscillator (2) that excites a laser gas to generate laser light includes a circulation path (9) for the laser gas, a circulation means (14) for circulating the laser gas through the...
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7529285 |
Frequency stabilised gas laser
A method for the frequency stabilization of a gas laser with a laser tube (1), in stable operation includes a continuous operation control procedure with the following steps: Operating the gas...
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7522650 |
Gas discharge laser chamber improvements
A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall...
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7496126 |
Gas laser oscillator and method of measuring laser gas replacement amount
A gas laser oscillator includes a supply-side valve for regulating a laser gas supply to a gas chamber, an exhaust-side valve for regulating a laser gas exhaust from the gas chamber, a gas pressure...
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7469000 |
Gas lasers including nanoscale catalysts and methods for producing such lasers
Gas lasers including nanoscale catalysts and methods for producing such lasers are disclosed herein. In one embodiment, a gas laser includes a gas containment structure having a gas discharge...
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7372887 |
Excimer laser device, laser gas exchange method and partial gas exchange quantity calculation method
To provide an excimer laser device and method in which the frequency of full gas exchange within the laser chamber is reduced, and more preferably full gas exchange is made unnecessary. The gas...
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7342948 |
Blower used for laser oscillator
In an laser oscillator (100), a blower (10, 20, 120) for circulating a laser medium between an electric discharge tube (102) and a circulating passage (104) includes: a casing (12) having a suction...
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7339972 |
Laser filament imager
An apparatus includes a gas chamber comprising a gas feed nozzle, an exhaust nozzle, and a window. The apparatus also includes a first partial reflector, in the gas chamber, sharing an optical path...
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7277464 |
Method and apparatus for controlling the output of a gas discharge laser system
The present invention relates to a fluorine gas discharge laser system and control of replenishment of fluorine gas as the gas discharge laser operates and consumes fluorine.
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7266137 |
Laser gas replenishment method
Output beam parameters of a gas discharge laser are stabilized by maintaining a molecular fluorine component at a predetermined partial pressure using a gas supply unit and a processor. The...
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7239656 |
Closed-loop purging system for laser
A method of minimizing contamination of optical components of a laser resonator is disclosed. The resonator components are located in an enclosure, which may contain contaminants including water...
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7203216 |
Timing control for two-chamber gas discharge laser system
Feedback timing control equipment and process for an injection seeded modular gas discharge laser. A preferred embodiment is a system capable of producing high quality pulsed laser beams at pulse...
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7158554 |
Methods and apparatus for regenerating fuels in a solid generator chemical oxygen iodine laser
A solid generator laser provides device simplicity and fuel regeneration without relying upon highly-corrosive or unstable fuels. The laser system includes a fuel supply system that provides a...
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7149237 |
Laser oscillator
A laser oscillator capable of preventing contamination of optical components by organic matter such as oil mist. Gas laser medium in an optical resonator constituted by optical components is pumped...
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7130324 |
Axial flow type gas laser oscillator
A gas laser oscillator achieving a substantial increase in laser output is provided. This gas laser oscillator includes a permeable screen plate at a position of a laser gas passage and can...
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7088751 |
Solid-state laser apparatus
A solid-state laser apparatus includes a cavity 17 for storing a laser diode 40 and a laser medium 6 to be excited by the laser diode 40, and a storage unit 70, for communicating with the cavity 17...
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7085302 |
Laser apparatus, exposure apparatus and method
There is to provide a laser apparatus that emits a laser beam by exciting gas enclosed in a chamber, including a gas characteristic detecting mechanism for detecting a characteristic of the gas in...
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7075963 |
Tunable laser with stabilized grating
A line-narrowing module for a laser includes a prism beam expander and a grating preferably attached to a heat sink. A pressure-controlled enclosure filled with an inert gas seals the grating...
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7023895 |
Integrated dual source recycling system for chemical laser weapon systems
An integrated dual source recycling system and method for a chemical oxygen-iodine laser system is described. The recycling system primarily includes: (1) a first collection system for collecting...
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7023893 |
Low-pressure axial direction excitation type F2 laser oscillator
An axial direction excitation type F2 laser apparatus comprises a discharge tube consisting of an insulating cylinder and metal electrodes at both ends of thereof, and a reflecting mirror or a...
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6985508 |
Very narrow band, two chamber, high reprate gas discharge laser system
An injection seeded modular gas discharge laser system capable of producing high quality pulsed laser beams at pulse rates of about 4,000 Hz or greater and at pulse energies of about 5 mJ or...
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6973112 |
Passive gas flow management and filtration device for use in an excimer or transverse discharge laser
The present invention provides systems and methods for filtering particles and assisting gas flow management within laser systems. In one embodiment, a laser apparatus (100) includes an elongate...
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6963595 |
Automatic gas control system for a gas discharge laser
An automatic F2 laser gas control, for a modular high repetition rate ultraviolet gas discharge laser. The laser gas control includes techniques, monitors, and processor for monitoring the F2...
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6940886 |
Laser oscillator
A laser oscillator includes: electrode tubes 15, for employing a discharge to excite a laser gas 10, and for generating a laser beam 11; a box 13, for storing parts, such as the electrode tubes 15;...
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6932944 |
High efficiency scrubber for waste gas abatement
A gas scrubber comprises a gas inlet pipe that provides the scrubber with gases to be processed; means for initiating reactions of decomposition that is directed to initialize the decomposition of...
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6931046 |
High power laser having a trivalent liquid host
A laser having a lasing chamber and a semiconductor pumping device with trivalent titanium ions dissolved in a liquid host within the lasing chamber. Since the host is a liquid, it can be removed...
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6922428 |
Gas laser apparatus for lithography
The present invention relates to a long pulse gas laser apparatus for lithography further improved in the laser oscillation efficiency and stability increased by addition of xenon gas. A gas laser...
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6914927 |
Laser discharge chamber passivation by plasma
Methods and apparatus are provided for cleaning and passivating laser discharge chambers with plasmas. In one embodiment, an oxygen based plasma is formed in a plasma source external to the laser...
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6882674 |
Four KHz gas discharge laser system
The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5 mJ or greater. A preferred...
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6879617 |
Two stage laser system
The present invention relates to a two stage laser system in which a desired spectral line width can be obtained at high output even when the integrated spectral characteristic of oscillator laser...
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6868106 |
Resonator optics for high power UV lasers
An excimer or molecular fluorine laser system includes a discharge chamber filled with a laser gas mixture at least including a halogen-containing molecular species and a buffer gas, multiple...
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6859482 |
Modular gas laser discharge unit
A laser discharge unit is provided. The discharge unit includes an elongated electrode plate, an elongated high voltage electrode, and an elongated ground electrode. Both the high voltage electrode...
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6842473 |
Water getter devices for laser amplifiers and process for the manufacture thereof
Water getter devices (10) are provided which comprise a powdered water getter material (18) in a container that is permeable to gases but capable of retaining solid particles and does not need...
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6839372 |
Gas discharge ultraviolet laser with enclosed beam path with added oxidizer
The present invention provides a gas discharge ultraviolet laser capable of producing a high quality pulsed ultraviolet laser beam at pulse rates greater than 2000 Hz at pulse energies at 5 mJ or...
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6839373 |
Ultra-narrow band flourine laser apparatus
An ultra-narrow band fluorine laser apparatus is provided in which a line width of a fluorine laser can be narrowed to about 0.2 to 0.3 pm without using any band-narrowing element such as an...
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6816536 |
Method and apparatus for in situ protection of sensitive optical materials
A method and apparatus are provided for in situ protection of sensitive optical materials from alternation or damage due to exposure to trace atmospheric components, during shipping, storage or...
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6798814 |
Gas discharge laser, method of operating a gas discharge laser, and use of a sintered filter
The invention relates to a gas discharge laser including a discharge tube (1), in which a gas is present and which has at least one aperture (19) through which a laser beam emerges or at which a...
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6798812 |
Two chamber F2 laser system with F2 pressure based line selection
The present invention provides an injection seeded modular gas discharge laser system capable of producing high quality pulsed laser beams at pulse rates of about 4,000 Hz or greater and at pulse...
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6795473 |
Narrow band excimer laser with a prism-grating as line-narrowing optical element
An excimer or molecular fluorine laser system includes a laser chamber filled with a gas mixture at least including a halogen-containing species and a buffer gas, and multiple electrodes with the...
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6792023 |
Method and apparatus for reduction of spectral fluctuations
An excimer or molecular fluorine laser system includes a laser chamber filled with a gas mixture at least including a halogen-containing species and a buffer gas, multiple electrodes, including a...
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6782029 |
Dedusting unit for a laser optical element of a gas laser and method for assembling
A dedusting unit for a laser optical element is provided. The dedusting unit comprises a high-voltage duct comprising a high-voltage conducting core having a first end and a second end and an...
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6771685 |
Discharge electrodes connecting structure for laser apparatus and laser apparatus therewith
The invention provides a discharge electrodes connecting structure for a laser apparatus in which a thickness of the return plate is set to be within an optimum range, and a laser apparatus...
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6757316 |
Four KHz gas discharge laser
The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5 mJ or greater. A preferred...
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6738406 |
Precision measurement of wavelengths emitted by a molecular fluorine laser at 157nm
An excimer or molecular fluorine laser system includes a wavelength calibration module permitting the wavelength of the narrow band output beam to be calibrated to a specific absolute wavelength....
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