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Document Title |
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8170078 |
Laser system
A method and apparatus may comprise a line narrowed pulsed excimer or molecular fluorine gas discharge laser system which may comprise a seed laser oscillator producing an output comprising a laser...
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8130810 |
Lasers
A laser apparatus comprises a laser having a lasing chamber an inlet to the lasing chamber for a lasing gas containing a heavy noble gas and an outlet from the lasing chamber for the discharge of a...
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7995637 |
Gas discharge laser chamber
One aspect of the disclosed subject matter describes a gas discharge laser chamber. The gas discharge laser chamber includes a discharge region formed between a first electrode and a second...
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RE42588 |
Control system for a two chamber gas discharge laser system
The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line...
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7889775 |
Particle damage protection for high power CO2 slab laser mirrors
A CO2 gas discharge laser includes elongated planar live and ground electrodes vertically spaced and electrically insulated from each. The electrodes are spaced apart by ceramic spacer strips...
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7885309 |
Laser system
A method and apparatus may comprise a line narrowed pulsed excimer or molecular fluorine gas discharge laser system which may comprise a seed laser oscillator producing an output comprising a laser...
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7871063 |
Two phase reactor
A two phase reactor includes a source of liquid reactant and a source of gas reactant. A chamber has an inlet coupled to the source of gas reactant and a flat jet nozzle coupled to the source of...
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7873093 |
Method and apparatus for carrying out a laser operation and use of a quick-change filter in such a laser operation
A method and apparatus for carrying out a laser operation, wherein a laser source is provided, wherein lasing gas is supplied from at least one lasing gas source to the laser source for the...
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7852899 |
Timing control for two-chamber gas discharge laser system
Feedback timing control equipment and process for an injection seeded modular gas discharge laser. A preferred embodiment is a system capable of producing high quality pulsed laser beams at pulse...
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7835414 |
Laser gas injection system
A method and apparatus are disclosed which may comprise predicting the gas lifetime for a gas discharge laser light source for a photolithography process, the light source comprising a halogen...
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7817699 |
High-power, high-throughput microwave discharge singlet oxygen generator for advanced electrical oxygen-iodine lasers
A laser device includes an optical resonator, a microwave driven discharge device, and a source for a second gas. The microwave driven discharge device is disposed relative to the optical...
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7741639 |
Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control
A multi-chambered excimer or molecular halogen gas discharge laser system comprising at least one oscillator chamber and at least one amplifier chamber producing oscillator output laser light...
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7672354 |
Electrically excited gas discharge laser for generating high-repetition frequency light pulses and method for the production thereof
A transversally electrically excited gas discharge laser for generating light pulses with a high pulse repetition rate. The gas discharge laser has components include a gas-tight discharge tube...
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7668221 |
Gas laser apparatus, and method and device for monitoring blower
A gas laser apparatus including a laser oscillating section including a blower forcibly circulating a medium gas in a medium circuit, and a blower monitoring section monitoring a maintenance state...
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7668222 |
Dual flow common combustor chemical laser
The invention herein is directed to a dual-chamber combustion laser assembly having lighter weight (per unit flow area), a more compact, flexible configuration for packaging in spacecraft,...
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7664155 |
Gas laser oscillating unit
A gas laser oscillating unit having a gas junction part where gas flow may be stable, whereby a stable laser beam output and/or a laser beam that does not fluctuate very much may be achieved. The...
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7664154 |
Gas laser oscillator and gas laser beam machine
A pressure of a laser gas in an enclosure (7) is detected by a gas pressure sensor (12), and a pressure comparison circuit (13) determines whether the thus-detected pressure is normal or anomalous....
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7633989 |
High pulse repetition rate gas discharge laser
A pulsed gas discharge laser operating at an output laser pulse repetition rate of greater than 4 kHz and a method of operating same is disclosed which may comprise a high voltage electrode having...
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7580439 |
Gas laser oscillator
A gas laser oscillator appropriately detecting a clogging of a laying pipe of a sub ejection apparatus is disclosed. The gas laser oscillator according to the present invention includes a laser gas...
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7567607 |
Very narrow band, two chamber, high rep-rate gas discharge laser system
An oscillator-amplifier gas discharge laser system and method is disclosed which may comprise a first laser unit which may comprise a first discharge region which may contain an excimer or...
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7564888 |
High power excimer laser with a pulse stretcher
An apparatus and method is disclosed which may comprise a high power excimer or molecular fluorine gas discharge laser DUV light source system which may comprise: a pulse stretcher which may...
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7551661 |
Gas laser oscillator
A gas laser oscillator (2) that excites a laser gas to generate laser light includes a circulation path (9) for the laser gas, a circulation means (14) for circulating the laser gas through the...
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7529285 |
Frequency stabilised gas laser
A method for the frequency stabilization of a gas laser with a laser tube (1), in stable operation includes a continuous operation control procedure with the following steps: Operating the gas...
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7522650 |
Gas discharge laser chamber improvements
A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall...
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7499482 |
Injection locking type or MOPA type of laser device
An injection locking type or MOPA type of laser device capable of always providing stable output energy and wavelength is provided. For this purpose, the laser device includes an oscillator for...
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7496126 |
Gas laser oscillator and method of measuring laser gas replacement amount
A gas laser oscillator includes a supply-side valve for regulating a laser gas supply to a gas chamber, an exhaust-side valve for regulating a laser gas exhaust from the gas chamber, a gas pressure...
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7460577 |
RF laser
An RF excited gas laser including an offset V-shaped laser cavity. The laser includes a first and second ceramic body portions with the laser cavity at least partially defined by the ceramic body...
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7453917 |
Supersonic all gas-phase iodine laser
A continuous wave laser based on the electronic I*(2P½)−I(2P 3/2) transition of atomic iodine at 1.315 microns from the NCl(a1Δ)+I(2P 3/2) energy transfer reaction using a transverse flow dev...
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7382816 |
Two-stage laser pulse energy control device and two-stage laser system
A charging voltage Vosc applied to a main capacitor C0 disposed in an oscillating high-voltage pulse generator 12 of an oscillating laser 100 is subject to constant control such that a pulse energy...
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7372887 |
Excimer laser device, laser gas exchange method and partial gas exchange quantity calculation method
To provide an excimer laser device and method in which the frequency of full gas exchange within the laser chamber is reduced, and more preferably full gas exchange is made unnecessary. The gas...
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7369596 |
Chamber for a high energy excimer laser source
A chamber for a gas discharge laser is disclosed and may include a chamber housing having a wall, the wall having an inside surface surrounding a chamber volume and an outside surface, the wall...
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7366219 |
Line narrowing module
A line narrowing method and module for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses, the module having a...
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7342948 |
Blower used for laser oscillator
In an laser oscillator (100), a blower (10, 20, 120) for circulating a laser medium between an electric discharge tube (102) and a circulating passage (104) includes: a casing (12) having a suction...
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7315561 |
Laser generator
Flow laminators are attached to gas introducing parts installed in a laser generator preventing impurities from attaching to surfaces of a translucent mirror and a condensing lens. The flow...
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7277466 |
High power gas discharge laser with helium purged line narrowing unit
A helium purge for a grating based line narrowing device for minimizing thermal distortions in line narrowed lasers producing high energy laser beams at high repetition rates. Applicants have shown...
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7257144 |
Rare gas-halogen excimer lasers with baffles
An excimer laser comprises a gas chamber, electrodes for creating rare gas/halide molecules that disassociate and produce optical emission, and reflective surfaces that form an optical resonant...
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7203216 |
Timing control for two-chamber gas discharge laser system
Feedback timing control equipment and process for an injection seeded modular gas discharge laser. A preferred embodiment is a system capable of producing high quality pulsed laser beams at pulse...
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7203217 |
Narrow band electric discharge gas laser having improved beam direction stability
An electric discharge, narrow band gas laser with improvements in wavelength stability. Improvements result from reduced laser beam directional fluctuations or fast correction of those...
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7194015 |
Laser oscillating apparatus and laser working machine
A laser oscillating apparatus includes a discharger for exciting a laser medium, a blower for blowing a laser gas and a laser gas path for connecting the discharger and the blower, and a laser...
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7190708 |
Annealed copper alloy electrodes for fluorine containing gas discharge lasers
An excimer laser with a laser chamber containing a circulating laser gas containing fluorine and long-life, annealed, copper alloy electrodes. Electrode lifetime is increased by annealing them...
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7139301 |
Laser spectral engineering for lithographic process
An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to...
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7130324 |
Axial flow type gas laser oscillator
A gas laser oscillator achieving a substantial increase in laser output is provided. This gas laser oscillator includes a permeable screen plate at a position of a laser gas passage and can...
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7116695 |
Laser output light pulse beam parameter transient correction system
An apparatus and method for producing laser output light pulses in bursts of pulses, at a selected pulse repetition rate, forming a laser output light beam, separated by an off time is disclosed,...
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7088759 |
Resonator box to laser cavity interface for chemical laser
A laser system (52A) is illustrated having a laser cavity (54) that generates a laser beam (78). An outcoupling resonator box (62) has a reflective mirror (70) therein. A return resonator box (64)...
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7085302 |
Laser apparatus, exposure apparatus and method
There is to provide a laser apparatus that emits a laser beam by exciting gas enclosed in a chamber, including a gas characteristic detecting mechanism for detecting a characteristic of the gas in...
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7075963 |
Tunable laser with stabilized grating
A line-narrowing module for a laser includes a prism beam expander and a grating preferably attached to a heat sink. A pressure-controlled enclosure filled with an inert gas seals the grating...
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7068697 |
Adjustable flow guide to accommodate electrode erosion in a gas discharge laser
A laser and method for operating a laser and disclosed. The laser may include a first discharge electrode and a second discharge electrode positioned at a distance from the first electrode. A...
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7035306 |
Method of assaying fluorite sample and method of producing fluorite crystal
Disclosed is a method of performing assay to a fluorite sample, which includes a first step for dissolving a fluorite sample, containing Ca and F, by use of a solvent, a second step for removing Ca...
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7031364 |
Gas laser device and exposure apparatus using the same
In a gas laser device, a laser gas sealingly stored in a chamber is excited using a discharging electrode that is electrically discharged. Laser light produced by the electrical discharging is...
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7016388 |
Laser lithography light source with beam delivery
The present invention provides a modular high repetition rate ultraviolet gas discharge laser light source for a production line machine. The system includes an enclosed and purged beam path for...
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