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7580439 |
Gas laser oscillator
A gas laser oscillator appropriately detecting a clogging of a laying pipe of a sub ejection apparatus is disclosed. The gas laser oscillator according to the present invention includes a laser gas...
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7567607 |
Very narrow band, two chamber, high rep-rate gas discharge laser system
An oscillator-amplifier gas discharge laser system and method is disclosed which may comprise a first laser unit which may comprise a first discharge region which may contain an excimer or...
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7564888 |
High power excimer laser with a pulse stretcher
An apparatus and method is disclosed which may comprise a high power excimer or molecular fluorine gas discharge laser DUV light source system which may comprise: a pulse stretcher which may...
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7551661 |
Gas laser oscillator
A gas laser oscillator ( 2 ) that excites a laser gas to generate laser light includes a circulation path ( 9 ) for the laser gas, a circulation means ( 14 ) for circulating the laser gas through...
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7529285 |
Frequency stabilised gas laser
A method for the frequency stabilization of a gas laser with a laser tube ( 1 ), in stable operation includes a continuous operation control procedure with the following steps:
Operating the...
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7522650 |
Gas discharge laser chamber improvements
A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall...
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7499482 |
Injection locking type or MOPA type of laser device
An injection locking type or MOPA type of laser device capable of always providing stable output energy and wavelength is provided. For this purpose, the laser device includes an oscillator for...
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7496126 |
Gas laser oscillator and method of measuring laser gas replacement amount
A gas laser oscillator includes a supply-side valve for regulating a laser gas supply to a gas chamber, an exhaust-side valve for regulating a laser gas exhaust from the gas chamber, a gas pressure...
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7460577 |
RF laser
An RF excited gas laser including an offset V-shaped laser cavity. The laser includes a first and second ceramic body portions with the laser cavity at least partially defined by the ceramic body...
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7453917 |
Supersonic all gas-phase iodine laser
A continuous wave laser based on the electronic I*( 2 P ½ )−I( 2 P 3/2 ) transition of atomic iodine at 1.315 microns from the NCl(a 1 Δ)+I( 2 P 3/2 ) energy transfer reaction using a...
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7382816 |
Two-stage laser pulse energy control device and two-stage laser system
A charging voltage Vosc applied to a main capacitor C 0 disposed in an oscillating high-voltage pulse generator 12 of an oscillating laser 100 is subject to constant control such that a pulse...
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7372887 |
Excimer laser device, laser gas exchange method and partial gas exchange quantity calculation method
To provide an excimer laser device and method in which the frequency of full gas exchange within the laser chamber is reduced, and more preferably full gas exchange is made unnecessary. The gas...
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7369596 |
Chamber for a high energy excimer laser source
A chamber for a gas discharge laser is disclosed and may include a chamber housing having a wall, the wall having an inside surface surrounding a chamber volume and an outside surface, the wall...
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7366219 |
Line narrowing module
A line narrowing method and module for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses, the module having a...
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7342948 |
Blower used for laser oscillator
In an laser oscillator ( 100 ), a blower ( 10, 20, 120 ) for circulating a laser medium between an electric discharge tube ( 102 ) and a circulating passage ( 104 ) includes: a casing ( 12 ) having...
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7315561 |
Laser generator
Flow laminators are attached to gas introducing parts installed in a laser generator preventing impurities from attaching to surfaces of a translucent mirror and a condensing lens. The flow...
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7277466 |
High power gas discharge laser with helium purged line narrowing unit
A helium purge for a grating based line narrowing device for minimizing thermal distortions in line narrowed lasers producing high energy laser beams at high repetition rates. Applicants have shown...
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7257144 |
Rare gas-halogen excimer lasers with baffles
An excimer laser comprises a gas chamber, electrodes for creating rare gas/halide molecules that disassociate and produce optical emission, and reflective surfaces that form an optical resonant...
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7203217 |
Narrow band electric discharge gas laser having improved beam direction stability
An electric discharge, narrow band gas laser with improvements in wavelength stability. Improvements result from reduced laser beam directional fluctuations or fast correction of those...
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7203216 |
Timing control for two-chamber gas discharge laser system
Feedback timing control equipment and process for an injection seeded modular gas discharge laser. A preferred embodiment is a system capable of producing high quality pulsed laser beams at pulse...
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7194015 |
Laser oscillating apparatus and laser working machine
A laser oscillating apparatus includes a discharger for exciting a laser medium, a blower for blowing a laser gas and a laser gas path for connecting the discharger and the blower, and a laser...
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7190708 |
Annealed copper alloy electrodes for fluorine containing gas discharge lasers
An excimer laser with a laser chamber containing a circulating laser gas containing fluorine and long-life, annealed, copper alloy electrodes. Electrode lifetime is increased by annealing them...
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7139301 |
Laser spectral engineering for lithographic process
An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to...
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7130324 |
Axial flow type gas laser oscillator
A gas laser oscillator achieving a substantial increase in laser output is provided. This gas laser oscillator includes a permeable screen plate at a position of a laser gas passage and can...
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7116695 |
Laser output light pulse beam parameter transient correction system
An apparatus and method for producing laser output light pulses in bursts of pulses, at a selected pulse repetition rate, forming a laser output light beam, separated by an off time is disclosed,...
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7095773 |
Injection locking type or MOPA type of laser device
An injection locking type or MOPA type of laser device capable of always providing stable output energy and wavelength is provided. For this purpose, the laser device includes an oscillator for...
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7088759 |
Resonator box to laser cavity interface for chemical laser
A laser system ( 52 A) is illustrated having a laser cavity ( 54 ) that generates a laser beam ( 78 ). An outcoupling resonator box ( 62 ) has a reflective mirror ( 70 ) therein. A return resonator...
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7085302 |
Laser apparatus, exposure apparatus and method
There is to provide a laser apparatus that emits a laser beam by exciting gas enclosed in a chamber, including a gas characteristic detecting mechanism for detecting a characteristic of the gas in...
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7075963 |
Tunable laser with stabilized grating
A line-narrowing module for a laser includes a prism beam expander and a grating preferably attached to a heat sink. A pressure-controlled enclosure filled with an inert gas seals the grating...
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7068697 |
Adjustable flow guide to accommodate electrode erosion in a gas discharge laser
A laser and method for operating a laser and disclosed. The laser may include a first discharge electrode and a second discharge electrode positioned at a distance from the first electrode. A...
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7035306 |
Method of assaying fluorite sample and method of producing fluorite crystal
Disclosed is a method of performing assay to a fluorite sample, which includes a first step for dissolving a fluorite sample, containing Ca and F, by use of a solvent, a second step for removing Ca...
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7031364 |
Gas laser device and exposure apparatus using the same
In a gas laser device, a laser gas sealingly stored in a chamber is excited using a discharging electrode that is electrically discharged. Laser light produced by the electrical discharging is...
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7016388 |
Laser lithography light source with beam delivery
The present invention provides a modular high repetition rate ultraviolet gas discharge laser light source for a production line machine. The system includes an enclosed and purged beam path for...
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6985508 |
Very narrow band, two chamber, high reprate gas discharge laser system
An injection seeded modular gas discharge laser system capable of producing high quality pulsed laser beams at pulse rates of about 4,000 Hz or greater and at pulse energies of about 5 mJ or...
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6973112 |
Passive gas flow management and filtration device for use in an excimer or transverse discharge laser
The present invention provides systems and methods for filtering particles and assisting gas flow management within laser systems. In one embodiment, a laser apparatus ( 100 ) includes an elongate...
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6973111 |
Injection locking type or MOPA type of gas laser device
An injection locking type or MOPA type of gas laser device which requires only a small installation area and allows easy maintenance. For this purpose, the laser device includes a seed laser unit (...
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6963595 |
Automatic gas control system for a gas discharge laser
An automatic F 2 laser gas control, for a modular high repetition rate ultraviolet gas discharge laser. The laser gas control includes techniques, monitors, and processor for monitoring the F 2 ...
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6937635 |
High rep-rate laser with improved electrodes
The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing...
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6931046 |
High power laser having a trivalent liquid host
A laser having a lasing chamber and a semiconductor pumping device with trivalent titanium ions dissolved in a liquid host within the lasing chamber. Since the host is a liquid, it can be removed...
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6924600 |
Laser plasma generation method and structure thereof
In laser-plasma generation, a fluid of target material is jet out to form a jet tube target 21 having a diameter φ and a wall thickness τ with a shell and a hollow space within the shell by...
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6922428 |
Gas laser apparatus for lithography
The present invention relates to a long pulse gas laser apparatus for lithography further improved in the laser oscillation efficiency and stability increased by addition of xenon gas. A gas laser...
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6920170 |
Orthogonally excited-type laser oscillator
Plate springs as coupling members can absorb deformation of an oscillator case due to heat and do not transmit the deformation to two optical bases constituting an optical resonator, and it is...
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6914927 |
Laser discharge chamber passivation by plasma
Methods and apparatus are provided for cleaning and passivating laser discharge chambers with plasmas. In one embodiment, an oxygen based plasma is formed in a plasma source external to the laser...
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6914919 |
Six to ten KHz, or greater gas discharge laser system
The present invention provides gas discharge laser systems capable of reliable long-term operation in a production line capacity at repetition rates in the range of 6,000 to 10,0000 pulses power...
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6898229 |
Gas circulation fan for excimer laser apparatus
In a gas circulation fan, a main shaft is supported in a non-contact manner, by magnetic bearings. Between each of the magnetic bearings and a controller, a relay is provided. Each relay includes a...
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6882674 |
Four KHz gas discharge laser system
The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5 mJ or greater. A preferred...
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6879617 |
Two stage laser system
The present invention relates to a two stage laser system in which a desired spectral line width can be obtained at high output even when the integrated spectral characteristic of oscillator laser...
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6847672 |
Laser gas supply path structure in an exposure apparatus
A gas supply path structure forms a fluid path for allowing a laser gas to flow into or out of a pair of fluid inlet and outlet 11 a and a laser gas is controlled to a predetermined subsonic...
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6847671 |
Blower for gas laser
A tangential blower for use in a gas discharge laser is provided provides improved homogeneity of laser gas flow through the discharge region of the laser. A flange which supports adjacent blower...
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6839373 |
Ultra-narrow band flourine laser apparatus
An ultra-narrow band fluorine laser apparatus is provided in which a line width of a fluorine laser can be narrowed to about 0.2 to 0.3 pm without using any band-narrowing element such as an...
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