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7630424 |
Laser system
A method/apparatus may comprise operating a line narrowed pulsed excimer or molecular fluorine gas discharge laser system by using a seed laser oscillator to produce an output which may comprise a...
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7620080 |
Laser pulse conditioning
A light pulse conditioning apparatus has at least first and second curved reflective surfaces that share a common focus and a light-redirecting element disposed between the first and second curved...
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7609740 |
Method and arrangement for the excitation of a gas laser arrangement
For exciting a gas laser arrangement with a plurality of HF signals, at least two pulsed HF signals are generated arid at least two electrodes or pairs of electrodes of the gas laser arrangement...
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7596164 |
Control system for a two chamber gas discharge laser
The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line...
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7586969 |
Method for discriminating anomaly in gas composition and discharge excitation type gas laser oscillator
A discharge excitation type gas laser oscillator has a discharge excitation unit for exciting a laser gas by discharge in a discharge tube to generate induced emission of laser light, a...
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7586968 |
Heater-attached alkali-encapsulated cell and alkali laser apparatus
An alkali-encapsulated cell internally having an alkali metal vapor G encapsulated is provided with first and second heaters 11, 12 . The alkali-encapsulated cell 10 has first and second end...
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7583717 |
Laser system
A laser discharge, where the laser discharge can be formed by electrodes and at least one sidewall in a manner allowing a more compact structure than previously provided. Protrusions in the...
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7580439 |
Gas laser oscillator
A gas laser oscillator appropriately detecting a clogging of a laying pipe of a sub ejection apparatus is disclosed. The gas laser oscillator according to the present invention includes a laser gas...
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7570683 |
Waveguided laser channels for a gas laser
An RF-excited waveguide laser module comprises a first electrode having a first elongate surface defining in part a waveguide laser channel extending along an optical axis, the first elongate...
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7567607 |
Very narrow band, two chamber, high rep-rate gas discharge laser system
An oscillator-amplifier gas discharge laser system and method is disclosed which may comprise a first laser unit which may comprise a first discharge region which may contain an excimer or...
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7564888 |
High power excimer laser with a pulse stretcher
An apparatus and method is disclosed which may comprise a high power excimer or molecular fluorine gas discharge laser DUV light source system which may comprise: a pulse stretcher which may...
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7558308 |
High power low inductance RF hermetic sealed feed-through for slab CO2 lasers
A low inductance, hermetically sealed, RF shielded feed-through is provided for exciting low impedance discharges associated with high power CO 2 slab lasers. The feed-through mechanically obtains...
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7551661 |
Gas laser oscillator
A gas laser oscillator ( 2 ) that excites a laser gas to generate laser light includes a circulation path ( 9 ) for the laser gas, a circulation means ( 14 ) for circulating the laser gas through...
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7535948 |
Cathodes for fluorine gas discharge lasers
A fluorine gas discharge laser electrode for a gas discharge laser having a laser gas containing fluorine is disclosed which may comprise a copper and copper alloy cathode body having an upper...
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7529285 |
Frequency stabilised gas laser
A method for the frequency stabilization of a gas laser with a laser tube ( 1 ), in stable operation includes a continuous operation control procedure with the following steps:
Operating the...
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7522650 |
Gas discharge laser chamber improvements
A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall...
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7518787 |
Drive laser for EUV light source
A laser light source is disclosed having a laser oscillator producing an output beam; a first amplifier amplifying the output beam to produce a first amplified beam, and a second amplifier...
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7507976 |
Lithographic apparatus, beam delivery systems, prisms and device manufacturing method
A beam directing element configured to receive a substantially collimated input beam of predetermined wavelength propagating in a first direction and to output a substantially collimated output...
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7505504 |
Laser processing device
A laser processing device in which even a short nozzle provided with a follower roller ( 35 ) can prevent disturbance of a laser beam and contamination of protective glass and in which shield gas...
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7501641 |
Dual hemispherical collectors
A system and method for collecting radiation, which may be used in a lithography illumination system. The system comprises a first surface shaped to reflect radiation in a first hemisphere of a...
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7496126 |
Gas laser oscillator and method of measuring laser gas replacement amount
A gas laser oscillator includes a supply-side valve for regulating a laser gas supply to a gas chamber, an exhaust-side valve for regulating a laser gas exhaust from the gas chamber, a gas pressure...
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7482609 |
LPP EUV light source drive laser system
An apparatus and method is disclosed which may comprise a laser produced plasma EUV system which may comprise a drive laser producing a drive laser beam; a drive laser beam first path having a...
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7480323 |
Laser tube with external adjustable reactance for a gas discharge RF-excited laser
A laser device is provided. The laser device includes a laser tube, oscillator circuitry, and a compensating reactive component that is arranged in parallel with the laser tube.
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7471708 |
Gas discharge laser output light beam parameter control
A line narrowed gas discharge laser system and method of operation are disclosed which may comprise: an oscillator cavity; a laser chamber comprising a chamber housing containing a lasing medium...
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7469000 |
Gas lasers including nanoscale catalysts and methods for producing such lasers
Gas lasers including nanoscale catalysts and methods for producing such lasers are disclosed herein. In one embodiment, a gas laser includes a gas containment structure having a gas discharge...
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7453918 |
Pulsed RF high pressure CO2 lasers
An improved laser system includes a sealed-off, RF excited, diffusion cooled, high pressure, short pulsed, high peak power waveguide and slab CO 2 laser that avoids problems typically associated...
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7453917 |
Supersonic all gas-phase iodine laser
A continuous wave laser based on the electronic I*( 2 P ½ )−I( 2 P 3/2 ) transition of atomic iodine at 1.315 microns from the NCl(a 1 Δ)+I( 2 P 3/2 ) energy transfer reaction using a...
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7447249 |
Lighting system
A lighting system includes a microwave resonator ( 2 ) for generating a standing microwave in the internal space, and a gas cell ( 6 ) enclosing a medium is disposed in the internal space of the...
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7436872 |
High frequency discharge excited gas laser oscillator
A high-frequency discharge excited gas laser oscillator receiving power from a laser power supply controlled by a pulse command, the high-frequency discharge excited gas laser oscillator provided...
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7426229 |
Line narrowing module, light source of exposure apparatus comprising the same, and method of producing exposure light using line narrowing
A line narrowing module includes an elliptical mirror, a diffraction grating disposed at a first focus of the mirror for separating an incident beam into different lines, and a laser beam...
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7418022 |
Bandwidth-limited and long pulse master oscillator power oscillator laser systems
Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the...
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7415056 |
Confocal pulse stretcher
A gas discharge laser system producing a laser output pulse and a method of operating such a system is disclosed which may comprise a pulse stretcher which may comprise a laser output pulse optical...
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7411989 |
Mechanically Q-switched CO2 laser
A CO 2 laser has a resonator mirror that oscillates about an axis perpendicular to the resonator axis through an angular range of oscillation sufficient that the resonator is only able to deliver...
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7397828 |
Laser system with multiple wavelength diode pump head and associated method
A laser system comprises a reflective chamber capable of housing a laser medium and at least two laser diodes emitting light at different respective wavelengths into the reflective chamber. The...
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7382815 |
Laser spectral engineering for lithographic process
An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to...
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7379487 |
Two phase reactor
A two phase reactor includes a source of liquid reactant and a source of gas reactant. A chamber has an inlet coupled to the source of gas reactant and a flat jet nozzle coupled to the source of...
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7372887 |
Excimer laser device, laser gas exchange method and partial gas exchange quantity calculation method
To provide an excimer laser device and method in which the frequency of full gas exchange within the laser chamber is reduced, and more preferably full gas exchange is made unnecessary. The gas...
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7369596 |
Chamber for a high energy excimer laser source
A chamber for a gas discharge laser is disclosed and may include a chamber housing having a wall, the wall having an inside surface surrounding a chamber volume and an outside surface, the wall...
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7366219 |
Line narrowing module
A line narrowing method and module for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses, the module having a...
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7366213 |
MOPA excimer or molecular fluorine laser system with improved synchronization
The relative timing delay between channels of a discharge circuit can be adjusted through application of appropriate control voltages. A control voltage of relatively long duration and relatively...
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7346093 |
DUV light source optical element improvements
A high power narrow band, high repetition rate laser light source optical improvement apparatus and methods are disclosed with a fast angularly positionable mirror having a mirror mounting frame, a...
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7342948 |
Blower used for laser oscillator
In an laser oscillator ( 100 ), a blower ( 10, 20, 120 ) for circulating a laser medium between an electric discharge tube ( 102 ) and a circulating passage ( 104 ) includes: a casing ( 12 ) having...
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7339973 |
Electrodes for fluorine gas discharge lasers
Fluorine gas discharge laser electrodes and electrode systems that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas...
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7339972 |
Laser filament imager
An apparatus includes a gas chamber comprising a gas feed nozzle, an exhaust nozzle, and a window. The apparatus also includes a first partial reflector, in the gas chamber, sharing an optical path...
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7321607 |
External optics and chamber support system
A gas discharge laser and method of operating same is disclosed which may comprise a gas discharge laser chamber support structure comprising a first support arm attached to a mounting table; a gas...
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7315561 |
Laser generator
Flow laminators are attached to gas introducing parts installed in a laser generator preventing impurities from attaching to surfaces of a translucent mirror and a condensing lens. The flow...
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7308013 |
Excimer or molecular fluorine laser system with precision timing
A Master Oscillator (MO)—Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers...
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7301980 |
Halogen gas discharge laser electrodes
A gas discharge laser includes a laser chamber containing a halogen laser gas, two electrode elements defining a cathode and an anode, each having a discharge receiving region defining two...
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7295591 |
Long-pulse pulse power system for gas discharge laser
A long pulse pulse power system for gas discharge lasers. The system includes a sustainer capacitor for accepting a charge from a high voltage pulse power source. A peaking capacitor with a...
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7292616 |
CO2 laser stabilization systems and methods
Systems and methods for stabilizing a CO 2 laser are disclosed. The system includes a detector unit for measuring the power in a select portion of the output beam. The detector unit generates an...
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