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7356913 Process for manufacturing a microsystem  
A process for making microswitches or microvalves, composed of a substrate and used for shifting between a first state of functioning and a second state of functioning by means of a bimetal-effect...
7319581 Capacitive pressure sensor  
A capacitive pressure sensor includes: a conductive silicon substrate having a diaphragm; an insulating substrate having a fixed electrode, the insulating substrate overlapping the conductive...
7316163 Method of forming a seal between a housing and a diaphragm of a capacitance sensor  
The axial distance between opposing conductors of a capacitance pressure transducer can depend, in part, upon the thickness of a seal that is disposed between a housing and a diaphragm of the...
7254008 Integrated capacitive microfluidic sensors method and apparatus  
A microfluidic device and method for capacitive sensing. The device includes a fluid channel including an inlet at a first end and an outlet at a second end, a cavity region coupled to the fluid...
7252011 Surface area deposition trap  
The disclosed pressure transducer assembly includes a housing, a pressure sensor disposed within the housing, a coupling establishing a sealed pathway between the housing and an external source of...
7242570 Vacuum capacitor  
A vacuum capacitor including an insulating cylinder having first and second ends which are opposite to each other. A stationary-side flange is installed to the first end of the insulating cylinder....
7176390 Capacitive load cell with multi-layer dielectric for extended range  
A capacitive load cell includes upper and lower capacitor plates and an intermediate dielectric comprising two or more layers of compressible material with diverse compressibility characteristics....
7159465 Fluororesin thin film diaphragm pressure sensor and method of fabricating the same  
The present invention provides a highly corrosion-resistant diaphragm pressure sensor capable of obviating the effects of temperature drift that arises when a pressure-travel coefficient changes...
7140085 Process for manufacturing a capacitive vacuum measuring cell  
A capacitive vacuum measuring cell includes first and second ceramic housing bodies ( 1, 4 ) joined by an edge seal ( 3 ). A thin ceramic membrane ( 2 ) is supported between first and second...
7135749 Pressure sensor  
A pressure sensor includes a silicon-on-insulator (SOI) substrate, a glass substrate bonded to the SOI substrate by anode bonding, a silicon island formed on a part of a silicon layer of the SOI...
7107855 Membrane for capacitive vacuum measuring cell  
A ceramic membrane for a capacitive vacuum measuring cell includes a thin ceramic membrane with a thickness of <250 μm, in particular less than 120 μm. The membrane is produced from a...
6993973 Contaminant deposition control baffle for a capacitive pressure transducer  
The disclosed transducer includes a housing, a diaphragm, an inner conductor, an outer conductor, and a first baffle. The housing defines an interior volume. The diaphragm is disposed in the...
6992492 Capacitive sensor  
A capacitive sensor is disclosed that includes a variable capacitor transducer that varies its capacitance with changes in an environmental parameter. The present invention is adapted to measure...
6903915 Variable capacitor voltage-controllable by use of coulomb blocking phenomenon  
Variable capacitive device, such as a capacitor, controllable in voltage Vc including at least one first armature (L) and one second armature (R), the armatures being separated by an insulation...
6892582 Semiconductor pressure sensor and pressure sensing device  
The object of the present invention is to propose an etch channel sealing structure characterized by excellent impermeability to moisture and resistance to temporal change of the diaphragm in the...
6883377 Measurement device including a pressure sensor  
The present invention relates to a measurement device for fixing to a pipe or a vessel containing a fluid, the device including a pressure sensor surrounded by a wall. The device includes a coating...
6874367 Pressure sensor  
A capacitive-type pressure sensor comprising a glass plate having an electrode formed thereon. A diaphragm is formed from a semiconductor material and bonded to the glass substrate to define an...
6865799 Method of manufacturing strain-detecting devices  
A method of manufacturing strain-detecting devices is provided. First, plural cylindrical substrates, each of which has one end closed by a diaphragm, are fixedly placed at predetermined positions...
6828801 Capacitive sensor  
A capacitive sensor is disclosed that includes a variable capacitor transducer that varies its capacitance with changes in an environmental parameter. The present invention is adapted to measure...
6802222 Diaphragm-type semiconductor device and method for manufacturing diaphragm-type semiconductor device  
A diaphragm-type semiconductor device includes a semiconductor substrate, a surface of which is substantially flat, a diaphragm, which covers a circular pressure reference space located on the...
6791342 Electrostatic capacitance sensor  
In an electrostatic capacitance sensor, an electrode is formed on a base board. The electrode is covered with a resist. A conductive rubber includes a first face and a second face. The first face...
6781814 Capacitive pressure transducer  
A capacitive fluid pressure transducer ( 10′ ) has a sensing element ( 12 ) received in an electrically conductive cup-shaped shield member ( 24 ) which is crimped onto the base of an electrical...
6776046 Pressure sensor with foresighted maintenance control and monitoring for diaphragm fracture and to a method for monitoring for diaphragm fracture  
A pressure-measuring device with monitoring for diaphragm fracture comprises a housing with a passage whose two openings at the end faces of the housing are closed by a first deformation body and a...
6725725 Micromechanical differential pressure sensor device  
A micromechanical differential pressure sensor device for measuring a pressure difference between two mutually separated spaces or media, in which two absolute pressure measuring devices are...
6725724 Manufacturing method for a thin-film high-pressure sensor  
A method for manufacturing a sensor component, in particular, a thin-film high-pressure sensor, as well as a sensor component, is described, in which at least one measuring element, in particular...
6704185 Capacitive pressure-responsive devices and their fabrication  
A method for making capacitive silicon pressure sensors and pressure switches with high long-term stability involves fabrication by wafer bonding of a silicon substrate wafer with another silicon...
6690569 Capacitive sensor  
A sensor, in particular a humidity sensor, comprises a measuring layer ( 4 ), the dielectric properties of which depend on a parameter to be measured, e.g. of the humidity of the environmental air....
6688181 Membrane pressure sensor comprising silicon carbide and method for making same  
The invention concerns a pressure sensor ( 1 ), able to operate at high temperature and measure the pressure of a hostile medium, comprising: a sensing element ( 4 ) integrating a membrane ( 8 )...
6687643 In-situ sensor system and method for data acquisition in liquids  
An in-situ sensor system and method which measures the density of a liquid accurately with pressure sensors by measuring pressure in the liquid at two separate positions defined by a fixed...
6684711 Three-phase excitation circuit for compensated capacitor industrial process control transmitters  
A capacitor industrial process control transmitter includes a three-phase excitation circuit to charge a sensing capacitor and a compensation capacitor of the transmitter and transfer charges to an...
6658938 Electret transducer  
A transducer with at least one variable-area capacitor comprising a flexible electrode with a surface facing a surface of a cooperating rigid electrode and an electret affixed to a portion of one...
6651506 Differential capacitive pressure sensor and fabricating method therefor  
A pressure sensor using two capacitors for measuring a pressure stimulus includes a substrate having a diaphragm positioned at a center portion thereof. The diaphragm has a reduced thickness so...
6626044 Freeze resistant sensor  
A sensor having freeze resistant features is disclosed. The sensor includes a sensor die and a buffer member that are assembled for attachment to a process fluid conduit. The buffer member defines...
6622368 Method of manufacturing a transducer having a diaphragm with a predetermined tension  
A method of manufacturing a transducer of the type having a diaphragm ( 11 ) with a predetermined tension. After the transducer has been manufactured with its basic structure the diaphragm is...
6615665 Pressure measuring device  
A pressure measuring device with a housing ( 21, 53 ) and a pressure measuring cell is provided, the pressure measuring cell being protected from interference, in particular independently of its...
6606911 Pressure sensors  
A pressure sensor is formed by sandwiching a pressure-sensitive dielectric membrane between and in contact with a pair of electrodes. As pressure is applied, the dielectric constant of the...
6606235 Photolithographically-patterned variable capacitor structures and method of making  
A new type of high-Q variable capacitor includes a substrate, a first electrically conductive layer fixed to the substrate, a dielectric layer fixed to a portion of the electrically conductive...
6604426 Variable capacitance pressure sensor  
A pressure sensor having a first pole element and a second pole element spaced apart from each other and forming a capacitor. The first pole element includes a substantially flat portion around...
6564643 Capacitive pressure sensor  
A high-accuracy high-stability capacitor type pressure sensor which eliminates a parasitic capacitance between a reference capacitor and a semiconductor substrate. A capacitor type pressure sensor...
6556418 Micromechanical component and process for its fabrication  
A micromechanical component placed on a substrate face includes at least one cell. A counter-electrode of a cell capacitor is placed under a cavity. The counter-electrode can be made from a first...
6541833 Micromechanical component with sealed membrane openings and method of fabricating a micromechanical component  
The method for producing a micromechanical component includes the following steps: producing a semi-finished micromechanical component; producing openings and forming a cavity; sealing the opening...
6532834 Capacitive pressure sensor having encapsulated resonating components  
A capacitive pressure sensor for measuring a pressure applied to an elastic member includes a capacitive plate disposed adjacent to the elastic member so as to define a gap between a planar...
6527961 Method of manufacturing pressure microsensors  
A method for the formation of a region of silicon dioxide on a substrate of monocrystalline silicon. The epitaxial growth of a silicon layer, the opening of holes in the silicon layer above the...
6465271 Method of fabricating silicon capacitive sensor  
Manufacturing all-silicon force sensors, such as capacitive pressure sensors ( 100, 200 ) that have long term stability and good linear sensitivity, and can be built into of a pneumatic tire. The...
6456477 Linear capacitance detection circuit  
A differential transconductance amplifier detects changes of the variable capacitor in a low-impedance, bridge circuit and feeds back current to balance the bridge. The voltage that controls the...
6441449 MEMS variable capacitor with stabilized electrostatic drive and method therefor  
A micro electro-mechanical systems device having variable capacitance is controllable over the full dynamic range and not subject to the “snap effect” common in the prior art. The device...
6418006 Wide tuning range variable MEMs capacitor  
A MEM capacitor having a capacitance plate nearer a movable plate than a separate bias plate. Voltage potential between the bias plate and movable plate determines the value of capacitance between...
6363790 Pressure sensor  
The invention is concerned with a pressure sensor which avoids temperature hysteresis effects caused on account of heat-induced expansions as a result of stresses between a ceramic...
6338284 Electrical feedthrough structures for micromachined devices and methods of fabricating the same  
Structures and methods are disclosed in conjunction with the fabrication of electrical lead transfer feedthroughs with respect to a sealed cavity. In some applications such as capacitive pressure...
6267009 Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same  
These capacitive pressure sensor cells have joints between substrates and diaphragms being both pressure and/or tension-proof and high-vacuum-tight and long-term-stable. The sensor cell comprises a...
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