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8156817 |
Pressure detection device
Provided is a pressure detection device capable of easy installation and removal of a sensor in/from a diaphragm, measurement of a pressure in a wide rage, and manufacture at a low cost while...
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8146437 |
Diaphragm structure and MEMS device
A diaphragm structure for a MEMS device includes a through-hole formed so as to penetrate from an upper surface to a bottom surface of a substrate; and a vibrating electrode film formed on the...
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8141430 |
Monolithic vacuum manometer utilizing electrostatic interference as a means of detection
A monolithic manometer and method of sensing pressure changes may include sensing a change in parasitic capacitive coupling between multiple parasitic capacitive coupled conductive elements in...
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8141429 |
High temperature capacitive static/dynamic pressure sensors and methods of making the same
Disclosed are capacitive pressure probes or sensors for high temperature applications. The capacitive pressure sensors of the present invention include, inter alia, a sapphire diaphragm which is...
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8132465 |
Sensor element placement for package stress compensation
Circuits, methods, and systems that calibrate or account for packaging and related stress components in a pressure sensor. Further examples provide an improved sensor element or device. One example...
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8096189 |
Physical quantity sensor and method for manufacturing the same
A physical quantity sensor includes two substrates and a movable electrode that is disposed between the two substrates and is bonded to the two substrates. In the physical quantity sensor, the...
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8079269 |
Electrostatic pressure sensor with porous dielectric diaphragm
A pressure sensor comprises a first pressure chamber containing fill fluid at a first pressure, a second pressure chamber containing fill fluid at a second pressure, a porous dielectric diaphragm...
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8042401 |
Isolation system for process pressure measurement
A process fluid pressure transmitter includes a pressure sensor, transmitter electronics, and an isolation system. The pressure sensor has an electrical characteristic that changes with pressure....
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8012360 |
Pressure sensor
A pressure sensor for measuring an external pressure fabricated upon a ceramic substrate penetrated by a via extending from the top to the bottom of the ceramic substrate is disclosed. A...
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7942062 |
Pressure sensor and method for manufacturing the same
A pressure sensor includes: a housing; an attachment having a pressure input orifice communicating with an interior of the housing; a first diaphragm that seals an opening of the pressure input...
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7900518 |
Microfabricated implantable wireless pressure sensor for use in biomedical applications and pressure measurement and sensor implantation methods
A variable capacitor, a microfabricated implantable pressure sensor including a variable capacitor and an inductor, and related pressure measurement and implantation methods. The inductor may have...
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7864503 |
Capacitive type touch panel
A capacitive type touch panel includes: a transparent substrate; an array of first conductors formed on a surface of the transparent substrate; an array of second conductors formed on the surface...
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7841238 |
Pressure sensor with temperature compensation
The invention provides for a pressure sensor with compensation for temperature variations. The sensor has CMOS layers deposited on a substrate, a conductive layer connected to the CMOS and a...
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7798007 |
Hydraulic pressure intermediary
A hydraulic pressure intermediary includes: a platform, which has a bowl-shaped surface having an annular, platform-surface edge region, a platform-surface central region depressed relative to the...
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7775118 |
Sensor element assembly and method
Described herein is the sense element assembly for a capacitive pressure sensor and method for creating same that has increased sensitivity without additional size. The sense element assembly and...
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7762140 |
Combined fluid pressure and temperature sensor apparatus
A combined fluid pressure transducer and temperature sensor (10) has a housing (12) containing a variable capacitor (14) having a rigid substrate (14a) and attached flexible diaphragm (14b) in...
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7681457 |
Micromechanical pressure sensing device
A micromechanical pressure sensing device includes a silicon support structure, which is configured to provide a plurality of silicon support beams. The device further includes one or more...
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7614308 |
Diaphragm pressure measuring cell arrangement
A diaphragm pressure measuring cell arrangement has a housing body at least partly made of sapphire material and a planar sapphire diaphragm with a peripheral edge joined by a first edge seal to...
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7607355 |
Semiconductor device
A semiconductor device is equipped with a semiconductor sensor chip for detecting pressure variations that is arranged inside of a hollow cavity of a housing, wherein an opening is formed in a...
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7581447 |
Temperature compensating pressure sensing arrangement
The invention provides for a temperature compensating pressure sensing arrangement. The arrangement includes a substrate having sealed channels on which is deposited a CMOS layer, with a conductive...
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7571650 |
Piezo resistive pressure sensor
Various embodiments and methods relating to a pressure sensor having a flexure supported piezo resistive sensing element are disclosed.
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7568394 |
Enhanced diaphragm for pressure sensing system and method
An enhanced pressure sensing system and method use an external diaphragm to address issues involved with accurate and prolonged measurement of fluid pressure, such as of blood flowing in a vascular...
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7559247 |
Pressure sensor with reduced size strain gauge mounting structure and manufacturing method of the same
A pressure sensor for detecting pressure includes: a metallic diaphragm for receiving the pressure; four strain gauges providing a Wheatstone bridge, wherein each strain gauge outputs an electric...
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7495302 |
Micromechanical component having a diaphragm
A micromechanical component having a diaphragm is provided, the structure of which effectively prevents the penetration of dirt particles into the cavity. A method for manufacturing such a...
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7434472 |
Differential pressure transducer configurations including displacement sensor
The present invention pertains to differential pressure transducers. In an embodiment of the invention, a differential pressure transducer includes a transducer housing, a diaphragm, a bellows, and...
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7418871 |
Method for detecting a pressure of a medium and pressure measuring device
A pressure measuring device for detecting a pressure to be measured of a medium, having a pressure housing; a converter situated in the pressure housing for converting a mechanical force produced...
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7395719 |
Preformed sensor housings and methods to produce thin metal diaphragms
A preformed sensor housing including a conduit having an inside; a plug disposed within the conduit; and a deposit covering a portion of the plug and a portion of the conduit. A method is also...
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7356913 |
Process for manufacturing a microsystem
A process for making microswitches or microvalves, composed of a substrate and used for shifting between a first state of functioning and a second state of functioning by means of a bimetal-effect...
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7319581 |
Capacitive pressure sensor
A capacitive pressure sensor includes: a conductive silicon substrate having a diaphragm; an insulating substrate having a fixed electrode, the insulating substrate overlapping the conductive...
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7316163 |
Method of forming a seal between a housing and a diaphragm of a capacitance sensor
The axial distance between opposing conductors of a capacitance pressure transducer can depend, in part, upon the thickness of a seal that is disposed between a housing and a diaphragm of the...
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7252011 |
Surface area deposition trap
The disclosed pressure transducer assembly includes a housing, a pressure sensor disposed within the housing, a coupling establishing a sealed pathway between the housing and an external source of...
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7254008 |
Integrated capacitive microfluidic sensors method and apparatus
A microfluidic device and method for capacitive sensing. The device includes a fluid channel including an inlet at a first end and an outlet at a second end, a cavity region coupled to the fluid...
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7242570 |
Vacuum capacitor
A vacuum capacitor including an insulating cylinder having first and second ends which are opposite to each other. A stationary-side flange is installed to the first end of the insulating cylinder....
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7176390 |
Capacitive load cell with multi-layer dielectric for extended range
A capacitive load cell includes upper and lower capacitor plates and an intermediate dielectric comprising two or more layers of compressible material with diverse compressibility characteristics....
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7159465 |
Fluororesin thin film diaphragm pressure sensor and method of fabricating the same
The present invention provides a highly corrosion-resistant diaphragm pressure sensor capable of obviating the effects of temperature drift that arises when a pressure-travel coefficient changes...
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7140085 |
Process for manufacturing a capacitive vacuum measuring cell
A capacitive vacuum measuring cell includes first and second ceramic housing bodies (1, 4) joined by an edge seal (3). A thin ceramic membrane (2) is supported between first and second housing...
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7107855 |
Membrane for capacitive vacuum measuring cell
A ceramic membrane for a capacitive vacuum measuring cell includes a thin ceramic membrane with a thickness of <250 μm, in particular less than 120 μm. The membrane is produced from a r...
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6993973 |
Contaminant deposition control baffle for a capacitive pressure transducer
The disclosed transducer includes a housing, a diaphragm, an inner conductor, an outer conductor, and a first baffle. The housing defines an interior volume. The diaphragm is disposed in the...
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6903915 |
Variable capacitor voltage-controllable by use of coulomb blocking phenomenon
Variable capacitive device, such as a capacitor, controllable in voltage Vc including at least one first armature (L) and one second armature (R), the armatures being separated by an insulation...
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6892582 |
Semiconductor pressure sensor and pressure sensing device
The object of the present invention is to propose an etch channel sealing structure characterized by excellent impermeability to moisture and resistance to temporal change of the diaphragm in the...
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6883377 |
Measurement device including a pressure sensor
The present invention relates to a measurement device for fixing to a pipe or a vessel containing a fluid, the device including a pressure sensor surrounded by a wall. The device includes a coating...
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6874367 |
Pressure sensor
A capacitive-type pressure sensor comprising a glass plate having an electrode formed thereon. A diaphragm is formed from a semiconductor material and bonded to the glass substrate to define an...
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6865799 |
Method of manufacturing strain-detecting devices
A method of manufacturing strain-detecting devices is provided. First, plural cylindrical substrates, each of which has one end closed by a diaphragm, are fixedly placed at predetermined positions...
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6802222 |
Diaphragm-type semiconductor device and method for manufacturing diaphragm-type semiconductor device
A diaphragm-type semiconductor device includes a semiconductor substrate, a surface of which is substantially flat, a diaphragm, which covers a circular pressure reference space located on the...
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6791342 |
Electrostatic capacitance sensor
In an electrostatic capacitance sensor, an electrode is formed on a base board. The electrode is covered with a resist. A conductive rubber includes a first face and a second face. The first face...
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6781814 |
Capacitive pressure transducer
A capacitive fluid pressure transducer (10′) has a sensing element (12) received in an electrically conductive cup-shaped shield member (24) which is crimped onto the base of an electrical c...
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6776046 |
Pressure sensor with foresighted maintenance control and monitoring for diaphragm fracture and to a method for monitoring for diaphragm fracture
A pressure-measuring device with monitoring for diaphragm fracture comprises a housing with a passage whose two openings at the end faces of the housing are closed by a first deformation body and a...
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6725725 |
Micromechanical differential pressure sensor device
A micromechanical differential pressure sensor device for measuring a pressure difference between two mutually separated spaces or media, in which two absolute pressure measuring devices are...
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6725724 |
Manufacturing method for a thin-film high-pressure sensor
A method for manufacturing a sensor component, in particular, a thin-film high-pressure sensor, as well as a sensor component, is described, in which at least one measuring element, in particular...
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6704185 |
Capacitive pressure-responsive devices and their fabrication
A method for making capacitive silicon pressure sensors and pressure switches with high long-term stability involves fabrication by wafer bonding of a silicon substrate wafer with another silicon...
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