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8966990 MEMS devices exhibiting linear characteristics  
A micro electro mechanical system device has a first subassembly having sensor element including a coupler, and a second subassembly including a comb drive. The comb drive having stator plates and...
8915141 Pressure sensor having a connection housing and a sensor housing  
Pressure sensor unit for sealed attachment to a fluidic system comprising a mounting member, a membrane cavity extending through the mounting member with an opening in contact with the fluidic...
8904876 Flexible piezocapacitive and piezoresistive force and pressure sensors  
Flexible force/pressure sensors for producing electrical output signals proportional to forces or pressures exerted on the sensor include a thin, elastically deformable foam pad laminated between...
8881596 Semiconductor sensing device to minimize thermal noise  
An MEMS pressure sensor is designed to reduce or eliminate thermal noise, such as temperature offset voltage output. The pressure sensor includes a pressure sensing element having a diaphragm, and...
8800376 Torque insensitive header assembly  
There is disclosed a high pressure sensing header which is relatively insensitive to mounting torque. The header generally includes an outer torque isolating shell which has a ā€œCā€ shaped cross...
8704538 Capacitance sensors  
A sensor assembly includes a housing assembly, an electrode arrangement and a diaphragm having a fixed portion secured to the housing assembly and an active portion movable relative to the...
8667849 Pressure sensor  
A pressure sensor includes: a container; a pressure receiving member which forms apart of the container; a pressure sensitive element which has a pressure sensing portion and a pair of base...
8656787 Electrostatic capacitive pressure sensor  
In an electrostatic capacitance pressure sensor provided with a pressure sensor chip of a diaphragm structure for detecting an electrostatic capacitance in accordance with a pressure of a medium...
8640547 Pressure sensor with a flexible membrane  
The invention relates to a pressure sensor (6). This pressure sensor (6) comprises a flexible membrane (11) cooperating with a transmission device (10) that enables a value representing the...
8631708 Apparatus and method for minimizing drift of a piezo-resistive pressure sensor due to the progressive release of mechanical stress over time  
An absolute piezo-resistive pressure sensor system and method employing multiple pressure sensing elements operating simultaneously to detect pressure. Both pressure sensing elements being subject...
8631709 Pressure transducer structures having a plurality of conductive traces for curved surfaces  
A novel flexible transducer structure is suitable for attaching to curved surface such as the leading edge of an aircraft wing. The structure comprises a thin flexible sheet of an insulating...
8627559 Media-compatible electrically isolated pressure sensor for high temperature applications  
A method for manufacturing a Micro-Electro-Mechanical System pressure sensor, including forming a gauge wafer including a diaphragm and a pedestal region. The method includes forming an electrical...
8590387 Absolute capacitive micro pressure sensor  
An absolute capacitive micro pressure sensor including a pressure sensor element with a mechanically fixed electrode and a deflectable pressure sensor membrane separated from the fixed electrode...
8587565 Position indicator, variable capacitor and input device  
A variable capacitor of a position indicator includes a dielectric, an electrode, a conductive member and a conductive portion. The dielectric has an upper surface and a lower surface opposite the...
8522620 Pressure sensor and use thereof in a fluid tank  
A pressure sensor in contact with an aggressive fluid for a pressure measurement has a board with a pressure passage. The pressure passage is closed on one side by a sensor chip as a pressure...
8516894 Electronic circuit for controlling a capacitive pressure sensor and capacitive pressure sensor system  
An electronic circuit (10) for controlling a capacitive pressure sensor (1), which capacitive pressure sensor (1) comprises a plate electrode capacitor (C) with a capacity that varies in...
8511168 Sensor element for capacitively measuring differential pressure  
A capacitive differential pressure sensor is described which has a simple configuration, and which provides reliable measuring results even in corrosive measuring environments. The sensor element...
8511170 Pressure transducer having structure for monitoring surface charge  
A pressure transducer includes a substrate, a piezoresistive element, a first conductive element, a first terminal, and a test structure. The substrate has a surface and a cavity. A diaphragm...
8511169 Monolithic vacuum manometer utilizing electrostatic interference as a means of detection  
A monolithic manometer and method of sensing pressure changes may include sensing a change in parasitic capacitive coupling between multiple parasitic capacitive coupled conductive elements in...
8471346 Semiconductor device including a cavity  
A semiconductor device includes a substrate including a cavity and a first material layer over at least a portion of sidewalls of the cavity. The semiconductor device includes an oxide layer over...
8429979 Capacitance type pressure sensor  
The present invention is adapted to prevent a diaphragm from being deformed by a thermal stress caused by thermal expansion coefficients of a sensor main unit and a fixing member and includes a...
8413518 Sensor membrane  
A pressure or force sensor has a sensor housing, a measuring element in the housing, and a sensor membrane. The membrane is delimited by an inner edge and an outer edge, which is connected in a...
8393223 Pressure sensor with resistance strain gages  
A pressure sensor micromachined by using microelectronics technologies includes a cavity hermetically sealed on one side by a silicon substrate and on the other side by a diaphragm that is...
8393222 Apparatus and method for minimizing drift of a piezo-resistive pressure sensor due to progressive release of mechanical stress over time  
An absolute piezo-resistive pressure sensor system and method employing multiple pressure sensing elements operating simultaneously to detect pressure. Both pressure sensing elements being subject...
8371174 Micro-deformable piezoresistive material and manufacturing method thereof and pressure sensor using the same  
A micro-deformable piezoresistive material is provided, including a hard plastic body, a micro-deformable rough texture surface, and a plurality of conductive particles. The micro-deformable rough...
8358047 Buried traces for sealed electrostatic membrane actuators or sensors  
In accordance with the invention, there are micro-electromechanical devices and methods of fabricating them. An exemplary micro-electromechanical device can include a first dielectric layer; a...
8272272 Pressure measurement module  
A pressure measuring module for recording an absolute pressure or a relative pressure. Pressure measuring module includes a housing produced preferably as a premold, in which a pressure measuring...
8256299 Pressure sensor having a cap above a first diaphragm connected to a hollow space below a second diaphragm  
A micromechanical pressure sensor includes a first diaphragm and a second diaphragm accommodated in a shared semiconductor substrate. The two diaphragms facilitate independent pressure sensing of...
8250925 Workpiece composite having a preform and a gel  
A workpiece composite includes a preform part and a gel accommodated in a recess in the preform, the recess being enclosed by at least one edge which serves as a creep barrier to prevent the gel...
8240217 Diaphragm isolation forming through subtractive etching  
Described herein is a housing comprising an inside and at least one sidewall, wherein the at least one sidewall comprises inner and outer surfaces. An etch stop deposit is disposed over at least a...
8234926 Pressure sensor with a closed cavity containing an inert filling medium  
A pressure sensor has a substrate with conductor tracks for contact-connecting electrical components. The pressure sensor has a measuring element for converting a mechanical measurement variable...
8215176 Pressure sensor for harsh media sensing and flexible packaging  
MEMS pressure sensing elements, the fabrication methods of the sensing elements, and the packaging methods using the new sensing elements are introduced to provide a way for a harsh media absolute...
8156817 Pressure detection device  
Provided is a pressure detection device capable of easy installation and removal of a sensor in/from a diaphragm, measurement of a pressure in a wide rage, and manufacture at a low cost while...
8146437 Diaphragm structure and MEMS device  
A diaphragm structure for a MEMS device includes a through-hole formed so as to penetrate from an upper surface to a bottom surface of a substrate; and a vibrating electrode film formed on the...
8141430 Monolithic vacuum manometer utilizing electrostatic interference as a means of detection  
A monolithic manometer and method of sensing pressure changes may include sensing a change in parasitic capacitive coupling between multiple parasitic capacitive coupled conductive elements in...
8141429 High temperature capacitive static/dynamic pressure sensors and methods of making the same  
Disclosed are capacitive pressure probes or sensors for high temperature applications. The capacitive pressure sensors of the present invention include, inter alia, a sapphire diaphragm which is...
8132465 Sensor element placement for package stress compensation  
Circuits, methods, and systems that calibrate or account for packaging and related stress components in a pressure sensor. Further examples provide an improved sensor element or device. One...
8096189 Physical quantity sensor and method for manufacturing the same  
A physical quantity sensor includes two substrates and a movable electrode that is disposed between the two substrates and is bonded to the two substrates. In the physical quantity sensor, the...
8079269 Electrostatic pressure sensor with porous dielectric diaphragm  
A pressure sensor comprises a first pressure chamber containing fill fluid at a first pressure, a second pressure chamber containing fill fluid at a second pressure, a porous dielectric diaphragm...
8042401 Isolation system for process pressure measurement  
A process fluid pressure transmitter includes a pressure sensor, transmitter electronics, and an isolation system. The pressure sensor has an electrical characteristic that changes with pressure....
8012360 Pressure sensor  
A pressure sensor for measuring an external pressure fabricated upon a ceramic substrate penetrated by a via extending from the top to the bottom of the ceramic substrate is disclosed. A...
7942062 Pressure sensor and method for manufacturing the same  
A pressure sensor includes: a housing; an attachment having a pressure input orifice communicating with an interior of the housing; a first diaphragm that seals an opening of the pressure input...
7900518 Microfabricated implantable wireless pressure sensor for use in biomedical applications and pressure measurement and sensor implantation methods  
A variable capacitor, a microfabricated implantable pressure sensor including a variable capacitor and an inductor, and related pressure measurement and implantation methods. The inductor may have...
7864503 Capacitive type touch panel  
A capacitive type touch panel includes: a transparent substrate; an array of first conductors formed on a surface of the transparent substrate; an array of second conductors formed on the surface...
7841238 Pressure sensor with temperature compensation  
The invention provides for a pressure sensor with compensation for temperature variations. The sensor has CMOS layers deposited on a substrate, a conductive layer connected to the CMOS and a...
7798007 Hydraulic pressure intermediary  
A hydraulic pressure intermediary includes: a platform, which has a bowl-shaped surface having an annular, platform-surface edge region, a platform-surface central region depressed relative to the...
7775118 Sensor element assembly and method  
Described herein is the sense element assembly for a capacitive pressure sensor and method for creating same that has increased sensitivity without additional size. The sense element assembly and...
7762140 Combined fluid pressure and temperature sensor apparatus  
A combined fluid pressure transducer and temperature sensor (10) has a housing (12) containing a variable capacitor (14) having a rigid substrate (14a) and attached flexible diaphragm (14b) in...
7681457 Micromechanical pressure sensing device  
A micromechanical pressure sensing device includes a silicon support structure, which is configured to provide a plurality of silicon support beams. The device further includes one or more...
7614308 Diaphragm pressure measuring cell arrangement  
A diaphragm pressure measuring cell arrangement has a housing body at least partly made of sapphire material and a planar sapphire diaphragm with a peripheral edge joined by a first edge seal to...

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