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7616425 |
Photo-sensitive MEMS structure
A heat-sensitive apparatus includes a substrate with a top surface, one or more bars being rotatably joined to the surface and having bimorph portions, and a plate rotatably joined to the surface...
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7586749 |
Protecting casing for transducer
A protecting casing for a transducer has an outer casing, an inner casing, a circuit board and a connector. The inner casing is detachably mounted in the outer casing and has a mounting hole and a...
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7568395 |
Pressure sensor with dual chambers
The present invention relates to a pressure sensor. The pressure sensor includes a substrate assembly. The substrate assembly defines sealed channels and includes a conductive layer. A conductive...
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7546772 |
Piezoresistive pressure sensor
A pressure sensor includes a housing portion with a fluid inlet and a polymer element within the housing portion. The polymer element may be coated with piezoresistive material to form a first...
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7533573 |
Pressure sensor including temperature adjustment
A pressure sensor for sensing a fluid pressure comprising: a first chamber including a first conductive membrane, wherein a fluid is sealed within the first chamber at a reference pressure such...
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7530275 |
Pressure sensor set in an opening of a wall
The invention refers to a pressure sensor comprising a membrane which separates a measuring device receiving the deformation of the membrane caused by pressure from the pressurised pressure space. ...
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7530276 |
Semiconductor pressure sensor and manufacturing method thereof
This invention aims to realize reduction in size without impairing measurement accuracy or connection reliability in a semiconductor pressure sensor in which a glass substrate is adhered to a...
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7516667 |
Differential pressure sensor having symmetrically-provided sensor chips and pressure introduction passages
A differential pressure sensor includes a case, a first and a second pressure sensing element, a first and a second pressure introduction passage, and a differential pressure determining element....
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7516669 |
Capacitance sensing circuit for a pressure sensor
The invention provides for a capacitance sensing circuit for a pressure sensor. The pressure sensor includes a sensor membrane and a compensation membrane. The circuit includes a controller...
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7509867 |
Bioinformation detection device utilizing air pressure variation
A bioinformation detection device, comprising a three-layer structure having a base, an elastic body, and a cover body, wherein a closed space is formed by a load applied to the structure, a strain...
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7472600 |
Pressure sensor
The invention relates to a pressure sensor ( 1 ), comprising a housing ( 2 ), a housing element ( 3 ) which may be exposed to a pressure chamber ( 10 ), mounted on the housing ( 2 ) by means of a...
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7461558 |
Capacitive pressure sensor with sealed reference chamber
A capacitive pressure sensor includes a substrate assembly. The substrate assembly includes a conductive layer and defines a plurality of channels terminating in closed ends. A conductive membrane...
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7458272 |
Capacitative pressure sensor with ceramic membrane
A pressure sensor for sensing a fluid pressure in harsh environments such as the air pressure in a tire formed on a wafer substrate. Associated circuitry deposited in CMOS layers on the wafer...
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7454976 |
Pressure sensor for a vehicle
A pressure sensor includes a case with an air passageway having a first opening leading to an inside of the case and a second opening leading to an outside of the case, pressure sensing means that...
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7451654 |
Constant power dissipation in capacitance pressure transducers
A system and method are described for maintaining power dissipation substantially constant across the sensor interface board of a capacitance pressure transducer. A shorted diaphragm level detector...
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7446994 |
Variable capacitor and manufacturing method thereof
A lower movable electrode 35 , having line sections 35 a , 35 a on both ends and a capacitor section 35 b in the center, and an upper movable electrode 37 , having line sections 37 a , 37 a ...
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7437936 |
Window for measuring device
The present disclosure provides for systems and methods for fabricating measuring devices, e.g., a pressure gauge, thermometer or the like. More particularly, the present disclosure provides for...
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7418871 |
Method for detecting a pressure of a medium and pressure measuring device
A pressure measuring device for detecting a pressure to be measured of a medium, having a pressure housing; a converter situated in the pressure housing for converting a mechanical force produced...
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7412892 |
Method of making pressure transducer and apparatus
A method for making a pressure transducer comprising: forming a recess in a diaphragm, the diaphragm having a thinned region that deflects responsively to pressure being applied thereto; depositing...
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7404330 |
Pressure sensor
A pressure sensor includes a metal housing and a semiconductor chip. The housing has a diaphragm unitary with the housing and an inlet for introducing fluid to the diaphragm. The inlet has a first...
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7400488 |
Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters
A device for varying the capacitance of an electronic circuit is disclosed. The device comprises a flexible membrane located above the electronic circuit, a metal layer connected to the flexible...
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7395716 |
Variable capacitance measuring device
A variable capacitance measuring device can comprise any one or more features in various different embodiments allow a reliable, compact device to be achieved. A capacitor electrode, a gettering...
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7382599 |
Capacitive pressure sensor
A capacitive pressure sensor is provided. The capacitive pressure sensor includes a glass substrate that has a pair of surfaces facing each other. A first silicon substrate has a fixed electrode...
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7360431 |
Pressure sensor device including a diaphragm and a stopper member having a curved surface facing the diaphragm
The pressure sensor device has a laminated diaphragm ( 12 ) in which a strain resistance gauge is formed in a surface and a stopper member ( 13 ) including a concave portion forming a curved...
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7347110 |
Tactile sensing device and an apparatus using the same
The present invention provides a tactile sensing device comprising a tactile sensing layer, a pressure adjusting unit, at least one pressure sensing unit and a control unit. The tactile sensing...
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7345867 |
Capacitive pressure sensor and method of manufacturing the same
A capacitive pressure sensor and method of manufacturing the same is provided. The capactive pressure sensor includes a glass substrate that has a pair of surfaces opposite to each other. A...
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7345866 |
Continuously tunable RF MEMS capacitor with ultra-wide tuning range
A method is provided of continuously varying the capacitance of a MEMS varactor having a cantilever assembly mounted on a base portion, the cantilever assembly having a first capacitance plate and...
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7331238 |
Pressure detection device
A pressure detection device includes a case unit which has therein an accommodation space and a pressure introduction passage, and a pressure detection unit having a detection surface for detecting...
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7325457 |
Sensor and sensor module
A sensor and sensor module with small power consumption and high reliability are disclosed. The sensor includes a capacitor having a capacitance varying with a physical quantity, a...
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7308830 |
Pressure sensor fault detection
A diagnostic system for a pressure sensor having a cavity configured to receive on applied pressure is provided. The cavity has a first and a second wall. A deflectable diaphragm is positioned in...
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7278321 |
Pressure sensor
A pressure sensor for sensing a pressure level of a medium. The pressure sensor includes a rigid substrate having a medium contacting side and a pressure sensitive resistor mounted on the medium...
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7260996 |
Pressure measuring apparatus and pressure sensor thereof
The present invention relates to a pressure measuring apparatus, characterized in that: the pressure measuring apparatus comprises a pressure sensor having a first resistor for sensing an external...
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7260994 |
Low cost high-pressure sensor
A pressure sensing apparatus including a thin disc of a metal having a ceramic material layer and piezoresistive elements formed thereon. A surface of the disc is bonded to a diaphragm assembly on...
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7254008 |
Integrated capacitive microfluidic sensors method and apparatus
A microfluidic device and method for capacitive sensing. The device includes a fluid channel including an inlet at a first end and an outlet at a second end, a cavity region coupled to the fluid...
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7249515 |
Capacitive pressure sensor
For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, with the pressure measuring cell being...
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7242570 |
Vacuum capacitor
A vacuum capacitor including an insulating cylinder having first and second ends which are opposite to each other. A stationary-side flange is installed to the first end of the insulating cylinder....
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7201057 |
High-temperature reduced size manometer
A pressure-sensing device and method for making and using such device having a temperature differential between two portions of the device is disclosed. A solid-state heat pump, such as a...
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7181975 |
Wireless capacitance pressure sensor
A wireless pressure sensor system has a pressure sensing capacitor and an inductor mounted on a common housing. The pressure sensing capacitor has a conductive diaphragm, a dielectric layer and a...
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7171856 |
Electrical shield structure for pressure sensor
A pressure sensor includes a case having a concave portion, a sensing portion disposed in the concave portion to output an electrical signal proportional to an applied pressure, a circuit portion...
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7159465 |
Fluororesin thin film diaphragm pressure sensor and method of fabricating the same
The present invention provides a highly corrosion-resistant diaphragm pressure sensor capable of obviating the effects of temperature drift that arises when a pressure-travel coefficient changes...
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7153383 |
Weight sensor
The invention provides a weight sensor ( 10 ) which includes a first electrically conductive sheet ( 12 ) electrically isolated from a second electrically conductive sheet ( 14 ) by inserts of a...
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7150197 |
Capacitive pressure sensor
For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, wherein the pressure measuring cell is...
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7093495 |
Pressure sensor
A pressure sensor for sensing a pressure level of a medium. The pressure sensor includes a rigid substrate having a medium contacting side and a pressure sensitive resistor mounted on the medium...
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7086287 |
Electrostatic condenser type pressure sensor, and method for manufacturing the pressure sensor
The present invention provides a small-sized electrostatic condenser type pressure sensor having high assembly accuracy but no dispersion in a detection accuracy, and a method for manufacturing the...
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7085628 |
Apparatus for the correction of temperature drift for pressure sensor, pressure control apparatus and pressure-type flow rate control apparatus
A pressure sensor, a pressure control apparatus, and a flow rate control apparatus are provided to automatically correct temperature drift of the pressure sensor and accurately detect pressure...
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7082834 |
Flexible thin film pressure sensor
Low pressure sensing and imperviousness to corrosion and to the effects of harsh environments are achieved in a pressure sensor that employs a flexible membrane supporting piezoresistive elements....
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7083737 |
Method for manufacturing a micro-actuator
A micro-actuator having a stage capable of a see-saw motion and a method for its manufacture are disclosed. In the micro-actuator according to the present invention, a plurality of parallel driving...
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7061745 |
Variable capacitor adjustable by linear motor
The disclosure describes a variable capacitor device, which is formed by a linear motor and a variable capacitor having at least one stator electrode and a movable electrode. A piezoelectric...
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7042699 |
Vacuum variable capacitor
A vacuum variable capacitor is includes of a vacuum container which is formed by sealing both end of a cylindrical insulator with a fixed-side end plate and a movable-side end plate, a movable...
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7031136 |
Variable capacitors, composite materials
Tunable capacitors ( 10, 20, 30, 40 ) have a dielectric material ( 16, 26, 36, 42 ) between electrodes, which dielectric material comprises an insulating material ( 17, 27, 37, 42 ) and...
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