Matches 1 - 50 out of 277 1 2 3 4 5 6 >
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7606400 Arrangement for authentication of a person  
A capacitive fingerprint sensor is fabricated on a plastic substrate ( 363 ) with an embedded integrated circuit chip ( 380 ). The invention describes a way to create two or three dimensional forms...
7562573 Integrated sensor and circuitry and process therefor  
A micromachined sensor and a process for fabrication and vertical integration of a sensor and circuitry at wafer-level. The process entails processing a first wafer to incompletely define a sensing...
7541816 Capacitive sensor  
In a capacitive sensor, a sensing electrode is positively charged, the sensing electrode and a sensing capacitor are charge-balanced, the sensing electrode is negatively charged, and then the...
7523665 Angular velocity sensor and method for operating the same  
An angular velocity sensor includes first and second vibrators having a movable portion with driving and detecting purpose movable electrodes and a fixed portion with first and second side driving...
7499257 Micro-electro-mechanical system varactor  
A micro-electro-mechanical system varactor. The varactor includes a substrate, a lower bias conductor partially overlaying the substrate, a first signal conductor partially overlaying the...
7464459 Method of forming a MEMS actuator and relay with vertical actuation  
A method of forming an actuator and a relay using a micro-electromechanical (MEMS)-based process is disclosed. The method first forms the lower sections of a square copper coil, and then forms a...
7382599 Capacitive pressure sensor  
A capacitive pressure sensor is provided. The capacitive pressure sensor includes a glass substrate that has a pair of surfaces facing each other. A first silicon substrate has a fixed electrode...
7346981 Method for fabricating microelectromechanical system (MEMS) devices  
A process for fabricating a MEMS device comprises the steps of depositing and patterning on one side of a wafer a layer of material having a preselected electrical resistivity; bonding a substrate...
7307827 Variable capacitor and method of manufacturing variable capacitor  
The first movable electrode is flat, but the second movable electrode is deformed into a convex shape. A dielectric layer is placed on the facing surface of the second movable electrode. By...
7272974 Capacitance type physical quantity sensor having sensor chip and circuit chip  
A capacitance type physical quantity sensor includes a sensor chip and a circuit chip. The sensor chip includes: a support substrate; a semiconductor layer; a movable electrode; and a fixed...
7263885 Physical quantity sensor having sensor chip and circuit chip  
A physical quantity sensor includes: a circuit chip; and a sensor chip disposed on the circuit chip through an adhesive layer. The sensor chip includes: a support substrate; a movable electrode;...
7251121 Electronically variable capacitor array  
A capacitor array may include a bottom electrode, a plurality of top electrodes, at least one dielectric medium and a plurality of switching mechanisms. Each switching mechanism may separably...
7236616 Biometric piezo scanner  
A piezoelectric thin film sensor array is used to scan and capture biometric data, for example, a fingerprint image. In one embodiment, a multi-layer structure includes a PVDF layer in between two...
7216541 Capacitive sensor for dynamical quantity  
A capacitive sensor for measuring a dynamical quantity based on a change in capacitance has a semiconductor substrate having a weight supported by beams so as to undergo displacement according to...
7203052 Method of fabricating MEMS tunable capacitor with wide tuning range  
A MEMS tunable capacitor and method of fabricating the same, includes a plurality of fixed charge plates on a substrate, the plurality of fixed charge plates having a same height, being arranged in...
7146024 Swiped aperture capacitive fingerprint sensing systems and methods  
A fingerprint sensing system includes an image sensor, a rate sensor and a sensor circuit. The image sensor includes a linear array of capacitive sensors for capacitive sensing of ridge peaks and...
7137300 Parylene capacitive accelerometer utilizing electrical fringing field sensing and method of making  
An accelerometer device comprises a dielectric seismic mass separated by a gap from an underlying comb-shaped planar capacitor. The principle for measuring acceleration detecting capacitance change...
7134340 Apparatus and method for anchoring micromachined structures  
Micromachined structures, such as fixed drive or sensing fingers of an inertial sensor, are anchored to a substrate using multiple anchors or elongated anchors in order to reduce the bending or...
7099496 Swiped aperture capacitive fingerprint sensing systems and methods  
A fingerprint sensing system includes an image sensor, a rate sensor and a sensor circuit. The image sensor includes a linear array of capacitive sensors for capacitive sensing of ridge peaks and...
7059190 Semiconductor dynamic sensor having variable capacitor formed on laminated substrate  
An acceleration sensor is formed on a top surface of a laminated silicon-on-insulator substrate. The acceleration sensor is composed of first and second capacitors each including a movable...
7054133 Electronic textile touch light controller  
A capacitive light/dimmer switch which uses soft or fuzzy fabrics made with electronic textiles instead of, or as an extension of, metal or plastic plates. The soft fabric material, which may be in...
7032448 Capacitive humidity sensor  
A capacitive humidity sensor includes a detection portion and a reference portion. The detection portion includes detection electrodes and a moisture sensitive film. The reference portion includes...
6999296 Voltage controlled variable capacitance device  
A P type substrate is provided on a surface thereof with varactor elements. The varactor element has an N well formed on the surface of the P type substrate, and a gate insulating film is formed on...
6993973 Contaminant deposition control baffle for a capacitive pressure transducer  
The disclosed transducer includes a housing, a diaphragm, an inner conductor, an outer conductor, and a first baffle. The housing defines an interior volume. The diaphragm is disposed in the...
6992878 Tunable capacitor and method of fabricating the same  
A tunable capacitor includes a substrate, a stationary electrode and a movable electrode supported by the substrate, piezoelectric actuators that are supported by the substrate and drive the...
6975498 Variable capacitor  
A variable capacitor includes a stator and a rotor rotatably supported by a cover relative to the stator. The stator includes a first stator electrode of two or more layers and a second stator...
6938485 Capacitive acceleration sensor  
The invention relates to measuring devices used for the measuring of acceleration, and specifically to capacitive acceleration sensors. The capacitive acceleration sensor according to the present...
6935176 Capacitive dynamic quantity sensor device  
A sensor chip ( 100 ) includes comb-toothed movable electrodes ( 24 ) displaceable in a Y-direction, and comb-toothed stationary electrodes ( 30, 31, 40, 41 ) arranged to confront those movable...
6925877 Micromachined devices with apertures  
A micromachined device has a body suspended over a substrate and movable in a plane relative to the substrate. The body has a perimeter portion, a first cross-piece portion extending from one part...
6923061 Physical quantity sensor having beam  
A physical quantity sensor for detecting physical quantity includes a substrate having an opening; a beam protruding in the opening of the substrate and supported on the substrate; and a fixed...
6903915 Variable capacitor voltage-controllable by use of coulomb blocking phenomenon  
Variable capacitive device, such as a capacitor, controllable in voltage Vc including at least one first armature (L) and one second armature (R), the armatures being separated by an insulation...
6856499 MEMS variable inductor and capacitor  
A variable passive component is provided for fabrication on a microelectromechanical system (MEMS) device. A conductive portion is provided on a low-profile sliding dielectric sheet that cooperates...
6848309 Capacitive type dynamic quantity sensor  
In a capacitive type dynamic quantity sensor, a width of a beam in a beam portion extending in a direction that is perpendicular to a predetermined deformation direction and a gap disposed between...
6785117 Capacitive device  
A capacitive device includes a substrate, a movable electrode, and a fixed electrode. The movable electrode is located above a surface of the substrate and is movable with respect to the substrate...
6747863 Electrostatic drive  
An electrostatic drive having a plurality of mover electrodes operatively secured to a mover, and a plurality of stator electrodes operatively secured to a stator. The mover and stator are...
6724612 Relative humidity sensor with integrated signal conditioning  
Methods of and systems providing high reliability relative humidity sensors having integrated signal conditioning are described, providing a series capacitive circuit including a humidity-sensitive...
6662663 Pressure sensor with two membranes forming a capacitor  
A pressure sensor may include a first membrane that flexes in response to pressure, a reference cavity covered by the first membrane where the reference cavity contains a vacuum and a second...
6600644 Microelectronic tunable capacitor and method for fabrication  
A microelectronic tunable capacitor and a method for fabricating the capacitor are described. The capacitor is formed by a micro-actuator, a first fixed capacitor plate and a second swayable...
6568269 Acceleration sensor and manufacturing method thereof  
The invention provides a highly reliable acceleration sensor capable of being manufactured at a low cost easily, and a manufacturing method the acceleration sensor. The acceleration sensor...
6556418 Micromechanical component and process for its fabrication  
A micromechanical component placed on a substrate face includes at least one cell. A counter-electrode of a cell capacitor is placed under a cavity. The counter-electrode can be made from a first...
6462930 Vacuum variable capacitor device  
An adjuster nut is rotatably supported to a vacuum container of a vacuum variable capacitor of a vacuum variable capacitor device. The adjuster nut has a nut portion, and a shank made of an...
6442013 Apparatus having capacitive sensor  
An electronic device ( 1 ), e.g. a mobile telephone having a front cover ( 6 ) and a capacitive proximity sensor, comprising: a first electrode ( 9; 27 ) and a second electrode ( 8; 21, 20 ), said...
6433375 Tunable microwave devices  
An electrically tunable device, particularly for microwaves, includes a carrier substrate, conductors, and at least one tunable ferroelectric layer. Between the conductors and the tunable...
6430029 Capacitor terminal  
The present invention relates to an electric capacitor and, more specifically, to its electrical terminals. One problem that occurs while mounting the capacitor provided with the standard terminals...
6370008 Capacitor film for a self-healing film capacitor  
The invention relates to a metallization for a film capacitor, wherein a dielectric capacitor film provided with a metallic coating is wound into a capacitor element in the running direction of the...
6308569 Micro-mechanical inertial sensors  
Micromechanical inertial sensors are formed of a plurality of substantially-planar semiconductor wafers interspersed with oxide layers. The sensitive element is located within an internal aperture...
6282960 Micromachined device with enhanced dimensional control  
A micromachined device is provided that establishes select dimensional relationships between micromachined structures to achieve correlation in dimensional variation among these structures.
6268232 Method for fabricating a micromechanical component  
A method for fabricating a micromechanical component, in particular a surface-micromechanical acceleration sensor, involves preparing a substrate and providing an insulation layer on the substrate,...
6263736 Electrostatically tunable resonance frequency beam utilizing a stress-sensitive film  
Methods and apparatus for detecting particular frequencies of acoustic vibration utilize an electrostatically-tunable beam element having a stress-sensitive coating and means for providing...
6240782 Semiconductor physical quantity sensor and production method thereof  
A semiconductor physical quantity sensor includes a substrate, a beam-structure movable portion and a fixed portion. The beam-structure movable portion is suspended by four anchors formed of...
Matches 1 - 50 out of 277 1 2 3 4 5 6 >