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Match Document Document Title
7453682 Discharge device and air conditioner having said device  
A surface discharge type air cleaning device comprises an insulating dielectric body formed in the shape of a sheet, a discharge electrode having a pattern part of a predetermined area formed on...
7446284 Etch resistant wafer processing apparatus and method for producing the same  
A wafer processing apparatus is fabricated by depositing a film electrode onto the surface of a base substrate, the structure is then overcoated with a protective coating film layer comprising at...
7438747 Negative ion generator  
A negative ion generator includes: a flat dielectric layer having a planar surface; a plurality of conductive lines that are attached to the planar surface of the dielectric layer, and that define...
7430104 Electrostatic chuck for wafer metrology and inspection equipment  
An electrostatic chuck is configured for electrostatically securing a wafer while limiting charge on the wafer and physical contact between the electrostatic chuck and the wafer. The electrostatic...
7411772 Casimir effect conversion  
Techniques in which a 1 st force, field, or effect caused by a Casimir effect is converted into a 2 nd force, field, or effect. The 1 st force, field, or effect might be distinct from the 2 nd ...
7379286 Quantum vacuum energy extraction  
A system is disclosed for converting energy from the electromagnetic quantum vacuum available at any point in the universe to usable energy in the form of heat, electricity, mechanical energy or...
7375947 Method of feedback control of ESC voltage using wafer voltage measurement at the bias supply output  
In a plasma reactor having an electrostatic chuck, wafer voltage is determined from RF measurements at the bias input using previously determined constants based upon transmission line properties...
7369393 Electrostatic chucks having barrier layer  
An electrostatic chuck for supporting a semiconductor wafer, including: a chuck body having a dielectric region and an insulating region, the insulating region having a higher electrical...
7352554 Method for fabricating a Johnsen-Rahbek electrostatic wafer clamp  
The present invention is directed to a J-R electrostatic clamp (ESC) and method for forming same. The ESC comprises a ceramic layer for clamping a wafer thereto, and a plurality of electrodes...
7289310 Adjustable static current discharging bracelet  
An adjustable static current discharging bracelet includes a main body of inverse U-shaped section, a medium static current collector under the top of the main body and riveted to a protruding rod,...
7259955 Electrostatic holding device and electrostatic tweezers using the same  
An electrostatic holding device ( 100 ) in which an electrode group ( 103 ) having a plurality of electrodes covered with an insulating material ( 102 ) is used as a holding surface applies...
7236344 Ionic flow generator for thermal management  
The apparatus for generating ionic flow of media includes a DC voltage supply having a positive terminal and a negative terminal with a collector connected to the negative terminal of the direct...
7221553 Substrate support having heat transfer system  
A support for a substrate processing chamber has upper and lower walls that are joined by a peripheral sidewall to define a reservoir. A fluid inlet supplies a heat transfer fluid to the reservoir....
7215527 MEMS digital-to-acoustic transducer with error cancellation  
An acoustic transducer comprising a substrate; and a diaphragm formed by depositing a micromachined membrane onto the substrate. The diaphragm is formed as a single silicon chip using a CMOS MEMS...
7199994 Method and system for flattening a reticle within a lithography system  
For clamping a reticle within a lithography system, a first area in the center of the reticle is clamped to a chuck of the lithography system at a first time point. In addition, a second area...
7199508 Coaxial flexible piezoelectric cable polarizer, polarizing method, defect detector, and defect detecting method  
The invention provides a defect inspecting apparatus and a defect detecting method for specifying a position of a defect before polarization when the defect is included in a coaxial flexible...
7160365 Ion generating apparatus, air conditioning apparatus, and charging apparatus  
An ion generating apparatus is built by sandwiching a dielectric layer between an induction electrode and a discharge electrode. The induction electrode is formed of a metal substrate of, for...
7150780 Electrostatic air cleaning device  
An electrostatic air cleaning device includes an array of electrodes. The electrodes include corona electrodes connected to a suitable source of high voltage so as to generate a corona discharge....
7149070 Holding device, in particular for fixing a semiconductor wafer in a plasma etching device, and method for supplying heat to or dissipating heat from a substrate  
A holding device including a holding element, on which a substrate is electrostatically fixed, positioned on a substrate electrode. In one configuration, a load body on the substrate electrode...
7126808 Wafer platen equipped with electrostatic clamp, wafer backside gas cooling, and high voltage operation capability for plasma doping  
An apparatus is provided for handling workpieces, such as semiconductor wafers, during semiconductor processing. The apparatus includes a wafer platen having a plurality of channels each extending...
7120006 Ion generator and air conditioning apparatus  
A switching transformer applies an alternating high voltage across an internal electrode and an external electrode which face each other with a glass tube as a dielectric body between them. The...
7113006 Capacitor reliability for multiple-voltage power supply systems  
A capacitor circuit having improved reliability includes at least first and second capacitors, a first terminal of the first capacitor connecting to a first source providing a first voltage, a...
7102872 Electrostatic chuck  
An ESC (Electrostatic Chuck) to chuck an object by electrostatic force, having an ESC main body supporting the object; a guide ring supported by the ESC main body and encircling the object; a...
7072165 MEMS based multi-polar electrostatic chuck  
The present invention is directed to a semiconductor processing apparatus and a method for clamping a semiconductor substrate and controlling a heat transfer associated therewith. According to one...
7042697 Electrostatic chucks and electrostatically attracting structures  
An electrostatic chuck includes a substrate having a wafer-installing face and an opposed back face. An electrostatic chucking electrode is buried in the substrate, and an insulating layer is...
7019955 MEMS digital-to-acoustic transducer with error cancellation  
An acoustic transducer comprising a substrate; and a diaphragm formed by depositing a micromachined membrane onto the substrate. The diaphragm is formed as a single silicon chip using a CMOS MEMS...
6992876 Electrostatic chuck and its manufacturing method  
An electrostatic chuck for preventing warpage of a ceramic layer and cooling gas leakage while providing enhanced electrostatic attraction and an improved detachment performance and its...
6950296 Nanoscale grasping device, method for fabricating the same, and method for operating the same  
A nanoscale grasping device comprising at least three electrostatically actuated grasping elements. The use of at least three elements, which together define a plane, allows an object to be grasped...
6924966 Spring loaded bi-stable MEMS switch  
A MEMS switch assembly comprising a substrate and a resilient switching member is provided. The resilient switching member comprises a transverse torsion member having a flexible portion, and a...
6922325 Electrostatic attraction mechanism, surface processing method and surface processing device  
Electrostatic attraction is performed on a plate-shaped object 9 in that an attraction power source 3 applies a voltage to a pair of attraction terminals 23, 24 mounted inside a dielectric...
6920032 Method for energy extraction—II  
In some embodiments, the illustrative method defines an engine cycle comprising several state changes that allow for a net gain of energy from an underlying source force field. The potential for a...
6919784 High cycle MEMS device  
A high life cycle and low voltage MEMS device. In an aspect of the invention, separate support posts are disposed to prevent a suspended switch pad from touching the actuation pad while permitting...
6898064 System and method for optimizing the electrostatic removal of a workpiece from a chuck  
A system and method are presented for neutralizing the electric charge binding a semiconductor wafer to an electrostatic chuck. When processing of a semiconductor wafer has been completed, lifter...
6876534 Method of clamping a wafer during a process that creates asymmetric stress in the wafer  
This invention relates to electrostatic clamping and associated clamps. A particular method is described of clamping a wafer, during the process that creates asymmetric stress in the wafer, to an...
6865065 Semiconductor processing chamber substrate holder method and structure  
A method and system for processing wafers is disclosed. According to one embodiment ( 100 ) a chuck system ( 102 ) may be situated opposite to an input source ( 104 ). A chuck system ( 102 ) may...
6842326 Apparatus for energy extraction-I  
In some embodiments, the illustrative method defines an engine cycle comprising several state changes that allow for a net gain of energy from an underlying source force field. The potential for a...
6839217 Surface structure and method of making, and electrostatic wafer clamp incorporating surface structure  
A surface structure for contacting a workpiece includes a flexible layer adhered to a support element and a coating on the flexible layer. The coating has ripples on its surface. The flexible layer...
6836394 Electrostatic discharge protection for eletrostatically actuated microrelays  
Apparatus and methods for protecting devices such as micro-switches ( 100 ) and micro-relays from adverse effects of electrostatic discharge (ESD). A protection device is provided that includes a...
6831823 Method and apparatus for chucking a substrate  
A substrate chucking apparatus includes an electrostatic chuck for electrostatically chucking a substrate, and a DC power supply for applying a DC chucking voltage to the electrostatic chuck. An...
6829131 MEMS digital-to-acoustic transducer with error cancellation  
An acoustic transducer comprising a substrate; and a diaphragm formed by depositing a micromachined membrane onto the substrate. The diaphragm is formed as a single silicon chip using a CMOS MEMS...
6813133 Switch, integrated circuit device, and method of manufacturing switch  
There is provided a switch 10 for connecting a first terminal with a second terminal electrically. The switch 10 includes: the first terminal 46 ; the second terminal 26 and a third terminal...
6804105 Enriched macromolecular materials having temperature-independent high electrical conductivity and methods of making same  
A polymer material comprising channels whose temperature-independent conductivity exceeds 10 6 S/cm is used to form conductive films. Conduction takes place through threads and channels passing...
6798321 Micro electromechanical switches  
A micro electromechanical switch structure includes a beam that is continuously controllable by adding an actuation electrode proximate to, but outside a beam projection. The beam projection is...
6791441 Micro-electro-mechanical switch, and methods of making and using it  
A micro-electro-mechanical (MEMS) switch ( 10, 110 ) has an electrode ( 22, 122 ) covered by a dielectric layer ( 23, 123 ), and has a flexible conductive membrane ( 31, 131 ) which moves between...
6785115 Electrostatic chuck and substrate processing apparatus  
An electrostatic chuck is provided, having an insulation layer including a mount plane on which a wafer is mounted, an inner electrode provided in the insulation layer, and projecting portions...
6784771 MEMS optical mirror array  
A compact high aspect ratio MEMS optical switch, and a process for fabricating same, are disclosed. An outer body portion is mounted so as to have a first rotational degree of freedom about a first...
6771482 Perimeter seal for backside cooling of substrates  
An apparatus, typically a sealing member extending around the periphery of a substrate support or chuck, seals an individual substrate with respect to a substrate support, typically in a processing...
6771481 Plasma processing apparatus for processing semiconductor wafer using plasma  
A plasma processing apparatus comprises: a body that comprises a vacuum processing chamber with a wafer stage on which a semiconductor wafer is held, a plasma producing unit for producing plasma...
6754062 Hybrid ceramic electrostatic clamp  
The invention is a hybrid chuck for securing workpieces with an electrostatic charge. The hybrid chuck includes a dielectric base for supporting the hybrid chuck. The dielectric base has a top...
6744618 Electrostatic chucks with flat film electrode  
An electrostatic chuck having an essentially flat film electrode which is essentially parallel to the chucking surface of the electrostatic chuck is fabricated by depositing a film electrode,...
Matches 1 - 50 out of 309 1 2 3 4 5 6 7 >