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7619870 |
Electrostatic chuck
An electrostatic chuck device includes an electrostatic chuck section including a substrate and a power supply terminal for applying a DC voltage to an electrostatic-adsorption inner electrode; and...
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7580238 |
Electrostatic chuck structure for semiconductor manufacturing apparatus
An electrostatic chuck structure according to example embodiments of the present invention may include at least one specific region of a conductor having a thickness relatively smaller than those...
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7573695 |
Snapdown prevention in voltage controlled MEMS devices
An architecture and method are provided for preventing snapdown in a voltage controlled MEMS device having a movable actuator with an actuator electrode coupled to a high voltage power supply...
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7561403 |
Static eliminator and electric discharge module
A static eliminator capable of replacing a discharge needle and improving maintainability of the eliminator is disclosed. The static eliminator comprises: an air-guiding duct having a tubular...
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7535692 |
Multilevel structured surfaces
An apparatus comprising a substrate having a surface with electrically connected and electrically isolated fluid-support-structures thereon. Each of the fluid-support-structures have at least one...
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7532451 |
Electrostatic fluid acclerator for and a method of controlling fluid flow
An electrostatic fluid acceleration and method of operation thereof includes at least two synchronously powered stages with final or rear-most electrodes of one stage maintained at substantially...
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7529075 |
Systems and methods involving electric-field cages
A representative system for providing an electric field comprises an electrically insulated frame, guard members and endplates. The frame incorporates a top, a bottom, opposing sides and opposing...
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7525787 |
Electrostatic chuck assembly with dielectric material and/or cavity having varying thickness, profile and/or shape, method of use and apparatus incorporating same
An electrostatic chuck assembly having a dielectric material and/or having a cavity with varying thickness, profile and/or shape is disclosed. The electrostatic chuck assembly includes a conductive...
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7504628 |
Nanoscale corona discharge electrode
An electrode for atmospheric corona discharge apparatus provide a passive conductor whose surface is decorated with nanostructures such as carbon nanotubes. The nanotubes provide for a lower corona...
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7495881 |
Chucking method and processing method using the same
The invention provides an electrostatically chucking technology capable of chucking a workpiece formed of an insulator or a workpiece attached with an object to be processed such as a semiconductor...
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7488375 |
Fan cooling system
A fan cooling system for use with an electronic apparatus having a fan for providing a cooling draft and adapted to remove draft-borne dust includes: an input module for receiving a control...
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7483256 |
Electrostatic chuck
An electrostatic chuck includes a base plate, an electrode layer having flexibility, covering the surface of the base plate, and a power supply unit for electrically connecting the electrode layer...
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7453682 |
Discharge device and air conditioner having said device
A surface discharge type air cleaning device comprises an insulating dielectric body formed in the shape of a sheet, a discharge electrode having a pattern part of a predetermined area formed on...
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7446284 |
Etch resistant wafer processing apparatus and method for producing the same
A wafer processing apparatus is fabricated by depositing a film electrode onto the surface of a base substrate, the structure is then overcoated with a protective coating film layer comprising at...
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7438747 |
Negative ion generator
A negative ion generator includes: a flat dielectric layer having a planar surface; a plurality of conductive lines that are attached to the planar surface of the dielectric layer, and that define...
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7430104 |
Electrostatic chuck for wafer metrology and inspection equipment
An electrostatic chuck is configured for electrostatically securing a wafer while limiting charge on the wafer and physical contact between the electrostatic chuck and the wafer. The electrostatic...
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7411772 |
Casimir effect conversion
Techniques in which a 1 st force, field, or effect caused by a Casimir effect is converted into a 2 nd force, field, or effect. The 1 st force, field, or effect might be distinct from the 2 nd ...
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7379286 |
Quantum vacuum energy extraction
A system is disclosed for converting energy from the electromagnetic quantum vacuum available at any point in the universe to usable energy in the form of heat, electricity, mechanical energy or...
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7375947 |
Method of feedback control of ESC voltage using wafer voltage measurement at the bias supply output
In a plasma reactor having an electrostatic chuck, wafer voltage is determined from RF measurements at the bias input using previously determined constants based upon transmission line properties...
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7369393 |
Electrostatic chucks having barrier layer
An electrostatic chuck for supporting a semiconductor wafer, including: a chuck body having a dielectric region and an insulating region, the insulating region having a higher electrical...
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7352554 |
Method for fabricating a Johnsen-Rahbek electrostatic wafer clamp
The present invention is directed to a J-R electrostatic clamp (ESC) and method for forming same. The ESC comprises a ceramic layer for clamping a wafer thereto, and a plurality of electrodes...
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7289310 |
Adjustable static current discharging bracelet
An adjustable static current discharging bracelet includes a main body of inverse U-shaped section, a medium static current collector under the top of the main body and riveted to a protruding rod,...
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7259955 |
Electrostatic holding device and electrostatic tweezers using the same
An electrostatic holding device ( 100 ) in which an electrode group ( 103 ) having a plurality of electrodes covered with an insulating material ( 102 ) is used as a holding surface applies...
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7236344 |
Ionic flow generator for thermal management
The apparatus for generating ionic flow of media includes a DC voltage supply having a positive terminal and a negative terminal with a collector connected to the negative terminal of the direct...
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7221553 |
Substrate support having heat transfer system
A support for a substrate processing chamber has upper and lower walls that are joined by a peripheral sidewall to define a reservoir. A fluid inlet supplies a heat transfer fluid to the reservoir....
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7215527 |
MEMS digital-to-acoustic transducer with error cancellation
An acoustic transducer comprising a substrate; and a diaphragm formed by depositing a micromachined membrane onto the substrate. The diaphragm is formed as a single silicon chip using a CMOS MEMS...
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7199994 |
Method and system for flattening a reticle within a lithography system
For clamping a reticle within a lithography system, a first area in the center of the reticle is clamped to a chuck of the lithography system at a first time point. In addition, a second area...
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7199508 |
Coaxial flexible piezoelectric cable polarizer, polarizing method, defect detector, and defect detecting method
The invention provides a defect inspecting apparatus and a defect detecting method for specifying a position of a defect before polarization when the defect is included in a coaxial flexible...
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7160365 |
Ion generating apparatus, air conditioning apparatus, and charging apparatus
An ion generating apparatus is built by sandwiching a dielectric layer between an induction electrode and a discharge electrode. The induction electrode is formed of a metal substrate of, for...
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7150780 |
Electrostatic air cleaning device
An electrostatic air cleaning device includes an array of electrodes. The electrodes include corona electrodes connected to a suitable source of high voltage so as to generate a corona discharge....
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7149070 |
Holding device, in particular for fixing a semiconductor wafer in a plasma etching device, and method for supplying heat to or dissipating heat from a substrate
A holding device including a holding element, on which a substrate is electrostatically fixed, positioned on a substrate electrode. In one configuration, a load body on the substrate electrode...
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7126808 |
Wafer platen equipped with electrostatic clamp, wafer backside gas cooling, and high voltage operation capability for plasma doping
An apparatus is provided for handling workpieces, such as semiconductor wafers, during semiconductor processing. The apparatus includes a wafer platen having a plurality of channels each extending...
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7120006 |
Ion generator and air conditioning apparatus
A switching transformer applies an alternating high voltage across an internal electrode and an external electrode which face each other with a glass tube as a dielectric body between them. The...
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7113006 |
Capacitor reliability for multiple-voltage power supply systems
A capacitor circuit having improved reliability includes at least first and second capacitors, a first terminal of the first capacitor connecting to a first source providing a first voltage, a...
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7102872 |
Electrostatic chuck
An ESC (Electrostatic Chuck) to chuck an object by electrostatic force, having an ESC main body supporting the object; a guide ring supported by the ESC main body and encircling the object; a...
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7072165 |
MEMS based multi-polar electrostatic chuck
The present invention is directed to a semiconductor processing apparatus and a method for clamping a semiconductor substrate and controlling a heat transfer associated therewith. According to one...
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7042697 |
Electrostatic chucks and electrostatically attracting structures
An electrostatic chuck includes a substrate having a wafer-installing face and an opposed back face. An electrostatic chucking electrode is buried in the substrate, and an insulating layer is...
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7019955 |
MEMS digital-to-acoustic transducer with error cancellation
An acoustic transducer comprising a substrate; and a diaphragm formed by depositing a micromachined membrane onto the substrate. The diaphragm is formed as a single silicon chip using a CMOS MEMS...
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6992876 |
Electrostatic chuck and its manufacturing method
An electrostatic chuck for preventing warpage of a ceramic layer and cooling gas leakage while providing enhanced electrostatic attraction and an improved detachment performance and its...
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6950296 |
Nanoscale grasping device, method for fabricating the same, and method for operating the same
A nanoscale grasping device comprising at least three electrostatically actuated grasping elements. The use of at least three elements, which together define a plane, allows an object to be grasped...
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6924966 |
Spring loaded bi-stable MEMS switch
A MEMS switch assembly comprising a substrate and a resilient switching member is provided. The resilient switching member comprises a transverse torsion member having a flexible portion, and a...
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6922325 |
Electrostatic attraction mechanism, surface processing method and surface processing device
Electrostatic attraction is performed on a plate-shaped object 9 in that an attraction power source 3 applies a voltage to a pair of attraction terminals 23, 24 mounted inside a dielectric...
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6920032 |
Method for energy extraction—II
In some embodiments, the illustrative method defines an engine cycle comprising several state changes that allow for a net gain of energy from an underlying source force field. The potential for a...
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6898064 |
System and method for optimizing the electrostatic removal of a workpiece from a chuck
A system and method are presented for neutralizing the electric charge binding a semiconductor wafer to an electrostatic chuck. When processing of a semiconductor wafer has been completed, lifter...
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6876534 |
Method of clamping a wafer during a process that creates asymmetric stress in the wafer
This invention relates to electrostatic clamping and associated clamps. A particular method is described of clamping a wafer, during the process that creates asymmetric stress in the wafer, to an...
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6865065 |
Semiconductor processing chamber substrate holder method and structure
A method and system for processing wafers is disclosed. According to one embodiment ( 100 ) a chuck system ( 102 ) may be situated opposite to an input source ( 104 ). A chuck system ( 102 ) may...
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6842326 |
Apparatus for energy extraction-I
In some embodiments, the illustrative method defines an engine cycle comprising several state changes that allow for a net gain of energy from an underlying source force field. The potential for a...
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6839217 |
Surface structure and method of making, and electrostatic wafer clamp incorporating surface structure
A surface structure for contacting a workpiece includes a flexible layer adhered to a support element and a coating on the flexible layer. The coating has ripples on its surface. The flexible layer...
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6836394 |
Electrostatic discharge protection for eletrostatically actuated microrelays
Apparatus and methods for protecting devices such as micro-switches ( 100 ) and micro-relays from adverse effects of electrostatic discharge (ESD). A protection device is provided that includes a...
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6831823 |
Method and apparatus for chucking a substrate
A substrate chucking apparatus includes an electrostatic chuck for electrostatically chucking a substrate, and a DC power supply for applying a DC chucking voltage to the electrostatic chuck. An...
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