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7375798 |
Projection system for EUV lithography
There is provided an EUV optical projection system. The system includes a first mirror, a second mirror, a third mirror, a fourth mirror, a fifth mirror, and a sixth mirror situated in an optical...
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7360906 |
Projection optical system unit and projection-type image display apparatus using the same
A projection optical system unit has a lower pedestal. The lower pedestal has first and second tubular portions opened to each other. An image formation device holding plate for a DMD is mounted on...
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7347572 |
Telescope mirror for high bandwidth free space optical data transmission
Optical mirror elements for high bandwidth free space optical communication are produced by an electroforming replication technique. Onto the precision surface of a mandrel that is a negative of...
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7324269 |
Projection optical system, exposure apparatus and device fabricating method
A projection optical system is provided for projecting a pattern on an object plane onto an image plane in a reduced size. The projection optical system has six reflective surfaces that include, in...
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7319556 |
Wide field of view telescope
A wide field of view telescope having two concave and two convex reflective surfaces, each with an aspheric surface contour, has a flat focal plane array. Each of the primary, secondary, tertiary,...
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7301694 |
Off-axis projection optical system and extreme ultraviolet lithography apparatus using the same
Example embodiments are directed to an off-axis projection optical system including first and second mirrors that are off-axially arranged. The tangential and sagittal radii of curvature of the...
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7297898 |
Laser processing machine
In a laser processing machine for processing workpieces using a laser beam ( 2 ), a telescope ( 1 ) for widening the laser beam ( 2 ) comprises an ellipsoidal mirror ( 3 ) and a paraboloidal mirror...
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7283206 |
Projection optical system, exposure apparatus, and device manufacturing method
A projection optical system has at least eight reflecting mirrors and is relatively compact in the radial direction. The eight reflecting mirrors (M 1 ˜M 8 ) form a reduced image of a first...
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7274507 |
Two-mirror telescope with central spider support for the secondary mirror
A telescope has a primary light mirror structure including a central base, and a concave primary mirror having a central opening in which the central base is received and extending radially...
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7232233 |
Catoptric reduction projection optical system and exposure apparatus using the same
A catoptric reduction projection optical system that uses light of light with a wavelength of 200 nm or less includes six light-reflecting mirrors arranged from an object side to an image side such...
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7209285 |
Common axis three mirror anastigmatic optic
A three mirror anastigmatic optic (and corresponding method of making) comprising a primary mirror, a secondary mirror, a tertiary mirror, and a vertex common to the primary and tertiary mirrors.
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7151592 |
Projection system for EUV lithography
An EUV optical projection system includes at least six mirrors (M 1 , M 2 , M 3 , M 4 , M 5 , M 6 ) for imaging an object (OB) to an image (IM). At least one mirror pair is preferably configured as...
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7130114 |
Catoptric optical system
There is provided a compact, strong and high-performance catoptric optical system. This catoptric optical system has plural optical curved reflective surfaces. A gap between a pair of reflective...
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7130018 |
Catoptric projection optical system, exposure apparatus and device fabrication method
A catoptric projection optical system for projecting a reduced size of a pattern on an object surface onto an image surface includes eight mirrors and forms an intermediate image between the sixth...
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7114818 |
Optical system, and electronic equipment that incorporates the same
The invention relates to a compact, slimmed-down, low-cost optical system and electronic equipment that incorporates the same. The optical system at least comprises a stop 2, at least one...
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7080912 |
High-resolution, all-reflective imaging spectrometer
An imaging spectrometer includes an all-reflective objective module that receives an image input and produces an objective module output at an exit slit, and an all-reflective...
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7070289 |
Catoptric projection optical system
A catoptric projection optical system for projecting a pattern on an object surface onto an image surface includes plural mirrors, wherein a second mirror from the image surface through the optical...
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7001031 |
Image-forming optical system, projection type image display apparatus and image pickup apparatus
The present invention discloses an image-forming optical system provided with a plurality of curved mirrors whereby two points at different distances are made to have an optically conjugate...
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6994442 |
Display apparatus
It is an object of this invention to provide a high-quality, high-precision, large-screen display apparatus which can obtain a sufficient light beam reception angle with respect to an image display...
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6991338 |
Projection optical system, projection type image display apparatus, and image display system
A projection optical system having a plurality of reflecting surfaces is disclosed in which a sufficiently large angle is provided between an incident side reference axis and an emerging side...
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6975385 |
Projection optical system and exposure apparatus
A six-mirror catoptric projection optical system for projecting a reduced size of a pattern on an object onto an image plane includes first, second, third, fourth, fifth, and sixth mirrors from the...
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6970286 |
Multiple field of view reflective telescope
A reflective afocal telescope is described herein that has multiple field of views and can be packaged in a compact arrangement. In one embodiment, the reflective telescope includes two entrance...
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6969840 |
Imaging optical system including a telescope and an uncooled warm-stop structure
An all-reflective telescope has, in order, a positive-optical-power primary mirror, a negative-optical-power secondary mirror, a positive-optical-power tertiary mirror, a negative-optical-power...
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6947210 |
Catoptric projection optical system, exposure apparatus and device fabrication method using same
A catoptric projection optical system for projecting a pattern on an object surface onto an image surface and for serving as an imaging system that forms an intermediate image includes first,...
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6934014 |
Device with at least one light source, comprising several individual light sources
A device with at least one light source, comprising several individual light sources ( 3, 3′ ) and an optical arrangement. At least two individual light sources ( 3, 3′ ) comprise a...
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6908200 |
Reflection optical device, and reflection solid-state optical device, imaging device comprising this, multiwavelength imaging device, video camera, and monitoring device mounted on vehicle
Two reflection surfaces that are a first reflection surface ( 2 ) and a second reflection surface ( 3 ), each in a non-axisymmetric form, are disposed in the stated order in a direction in which...
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6902283 |
Microlithography reduction objective and projection exposure apparatus
A projection objective formed from six mirrors arranged in a light path between an object plane and an image plane is provided. The projection objective, in some examples, is characterized by...
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6902282 |
Fast, wide-field-of-view, relayed multimirror optical system
An all-reflective, relayed optical system is arranged along a beam path. The optical system includes a first mirror having positive optical power, and a second mirror having a negative optical...
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6896381 |
Compact folded-optics illumination lens
A method for manufacturing an apparatus and the apparatus being configured to convert a first distribution of an input radiation to a second distribution of output radiation. The method consists of...
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6894834 |
Objective with pupil obscuration
An objective is configured with a first partial objective and a second partial objective. The first partial objective, which projects a first field plane onto an intermediate image, has a first,...
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6890081 |
Optical element and optical system having the same
An optical element formed from a transparent optical material includes two refraction surfaces, a first reflection surface group having a plurality of internal reflection surfaces arrayed in a...
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6886953 |
High-resolution, all-reflective imaging spectrometer
An imaging spectrometer includes an all-reflective objective module that receives an image input and produces an objective module output at an exit slit, and an all-reflective...
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6883922 |
Display apparatus
It is an object of this invention to provide a high-quality, high-precision, large-screen display apparatus which can obtain a sufficient light beam reception angle with respect to an image display...
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6863410 |
Reflector which exhibits good reflectance over wide angle range and liquid crystal display using the same
Light-reflective concave portions are disposed on the surface of a substrate. The concave portions have a first and second vertical section perpendicular to each other. The first vertical section...
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6860610 |
Reflection type projection optical system, exposure apparatus and device fabrication method using the same
A reflection type projection optical system for projecting a pattern on an object surface onto an image surface and forming an imaging system that forms an intermediate image between the object...
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6856630 |
Beam homogenizer, laser irradiation apparatus, semiconductor device, and method of fabricating the semiconductor device
An optical system (in FIGS. 1 A and 1 B) wherein a rectilinear laser beam of homogeneous energy distribution is defined for annealing a non-single crystalline semiconductor film (a surface...
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6856366 |
Reflector plate, reflection type display device, electronic apparatus, light reflecting method and image display method
It is an object to provide a reflector plate capable of suppressing coloring caused by interference and enhancing visibility. A plurality of first reflecting units 10 and a plurality of second...
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6840640 |
Multi mirror system for an illumination system
There is provided a multi-mirror system for an illumination system with wavelengths ≦193 nm. The multi-mirror system includes (a) an imaging system having a first mirror and a second mirror, (b)...
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6829094 |
Reflector which exhibits good reflectance over wide angle range and liquid crystal display using the same
Light-reflective concave portions are disposed on the surface of a substrate. The concave portions have a first and second vertical section perpendicular to each other. The first vertical section...
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6789908 |
Confocal ellipsoidal mirror system for wide field of view imaging
An optical system having a pair of ellipsoidal shaped reflective surfaces or mirrors which receive light from an object and provide wide field view imaging for the object. The optical system...
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6767103 |
Compact four-mirror anastigmat telescope
An optical system comprises a three-mirror anastigmat including a primary mirror, a secondary mirror, and a tertiary mirror positioned to reflect a beam path. An intermediate image is formed on the...
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6752500 |
Rear surface projection type display device
A rear projection display device capable of reducing the depth of a display device itself, comprising an optical engine, first, second, third reflective mirrors arranged at such positions as to be...
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6750930 |
Reflector providing particularly high reflectance in an intended viewing angle and reflection type liquid crystal display device using the same
A reflector and reflector-type LCD suppresses inter-object reflection over a wide angle, and provides particularly high reflectance in an intended range of viewing angle. The reflector includes a...
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6727980 |
Apparatus and method for pattern exposure and method for adjusting the apparatus
A method for performing optical adjustments of an exposure apparatus is based on an exposure apparatus having a light source for generating illumination light for exposure, and illumination optics...
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6707603 |
Apparatus and method to distort an optical beam to avoid ionization at an intermediate focus
An optical system has a light source of an optical beam, and a wavefront distortion generator that introduces a known wavefront distortion into at least one wavelength component of the optical beam...
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6695454 |
Reflector which exhibits good reflectance over wide angle range and liquid crystal display using the same
Light-reflective concave portions are disposed on the surface of a substrate. The concave portions have a first and second vertical section perpendicular to each other. The first vertical section...
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6666560 |
Reflection type demagnification optical system, exposure apparatus, and device fabricating method
A reflection type magnification projection optical system includes five light-reflecting mirrors arranged from an object side to an image side in a sequence of a concave mirror (M 1 ), a convex...
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6648483 |
Concave mirror optical system for scanner
A concave mirror optical system for a scanner and a method for compensating image distortion. In this invention, the more expensive lens assembly in a conventional optical system is replaced by a...
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6637899 |
Optical element and optical system having the same
An optical element formed from a transparent optical material includes two refraction surfaces, a first reflection surface group having a plurality of internal reflection surfaces arrayed in a...
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6626542 |
Reflection type projection optical system
A bright reflection type projection optical system is used for projecting onto a screen under magnification a luminous flux carrying image information from a light valve driven by an image signal,...
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