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7375798 Projection system for EUV lithography  
There is provided an EUV optical projection system. The system includes a first mirror, a second mirror, a third mirror, a fourth mirror, a fifth mirror, and a sixth mirror situated in an optical...
7360906 Projection optical system unit and projection-type image display apparatus using the same  
A projection optical system unit has a lower pedestal. The lower pedestal has first and second tubular portions opened to each other. An image formation device holding plate for a DMD is mounted on...
7347572 Telescope mirror for high bandwidth free space optical data transmission  
Optical mirror elements for high bandwidth free space optical communication are produced by an electroforming replication technique. Onto the precision surface of a mandrel that is a negative of...
7324269 Projection optical system, exposure apparatus and device fabricating method  
A projection optical system is provided for projecting a pattern on an object plane onto an image plane in a reduced size. The projection optical system has six reflective surfaces that include, in...
7319556 Wide field of view telescope  
A wide field of view telescope having two concave and two convex reflective surfaces, each with an aspheric surface contour, has a flat focal plane array. Each of the primary, secondary, tertiary,...
7301694 Off-axis projection optical system and extreme ultraviolet lithography apparatus using the same  
Example embodiments are directed to an off-axis projection optical system including first and second mirrors that are off-axially arranged. The tangential and sagittal radii of curvature of the...
7297898 Laser processing machine  
In a laser processing machine for processing workpieces using a laser beam ( 2 ), a telescope ( 1 ) for widening the laser beam ( 2 ) comprises an ellipsoidal mirror ( 3 ) and a paraboloidal mirror...
7283206 Projection optical system, exposure apparatus, and device manufacturing method  
A projection optical system has at least eight reflecting mirrors and is relatively compact in the radial direction. The eight reflecting mirrors (M 1 ˜M 8 ) form a reduced image of a first...
7274507 Two-mirror telescope with central spider support for the secondary mirror  
A telescope has a primary light mirror structure including a central base, and a concave primary mirror having a central opening in which the central base is received and extending radially...
7232233 Catoptric reduction projection optical system and exposure apparatus using the same  
A catoptric reduction projection optical system that uses light of light with a wavelength of 200 nm or less includes six light-reflecting mirrors arranged from an object side to an image side such...
7209285 Common axis three mirror anastigmatic optic  
A three mirror anastigmatic optic (and corresponding method of making) comprising a primary mirror, a secondary mirror, a tertiary mirror, and a vertex common to the primary and tertiary mirrors.
7151592 Projection system for EUV lithography  
An EUV optical projection system includes at least six mirrors (M 1 , M 2 , M 3 , M 4 , M 5 , M 6 ) for imaging an object (OB) to an image (IM). At least one mirror pair is preferably configured as...
7130114 Catoptric optical system  
There is provided a compact, strong and high-performance catoptric optical system. This catoptric optical system has plural optical curved reflective surfaces. A gap between a pair of reflective...
7130018 Catoptric projection optical system, exposure apparatus and device fabrication method  
A catoptric projection optical system for projecting a reduced size of a pattern on an object surface onto an image surface includes eight mirrors and forms an intermediate image between the sixth...
7114818 Optical system, and electronic equipment that incorporates the same  
The invention relates to a compact, slimmed-down, low-cost optical system and electronic equipment that incorporates the same. The optical system at least comprises a stop 2, at least one...
7080912 High-resolution, all-reflective imaging spectrometer  
An imaging spectrometer includes an all-reflective objective module that receives an image input and produces an objective module output at an exit slit, and an all-reflective...
7070289 Catoptric projection optical system  
A catoptric projection optical system for projecting a pattern on an object surface onto an image surface includes plural mirrors, wherein a second mirror from the image surface through the optical...
7001031 Image-forming optical system, projection type image display apparatus and image pickup apparatus  
The present invention discloses an image-forming optical system provided with a plurality of curved mirrors whereby two points at different distances are made to have an optically conjugate...
6994442 Display apparatus  
It is an object of this invention to provide a high-quality, high-precision, large-screen display apparatus which can obtain a sufficient light beam reception angle with respect to an image display...
6991338 Projection optical system, projection type image display apparatus, and image display system  
A projection optical system having a plurality of reflecting surfaces is disclosed in which a sufficiently large angle is provided between an incident side reference axis and an emerging side...
6975385 Projection optical system and exposure apparatus  
A six-mirror catoptric projection optical system for projecting a reduced size of a pattern on an object onto an image plane includes first, second, third, fourth, fifth, and sixth mirrors from the...
6970286 Multiple field of view reflective telescope  
A reflective afocal telescope is described herein that has multiple field of views and can be packaged in a compact arrangement. In one embodiment, the reflective telescope includes two entrance...
6969840 Imaging optical system including a telescope and an uncooled warm-stop structure  
An all-reflective telescope has, in order, a positive-optical-power primary mirror, a negative-optical-power secondary mirror, a positive-optical-power tertiary mirror, a negative-optical-power...
6947210 Catoptric projection optical system, exposure apparatus and device fabrication method using same  
A catoptric projection optical system for projecting a pattern on an object surface onto an image surface and for serving as an imaging system that forms an intermediate image includes first,...
6934014 Device with at least one light source, comprising several individual light sources  
A device with at least one light source, comprising several individual light sources ( 3, 3′ ) and an optical arrangement. At least two individual light sources ( 3, 3′ ) comprise a...
6908200 Reflection optical device, and reflection solid-state optical device, imaging device comprising this, multiwavelength imaging device, video camera, and monitoring device mounted on vehicle  
Two reflection surfaces that are a first reflection surface ( 2 ) and a second reflection surface ( 3 ), each in a non-axisymmetric form, are disposed in the stated order in a direction in which...
6902283 Microlithography reduction objective and projection exposure apparatus  
A projection objective formed from six mirrors arranged in a light path between an object plane and an image plane is provided. The projection objective, in some examples, is characterized by...
6902282 Fast, wide-field-of-view, relayed multimirror optical system  
An all-reflective, relayed optical system is arranged along a beam path. The optical system includes a first mirror having positive optical power, and a second mirror having a negative optical...
6896381 Compact folded-optics illumination lens  
A method for manufacturing an apparatus and the apparatus being configured to convert a first distribution of an input radiation to a second distribution of output radiation. The method consists of...
6894834 Objective with pupil obscuration  
An objective is configured with a first partial objective and a second partial objective. The first partial objective, which projects a first field plane onto an intermediate image, has a first,...
6890081 Optical element and optical system having the same  
An optical element formed from a transparent optical material includes two refraction surfaces, a first reflection surface group having a plurality of internal reflection surfaces arrayed in a...
6886953 High-resolution, all-reflective imaging spectrometer  
An imaging spectrometer includes an all-reflective objective module that receives an image input and produces an objective module output at an exit slit, and an all-reflective...
6883922 Display apparatus  
It is an object of this invention to provide a high-quality, high-precision, large-screen display apparatus which can obtain a sufficient light beam reception angle with respect to an image display...
6863410 Reflector which exhibits good reflectance over wide angle range and liquid crystal display using the same  
Light-reflective concave portions are disposed on the surface of a substrate. The concave portions have a first and second vertical section perpendicular to each other. The first vertical section...
6860610 Reflection type projection optical system, exposure apparatus and device fabrication method using the same  
A reflection type projection optical system for projecting a pattern on an object surface onto an image surface and forming an imaging system that forms an intermediate image between the object...
6856630 Beam homogenizer, laser irradiation apparatus, semiconductor device, and method of fabricating the semiconductor device  
An optical system (in FIGS. 1 A and 1 B) wherein a rectilinear laser beam of homogeneous energy distribution is defined for annealing a non-single crystalline semiconductor film (a surface...
6856366 Reflector plate, reflection type display device, electronic apparatus, light reflecting method and image display method  
It is an object to provide a reflector plate capable of suppressing coloring caused by interference and enhancing visibility. A plurality of first reflecting units 10 and a plurality of second...
6840640 Multi mirror system for an illumination system  
There is provided a multi-mirror system for an illumination system with wavelengths ≦193 nm. The multi-mirror system includes (a) an imaging system having a first mirror and a second mirror, (b)...
6829094 Reflector which exhibits good reflectance over wide angle range and liquid crystal display using the same  
Light-reflective concave portions are disposed on the surface of a substrate. The concave portions have a first and second vertical section perpendicular to each other. The first vertical section...
6789908 Confocal ellipsoidal mirror system for wide field of view imaging  
An optical system having a pair of ellipsoidal shaped reflective surfaces or mirrors which receive light from an object and provide wide field view imaging for the object. The optical system...
6767103 Compact four-mirror anastigmat telescope  
An optical system comprises a three-mirror anastigmat including a primary mirror, a secondary mirror, and a tertiary mirror positioned to reflect a beam path. An intermediate image is formed on the...
6752500 Rear surface projection type display device  
A rear projection display device capable of reducing the depth of a display device itself, comprising an optical engine, first, second, third reflective mirrors arranged at such positions as to be...
6750930 Reflector providing particularly high reflectance in an intended viewing angle and reflection type liquid crystal display device using the same  
A reflector and reflector-type LCD suppresses inter-object reflection over a wide angle, and provides particularly high reflectance in an intended range of viewing angle. The reflector includes a...
6727980 Apparatus and method for pattern exposure and method for adjusting the apparatus  
A method for performing optical adjustments of an exposure apparatus is based on an exposure apparatus having a light source for generating illumination light for exposure, and illumination optics...
6707603 Apparatus and method to distort an optical beam to avoid ionization at an intermediate focus  
An optical system has a light source of an optical beam, and a wavefront distortion generator that introduces a known wavefront distortion into at least one wavelength component of the optical beam...
6695454 Reflector which exhibits good reflectance over wide angle range and liquid crystal display using the same  
Light-reflective concave portions are disposed on the surface of a substrate. The concave portions have a first and second vertical section perpendicular to each other. The first vertical section...
6666560 Reflection type demagnification optical system, exposure apparatus, and device fabricating method  
A reflection type magnification projection optical system includes five light-reflecting mirrors arranged from an object side to an image side in a sequence of a concave mirror (M 1 ), a convex...
6648483 Concave mirror optical system for scanner  
A concave mirror optical system for a scanner and a method for compensating image distortion. In this invention, the more expensive lens assembly in a conventional optical system is replaced by a...
6637899 Optical element and optical system having the same  
An optical element formed from a transparent optical material includes two refraction surfaces, a first reflection surface group having a plurality of internal reflection surfaces arrayed in a...
6626542 Reflection type projection optical system  
A bright reflection type projection optical system is used for projecting onto a screen under magnification a luminous flux carrying image information from a light valve driven by an image signal,...
Matches 1 - 50 out of 334 1 2 3 4 5 6 7 >