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7436589 |
Reflective-type projection optical system and exposure apparatus equipped with said reflective-type projection optical system
A reflective-type projection optical system has 8 reflective mirrors that form a reduced image of a first surface on a second surface. A first reflective imaging optical system (G 1 ) forms an...
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7405871 |
Efficient EUV collector designs
A collector that includes a laser produced plasma (LPP) extreme ultra violet (EUV) light source and a first optical path from the source to a mirror. The mirror is the first mirror that light...
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7401928 |
Scanning display optical system
A display optical system includes a light-source unit, a first optical unit which collects a light beam from the light-source unit, a scanning member which scans the light beam from the first...
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7397615 |
Directing electromagnetic energy from an area or volume source
An eye mirror in which a first defining ray 5 is reflected from a further defined mirror 2 and intersects a fixed defined unit 75 at a respective further point 8 within a circular cone 91 ...
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7390101 |
Off-axis two-mirror re-imaging infrared telescope
An infrared telescope utilizes two mirrors in an off-axis, eccentric-pupil, re-imaging configuration. To improve the image quality of traditional two mirror telescopes, the reflective surfaces of...
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7372624 |
8-mirror microlithography projection objective
A projection objective provides a light path for a light bundle from an object field in an object plane to an image field in an image plane. The projection objective includes eight mirrors. The...
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7367687 |
Illumination system
An illumination system is for providing a parallel illumination light beam. The illumination system includes two lamps, and each lamp includes a first lampshade, a burner and a reflector. The...
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7360906 |
Projection optical system unit and projection-type image display apparatus using the same
A projection optical system unit has a lower pedestal. The lower pedestal has first and second tubular portions opened to each other. An image formation device holding plate for a DMD is mounted on...
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7354167 |
Beam focusing and scanning system using micromirror array lens
A beam focusing and scanning system using a micromirror array lens (optical system) includes a light source configured to emit light and a micromirror array lens, including at least one...
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7317583 |
High numerical aperture projection system and method for microlithography
The present invention relates to a high numerical aperture exposure system having a wafer. The exposure system in the present invention includes a beam-splitter, a reticle, a reticle optical group,...
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7297898 |
Laser processing machine
In a laser processing machine for processing workpieces using a laser beam ( 2 ), a telescope ( 1 ) for widening the laser beam ( 2 ) comprises an ellipsoidal mirror ( 3 ) and a paraboloidal mirror...
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7232233 |
Catoptric reduction projection optical system and exposure apparatus using the same
A catoptric reduction projection optical system that uses light of light with a wavelength of 200 nm or less includes six light-reflecting mirrors arranged from an object side to an image side such...
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7216065 |
Reflecting surface design system, reflecting surface design method, recording medium, and computer program
A reflecting surface design system ( 50 ) has (1) first rendering means ( 54 ) for displaying a free-form surface ( 20 ) on which a plurality of segments ( 24 ), each of which is defined by a...
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7215474 |
Method and apparatus for combining optical beams
According to one aspect of the present invention, an apparatus for optically combining light beams is disclosed. The apparatus includes a set of prism shaped doorways configured to receive output...
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7209286 |
Objective with pupil obscuration
In accordance with the present invention, a projection exposure apparatus includes an illuminating system to illuminate a drivable micromirror array and an objective which projects the drivable...
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7192173 |
Optical throughput condenser
An optical throughput condenser re-concentrates light thereby causing light which otherwise would be wasted outside of the useful AΩ product, also known as optical throughput, of an illuminating...
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7130114 |
Catoptric optical system
There is provided a compact, strong and high-performance catoptric optical system. This catoptric optical system has plural optical curved reflective surfaces. A gap between a pair of reflective...
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7123324 |
Reflector providing particularly high reflectance in an intended viewing angle and reflection type liquid crystal display device using the same
The present invention provides a reflector having a light-diffusing property which suppresses inter-object reflection over a wide angle, and giving particularly high reflectance in an intended...
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7090362 |
Facet mirror having a number of mirror facets
In a facet mirror with a number of mirror facets, wherein the mirror facets are provided with reflecting surfaces, the mirror facets are mounted jointly in a basic body via bearing devices. The...
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7086742 |
Projection optical system
A projection optical system is disclosed with which undistorted images can be obtained at any image position within a specification range, and whose projection angle can be changed. The projection...
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7080912 |
High-resolution, all-reflective imaging spectrometer
An imaging spectrometer includes an all-reflective objective module that receives an image input and produces an objective module output at an exit slit, and an all-reflective...
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7070289 |
Catoptric projection optical system
A catoptric projection optical system for projecting a pattern on an object surface onto an image surface includes plural mirrors, wherein a second mirror from the image surface through the optical...
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7055967 |
Illumination systems employing corrective optics for use in reduced étendue color video projection systems
An illumination system is provided with at least a first arc lamp positioned on the first axis of a first reflecting device. An aspherical corrector plate is positioned to receive the light rays...
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7034320 |
Dual hemispherical collectors
A system and method for collecting radiation, which may be used in a lithography illumination system. The system comprises a first surface shaped to reflect radiation in a first hemisphere of a...
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7001031 |
Image-forming optical system, projection type image display apparatus and image pickup apparatus
The present invention discloses an image-forming optical system provided with a plurality of curved mirrors whereby two points at different distances are made to have an optically conjugate...
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6991338 |
Projection optical system, projection type image display apparatus, and image display system
A projection optical system having a plurality of reflecting surfaces is disclosed in which a sufficiently large angle is provided between an incident side reference axis and an emerging side...
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6984044 |
Projection optical system, projection type image display apparatus, and image display system
A projection optical system which can project a bright image with less distortion and a small projection distance without causing aberration or an increase in size of reflective surfaces is...
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6958861 |
Method and apparatus for combining optical beams
According to one aspect of the present invention, an apparatus for optically combining light beams is disclosed. The apparatus includes a set of prism shaped doorways configured to receive output...
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6953252 |
Projector having a plurality of retro-reflectors
A projector having a plurality of retro-reflectors. In one embodiment of the present invention, a projector includes a light source, an image forming device, a concave reflector, and a plurality of...
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6929373 |
Reflection optical device and imaging apparatus comprising it, multi-wavelength imaging apparatus, and vehicle mounted monitor
Reflection surfaces ( 2, 3 ) and a diaphragm ( 1 ) for limiting light fluxes disposed between an object and the reflection surface ( 2 ) that is located closest to the object are provided. At least...
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6922291 |
Catoptric projection optical system and exposure apparatus
A catoptric projection optical system for projecting a reduced size of a pattern on an object surface onto an image surface and for serving as an imaging system that forms an intermediate image...
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6911110 |
Thermally controlled solar reflector facet with heat recovery
A high concentration central receiver system and method provides improved reflectors and a unique heat removal system. The central receiver has a plurality of interconnected reflectors coupled to a...
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6908200 |
Reflection optical device, and reflection solid-state optical device, imaging device comprising this, multiwavelength imaging device, video camera, and monitoring device mounted on vehicle
Two reflection surfaces that are a first reflection surface ( 2 ) and a second reflection surface ( 3 ), each in a non-axisymmetric form, are disposed in the stated order in a direction in which...
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6896382 |
Reflective optical device, and reflective solid-state optical device, and imaging device, multi-wavelength imaging device, video camera device, and vehicle-mounted monitor utilizing the same
Two reflection surfaces that are a first reflection surface ( 2 ) and a second reflection surface ( 3 ), each in a non-axisymmetric form, are disposed in the stated order in a direction in which...
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6896381 |
Compact folded-optics illumination lens
A method for manufacturing an apparatus and the apparatus being configured to convert a first distribution of an input radiation to a second distribution of output radiation. The method consists of...
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6894818 |
Conformal all-reflective beam-steering (CARBS) device
A conformed all-reflective beam-steering (CARBS) device is provided which is a hybrid of a mirror and one-axis gimbal assembly mounted on a rotating carriage. The CARBS device functions as a...
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6894263 |
Image reading imaging optical system and image reading apparatus using the same
An image reading imaging optical system for imaging image information on a line sensor and reading the image information has an imaging optical element including a plurality of off-axial reflecting...
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6890081 |
Optical element and optical system having the same
An optical element formed from a transparent optical material includes two refraction surfaces, a first reflection surface group having a plurality of internal reflection surfaces arrayed in a...
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6886953 |
High-resolution, all-reflective imaging spectrometer
An imaging spectrometer includes an all-reflective objective module that receives an image input and produces an objective module output at an exit slit, and an all-reflective...
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6863410 |
Reflector which exhibits good reflectance over wide angle range and liquid crystal display using the same
Light-reflective concave portions are disposed on the surface of a substrate. The concave portions have a first and second vertical section perpendicular to each other. The first vertical section...
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6862146 |
Afocal optical rearview mirror assembly
The invention comprises an afocal lens and mirror assembly comprising an objective lens which gathers light from an object and a field lens which transmits light to a driver's eye to provide an...
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6859263 |
Apparatus for generating partially coherent radiation
Techniques for generating partially coherent radiation and particularly for converting effectively coherent radiation from a synchrotron to partially coherent EUV radiation suitable for projection...
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6858853 |
Illumination system particularly for microlithography
There is provided an illumination system for microlithography with wavelengths≦193 nm that includes a primary light source, a first optical component, a second optical component, an image plane,...
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6851804 |
Readjustable optical elements
The invention relates to optical elements whose optical properties can be repeatedly adjusted over time. Through the use of modifying compositions capable of stimulus induced polymerization coupled...
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6840640 |
Multi mirror system for an illumination system
There is provided a multi-mirror system for an illumination system with wavelengths ≦193 nm. The multi-mirror system includes (a) an imaging system having a first mirror and a second mirror, (b)...
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6839095 |
Single-path color video projection systems employing reflective liquid crystal display devices
A multimedia projector ( 100 ) includes a single-path frame-sequential color optical system in which light rays emitted by a light source ( 14 ) propagate through a color wheel ( 102 ) and an...
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6829094 |
Reflector which exhibits good reflectance over wide angle range and liquid crystal display using the same
Light-reflective concave portions are disposed on the surface of a substrate. The concave portions have a first and second vertical section perpendicular to each other. The first vertical section...
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6811271 |
Electromagnetic wave focusing device
The electromagnetic wave focusing device has a mirror group consisting of a focal-line type primary reflective mirror and secondary reflective mirror which have a unique parabolic cross-sectional...
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6798494 |
Apparatus for generating partially coherent radiation
The effective coherence of an undulator beamline can be tailored to projection lithography requirements by using a simple single moving element and a simple stationary low-cost spherical mirror....
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6789908 |
Confocal ellipsoidal mirror system for wide field of view imaging
An optical system having a pair of ellipsoidal shaped reflective surfaces or mirrors which receive light from an object and provide wide field view imaging for the object. The optical system...
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