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7619191 |
Increase spatial sampling for wave front mid-spatial frequency error recovery
A differential curvature sensing device for measuring a wavefront curvature by employing increased spatial sampling for wavefront testing with mid-frequency error recovery. The device includes a...
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7572019 |
Adaptive-optics actuator arrays and methods for using such arrays
Actuator arrays for use in adaptive-optical elements and optical systems containing at least one such element are disclosed. The actuator arrays provide more precise control of the shape of the...
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7556388 |
Thin nearly wireless adaptive optical device
A thin nearly wireless adaptive optical device capable of dynamically modulating the shape of a mirror in real time to compensate for atmospheric distortions and/or variations along an optical...
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7554711 |
MEMS devices with stiction bumps
An interferometric modulator comprising a substrate, a movable membrane and one or more stiction bumps disposed between the substrate and the movable membrane. The stiction bumps are configured to...
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7547107 |
Edge constrained optical membrane deformable mirror and method of fabricating
Fabricating a deformable mirror by providing a plurality of actuators and a support structure supporting and at least partially surrounding the actuators; applying an optical membrane across the...
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7545482 |
Projection objective of a microlithographic projection exposure apparatus
A projection objective of a microlithographic projection exposure apparatus has a plurality of optical elements, for example lenses or mirrors. The objective furthermore includes an actuator for...
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7530945 |
Endoscope and method for assembling components of an optical system
An endoscope has a tubular shaft whose interior contains components, in particular lenses, spacers, diaphragms, prisms and filters of an optical system, said components being at least partially...
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7518780 |
Nanolaminate deformable mirrors
A deformable mirror formed out of two layers of a nanolaminate foil attached to a stiff substrate is introduced. Deformation is provided by an electrostatic force between two of the layers. The...
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7494233 |
Off-axis variable focus and aberration control mirrors and method
An optical element with multi-layer composites that deforms to reduce optical aberrations in off-axis optic. Methods are also described in relation to the optical element.
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7486893 |
Dynamic optical interconnect system reference signal formation
The disclosed technology provides a dynamic interconnection system which allows to couple a pair of optical beams carrying modulation information. In accordance with the disclosed technology, two...
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7452089 |
Variable-shape mirror and optical pickup device therewith
The variable-shape mirror is provided with a support base and a minor portion that is disposed to face the support base and that has on a side thereof facing away from the support base a minor...
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7434947 |
Adaptive phase mask for producing a phase shift in incident light
Systems and methods for shifting the phase of incident light to induce a continuous phase variation in an azimuthal direction. A phase mask apparatus includes a conical mirror assembly and a...
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7426013 |
Exposure apparatus and device fabrication method
An exposure apparatus illuminates a pattern on an original form, introduces light from the pattern to a plate, and exposes the plate. The exposure apparatus includes at least one optical element,...
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7411718 |
Variable focal length lens and lens array comprising discretely controlled micromirrors
A discretely controlled micromirror array lens (DCMAL) consists of many discretely controlled micromirrors (DCMs) and actuating components. The actuating components control the positions of DCMs...
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7411714 |
Micromirror unit with torsion connector having nonconstant width
A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror...
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7401932 |
High authority deformable optical system
A high authority deformable optical system includes an optical faceplate; a base; a plurality of circuit boards, each including at least one actuator; each actuator engaging at one end the base and...
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7387394 |
Deformable mirror control device and device for observing retina of eye
A deformable mirror control device is provided with improved response characteristic by devising the mode of control even if the deformable mirror has a large time constant in comparison with the...
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7381934 |
Closed loop compensation system and method for a deformable mirror
A closed loop compensation system including a deformable mirror including an array of spaced actuators. An array of spaced sensors is mapped in optical space to reside between pairs of actuators. A...
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7380950 |
Hybrid high-bandwidth deformable fast steering mirror
A high-bandwidth deformable fast steering mirror (“HDFSM”) system, including an electromechanical fast steering mirror (“FSM”) apparatus, and a deformable mirror (“DM”) apparatus...
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7377659 |
Deformable system comprising a parallelepiped-shaped part and an actuator
The invention relates to a deformable system comprising a part of a rectangular block shape, such as a beam, coupled to an actuator enabling the part to be deformed by generating curvature in the...
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7374302 |
Deformable mirror
This invention relates to a hybrid deformable mirror. A deformable mirror is provided comprising a reflective surface provided on a substrate and a layer of deformable material attached to the...
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7374301 |
Stretched membrane device
An improved device for reflecting, radiating, or receiving electromagnetic radiation, acoustic waves, or other energy forms through the use of a membrane stretched across a lightweight, round,...
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7372614 |
Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit
A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support...
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7344262 |
MEMS mirror with tip or piston motion for use in adaptive optics
An array of high fill factor mirrors has each mirror be coupled across two deformable spring bars that are deformed using a drive. The two deformable springs are parallel to each other, and coupled...
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7342703 |
Micro-mechanical beam protective support structures wherein at least two adjacent support structures touch each other upon reaching a predetermined bending action
An arrangement for use with a micro-mechanical beam, in which a plurality of support structures are configured to directly attach to the micro-mechanical beam to increase bending stiffness of the...
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7318649 |
Outer rear-view mirror unit for a motor-vehicle with shape memory actuating means
An outer-rearview-mirror unit for a motor vehicle comprises an electrical switching device with a number of positions, which controls electrical supply of a plurality of shape-memory wires that...
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7294814 |
Microlithography projection objective including deformable mirror with adjusting elements and systems and methods using the same
A catadioptric projection objective for microlithography has at least one curved mirror that is deformable and adjusting elements that can deform the deformable mirror. The adjusting elements are...
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7232232 |
Reflector device
In a reflecting mirror, a plurality of segmented mirrors are grouped into a plurality of groups of a cluster, and are supported by a plurality of sub mirror cells. The plurality of sub mirror cells...
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7229178 |
Variable focal length deformable mirror
A variable focal length deformable mirror has an inner ring and an outer ring that simply support and push axially on opposite sides of a mirror plate. The resulting variable clamping force deforms...
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7220009 |
Optical deflector
The present invention provides a resonance type micro-oscillating member capable of retraining a fluctuation of angular velocity, and specifically provides a micro-oscillating member, which is a...
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7207685 |
Reflector module with image correction capability
A reflector module for a projection system includes a base, a reflecting component provided with a reflecting surface, an axle unit, and at least one actuator. The base has a surrounding wall with...
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7203552 |
Method and apparatus for controlling a deformable mirror
A method, or corresponding apparatus, for controlling deformation of a structure, in part, includes applying a command signal at a first signal level to at least one actuator mechanically coupled...
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7201486 |
Reflecting mirror support structure and adjusting method therefor
A reflecting mirror support mechanism has at least one reflecting mirror panel ( 1 ), a support base ( 3 ) to finally support the reflecting mirror panel ( 1 ), and at least one reflecting mirror...
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7195361 |
Active hybrid optical component
An active hybrid optical component includes a substrate including a mounting surface; a replicated optical surface mounted on the mounting surface; and a plurality of actuators for deforming the...
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7192145 |
Integrated actuator meniscus mirror without reaction mass
An integrated actuator meniscus mirror includes an optical substrate having a mirror surface on one side and a support structure on the other for controllably altering the shape of the mirror...
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7188964 |
Integrated actuator meniscus mirror
An integrated actuator meniscus mirror includes an optical substrate having a mirror surface on one side and a support structure on the other and a plurality of actuators embedded in the support...
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7172299 |
Integrated wavefront correction module with reduced translation
An integrated wavefront correction module including a mounting device a deformable mirror carried by the mounting device for correcting for high spatial and temporal frequency error in an incident...
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7161729 |
Array of micromirror array lenses
An array of micromirror array lenses is invented. The micromirror array lens consists of many micromirrors and actuating components. Each micromirror array lens is variable focal length lens with...
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7125129 |
Mirror support mechanism and optical apparatus using the same
A fluid pressure support mechanism has a container in which fluid pressure is applied and fluid tubes are connected to the fluid pressure support mechanisms and to a fluid pressure control unit in...
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7125128 |
Adaptive-optics actuator arrays and methods for using such arrays
Actuator arrays for use in adaptive-optical elements and optical systems containing at least one such element are disclosed. The actuator arrays provide more precise control of the shape of the...
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7119945 |
Altering temporal response of microelectromechanical elements
An array of movable elements is arranged on a substrate. Each element has a cavity and a movable member to move through the cavity. The pressure resistance of the elements varies, allowing...
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7113707 |
Dynamic optical interconnect
This invention provides a dynamic interconnection system which allows to couple a pair of optical beams carrying modulation information. In accordance with this invention, two optical beams emanate...
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7112772 |
Catadioptric projection objective with adaptive mirror and projection exposure method
A catadioptric projection objective for microlithography has at least one curved mirror that is deformable and adjusting elements that can deform the deformable mirror. The adjusting elements are...
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7075699 |
Double hidden flexure microactuator for phase mirror array
Disclosed is an actuator for a phase mirror array including a) a first support member extending perpendicularly from a surface of a mirror, b) a plurality of flexures engaging the first support...
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7050161 |
Global radius of curvature estimation and control system for segmented mirrors
An apparatus controls positions of plural mirror segments in a segmented mirror with an edge sensor system and a controller. Current mirror segment edge sensor measurements and edge sensor...
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7031082 |
Retainer, exposure apparatus, and device fabrication method
A retainer for holding an optical element includes a detector for detecting a deformation amount of the optical element, and an adjustment unit for adjusting the deformation of the optical element...
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7013183 |
Multiplexer hardware and software for control of a deformable mirror
A multiplexer (MUX) driver system controls a deformable mirror, in part, by enabling and disabling individual or multiple actuators, mechanically coupled to the deformable mirror, through use of...
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6985208 |
Apparatus and method for retaining mirror, and mirror exchange method
A mirror retainer for retaining a mirror accommodated in a chamber that has a wall and a lid openably provided on the wall, and generates a reduced pressure environment, includes an elastic member...
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6984049 |
Hinged substrate for large-aperture, lightweight, deformable mirrors
An improved structure and method for building large-aperture lightweight deformable mirrors uses a hinged substrate. In addition to reduced weight, the approach provides rigidity to the mirror,...
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6951397 |
Composite ultra-light weight active mirror for space applications
A lightweight active mirror. A first layer has a front side and a backside. A second layer has a front side and a backside. The backside of the second layer faces the front side of the first layer....
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