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7554711 |
MEMS devices with stiction bumps
An interferometric modulator comprising a substrate, a movable membrane and one or more stiction bumps disposed between the substrate and the movable membrane. The stiction bumps are configured to...
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7547505 |
Methods of forming capping layers on reflective materials
A reflective material is heated to reduce internal stress, and then a capping layer is formed over the reflective material. Heating the reflective material reduces the internal stress of the...
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7543948 |
Multilayer mirror manufacturing method, optical system manufacturing method, exposure apparatus, and device manufacturing method
A method for manufacturing a multilayer mirror that includes a substrate and a multilayer film formed on the substrate, and has a reflection surface shape includes the steps of estimating a surface...
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7529011 |
Deflector mirror with regions of different flexural rigidity
A deflector mirror is disclosed that includes a mirror substrate configured to vibrate in a reciprocating manner on beams as a torsional rotary shaft so as to deflect a light beam emitted from a...
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7448763 |
Optical subassembly and projection objective in semiconductor lithography
An optical subassembly with an optical element, for example a mirror element ( 7 ), has an optical surface ( 9 ) and bearing points ( 12 ) arranged on the circumference. The optical element ( 7 )...
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7429114 |
Light-weight mirror blank assembly
A light-weight mirror blank assembly, having at least one sheet of corrugated material; and at least one face sheet in intimate contact with a surface of the sheet of corrugated material forming...
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7400432 |
Scanning-mirror structure having a cut or a composite design to reduce deformation of the mirror face, and related system and method
A mirror structure includes a mirror, a reflective face, a cut in the mirror under the face, and a torsion arm attached to the mirror. Such a mirror structure often distorts a scanned image less...
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7281809 |
Open lattice mirror structure and method of making same
A method of making a mirror structure includes assembling a supporting isogrid framework, assembling an isogrid back plane, interconnecting the supporting isogrid framework with the isogrid back...
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7273288 |
Ribbed telescope mirrors with thermal gradient control
Ribbed mirrors allowing heat to be conducted past the glass during optical polish and application of coatings and methods of fabricating same. The method comprises placing a bridge of thermally...
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7220489 |
Layered structures for optical reflectors
Device of layered structures for optical reflectors and method for making the device. A device for providing environmental stability and mechanical integrity in space includes a substrate and a...
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7163301 |
Method and apparatus for managing actinic intensity transients in a lithography mirror
An apparatus and method for mitigating a cold edge effect within a lithography mirror is presented. The apparatus includes a heated annular zone formed on a substrate and a heated optical aperture...
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7073915 |
Mirror fixing method and optical apparatus
An object of the invention is to provide a mirror fixing method capable of reducing stress distortion of a surface of a mirror which constitutes an optical system, with hardly deforming a surface...
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7050161 |
Global radius of curvature estimation and control system for segmented mirrors
An apparatus controls positions of plural mirror segments in a segmented mirror with an edge sensor system and a controller. Current mirror segment edge sensor measurements and edge sensor...
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7006268 |
Bracket for supporting a torsional hinge mirror with reduced hinge stress
The present invention provides methods and apparatus for combining a pivoting mirror and support bracket such that the support bracket transmits little or no stresses to the torsional hinges of the...
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6959992 |
Adaptive mirror comprising cooling channels
A mirror, in particular an adaptive mirror configured as a laser beam guidance component. The mirror comprises a housing, to which a mirror element that is optionally deformable is allocated. The...
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6948821 |
Mirror for reflecting electromagnetic radiation as well as illumination and imaging method employing the same
A mirror arrangement for reflecting electromagnetic radiation has a mirror body with a mirror side disposed towards the radiation to be reflected and at least one extension sensor located at the...
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6896383 |
Reflecting mirror supporting mechanism
A reflecting mirror supporting mechanism has a reflecting mirror with countersinks in the side thereof, a mirror holder (a base) for supporting the reflecting mirror, and leaf springs which urge a...
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6886952 |
Variable shape mirror and its manufacturing method
A variable shape mirror comprises a frame member having an opening, and a thin film having a first region including a reflecting plane and a second region of higher rigidity than the first region...
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6869196 |
Variable-profile optical device including variable profile mirror and optical element including variable profile optical element
A variable-profile optical device includes a light-transmission elastic member in which an elasticity of a first surface is set to be higher than that of a second surface disposed opposite to the...
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6843572 |
Form-error-cancelling mirror-support devices and related methods, and microlithography systems comprising same
Methods and apparatus are disclosed for peripherally supporting X-ray-reflective mirrors such as used in X-ray microlithography systems and other X-ray optical systems. The methods provide...
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6840641 |
Carrier plate for mirror assembly
An external rearview mirror includes a holder for affixing the mirror to a motor vehicle. A carrier plate is located in a housing that is secured to the holder. At least one mirror assembly with a...
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6808275 |
Mirror assembly with elevator lifter
The present invention is generally directed to a method and assembly for elevating and supporting a microstructure of a MEM system generally by engaging a positioning system of the MEM system with...
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6791730 |
Surface micromachined optical system with reinforced mirror microstructure
Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed,...
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6739730 |
Optical pickup deformable mirror
The present invention provides an optical pickup deformable mirror used for correcting a spherical aberration caused by a difference in thickness of a cover glass of a recording medium, wherein the...
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6598984 |
Lightweight mirror and method of making
A lightweight mirror structure is formed from a unitary body of mirror blank material by using an abrasive water jet cutting apparatus to cut a plurality of cylindrical channels in the blank...
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6520653 |
Honeycomb structure carrier plate for external rearview mirror and related mirror assembly
An external rearview mirror includes a holder for affixing the mirror to a motor vehicle. A carrier plate is located in a housing that is secured to the holder. At least one mirror assembly with a...
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6513939 |
Micro-mirrors with variable focal length, and optical components comprising micro-mirrors
A micro-mirror comprises a membrane of a dielectric polymer layer between two metal layers for supplying a high frequency ac voltage thereto for dielectric heating of the membrane, and a further...
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6447125 |
Device for influencing a laser beam
The invention relates to a device for influencing a laser beam by means of an adaptive mirror ( 12 ) in the beam path, having a piezoelectric adjusting member ( 17 ) arranged on the back of the...
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6412961 |
Rectifying mirror
A mirror for use in a catadioptric system, is provided which is a substantially circular mirror having a rotationally symmetric cross section by a set of points substantially close to a curve...
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6361177 |
Optical device fixing device
The present invention relates to an optical element fixing device, and particularly to a prism mounting device for an optical device using light beam which passes through a prism or lens, a lens...
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6293682 |
Reflecting panel adjusting mechanism
A reflecting panel adjusting mechanism includes a support means for supporting a reflecting panel 1 at three points through spherical bearing units (7a, 7b and 7c) rotatable in all directions on...
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6271958 |
Method and apparatus for curvature-resistant micro-mirror structures to reduce light beam loss in free-space micro-machined optical switches
A method and apparatus for curvature-resistant micro-mirror structures to reduce light beam coupling loss due to mirror curvature in free-space micro-machined optical switches is presented. As a...
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6264165 |
Stage and supporting mechanism for supporting movable mirror on stage
A movable mirror supporting mechanism for supporting a movable mirror forming a part of an interferometric measurement system and having a rectangular cross-section onto an object, with a...
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6256147 |
Compensating layer to reduce wavefront errors in coatings on mirrors for optical systems
A method is disclosed for reducing or eliminating the wavefront error caused by variations in the thickness of an optical coating applied to a mirror without requiring that the thickness variation...
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6217179 |
Optical reflection panel
An optical reflection panel made of thermosetting plastic material as a substrate is disclosed. One surface of the substrate is coated with an adherent layer and then an optical reflecting layer is...
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6206528 |
Surface figure control for coated optics
A pedestal optical substrate that simultaneously provides high substrate dynamic stiffness, provides low surface figure sensitivity to mechanical mounting hardware inputs, and constrains surface...
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6176588 |
Low cost light weight mirror blank
An inexpensive lightweight mirror blank having good dimensional stability, and a method of making the same is provided. The mirror blank includes an extruded ceramic honeycomb core and a faceplate...
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6111691 |
Positioning table
A structure includes a cover body having a plate-like shape and a support body of open light-weight structure composed of struts, connecting nodes and support points. Attachment locations are...
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6076939 |
Alignment device for aligning an optical transmitting beam with an optical receiving beam
The alignment device (10) is used for aligning an optical transmitting beam with an optical receiving beam. It comprises a rough alignment device and a fine alignment device. The rough alignment...
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6045231 |
Open core light-weight telescope mirror and method of manufacture
A Light-weight low cost mirror for astronomical purposes and a method of manufacturing said light-weight mirror is disclosed. The light-weight mirror is comprised of an optical plate a backing...
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5956191 |
Light weight reflector facet
A light weight arcuate reflector facet, for a solar concentrator is disclosed, which comprises a thin mirrored glass sheet such as a microsheet, and a backing sheet or substrate, the glass sheet...
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5844731 |
Light reflecting plate
A light reflecting plate includes a thermoplastic polyester foam containing fine cells with a mean cell diameter of 50 μm or less and having a thickness of 200 μm or more and a specific gravity...
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5831780 |
Continually supported thin mirror with force-type actuators
A continually supported assembly capable of being space launched includes a base and a thin optical substrate having a light collecting first surface and an opposite rear surface. An elastically...
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5825565 |
Reflector
In order to produce lightweight mirror structures or other reflecting components, preformed silicon elements of sufficient wall thickness are applied to a CFC or CMC substrate structure with the...
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5798878 |
Shape control apparatus for reflecting mirrors
The control of a mirror's shape, such as for use in large reflecting telescopes, is associated with discrete points so as to avoid incurring constraints and exerting undesirable stress on the...
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5781355 |
Stress-free support
The invention is directed to a stress-free support which includes two parts 1 and 2 having different linear thermal expansion coefficients. One part can, for example, be a mirror support made of...
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5777807 |
Deformable mirror, in particular for a laser beam material machining apparatus
A deformable mirror for a laser beam material machining apparatus including a housing for supporting a mirror plate, an electro-mechanical actuator disposed within a jacket tube, a pressure portion...
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5760979 |
Reflecting optical apparatus
A mirror optical system includes a main mirror and a sub-mirror which are arranged to oppose each other, and a plurality of columns for coupling the main mirror to the sub-mirror. The main mirror,...
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5640282 |
Base body of reflecting mirror and method for preparing the same
A light-weight base body of a reflecting mirror, such as those used in reflecting astronomical telescopes, is proposed which is made from fused silica glass or high-silica glass and is advantageous...
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5604642 |
Laser welding of light-weight honeycomb mirrors
The invention provides method and apparatus for making light-weight honeycomb mirrors by assembling fused quartz ribs in a honeycomb pattern so that rib ends are proximate other rib ends to form...
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