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7619807 |
Micromirror array lens with optical surface profiles
A Micromirror Array Lens comprises a plurality of micromirrors arranged on a flat or a curved surface to reflect incident light. Each micromirror in the Micromirror Array Lens is configured to have...
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7618149 |
Bimorph mirror with two piezoelectric layers separated by a central core of semirigid material
The invention relates to a bimorph mirror presenting first and second layers ( 1, 2 ) of piezoelectric ceramic together with at least one electrode enabling at least one curvature of the mirror to...
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7589885 |
Micromirror array device comprising encapsulated reflective metal layer and method of making the same
The present invention provides an optical micromirror device and their array device and method for making the same. By introducing a sub coating layer and an over coating layer with a high...
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7589884 |
Micromirror array lens with encapsulation of reflective metal layer and method of making the same
The present invention provides a micromirror array device specially Micromirror Array Lens device structure and method for making the same. By introducing a sub coating layer and an over coating...
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7572019 |
Adaptive-optics actuator arrays and methods for using such arrays
Actuator arrays for use in adaptive-optical elements and optical systems containing at least one such element are disclosed. The actuator arrays provide more precise control of the shape of the...
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7567396 |
Variably focusing mirror driven by electromagnetic force and operating method thereof
The present invention relates to a variably focusing mirror for realizing an automatic focusing and optical zooming of a miniature camera module, the mirror comprising a driving part having a...
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7556388 |
Thin nearly wireless adaptive optical device
A thin nearly wireless adaptive optical device capable of dynamically modulating the shape of a mirror in real time to compensate for atmospheric distortions and/or variations along an optical...
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7545482 |
Projection objective of a microlithographic projection exposure apparatus
A projection objective of a microlithographic projection exposure apparatus has a plurality of optical elements, for example lenses or mirrors. The objective furthermore includes an actuator for...
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7543948 |
Multilayer mirror manufacturing method, optical system manufacturing method, exposure apparatus, and device manufacturing method
A method for manufacturing a multilayer mirror that includes a substrate and a multilayer film formed on the substrate, and has a reflection surface shape includes the steps of estimating a surface...
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7535626 |
Shape-variable optical element, optical device and image pickup apparatus
A shape-variable optical element, which includes: a shape-variable section made up of an organic material that can be expanded and contracted by an electric field, in a direction of the electric...
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7529011 |
Deflector mirror with regions of different flexural rigidity
A deflector mirror is disclosed that includes a mirror substrate configured to vibrate in a reciprocating manner on beams as a torsional rotary shaft so as to deflect a light beam emitted from a...
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7525722 |
Liquid mirror
An apparatus that comprises a liquid mirror. The liquid mirror includes a liquid that forms an interface with a fluid adjacent to the liquid. The liquid mirror also includes a layer of reflective...
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7524072 |
Optical component, comprising a material with a predetermined homogeneity of thermal expansion
There is provided an optical component. The optical component includes a material having a coefficient of thermal expansion α, where the coefficient of thermal expansion is dependent on location....
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7508561 |
Deformable mirrors
A deformable mirror (DM) embodying the invention includes a reflective layer attached to the front surface of a solid monolithic block of a ceramic material. A plurality of holes is drilled from...
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7494233 |
Off-axis variable focus and aberration control mirrors and method
An optical element with multi-layer composites that deforms to reduce optical aberrations in off-axis optic. Methods are also described in relation to the optical element.
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7490947 |
Microoptic reflecting component
The invention relates to active microoptic reflecting components for adapting or changing the focal length or focal position in optical systems. It is the object of the invention to make available...
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7486893 |
Dynamic optical interconnect system reference signal formation
The disclosed technology provides a dynamic interconnection system which allows to couple a pair of optical beams carrying modulation information. In accordance with the disclosed technology, two...
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7474471 |
Optical unit, image capturing device, and reflective device
An optical unit includes a closed hollow body defining an enclosed chamber therein, and having an optical part that confines a portion of the chamber and that is deformable so as to be changeable...
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7474455 |
Deformable mirror
A deformable mirror includes a deformable section on which a reflecting surface and a COM electrode are formed, a fixing section which fixes the deformable section, a driving and sensing electrode...
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7460292 |
Interferometric modulator with internal polarization and drive method
A method of creating an internal dipole moment in an interferometric light modulating device is disclosed. In certain embodiments, the method includes applying heat and an electrical field to a...
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7452089 |
Variable-shape mirror and optical pickup device therewith
The variable-shape mirror is provided with a support base and a minor portion that is disposed to face the support base and that has on a side thereof facing away from the support base a minor...
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7448763 |
Optical subassembly and projection objective in semiconductor lithography
An optical subassembly with an optical element, for example a mirror element ( 7 ), has an optical surface ( 9 ) and bearing points ( 12 ) arranged on the circumference. The optical element ( 7 )...
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7429114 |
Light-weight mirror blank assembly
A light-weight mirror blank assembly, having at least one sheet of corrugated material; and at least one face sheet in intimate contact with a surface of the sheet of corrugated material forming...
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7426013 |
Exposure apparatus and device fabrication method
An exposure apparatus illuminates a pattern on an original form, introduces light from the pattern to a plate, and exposes the plate. The exposure apparatus includes at least one optical element,...
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7422335 |
Variable-shape mirror and optical pickup device therewith
In a variable-shape mirror of which the shape of the mirror surface can be varied, a mirror portion is bonded only to a fixed portion and not to a piezoelectric element. When the piezoelectric...
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7410265 |
Focusing-device for the radiation from a light source
A focusing-device for the radiation from a light source ( 2 ) is provided with a collector mirror ( 1, 1 ′) which is arranged in a mount ( 24 ) and collects the light, in virtual or real terms,...
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7399093 |
Reflection mirror of projection television and fabrication method thereof
Disclosed is a reflection mirror of a projection television to prevent the frame of the projection television from being deformed and to fabricate the projection television with ease. The...
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7387394 |
Deformable mirror control device and device for observing retina of eye
A deformable mirror control device is provided with improved response characteristic by devising the mode of control even if the deformable mirror has a large time constant in comparison with the...
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7381934 |
Closed loop compensation system and method for a deformable mirror
A closed loop compensation system including a deformable mirror including an array of spaced actuators. An array of spaced sensors is mapped in optical space to reside between pairs of actuators. A...
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7374302 |
Deformable mirror
This invention relates to a hybrid deformable mirror. A deformable mirror is provided comprising a reflective surface provided on a substrate and a layer of deformable material attached to the...
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7374301 |
Stretched membrane device
An improved device for reflecting, radiating, or receiving electromagnetic radiation, acoustic waves, or other energy forms through the use of a membrane stretched across a lightweight, round,...
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7372614 |
Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit
A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support...
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7347572 |
Telescope mirror for high bandwidth free space optical data transmission
Optical mirror elements for high bandwidth free space optical communication are produced by an electroforming replication technique. Onto the precision surface of a mandrel that is a negative of...
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7344262 |
MEMS mirror with tip or piston motion for use in adaptive optics
An array of high fill factor mirrors has each mirror be coupled across two deformable spring bars that are deformed using a drive. The two deformable springs are parallel to each other, and coupled...
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7329015 |
Variable shape mirror and optical pickup device having the same
The variable shape mirror ( 1 ) includes a substrate ( 2 ) and a bulk piezoelectric body ( 3 ). On the piezoelectric body ( 3 ), a specular surface ( 4 ) is formed, and further a plurality of...
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7311408 |
Adjustable rear view mirror structure
An adjustable rear view mirror structure is provided. The rear view mirror structure comprises a flexible body and an adjusting apparatus wherein the body has a reflective surface and an inner...
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7311407 |
Mirror unit, method of producing the same, and exposure apparatus and method using the mirror unit
Disclosed are a mirror unit and a method of producing the same. In one preferred embodiment, the mirror unit includes a mirror with a multilayered film formed on a substrate, the multilayered film...
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7309398 |
Composite backed prestressed mirror for solar facet
A glass structure, such as a mirror facet, having a glass member, a composite structure and a support structure. The composite structure includes a rigid interlayer which is bonded to the glass...
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7301690 |
Micro-optical arrangement
The invention relates to a micro-optical arrangement with which in particular optical properties of an optical element or its influencing of electromagnetic radiation may be changed. Thereby the...
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7296904 |
Reflector for laser interrogation of three-dimensional objects
A digital control for light beams. A position of an output light beam is changed based on a digital input control formed of a plurality of bits. The device may use movable mirrors to change the...
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7295331 |
Optical element with an optical axis
The invention concerns an optical element ( 1 ) with an optical axis ( 3 ), designed in particular for an exposure lens used in semiconductor lithography. Said optical element comprises at least an...
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7292385 |
Mirror with local deformation by thickness variation of an electro-active material controlled by electrical effect
A deformable mirror comprises i) an electrically insulative substrate having a substantially plane front face, ii) a first stage comprising at least two plane electrodes placed at chosen places on...
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7267447 |
Variable focal length lens comprising micromirrors
A variable focal length lens consists of many micromirrors with degrees of freedom rotation and/or degrees of freedom translation and actuating components. As operating methods for the lens, the...
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7265814 |
Mirror holding method and optical apparatus
This invention relates to a mirror holding method, wherein a symmetry axis of an illuminating area corresponds with that of a mirror holder, and a center of the illuminating area in a mirror...
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7253834 |
Image pickup apparatus having image pickup optical system
An image pickup apparatus comprising a first lens unit which comprises at least a negative lens element and at least a positive lens element and has negative refractive power, a second lens unit...
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7252395 |
MEMS device deflection stop
A micromirror array fabricated on a semiconductor substrate. The array is comprised of three operating layers. An addressing layer is fabricated on the substrate. A hinge layer is spaced above the...
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7203552 |
Method and apparatus for controlling a deformable mirror
A method, or corresponding apparatus, for controlling deformation of a structure, in part, includes applying a command signal at a first signal level to at least one actuator mechanically coupled...
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7195361 |
Active hybrid optical component
An active hybrid optical component includes a substrate including a mounting surface; a replicated optical surface mounted on the mounting surface; and a plurality of actuators for deforming the...
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7192145 |
Integrated actuator meniscus mirror without reaction mass
An integrated actuator meniscus mirror includes an optical substrate having a mirror surface on one side and a support structure on the other for controllably altering the shape of the mirror...
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7192144 |
Bi-directionally actuated thin membrane mirror
A deformable membrane mirror and a related method for its use, the mirror including a deformable membrane having a reflective front face and a back face, and further including electrodes located on...
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