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7374300 |
Metal reflector and process for producing it
The invention provides a process for producing a high-precision reflector and its coating. A reflector is produced from a solid material using a material-removing process and is coated with a...
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7349063 |
Reflection mirror apparatus, exposure apparatus and device manufacturing method
A reflection mirror apparatus, used in a reflection optical system of an exposure apparatus which performs exposure processing by guiding exposure light by reflection, has a mirror having a...
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7329014 |
Collector mirror for plasma-based, short-wavelength radiation sources
The invention is directed to a collector mirror for short-wavelength radiation based on a plasma. It is the object of the invention to find a novel possibility for managing the temperature of a...
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7292307 |
Cooling apparatus, optical element having the same, and exposure apparatus
A cooling apparatus for use with an optical element having a concave part includes a cooling mechanism, located in the concave part of the optical element, for cooling the optical element through...
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7264363 |
Deformable-mirror cooling
This invention relates to a cooled deformable-mirror and its mount. A deformable mirror is provided comprising a reflective element provided on a substrate that is secured to a deformable element,...
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6986585 |
Radius of curvature controlled mirror
A controlled radius of curvature mirror assembly comprising: a distortable mirror having a reflective surface and a rear surface; and in descending order from the rear surface; a counter-distortion...
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6959992 |
Adaptive mirror comprising cooling channels
A mirror, in particular an adaptive mirror configured as a laser beam guidance component. The mirror comprises a housing, to which a mirror element that is optionally deformable is allocated. The...
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6947201 |
Transverse electrodisplacive actuator array
A transverse electrodisplacive actuator array for controlling the optical phasing of a reflective surface includes a support structure; a plurality of electrodisplacive actuator elements extending...
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6911110 |
Thermally controlled solar reflector facet with heat recovery
A high concentration central receiver system and method provides improved reflectors and a unique heat removal system. The central receiver has a plurality of interconnected reflectors coupled to a...
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6877869 |
Mirror for laser applications and method for manufacture of said mirror
A mirror for laser application and a method for manufacturing the mirror is disclosed herein. The mirror comprises several layers including a top layer used as the mirror surface. A cooling...
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6846086 |
Mirror assembly with thermal contour control
A system for compensating for heating effects in a mirror. Different areas of the mirror are associated with buried temperature sensors. Each temperature sensor is monitored, and used to create a...
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6831744 |
Mirror device, mirror adjustment method, exposure apparatus, exposure method, and semiconductor device manufacturing method
A mirror device having an optical system of an exposure apparatus for transferring a reticle pattern onto a wafer includes a mirror, a mirror holding portion, a temperature adjustment unit, a...
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6764187 |
Universally oriented renewable liquid mirror
A universally oriented liquid mirror. A liquid and a penetrable unit are operatively connected to provide a mirror that can be universally oriented.
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6708687 |
Thermally controlled solar reflector facet with heat recovery
A method and high concentration central receiver system provide improved reflectors and a unique heat removal system. The central receiver has a plurality of interconnected reflectors coupled to a...
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6679611 |
Adaptive, aluminized Mylar mirror
An infrared beam is directed to the surface of a Mylar mirror, and the mirror reflects that beam. The reflected beam is detected, and data gleaned from the reflected beam is used to determine...
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6598984 |
Lightweight mirror and method of making
A lightweight mirror structure is formed from a unitary body of mirror blank material by using an abrasive water jet cutting apparatus to cut a plurality of cylindrical channels in the blank...
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6568647 |
Mounting apparatus for a deformable mirror
A mounting apparatus for a deformable mirror that has a peripheral mounting portion with oppositely facing and parallel mounting surfaces. A base member and a mounting ring have juxtaposed...
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6530539 |
Internal fluid cooled window assembly
An interceptor missile including an infrared radiation detection subsystem and a window assembly in the hull of the missile optically coupled to the infrared radiation detection subsystem. The...
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6467915 |
Deformable mirror, in particular for a laser beam material machining apparatus
In the case of a deformable mirror ( 11 ) with a mirror plate ( 13 ) which is in glass form in particular for high laser frequencies and an axial actuator ( 20 ) which concentrically engages the...
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6048070 |
Durable large stroke deformable mirror
A durable large stroke deformable mirror. In the illustrative embodiment, the mirror (10') includes a faceplate (12') constructed of a first material, and a backplate (14') constructed of a second...
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5980049 |
Sensor assembly with dual reflectors to offset sensor
Radiant energy sensor is protected from severe environments with a radiant energy sensor assembly that off-sets the sensor from the environment. The sensor assembly includes a radiant energy...
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5975709 |
Reflecting system
A reflection system, includes a reflecting member having a mirror-finished reflection surface of a spherical shape; and a base member having a base surface of a predetermined shape; and wherein the...
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5777807 |
Deformable mirror, in particular for a laser beam material machining apparatus
A deformable mirror for a laser beam material machining apparatus including a housing for supporting a mirror plate, an electro-mechanical actuator disposed within a jacket tube, a pressure portion...
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5617261 |
Mirror arrangement with a deformable mirror element
A mirror arrangement with a deformable mirror element, and which includes a housing which is provided for the retention of the mirror element, and whereby a cooling installation is provided for the...
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5615245 |
Monochromator for radiant X-rays
A monochromator for radiant X-rays is composed of a first crystal which has a first surface of incidence having a concave letter V-shaped groove and cooling means for flowing a cooling material...
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5579333 |
Cooled laser mirror materials
An improved cooled high power laser mirror system is described which uses a ilicon mirror face with an attached silicon nitride based heat exchanger assembly. The silicon nitride provides a high...
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5444576 |
Cooled reflective mirror apparatus
A cooled reflective mirror apparatus is provided, in which a reflective mirror body is so constructed as to make the cooling fluid spread in a plane covering the outer wall surface of the...
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5418652 |
Deflection mirror housing for laser material-machining systems and beam separating filter
In a deflection mirror housing for laser material-machining systems and a beam separating filter with such a deflection mirror housing, the housing is composed of two parts comprising a housing...
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5416635 |
Portable condensation-free shower mirror
A condensation-free shower mirror includes a housing (11) holding a mirror (10) and a urethane water container (18). The water container, which is substantially the same size and shape as the...
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5375015 |
Heat resisting reflection mirror
The reflection mirror of this invention is considered an improvement over the conventional art in that it has a plating means that smoothes the inner surface of the reflection mirror body and a...
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5357539 |
Laser oscillating apparatus with mirror angle adjustment
A laser oscillator comprising a laser resonator having a plurality of mirrors for directing the laser energy from source to exit apertures, the mirrors being constructed and mounted adjustably for...
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5327293 |
Reflection mirror apparatus
The reflection mirror apparatus of this invention, which can be applied to light projector, sterilizing lamp and development device, improves the light reflection precision and the light collecting...
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5323271 |
Water- and air-cooled reflection mirror
The water- and air-cooled reflection mirror of this invention, which can be applied to light projector, sterilizing lamp and development device, cools with water and air the reflection mirror that...
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5313316 |
Mirror and caddy for use in showers
A mirror for use in a steamy environment such as a shower stall. The mirror has a recess for holding a cylindrical can of shaving cream while exposing half of the can for easy grasping. Either a...
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5312693 |
Nonsacrificial laser hardening
A nonsacrifical laser hardened structure and method protects against incident high energy irradiation. A very thin outer face sheet with a reflective outer surface is laminated to a foam core which...
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5303081 |
Laser beam scanner
It is profitable to oscillate a beam on objects when a high power CO 2 laser beam or a high power YAG laser beam welds or anneals the objects. In order to let a laser beam scan, a device for...
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5209291 |
Cooling apparatus for optical devices
An internally-cooled optical device 10 includes a manifold 14 having two oppositely disposed coolant input ports 18 and two oppositely disposed coolant output ports 20. The input and output ports...
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5208439 |
Laser beam relay unit
In a laser beam relay unit for shifting the direction of a laser beam, two reflecting mirrors (31, 37) are placed in parallel to each other and at a predetermined angle relative to incident light,...
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5172277 |
Kinematic fixturing of optic components
An optical mirror is kinematically mounted at its sides on one fixed point and two movable points which points are supported by a frame spaced from the mirror. One of the movable points is a ball...
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5168924 |
Low surface distortion monochromator
A monochromator 18 has a thin faceplate which reduces temperature-induced distortion in a strain-free region by placing it close to a two-level heat exchanger 46, 64. The heat exchanger has a first...
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5150253 |
Reflective mirror having cooling unit attached thereto
A reflective mirror having a cooling unit attached thereto is provided with a layer of material deposited on the surface of a glass plate. This material has such properties that most of ultraviolet...
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5094519 |
Cooled laser mirror having adaptive flow control
A adaptive flow-control regulator is disclosed for use in controlling the circulation of cooling fluid through in a cooled laser mirror. The adaptive flow-control regulator utilizes a...
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5073831 |
Cooled transmissive mirrors, beam splitters, windows, and refractive elements for high-power applications
An optical element having a thin, transparent plate containing a plurality of shallow cooling channels, and a transparent substrate immediately behind the plate with a plurality of inlet and...
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5037190 |
Fusible link actuators for deformable mirrors
A construction for a deformable mirror is disclosed in which each of the electrodistortive actuators used to selectively impart deformations to the mirror's reflecting facesheet are mechanically...
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5022746 |
Solid-to-liquid phase change cooled mirror arrangement
A phase change material cooled mirror arrangement includes a mirror substrate which has a reflective front major surface and a rear major surface. The mirror is cooled by advancing at least one rod...
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5020895 |
Laser mirror head
For power lasers, the shape of the mirror is an essential factor for the quality of the mode. In addition, a power laser usually has a plurality of mirrors. The shape of the mirrors may change...
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5016997 |
Partially segmented deformable mirror
A partially segmented deformable mirror is formed with a mirror plate having a smooth and continuous front surface and a plurality of actuators to its back surface. The back surface is divided into...
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5004319 |
Crystal diffraction lens with variable focal length
A method and apparatus for altering the focal length of a focusing element o one of a plurality of pre-determined focal lengths by changing heat transfer within selected portions of the element by...
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5002378 |
Light weight cooled mirror
A lightweight cooled mirror is disclosed in which cooling of the mirror's reflecting surface is provided by a two-phase fluid contained in an enclosed chamber behind the reflecting surface. The...
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4956037 |
Cooled optical component manufacture
An optical component having a plurality of cooling channels in a surface region underlying its effective surface is manufactured by first forming a precursor of the optical component consisting of...
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