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7448763 |
Optical subassembly and projection objective in semiconductor lithography
An optical subassembly with an optical element, for example a mirror element ( 7 ), has an optical surface ( 9 ) and bearing points ( 12 ) arranged on the circumference. The optical element ( 7 )...
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7446961 |
Lens device
A lens element has an annular flange portion which has a tapered lateral surface so as to form at least an annular clearance tapering from a rear edge thereof when it is received in a lens holder....
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7423823 |
Lens barrel
A lens barrel component includes a lens holding member for holding a lens and a supporting member supporting the lens holding member. The lens barrel component is molded using a composite material...
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7408728 |
System and method for focal length stabilization using active temperature control
An optical metrological system having a heat-generating light source coaxially mounted near a heat-sensitive lens. The system uses a temperature sensor to monitor the lens temperature and a heating...
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7408717 |
Liquid-based optical device, method for controlling such a device and electronic device
The present invention discloses an optical device comprising a container enclosing an insulating liquid (A) and an electrically susceptible liquid (B), the insulating liquid (A) and the...
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7403347 |
Optical transmission module with temperature control
An optical module including a temperature measurement module and an optical part having a temperature dependency. The module includes a temperature control part mounted directly or indirectly on...
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7400462 |
Optical system having lenses with adjustable focal length
An optical system ( 10 ) operatively associated with lenses ( 120 ) with adjustable focal length is provided. The optical system includes a first lens assembly ( 12 ), at least one heat control...
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7397531 |
Lithographic apparatus and device manufacturing method
A lithographic apparatus includes an illumination system for providing a beam of radiation, and a support structure for supporting a patterning device. The patterning device serves to impart the...
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7382556 |
Lens module
A lens module ( 800 ) includes a lens barrel ( 20 ), a base ( 10 ), and a temperature compensation module ( 30 ). A first lens ( 201 ) is disposed in the lens barrel. The lens barrel is disposed in...
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7372413 |
Mobile communication device
A mobile communication device ( 100 ) includes a main body ( 110 ), a cover body ( 120 ) and a linking member ( 130 ). The cover body is coupled to the main body and is movable relative to the main...
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7369215 |
Laser crystallization apparatus
A laser crystallization apparatus has a light source, a phase shifter which modulates a laser light from the light source, an illumination system which is provided between the light source and the...
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7365923 |
Heat sink tab for optical sub-assembly
The present invention relates to a heat sinking tab for dissipating heat directly from an optical sub-assembly (OSA) to a transceiver housing, within which the optical sub-assembly is located. The...
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7365826 |
Projection optical system, exposure apparatus and method using the same
A projection optical system includes an optical element that includes and locally uses a reflective or refractive area that is substantially axially symmetrical around an optical axis, the optical...
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7349163 |
High-heat-dissipation lighting module
There is provided a lighting module of the type having a solid-state light source, in particular a LED, a supporting plate, and a lens; the lens has a recess housing the light source; the lens is...
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7342732 |
Optical mount
An optical mount ( 1 ) for optical component ( 2 ) which has a edge contour ( 4 ) relative to extending radially optical axis (A), includes a rigid optical support ( 3 ) having an axially oriented...
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7334951 |
Camera head
The present invention is to provide a camera head capable of efficiently radiating heat generated by heat sources in the camera head even if it is equipped with a dust-proofing and drip-proofing...
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7301713 |
Object lens unit and optical pickup device employing the unit
An object lens unit for an optical pickup comprising: a first optical element positioned facing an optical information recording medium; a second optical element positioned on a light source side...
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7295285 |
Exposure apparatus and device manufacturing method
An exposure apparatus which exposes a pattern of an original onto a substrate. The apparatus includes an optical system, including a reflective optical element, configured to conduct exposure...
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7289282 |
Lens barrel for holding lens
A lens barrel for holding a lens includes a barrel body for containing the lens. A ring shaped receiving wall is formed on the barrel body, for receiving a rear face of a peripheral portion of the...
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7277244 |
Lens barrel for image taking lens
A heat sink is attached to a subject-side end portion of a barrel body of a lens barrel. The heat sink is provided with a large number of radiation fins formed in whorl. A heat pipe is disposed...
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7274120 |
Drive unit and image pickup unit equipped with the drive unit
A drive unit for performing precise linear movement of a driven object comprises a motor having a cylindrical stator and a cylindrical rotor that is coaxially put in the cylindrical stator and...
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7270453 |
Heat resistant plastic lamp components and methods of forming
A molded plastic lamp component includes, in an exemplary embodiment, a first portion formed from a first material having a first heat distortion temperature, and a second portion formed from a...
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7270022 |
Temperature-compensated structure with force multiplier for the temperature compensator
A temperature-compensated structure includes a temperature compensator having a temperature-compensation bellows whose length is responsive to changes in temperature, and a temperature-compensation...
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7268960 |
Mount for an optical structure and method of mounting an optical structure using such mount
An improved mount for, and method of mounting an, optical structure is provided, wherein the optical structure has at least one mounting surface. The mount has a mounting section with at least one...
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7265919 |
Flange assembly of an optical system
A flange assembly of an optical system has a first flange, a compensation element and a second flange. The flanges and the compensation element are substantially axially symmetric both flanges ( 2,...
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7256952 |
Fixation method for optical member and optical unit
A fixation method for fixing an optical member to a holding member using irradiation of a laser beam. The method includes the steps of inserting the optical member into the holding member,...
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7253975 |
Retainer, exposure apparatus, and device fabrication method
A retainer for holding an optical element having three first grooves includes a first support member that supports the optical element through the first grooves, and a second support member that...
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7250616 |
Temperature adjustment apparatus, exposure apparatus having the same, and device fabricating method
A temperature adjustment apparatus for adjusting the temperature of an optical member includes a first radiation mechanism, with a first radiation member, that transfers the radiation heat between...
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7242539 |
Image scanning apparatus
An image scanning apparatus that forms an optical image of a document with an image-forming lens onto an image sensor. In order to prevent deterioration in image-forming performance, the image...
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7227707 |
Holding device for an optical element
A holding device for an optical element, is formed at least in part, of a silicon-containing aluminum material.
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7167325 |
Flexured athermalized pseudokinematic mount
A method for designing a base includes (1) selecting a location of a first center of expansion of a child part (CE child ) relative to a parent part; (2) determining a location of a second center...
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7161750 |
Retainer, exposure apparatus, and device fabrication method
A retainer for holding an optical element having three first grooves includes a first support member that supports the optical element through the first grooves, and a second support member that...
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7158209 |
Holding mechanism in exposure apparatus, and device manufacturing method
Disclosed is a holding system and an exposure apparatus having the same, wherein deformation of an optical member resulting from its thermal expansion and causing degradation of imaging performance...
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7149041 |
Heat dissipation structure for optical engine
An optical engine includes a light source, an optical main body and a projection lens. The optical main body includes a reflective light valve, a case, a first heat-dissipating device and a...
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7142243 |
Image sensing apparatus having a member that adjusts with temperature change
This invention has building members which include an image sensing portion, an optical member for forming a beam from an object to be sensed into an image on the image sensing portion, a...
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7130136 |
Optical modulator holder, optical device, and projector
Cooling chambers (R 1 , R 2 ) for accommodating therein a cooling fluid for cooling a liquid crystal panel ( 441 ) are formed inside a pair of frame members ( 4405, 4406 ) constituting an optical...
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7116501 |
Optical element holder, exposure apparatus, and device fabricating method
An optical element holder for holding an optical element includes a holding element to hold the optical element or a holding part provided to the optical element unitedly, wherein there is...
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7116399 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
A lithographic projection apparatus contains a projection system configured to project a patterned beam of radiation onto a target portion of a substrate. The projection system contains one or more...
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7115852 |
Photodetection device for rotary laser system
A photodetection device for a rotary laser system for projecting at least two fan-shaped beams tilted at a known angle with respect to a horizontal plane and having a known spreading angle,...
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7113263 |
Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device
A supporting structure for supporting an optical element includes a first supporting member for supporting the optical element, and a second supporting member for supporting the first supporting...
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7095574 |
Optical pickup
An optical pickup includes: a lens holder having an objective lens, an optical component, a radiator plate formed of a sheet metal, and a base member on which the lens holder and the optical...
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7085081 |
Optical device and projector
An optical device ( 44 ) includes fluid circulating member link sections ( 446 ) that can link a plurality of fluid circulating members ( 448 ). The fluid circulating member link sections ( 446 )...
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7085080 |
Low-deformation support device of an optical element
In a low-deformation support device of an optical element ( 8, 24 ), in particular an end plate ( 14 ) of a projection objective ( 7 ) of a projection exposure machine ( 3 ) for microlithography...
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7079331 |
Device for holding a beam splitter element
The invention relates to a device for holding a beam splitter element having an optically active beam splitter layer in an optical imaging device, the beam splitter element being connected to at...
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7072126 |
Temperature compensation device for optical instruments
The present invention discloses a temperature compensation device for optical instruments which comprises a lens assembly, motor means for rotating the lens assembly about the optical axis thereof,...
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7072117 |
Micro-lens array
A tunable micro-lens and micro-lens array for use in optical communications are disclosed. The micro-lens uses thermo optical material and a temperature controller to adjust the temperature and,...
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7068348 |
Holding mechanism in exposure apparatus, and device manufacturing method
Disclosed is a holding system and an exposure apparatus having the same, wherein deformation of an optical member resulting from its thermal expansion and causing degradation of imaging performance...
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7061697 |
Method for fixing a lens of an optic group with respect to an optical sensor inside an electronic device able to acquire images and corresponding device
A method is described for fixing a lens of an optical group with respect to an optical sensor in an image acquisition device comprising the steps of housing the optical sensor in a housing, fixing...
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7054079 |
Optical element holder, exposure apparatus, and device fabricating method
An optical element holder for holding an optical element includes a holding element to hold the optical element or a holding part provided to the optical element unitedly, wherein there is...
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7045936 |
Projection coupler with contrast ribs
An improved coupler with contrast ribs for use in a projection system. The coupler supports a projection lens in alignment with a projection optical signal generation device (e.g., a Cathode Ray...
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