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7564633 |
Catadioptric imaging system for high numerical aperture imaging with deep ultraviolet light
A catadioptric imaging system for micro-lithographic projection features a high numerical aperture objective where most of the focusing power is produced by reflection and refraction angles are...
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7561346 |
Angular shear plate
One or more disc-shaped angular shear plates each include a region thereon having a thickness that varies with a nonlinear function. For the case of two such shear plates, they are positioned in a...
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RE40743 |
Projection exposure system having a reflective reticle
A projection exposure system for microlithography includes an illuminating system ( 2 ), a reflective reticle ( 5 ) and reduction objectives ( 71, 72 ). In the reduction objective ( 71, 72 ), a...
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7532414 |
Reflective optical system
A lens arrangement is presented. The lens arrangement comprises a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially...
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7463422 |
Projection exposure apparatus
A method of determining materials of lenses contained in an optical system of a projection exposure apparatus is described. First, for each lens of a plurality of the lenses, a susceptibility...
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7391580 |
Ultra compact mono-bloc catadioptric imaging lens
A mono-bloc catadioptric imaging lens comprising a solid body and a single-focal Maksutov type construction characterized by two refractive surfaces and two reflective surfaces wherein all surfaces...
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7346261 |
Image display apparatus
There disclosed is an image display apparatus having a light source, a scanning member for deflecting a light from the light source to scan a predetermined surface with the light to form a...
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7317571 |
Catadioptric projection optical system, exposure apparatus having the same, device fabrication method
A catadioptric projection optical for forming an image of the intermediate image onto a second object, the catadioptric projection optical system include, a first dioptric group including a first...
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7170688 |
Retroreflective device comprising gradient index lenses
A retroreflective device comprising a substantially spherical graded refractive index lens, referred to as a GRIN-sphere lens ( 2 ), a reflective part for retroreflecting ( 6 ) a radiation beam (B)...
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RE39296 |
Catadioptric projection systems
Catadioptric projection systems are disclosed for projecting an illuminated region of a reticle onto a corresponding region on a substrate. The systems are preferably used with ultraviolet light...
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7088526 |
Lens collimator and method of producing optical signals with reduced aberrations
A lens collimator according to the present invention includes a plurality of lens elements bonded together. The lens elements, preferably three, each include spherical surfaces and are generally...
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7046459 |
Catadioptric reductions lens
A catadioptric projection lens for imaging a pattern arranged in an object plane while creating a real intermediate image, having a catadioptric first lens section having a concave mirror and a...
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7019909 |
Optical system, image display apparatus, and image taking apparatus
A small optical system that is capable of widening an angle of view is provided. This optical system is provided with a first surface having a reflecting action and a second surface that reflects a...
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RE39024 |
Exposure apparatus having catadioptric projection optical system
To use a beam splitting optical system smaller than the conventional beam splitters and to set a longer optical path between a concave, reflective mirror and an image plant. A light beam from an...
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6985308 |
Telecommunications optical processor
A demultiplexer for use in a wavelength-division multiplexed optical system including a first positive lens group, a negative lens group, and a second positive lens group in order from a dispersive...
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6919997 |
Compact device for imaging a printing form
A compact device for imaging ( 10 ) a printing form ( 12 ), including a number of light sources ( 14 ) as well as imaging optics ( 18 ) for producing a number of image spots ( 16 ) of the light...
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6898025 |
Projection aligner and optical system therefor
A projection optical system, which is telecentric with respect to an object side and an image side, projects a pattern onto an image plane, which is substantially parallel with the pattern, at a...
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6836379 |
Catadioptric objective
A catadioptric objective is provided with a beam splitter surrounded at least partially by a mount, with a mirror, with a plurality of lenses and with a λ/4 plate arranged between the mirror and...
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6829096 |
Bi-directional wavelength division multiplexing/demultiplexing devices
A bi-directional wavelength division multiplexing/demultiplexing device is disclosed. In an exemplary embodiment, the bi-directional wavelength division multiplexing/demultiplexing device comprises...
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6801371 |
Dressing mirror with multiple functions
The present invention of a multi-functional dressing mirror is applied to a portable case body for containing a plane mirror inside, in addition, the outer covering, a convex mirror made from...
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6678056 |
Jamin-type interferometers and components therefor
A retroreflector has three mutually-orthogonal reflective surfaces arranged around an optical axis. The reflective surfaces stop short of the optical axis to provide a central region of the...
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6665126 |
Projection exposure lens with aspheric elements
A projection exposure lens has an object plane, optical elements for separating beams, a concave mirror, an image plane, a first lens system arranged between the object plane and the optical...
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6636349 |
Reflection and refraction optical system and projection exposure apparatus using the same
An imaging optical system includes a polarization beam splitter, a quarter waveplate, a reflection mirror and polarization state changing unit. The beam from an object plane is projected by way of...
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6590718 |
Projection exposure system having a reflective reticle
A projection exposure system for microlithography includes an illuminating system ( 2 ), a reflective reticle ( 5 ) and reduction objectives ( 71, 72 ). In the reduction objective ( 71, 72 ), a...
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6570711 |
Virtual waveplate and optical channel interleaver formed therewith
A conventional interleaver, based on a stack of waveplates, relies on the orientation and the birefringence of the waveplates to differentiate the polarizations of one set of channels from another,...
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6560000 |
Wavelength-dependent optical signal processing using an angle-to-offset module
An optical device comprises a dispersion element, a reflector, and an angle-to-offset (ATO) element. The angle-to-offset (ATO) element has optical power. The dispersion element is positioned in or...
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6522473 |
Observing optical system and imaging optical system
An optical system invention is interposed between a pupil plane and an image plane, and includes a first prism, a second prism, and a holographic element which is sandwiched between the first prism...
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6441972 |
Optical image separator
An optical assembly divides a single image into a plurality of images which are simultaneously projected onto a single sensor array. The optical assembly is arranged so that each of the plurality...
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6441969 |
Prescription mirror
A common corrective eyeglass lens blank and a common mirror, Plano or magnifying, are brought together in a “compact” (small sized) construction and assembly to provide the very thing long...
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6424471 |
Catadioptric objective with physical beam splitter
A catadioptric projection objective comprises an object plane, a physical beam splitter, a concave mirror, an image plane, a first objective part, a second objective part, and a third objective...
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6208473 |
Catadioptric projection lens
A catadioptric projection lens comprising a first lens group (G1) disposed along a first optical axis (16a), a mirror (18) which creates a second optical axis (16b), a beam splitter (20) which...
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6169637 |
Catadioptric lens
A catadioptric lens (10) comprising, along an optical axis (AX), a first lens group (L 1 ) having an objectwise concave annular incident surface (SI) upon which light from an object is first...
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6157497 |
Exposure apparatus
It is an object to provide a high-performance and compact exposure apparatus which can perform a projection exposure operation with satisfactory optical performance by using a plurality of compact...
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6118596 |
Catadioptric reduction projection optical system and method
A catadioptric reduction projection optical system having a first lens unit having negative refractive power and widening a light beam from a reticle, a prism type beam splitter for transmitting...
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6115193 |
Panoramic sensor head
A device for creating a panoramic field of view comprises a first light passing incident surface which is a cylinder surface and a second incident surface which is a mirror surface onto which light...
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RE36740 |
Cata-dioptric reduction projection optical system
In a cata-dioptric optical system having a combination of a reflection system and a refraction system for reduction-projecting an object on a first plane onto a second plane, a polarization beam...
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6072637 |
Zoom lens system
A zoom lens system that is free from parallax, is compact, and offers excellent optical performance has, from the object side, a positive first lens unit, a negative second lens unit, a positive...
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6069749 |
Catadioptric reduction optical system
A catadioptric reduction optical system capable of imaging an object by scanning in a scanning direction. The system comprises, objectwise to imagewise, a first optical system, a beam splitter, and...
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6065844 |
Display rerouting apparatus for communication equipment
A display rerouting apparatus reroutes a displayed image from an image source in a display module for providing a redirected angular visibility for the displayed image. In an illustrative...
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5835284 |
Catadioptric optical system and adjusting method
A catadioptric optical system in which a first imaging optical system is constructed of a unidirectional optical apparatus which transmits outgoing light from a first plane in one direction only...
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5805357 |
Catadioptric system for photolithography
Catadioptric systems are disclosed that project a demagnified image of an object on a substrate. A first optical system substantially collimates a light flux from the object and directs the light...
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5805356 |
Projection exposure apparatus
A projection exposure apparatus achieves good imaging performance as securing a sufficient working distance. This projection exposure apparatus has a projection optical system for...
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5805334 |
Catadioptric projection systems
Catadioptric projection systems are disclosed for projecting an illuminated region of a reticle onto a corresponding region on a substrate. The systems are preferably used with ultraviolet light...
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5796524 |
Catadioptric optical system and exposure apparatus using the same
This invention provides a catadioptric optical system for achieving excellent imaging performance to obtain a resolution of quartermicron order. The catadioptric optical system is an optical system...
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5793538 |
Solid catadioptric lens
A solid catadioptric lens (10) includes substantially planar input surface (14), primary concave mirror 18, secondary convex mirror (22) and substantially spherical exit surface (24). The lens is...
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5777795 |
Optical path extender for compact imaging display systems
A compact image display system in which the optical pathway is folded and thereby extended between the image source and the imaging optics of the system. The image display system may be used in...
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5742436 |
Maximum aperture catadioptric reduction objective for microlithography
A catadioptric reduction objective has a concave mirror 19', a beam splitter 150' and several lens groups (100', 200'; 300', 400'). The system diaphragm 40' is mounted between beam splitter surface...
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5739956 |
Real image albada finder
There is provided an objective lens for focusing a subject light to form a real image on a predetermined focal plane, an eyepiece through which the real image is observed, and the first and second...
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5710668 |
Multi-color head-up display system
A multi-color optical display system (10) employs a multi-powered reflective combiner (20) that together with a monochromatic or partly color-corrected relay lens (16) longitudinally corrects a...
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5710661 |
Integrated panoramic and high resolution sensor optics
An optical apparatus monitors the entire panorama in low resolution and simultaneously monitors a selected portion of the panorama in high resolution. For the panoramic portion of the apparatus, a...
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