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7453645 |
Spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby
A spectral purity filter includes an aperture, the aperture having a diameter, wherein the spectral purity filter is configured to enhance the spectral purity of a radiation beam by reflecting...
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7450312 |
Optical projection lens system
An optical projection lens system for microlithography includes in the direction of propagating radiation: a first lens group having positive refractive power, a second lens group having negative...
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7443595 |
Optical system for projector and imaging method thereof
An optical system for a projector and an imaging method thereof. A light beam from a light source passes through a first lens set and a second lens set sequentially. The light beam having passed...
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7438424 |
Illumination optical apparatus and projection type display apparatus
An illumination optical apparatus and a projection type display apparatus capable of enhancing an illumination efficiency; having an ellipsoidal mirror, a light source arranged at a first focal...
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7436597 |
Projection lens
A first lens group having a negative refractive power, an aperture diaphragm, and a second lens group having a positive refractive power are arranged in order from an enlargement side. A reduction...
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7435482 |
Article or transparent component having liquid repellent layer, optical lens having liquid repellent layer and production process thereof, and projection type display apparatus using the lens
It is an object to form a highly wear-resistant liquid repellent layer on a non-oxide surface. The oxide layer 8 is formed on the non-oxide material 1 surface. The oxide layer 8 is bound to...
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7428105 |
Objectives as a microlithography projection objective with at least one liquid lens
The invention relates to an objective designed as a microlithography projection objective for an operating wavelength. The objective has a greatest adjustable image-side numerical aperture NA, at...
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7426082 |
Catadioptric projection objective with geometric beam splitting
A projection exposure lens has an object plane, optical elements for separating beams, a concave mirror, an image plane, a first lens system arranged between the object plane and the optical...
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7426079 |
Optical system
At least one exemplary embodiment is directed to A retro focus optical system that is capable of sufficiently correcting and/or reducing various aberrations including the chromatic aberration. The...
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7414795 |
Method for driving display with reduced aging
A method of driving a display having a plurality of light-emitting elements that change with time or use, comprising the steps of: a) displaying first and second image signals having spatially...
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7414794 |
Optical arrangement of autofocus elements for use with immersion lithography
An autofocus unit is provided to an immersion lithography apparatus in which a fluid is disposed over a target surface of a workpiece and an image pattern is projected onto this target surface...
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7414781 |
Catoptric objectives and systems using catoptric objectives
In general, in a first aspect, the invention features a system that includes a microlithography projection optical system. The microlithography projection optical system includes a plurality of...
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7411737 |
Projection optical system
A projection optical system for projecting, while enlarging, an image formed on an image formation surface onto an image projection surface from an oblique direction relative thereto has at least...
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7411201 |
Projection objective for a microlithographic projection exposure apparatus
A projection objective of a microlithographic projection exposure apparatus has a last optical element on the image side which is plane on the image side and which, together with an image plane of...
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7408716 |
Refractive projection objective for immersion lithography
A purely refractive projection objective suitable for immersion microlithography is designed as a single-waist system with five lens groups, in the case of which a first lens group with negative...
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7405891 |
Projection apparatus
A projection apparatus including an optical engine, a ring, a lens and multiple casings is provided. The optical engine is suitable for producing an image light beam to project an image onto a...
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7404646 |
Projection lens apparatus and rear projection type image display apparatus
A projection lens apparatus includes a plurality of lenses, for enlarging and projecting, onto a screen, an original image displayed on an image generation source. The plurality of lenses are...
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7403339 |
Zoom lens and image projection apparatus having the same
A zoom lens comprises a plurality of lens units including a first lens unit disposed most adjacent to an enlargement side and having negative refractive power, wherein one or more lens units of the...
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7391577 |
Projection lens and projector
A projector includes a projection lens having a first lens. The first lens is a plastic lens made by injection molding using a single gate, and has a gate mark on its outer edge. The first lens...
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7385764 |
Objectives as a microlithography projection objective with at least one liquid lens
The invention relates to an objective designed as a microlithography projection objective for an operating wavelength. The objective has a greatest adjustable image-side numerical aperture NA, at...
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7382556 |
Lens module
A lens module ( 800 ) includes a lens barrel ( 20 ), a base ( 10 ), and a temperature compensation module ( 30 ). A first lens ( 201 ) is disposed in the lens barrel. The lens barrel is disposed in...
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7382540 |
Refractive projection objective
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first...
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7382539 |
Projector
A projector includes an illuminating device having a light source device, a first lens array having plural first small lenses, a second lens array having plural second small lenses corresponding to...
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7382538 |
Optical unit for projection display apparatus and projection display apparatus
An optical unit has a first lens holder holding a first lens and a second lens holder holding a second lens, the first lens holder and the second lens holder being mounted on a common lens base....
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7375897 |
Imaging systems
In certain aspects, the disclosure relates to an imaging system, particularly an objective or an illumination device of a microlithography projection-exposure apparatus having an optical axis (OA),...
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7375896 |
Digital light-processing projection apparatus and beam splitter module thereof
A digital light-processing projection apparatus includes a light source, a beam splitter module and an optical combiner module. The beam splitter module is used in conjunction with an optical...
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7372634 |
Reticle-masking objective with aspherical lenses
A reticle-masking (REMA) objective for imaging an object plane onto an image plane has a condenser portion, an intermediate portion, and a field lens portion. The three portions together have no...
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7372633 |
Lithographic apparatus, aberration correction device and device manufacturing method
An aberration correction device useable in lithography comprises two elements, at least one of which is relatively rotatable to the other about, for example, an optical axis. One surface of each...
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7369320 |
Projection system with beam homogenizer
A projection system having a prescribed relationship between the condenser and the projection lens is disclosed, where an imager gate normally coinciding with a projection object plane is between...
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7362508 |
Projection optical system and method for photolithography and exposure apparatus and method using same
Optical Projection System and Method for Photolithography. A lithographic immersion projection system and method for projecting an image at high resolution over a wide field of view. The projection...
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7355799 |
Projection lens and projection display device using the same
A projection lens includes two lens groups, arranged as follows from the magnification side: a first lens group of negative refractive power, a mask, an aperture stop, and a second lens group of...
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7348575 |
Projection optical system, exposure apparatus, and exposure method
A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging...
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7342724 |
Rear projection type image display device
The present invention relates to a rear projection type image display device comprising projection lenses ( 2, 3 ) for projecting an image displayed on an image display element onto a transmission...
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7342723 |
Projection lens and portable display device for gaming and other applications
A portable projection device comprises a housing, a handle, and an optical engine. The optical engine comprises an illumination source, an imaging system, and a wide angle projection lens that...
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7339743 |
Very-high aperture projection objective
A very-high aperture, purely refractive projection objective is designed as a two-belly system with an object-side belly, an image-side belly and a waist ( 7 ) situated therebetween. The system...
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7324169 |
Projection optical system, projection television, and method of manufacturing lens included in projection optical system
Provided are a projection optical system, a projection television, and a method of manufacturing a lens included in the projection optical system. The projection optical system includes lenses for...
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7321473 |
Aperture and projection lens system
An aperture comprising a round filter portion and at least one annular filter portion is provided. The round filter portion and the annular filter portion are forming a round zone. A transmission...
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7321349 |
Display element, display device, and microlens array
A display element having a plurality of pixel portions arranged two-dimensionally with a predetermined pixel pitch and a microlens array including a plurality of microlenses arranged...
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7312928 |
Projection system field lens
A projection system includes a modulator and a field lens. The modulator is to modulate light in accordance with image data. The field lens is to at least partially collect the light modulated by...
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7312847 |
Refractive projection objective for immersion lithography
A purely refractive projection objective suitable for immersion micro-lithography is designed as a single-waist system with five lens groups, in the case of which a first lens group with a negative...
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7312463 |
Projection optical system, exposure apparatus, and exposure method
A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging...
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7310188 |
Projection lens and projection type display device using the same
A projection lens includes, in order from a magnification side, a first lens group, a second lens group and a third lens group. The first lens group includes, in order from the magnification side,...
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7310187 |
Projection objective, especially for microlithography, and method for adjusting a projection objective
A method of adjusting a projection objective permits the projection objective to be adjusted between an immersion configuration and a dry configuration with few interventions in the system, and...
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7309870 |
Projection optical system, exposure apparatus, and exposure method
A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging...
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7307791 |
Head mounted device
A head-mounted display (HMD) comprises a frame for hanging on a user's head, and a display device affixed to the frame. The display device comprises alight source, a driving circuit for generating...
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7303291 |
Illumination apparatus and video projection display system
An illumination apparatus includes: a group of light source segments; a group of condenser lenses arrayed as opposed to the group of light source segments, and a group of rectangular lens elements...
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7301707 |
Projection optical system and method
A refractive projection optical system for imaging a first object into a region of a second object comprises a plurality of lenses disposed along an imaging beam path of the projection optical...
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7298561 |
Optical device
A front group is formed of a negative first lens as a meniscus lens which is convex at the object side and a negative second lens, and a rear group is formed of a biconvex positive third lens, an...
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7295378 |
Zoom optical system
A zoom optical system, in order from a reduction side to a magnification side, includes a first lens unit having positive optical power, a second lens unit having the positive optical power, a...
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RE39911 |
Wide field of view projection lenses for compact projection lens systems employing pixelized panels
A projection lens for use with LCD panels is provided. The lens has a first lens unit which includes a strong negative lens element having an aspherical surface which provides distortion...
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