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7453645 Spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby  
A spectral purity filter includes an aperture, the aperture having a diameter, wherein the spectral purity filter is configured to enhance the spectral purity of a radiation beam by reflecting...
7450312 Optical projection lens system  
An optical projection lens system for microlithography includes in the direction of propagating radiation: a first lens group having positive refractive power, a second lens group having negative...
7443595 Optical system for projector and imaging method thereof  
An optical system for a projector and an imaging method thereof. A light beam from a light source passes through a first lens set and a second lens set sequentially. The light beam having passed...
7436597 Projection lens  
A first lens group having a negative refractive power, an aperture diaphragm, and a second lens group having a positive refractive power are arranged in order from an enlargement side. A reduction...
7435482 Article or transparent component having liquid repellent layer, optical lens having liquid repellent layer and production process thereof, and projection type display apparatus using the lens  
It is an object to form a highly wear-resistant liquid repellent layer on a non-oxide surface. The oxide layer 8 is formed on the non-oxide material 1 surface. The oxide layer 8 is bound to the...
7428105 Objectives as a microlithography projection objective with at least one liquid lens  
The invention relates to an objective designed as a microlithography projection objective for an operating wavelength. The objective has a greatest adjustable image-side numerical aperture NA, at...
7426082 Catadioptric projection objective with geometric beam splitting  
A projection exposure lens has an object plane, optical elements for separating beams, a concave mirror, an image plane, a first lens system arranged between the object plane and the optical...
7426079 Optical system  
At least one exemplary embodiment is directed to A retro focus optical system that is capable of sufficiently correcting and/or reducing various aberrations including the chromatic aberration. The...
7414795 Method for driving display with reduced aging  
A method of driving a display having a plurality of light-emitting elements that change with time or use, comprising the steps of: a) displaying first and second image signals having spatially...
7411737 Projection optical system  
A projection optical system for projecting, while enlarging, an image formed on an image formation surface onto an image projection surface from an oblique direction relative thereto has at least...
7411201 Projection objective for a microlithographic projection exposure apparatus  
A projection objective of a microlithographic projection exposure apparatus has a last optical element on the image side which is plane on the image side and which, together with an image plane of...
7408716 Refractive projection objective for immersion lithography  
A purely refractive projection objective suitable for immersion microlithography is designed as a single-waist system with five lens groups, in the case of which a first lens group with negative...
7405891 Projection apparatus  
A projection apparatus including an optical engine, a ring, a lens and multiple casings is provided. The optical engine is suitable for producing an image light beam to project an image onto a...
7404646 Projection lens apparatus and rear projection type image display apparatus  
A projection lens apparatus includes a plurality of lenses, for enlarging and projecting, onto a screen, an original image displayed on an image generation source. The plurality of lenses are...
7391577 Projection lens and projector  
A projector includes a projection lens having a first lens. The first lens is a plastic lens made by injection molding using a single gate, and has a gate mark on its outer edge. The first lens...
7382539 Projector  
A projector includes an illuminating device having a light source device, a first lens array having plural first small lenses, a second lens array having plural second small lenses corresponding...
7382540 Refractive projection objective  
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first...
7382556 Lens module  
A lens module (800) includes a lens barrel (20), a base (10), and a temperature compensation module (30). A first lens (201) is disposed in the lens barrel. The lens barrel is disposed in the...
7382538 Optical unit for projection display apparatus and projection display apparatus  
An optical unit has a first lens holder holding a first lens and a second lens holder holding a second lens, the first lens holder and the second lens holder being mounted on a common lens base....
7375896 Digital light-processing projection apparatus and beam splitter module thereof  
A digital light-processing projection apparatus includes a light source, a beam splitter module and an optical combiner module. The beam splitter module is used in conjunction with an optical...
7375897 Imaging systems  
In certain aspects, the disclosure relates to an imaging system, particularly an objective or an illumination device of a microlithography projection-exposure apparatus having an optical axis...
7372634 Reticle-masking objective with aspherical lenses  
A reticle-masking (REMA) objective for imaging an object plane onto an image plane has a condenser portion, an intermediate portion, and a field lens portion. The three portions together have no...
7369320 Projection system with beam homogenizer  
A projection system having a prescribed relationship between the condenser and the projection lens is disclosed, where an imager gate normally coinciding with a projection object plane is between...
7355799 Projection lens and projection display device using the same  
A projection lens includes two lens groups, arranged as follows from the magnification side: a first lens group of negative refractive power, a mask, an aperture stop, and a second lens group of...
7342724 Rear projection type image display device  
The present invention relates to a rear projection type image display device comprising projection lenses (2, 3) for projecting an image displayed on an image display element onto a transmission...
7342723 Projection lens and portable display device for gaming and other applications  
A portable projection device comprises a housing, a handle, and an optical engine. The optical engine comprises an illumination source, an imaging system, and a wide angle projection lens that...
7324169 Projection optical system, projection television, and method of manufacturing lens included in projection optical system  
Provided are a projection optical system, a projection television, and a method of manufacturing a lens included in the projection optical system. The projection optical system includes lenses for...
7321349 Display element, display device, and microlens array  
A display element having a plurality of pixel portions arranged two-dimensionally with a predetermined pixel pitch and a microlens array including a plurality of microlenses arranged...
7321473 Aperture and projection lens system  
An aperture comprising a round filter portion and at least one annular filter portion is provided. The round filter portion and the annular filter portion are forming a round zone. A transmission...
7312928 Projection system field lens  
A projection system includes a modulator and a field lens. The modulator is to modulate light in accordance with image data. The field lens is to at least partially collect the light modulated by...
7310188 Projection lens and projection type display device using the same  
A projection lens includes, in order from a magnification side, a first lens group, a second lens group and a third lens group. The first lens group includes, in order from the magnification side,...
7310187 Projection objective, especially for microlithography, and method for adjusting a projection objective  
A method of adjusting a projection objective permits the projection objective to be adjusted between an immersion configuration and a dry configuration with few interventions in the system, and...
7307791 Head mounted device  
A head-mounted display (HMD) comprises a frame for hanging on a user's head, and a display device affixed to the frame. The display device comprises alight source, a driving circuit for generating...
7303291 Illumination apparatus and video projection display system  
An illumination apparatus includes: a group of light source segments; a group of condenser lenses arrayed as opposed to the group of light source segments, and a group of rectangular lens elements...
7301707 Projection optical system and method  
A refractive projection optical system for imaging a first object into a region of a second object comprises a plurality of lenses disposed along an imaging beam path of the projection optical...
7298561 Optical device  
A front group is formed of a negative first lens as a meniscus lens which is convex at the object side and a negative second lens, and a rear group is formed of a biconvex positive third lens, an...
RE39911 Wide field of view projection lenses for compact projection lens systems employing pixelized panels  
A projection lens for use with LCD panels is provided. The lens has a first lens unit which includes a strong negative lens element having an aspherical surface which provides distortion...
7289279 Lithographic objective having a first lens group including only lenses having a positive refractive power  
A projection objective includes a first lens group (G1) of positive refractive power, a second lens group (G2) of negative refractive power and at least one further lens group of positive...
7289270 Projection lens and projection display apparatus  
A projection lens is provided and includes: in order from the object, a first lens group having a negative refractive power and including an aspheric lens and a double-concave lens in this order...
7289277 Relay lens used in an illumination system of a lithography system  
A relay lens is provided in an illumination system for use in microlithography. The relay lens can be used to uniformly illuminate a field at a reticle by telecentric light beams with variable...
7283308 Optical systems for generating three-dimensional images  
In general, in one aspect, the invention features systems that include a spatial light modulator, a scanning optical component configured to direct light from the spatial light modulator along a...
7268952 Catadioptric projection system, and exposure apparatus having the same  
A catadioptric projection system for forming an intermediate image of a first object plural times, and images the intermediate image onto a second object includes at least two deflective...
7262920 Optical element and manufacturing method therefor  
An optical element and a manufacturing method therefor, an exposure apparatus, and a device manufacturing method that can reduce the effect of intrinsic birefringence under high NA conditions....
7259918 Projection device  
A projection device includes an image source unit, a first projecting optical system, an intermediate optical system, and a second projecting optical system. The image displaying area of the image...
7239450 Method of determining lens materials for a projection exposure apparatus  
A method of determining materials of lenses contained in an optical system of a projection exposure apparatus is described. First, for each lens of a plurality of the lenses, a susceptibility...
7239452 Projection optical system  
A projection optical system for performing enlargement projection from a primary image surface on the reduction side to a secondary image surface on the enlargement side has, from the primary...
7239453 Projection optical system and projection exposure apparatus  
A catadioptric projection optical system includes a first optical system, for receiving light from an object, a second optical system, for forming an image of the object on an image plane, and a...
7230770 Projection lenses having color-correcting rear lens units  
Projection lenses for use with pixelized panels (PP) are provided. The projection lenses have a first unit (U1) separated from a positive second unit (U2). The lenses are telecentric on the short...
7221516 Projection lens for a microlithographic projection exposure apparatus  
A projection lens for a EUV microlithographic projection exposure apparatus comprises a diaphragm (BL) which is arranged at a distance (D) in front of a mirror (S2) of the lens. The diaphragm (BL)...
7218453 Projection system, in particular for a microlithographic projection exposure apparatus  
A projection system for imaging an object field onto an image field, including at least two partial objectives (S1, S2); at least one intermediate image field between the partial objectives (S1,...