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7733576 Two-group zoom projection lens and projection display  
A two-group zoom projection lens is provided and includes: in order from a magnification side, a first lens group having a negative refractive power; and a second lens group having a positive...
7733574 Illumination optical apparatus and optical apparatus  
There are provided an illumination optical apparatus and an optical apparatus using this illumination optical apparatus that are capable of efficiently collecting light emitted from a...
7719772 Catoptric objectives and systems using catoptric objectives  
In general, in a first aspect, the invention features a system that includes a microlithography projection optical system. The microlithography projection optical system includes a plurality of...
7715111 Projection zoom lens system and projection type display apparatus  
The projection zoom lens system includes a negative first lens group, a positive second lens group, a third lens group, a positive fourth lens group, a fifth lens group, and a positive sixth lens...
7706075 Projection optical system, exposure apparatus, and device fabrication method  
The present invention provides a projection optical system which projects an image on a first object plane onto a second object plane, comprising at least four optical members which are arrayed in...
7706074 Projection optical system, method of manufacturing projection optical system, exposure apparatus, and exposure method  
A projection optical system provided with at least one of optical members made of a calcium fluoride single crystal, wherein each of the optical members satisfies at least any one of the following...
7701639 Projection type image display apparatus  
A projection-type display apparatus, comprises a front lens group having a plural number of lenses, each having rotationally symmetric surface configuration, a rear lens group, being disposed in...
7701640 Projection optical system and method for photolithography and exposure apparatus and method using same  
An immersion optical system includes a plurality of lenses disposed along a light beam path of the immersion optical system. The plurality of lenses include a liquid immerged lens which is...
7697211 Symmetrical objective having four lens groups for microlithography  
The invention features a system for microlithography that includes a mercury light source configured to emit radiation at multiple mercury emission lines, a projection objective positioned to...
7697210 Wide-angle objective lens system and camera  
A vehicle camera and wide-angle objective lens system are disclosed wherein the wide-angle objective lens has image aberrations or errors that do not deteriorate the detection of obstructions or...
7692868 Lithography projection objective, and a method for correcting image defects of the same  
Projection objectives, as well as related components, systems and methods, are disclosed. In general, a projection objective is configured to image radiation from an object plane to an image...
7679831 Projection objective of a microlithographic projection exposure apparatus  
Projection objectives of micro-lithographic projection exposure apparatuses, as well as related methods and components, are disclosed.
7679806 Method for making optical elements for microlithography, the lens systems obtained by the method and their uses  
The optical elements for ultraviolet radiation, especially for microlithography, are made from cubic granet, cubic spinel, cubic perovskite and/or cubic M(II)- as well as M(IV)-oxides. The optical...
7663806 Projection lens and projection type display device using the same  
A projection lens includes, in order form a magnification side: a first lens group having negative refractive power; and a second lens group having positive refractive power. An aspheric lens is...
7649702 Immersion lithography objective  
An immersion lithography objective has a housing in which at least one first optical element is arranged, a second optical element, which follows the first optical element in the direction of the...
7646541 Backlighting system for a liquid-crystal display screen and corresponding display device  
The invention relates to a backlighting system for a liquid-crystal display screen, comprising: an illumination source producing an illumination beam;an objective illuminated by said illumination...
7637621 Projection optical system, magnification projection optical system, magnification projection apparatus, and image projection apparatus  
A projection optical system for use in an image projection apparatus illuminating an image display panel forming an image in accordance with a modulating signal with illumination light from a...
7626764 Projecting lens system  
A projecting lens system includes a first lens positive in power, a second lens negative in power, a third lens positive in power, and a fourth lens positive in power. The projecting lens system...
7612946 Wide-angle lenses  
The present invention provides new projection schemes for wide angle imaging lenses rotationally symmetric about optical axis wherein the field of view of lenses and the size of image sensors are...
7609454 Imaging lens system with high resolution and compact size  
An imaging lens includes, in the order from the object side to the image side, a first lens of positive refraction power, a second lens of negative refraction power, a third lens of positive...
7589903 Projection objective adapted for use with different immersion fluids or liquids, method of conversion of such and production method  
The invention relates to a projection objective (6), in particular for applications in microlithography, serving to project an image of an object (3) arranged in an object plane (4) onto a...
7589904 Projection type image display device  
Both ends of a transparent cover which is formed of a curved member are fitted to a lens guard and a mirror guard, and a free-shaped surface mirror and a free-shaped surface lens are housed in a...
7586697 Lens device and lens holding method  
A lens device comprises a lens element having round depressions formed in the back thereof and a lens barrel provided with round projections formed correspondingly in position to the round...
7586687 Projecting optical unit and projecting type image display apparatus therewith  
A projection image display device is disclosed in which a trapezoidal distortion and/or aberration are restrained when an image is enlarged and projected obliquely onto a screen. An image...
7580207 Optical apparatus comprising an optical component and an adjustment device and method for influencing a polarization state of the optical component  
An optical apparatus comprises an optical component having at least one optical surface and a first optical axis, a socket in which said optical component is mounted, first manipulators arranged...
7580194 Projection lens with high resolution and reduced overall length  
An exemplary projection lens includes, in this order from the screen-side thereof, a negative lens group having negative refraction of power, and a positive lens group having positive refraction...
7576923 Zoom lens and image projection apparatus having the same  
A zoom lens comprises a plurality of lens units including a first lens unit disposed most adjacent to an enlargement side and having negative refractive power, wherein one or more lens units of...
7570431 Optical arrangement of autofocus elements for use with immersion lithography  
An autofocus unit is provided to an immersion lithography apparatus in which a fluid is disposed over a target surface of a workpiece and an image pattern is projected onto this target surface...
7558002 Projection zoom lens and projection-type display device  
A negative first group G1 is fixed when a power of the projection zoom lens varies and has a focusing function. A positive second group G2, a positive or negative third group G3, a positive fourth...
7557996 Projection objective  
A projection objective for imaging a pattern arranged in an object surface of the projection objective onto an image surface of the projection objective using ultraviolet radiation has a plurality...
7557997 Immersion objective optical system, exposure apparatus, device fabrication method, and boundary optical element  
In a liquid immersion type projection optical system for forming an image of a first plane on a second plane, an optical path between the optical system and the second plane is filled with a...
7551361 Lithography lens system and projection exposure system provided with at least one lithography lens system of this type  
An optical imaging system for a microlithography projection exposure system is used for imaging an object field arranged in an object plane of the imaging system into an image field arranged in an...
RE40743 Projection exposure system having a reflective reticle  
A projection exposure system for microlithography includes an illuminating system (2), a reflective reticle (5) and reduction objectives (71, 72). In the reduction objective (71, 72), a first beam...
7545572 Projection objective with fixed focal length formed of several subassemblies for digital projection  
The invention relates to a projection objective with fixed focal length for digital projection, characterized by the following features: a first optical subassembly of several lenses seated in a...
7542217 Beam reshaping unit for an illumination system of a microlithographic projection exposure apparatus  
A beam reshaping unit for an illumination system of a microlithographic projection exposure apparatus includes a first beam reshaping element having a first beam reshaping surface and a second...
7538951 Robust family of microdisplay projection lenses  
The present invention provides a projection lens system comprising a double-gauss architecture with aspheric lens elements at the beginning and end of the lens system with a system stop...
7538952 Lithographic apparatus, aberration correction device and device manufacturing method  
An aberration correction device useable in lithography comprises two elements, at least one of which is relatively rotatable to the other about, for example, an optical axis. One surface of each...
7529036 Projection zoom lens and projection display device  
A projection zoom lens has three negative, positive, and position group configuration in order from a magnification side. A first group G1 includes a positive L1, a negative meniscus lens L2, a...
7529033 Projection lens device and projection display apparatus using the same  
A projection lens device includes, in order from a magnification side, a first lens group G1 having a negative refractive power, and a second lens group G2 having a positive refractive power. The...
7529032 Projection optical system and image display apparatus  
A disclosed projection optical system for projecting and forming an enlarged image of an image displayed in a planar manner as an object includes: a lens system including, from an object side, at...
7511890 Refractive optical imaging system, in particular projection objective for microlithography  
A refractive optical imaging system for imaging an object field arranged in an object surface of the imaging system into an image field arranged in an image surface of the imaging system on a...
7511897 Projector optical system  
A projector optical system for forming a real image by projecting an image of a display element is constituted by, sequentially from a projection side, an aperture diaphragm; and a first lens...
7495840 Very high-aperture projection objective  
A very high-aperture, purely refractive projection objective having a multiplicity of optical elements has a system diaphragm (5) arranged at a spacing in front of the image plane. The optical...
7492509 Projection optical system  
A projection optical system comprises a plurality of lenses disposed along an optical axis of the projection optical system; wherein the plurality of lenses is dividable into four non-overlapping...
7474469 Arrangement of optical elements in a microlithographic projection exposure apparatus  
The invention relates to an arrangement of optical elements in a microlithographic projection exposure apparatus, particularly in a projection objective of a microlithographic projection exposure...
7474468 Off-axis projection optics and extreme ultraviolet lithography apparatus employing the same  
Off-axis projection optics that includes first and second mirrors positioned off-axis and sharing a confocal point that are arranged to reduce linear astigmatism. If a distance between an object...
7471465 Optical apparatus  
To provide a high-brightness, small, low-cost optical apparatus which covers a wide-angle to super-wide-angle region and which reliably corrects various aberrations with a small number of lenses....
7466489 Projection objective having a high aperture and a planar end surface  
A projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective suitable for microlithography projection...
7460309 Variable lens and exposure system  
A lithography apparatus comprising variable lenses is described. These variable lenses are included in a microlens array. At least some of the lenses have two or more immiscible liquids whose...
7457043 Projection exposure system  
A projection exposure system, intended in particular for microlithography, is used for generating, in an image plane, an image of a mask arranged in an object plane. The projection exposure system...