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7453643 |
Blazed diffractive optical element and projection objective for a microlithographic projection exposure apparatus
A diffractive optical element has a support and a plurality of diffraction structures. The latter are applied on the support and are binary blazed by being split into substructures so that the...
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7436490 |
Exposure apparatus using blaze type diffraction grating to diffract EUV light and device manufacturing method using the exposure apparatus
This invention generally relates to an exposure apparatus and an exposure method using EUV light. In one preferred form of the present invention, the exposure apparatus is arranged to expose a...
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7433290 |
Complex objective lens, optical head, optical information apparatus, computer, optical disk player, car navigation system, optical disk recorder, and optical disk server
A complex objective lens composed of a hologram and an objective lens, capable of realizing stable and high-precision compatible reproducing/recording of a BD with a base thickness of about 0.1 mm...
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7420734 |
Planar waveguide grating devices having controlled polarization dependent sensitivity and method of manufacturing thereof
Diffraction gratings are formed from grooves each having a reflective facet and a non-reflective facet. The net reflection of TE (Transverse Electric) and TM (Transverse Magnetic) polarizations...
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7408712 |
Polarization-selectively blazed, diffractive optical element
A polarization-selectively blazed, diffractive optical element including multiple contiguous blaze structures extending along a given geometrical path. Each structure has a width perpendicular to...
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7376305 |
Echelle gratings with low Polarization Dependent Loss (PDL) using metal coating on the reflecting facets only
An Echelle grating has alternate first ( 1 a ) and second ( 1 b ) sets of facets ( 1 ). The first set of facets ( 1 a ) is operative to reflect incident light ( 4 ) for diffraction and the second...
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7336420 |
Diffractive optical element, illumination system comprising the same, and method of manufacturing semiconductor device using illumination system
An illumination system including a diffractive optical element (DOE) having an uneven surface that produces an illumination shape. The DOE comprising an uneven surface that produces a multipole...
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7315419 |
Dispersive element, diffraction grating, color display device, demultiplexer, and diffraction grating manufacture
In a transmission grating as a dispersive element, diffraction efficiency is enhanced and manufacturing costs are considerably reduced. A dispersive element includes resin members for forming a...
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7289258 |
Light modulator having variable blaze diffraction grating
The present invention relates, in general, to a light modulator having a variable blaze diffraction grating and, more particularly, to a light modulator having a variable blaze diffraction grating,...
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7271957 |
Computer-generated hologram and its fabrication process, reflector using a computer-generated hologram, and reflective liquid crystal display
The invention provides a computer-generated hologram which can be viewed in white at the desired viewing region and a reflective liquid crystal display using the same as a reflector. The...
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7247826 |
Optical pickup apparatus
An optical path coupling member aligns an optical axis directed to a light condensing member of the first wavelength light having a shortest wavelength with that of the third wavelength light...
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7236302 |
Diffraction optical element
In a diffraction optical element in which a plurality of diffraction gratings are laminated and the maximum difference of length among optical paths of light passing through the plurality of...
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7233443 |
Arrangement for WDM multiplexing and demultiplexing
An arrangement for dispersing light comprises a blazed diffraction grating and a mirror. The blazed diffraction grating comprises a grating plane and a multiplicity of blazed facets. Each blazed...
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7218449 |
Optical device for scanning an optical record carrier
An optical device for scanning an optical record carrier ( 20 ) has a radiation source ( 25 ) that can emit two radiation beams of different wavelength along different optical paths ( 28, 29 ). The...
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7215471 |
Diffractive optical element, illumination system comprising the same, and method of manufacturing semiconductor device using illumination system
An illumination system including a diffractive optical element (DOE) having an uneven surface that produces an illumination shape. The DOE comprising an uneven surface that produces a multipole...
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7187499 |
Optical grating and method for the manufacture of such an optical grating
An optical grating has a multiplicity of parallel diffraction structures, which are arranged on a support defining a base face. Each structure has a blaze flank that is inclined substantially at...
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7149030 |
Diffractive optical element and also optical arrangement comprising a diffractive optical element
A diffractive optical element has a plurality of diffraction structures for a certain wavelength. These each have a width measured in the plane of the diffractive optical element and a height...
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7145722 |
Optical filter and method of manufacturing thereof
Novel structure of the optical elements (i.e. filter) to be operated in the long, mid, and near infrared wavelengths of lights is provided. The filter can offer very narrow linewidth, and high...
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7139127 |
Diffractive optical element
A diffractive optical element contains a multiplicity of binary blazed diffraction structures, which substantially extend mutually parallel in a longitudinal direction. Perpendicularly to the...
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7139126 |
Optical element, lens and optical head device
An optical element includes a diffraction grating by which both a first laser beam and a second laser beam are diffracted. A diffraction performance of the diffraction grating is expressed by an...
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7102824 |
Optical element for efficient sensing at large angles of incidence
An optical element is provided that may be used for collecting optical radiation incident at large angles of incidence. The element may include a grating window formed of grating elements that may...
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7092161 |
Optical arrangement, optical grating and method for the manufacture of such an optical grating
An optical grating has a multiplicity of parallel diffraction structures, which are arranged on a support defining a base face. Each structure has a blaze flank that is inclined substantially at...
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7075722 |
Diffractive optical element and optical system having the same
In a diffractive optical element and a polarization separation element using this diffractive optical element, incident light can be effectively separated for the respective polarization directions...
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7057819 |
High contrast tilting ribbon blazed grating
The light modulator includes elongated elements and a support structure coupled to the elongated elements. Each element includes one or more lengthwise slits within an active optical area, and a...
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7042642 |
Diffractive optical element
A diffractive optical element includes a first diffractive element and a second diffractive element that is made of a material different from that of the first diffractive element and is cemented...
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7042625 |
Light modulator having digital micro blaze diffraction grating
Disclosed is a light modulator having a digital micro blaze diffraction grating. In the light modulator, a fine protrusion is formed on an edge of a lower surface of a diffraction member so that a...
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7042611 |
Pre-deflected bias ribbons
A modulator for and a method of modulating an incident beam of light including means for supporting a plurality of active elements and a plurality of bias elements, each active and bias element...
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7019883 |
Dynamic optical filter having a spatial light modulator
An dynamic optical filter 10 is provided to selectively attenuate or filter a wavelength band(s) of light (i.e., optical channel(s)) or a group(s) of wavelength bands of an optical WDM input...
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6995910 |
Diffraction grating with reduced polarization-dependent loss
A diffraction grating that achieves high diffraction efficiency at all polarizations for optical signals at telecommunications wavelengths is provided. The diffraction grating has a substrate and a...
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6975458 |
Method and apparatus for transformation of a gaussian laser beam to a far field diffraction pattern
A method and apparatus for converting a Gaussian laser beam into a propagating far field diffraction pattern using an off-axis diffractive optic. This propagating far field pattern is focused by a...
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6958859 |
Grating device with high diffraction efficiency
A grating structure with a dielectric coating is disclosed that operates efficiently away from the blaze angle in low order with a high diffraction efficiency and high wavelength dispersion. Such...
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6951715 |
Optical detection of label-free biomolecular interactions using microreplicated plastic sensor elements
Methods and compositions are provided for detecting biomolecular interactions. The use of labels is not required and the methods can be performed in a high-throughput manner. The invention also...
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6947213 |
Diffractive optical element that polarizes light and an optical pickup using the same
A first diffractive optical element pattern with a pattern pitch that is no greater than a wavelength of incident light is formed on a first main surface of substrate such as a glass plate. Second...
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6943950 |
Two-dimensional blazed MEMS grating
A method for assuring a blazed condition in a DMD device used in telecommunications applications. By meeting certain conditions in the fabrication and operation of the DMD, the device can achieve a...
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6934084 |
Thinner, lighter and lower aberration prisms for ophthalmic applications
Novel optical devices, which are referred to as composite prisms in this document, have been designed, produced and tested. They have the potential to be useful for a number of vision related...
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6930834 |
Method of manufacturing diffractive optical element
A method of manufacturing a diffractive optical element, including a process for forming a resist mask of blazed shape upon a substrate and for etching the substrate by use of the resist mask so...
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6924934 |
Diffractive safety element
A security element ( 2 ) comprising a plastic laminate ( 1 ) has a surface pattern which is composed mosaic-like at least from surface elements, wherein in the surface elements a reflecting...
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6922286 |
Off-axis diffractive beam shapers and splitters for reducing sensitivity to manufacturing tolerances
A diffractive element used in conjunction with a grating to move a desired order beam off-axis, thereby reducing interference by undesired orders. Use of the off-axis grating allows a more uniform...
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6898010 |
Beam-shaping device, optical disc device, and fabrication method of beam-shaping device
The present invention provides the beam-shaping device which includes a first surface on which is formed a first grating through which a beam of light emitted from a light source on an optical axis...
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6882482 |
Liquid-crystal lens and method and apparatus for driving the same
A liquid-crystal lens includes a hologram liquid-crystal element having a liquid crystal which provides a light beam transmitting therethrough with a phase change so as to have a wavefront of a...
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6873463 |
Diffractive optical element and optical system having the same
Disclosed is a diffractive optical element which is made of at least two materials of different dispersions and which includes at least two diffraction gratings being accumulated one upon another,...
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6865025 |
Aberration compensating optical element, optical system, optical pickup device, recorder and reproducer
An aberration compensating optical element includes: a diffractive structure having a plurality of ring-shaped zone steps formed into substantially concentric circles on at least one surface of the...
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6859319 |
Optical element, mold for molding optical element and optical pickup device
An optical element including a binary blaze grating formed thereon, wherein the binary blaze grating is formed so as to have step differences formed by a number of levels produced by mechanical...
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6859317 |
Diffraction grating for wavelength division multiplexing/demultiplexing devices
A diffraction grating for optical communication is disclosed. The diffraction grating includes a substrate and a reflective material adjacent the substrate, wherein one or more input optical...
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6844973 |
Plane diffraction grating based on surface normal rotation and its application to an optical system
A plane diffraction grating based on surface normal rotation according to the present invention is designed so that the profile of the grooves at a radial area is determined depending on a...
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6839173 |
Reflection type diffraction grating
A reflection type diffraction grating according to the present invention has a structure in which a metal film as a first layer with reflectance not lower than 30% with respect to the wavelength of...
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6839172 |
Enhanced sampling rate in time domain imaging using MOEMS scanning optical delay line
Electromagnetic waves in wide frequency ranges up to photonics have been used for applications to time-domain imaging (TDI). Realistic time domain imaging requires a rapid optical delay line on the...
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6831783 |
Diffractive optical element and optical system
A diffractive optical element includes a first layer having a relief-type grating, a second layer having a relief-type grating, and a third layer having a relief-type grating. The first, second and...
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6825988 |
Etched silicon diffraction gratings for use as EUV spectral purity filters
An extreme ultraviolet (EUV) lithography system may include a spectral purity filter including diffractive gratings. The diffractive gratings may be formed in a silicon substrate using anisotropic...
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6822796 |
Diffractive optical element
A diffractive optical element has a diffraction grating formed by periodic depressions and projections on the surface of a substrate and a dielectric multilayer film on the diffraction grating. The...
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