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7453641 |
Structures and methods for reducing aberration in optical systems
An optical system includes at least one cubic crystalline optical element aligned along an optical axis, the at least one cubic crystalline optical element being birefringent and imparting...
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7445883 |
Lithographic printing with polarized light
The present invention provides systems and methods for improved lithographic printing with polarized light. In embodiments of the present invention, polarized light (radially or tangentially...
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7413317 |
Polarized UV exposure system
A light exposure system is used to expose an alignment layer formed of anistropically absorbing molecules so as to allow alignment of subsequently applied liquid crystal polymer (LCP) molecules....
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7411656 |
Optically polarizing retardation arrangement, and a microlithography projection exposure machine
A retardation arrangement for converting an input radiation beam, incident from an input side of the retardation arrangement, into an output radiation beam which has over its cross section a...
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7403267 |
System and method for providing modified illumination intensity
A system and method utilize a birefringence inducer to induce or change birefringence of an optical element to change an index of refraction within the optical element to produce a...
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7382536 |
Objective with fluoride crystal lenses
An objective for a microlithography projection system has at least one fluoride crystal lens. The effects of birefringence, which are detrimental to the image quality, are reduced if the lens axis...
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7381339 |
Increased yield of cubic crystalline optical elements by crystal orientation
Increased yield of optical elements from cubic crystal rods, such as made of calcium fluoride, is made possible by orienting the optical elements for supporting the propagation of light along one...
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7339736 |
Light polarizing film
A light polarizing film and method of making same includes a linear polarizer having a first surface and a second surface and having a polarization direction, an optical retarder comprising a...
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7329006 |
Projection system having low astigmatism
Generally, the present invention relates to an apparatus for reducing astigmatism in a projection system that is particularly well suited to reducing astigmatism in LCD projection systems. A...
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7327518 |
Attenuator for high-power unpolarized laser beams
A method for attenuating an unpolarized laser beam includes separating the laser beam into two plane-polarized beams. The plane-polarized beams are polarization rotated. Each of the...
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7321465 |
Method of optimizing an objective with fluoride crystal lenses, and objective with fluoride crystal lenses
A numerical optimizing method serves to reduce harmful effects caused by intrinsic birefringence in lenses of a fluoride crystal material of cubic crystal structure in an objective, particularly a...
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7301138 |
Method and apparatus for dual polarization imaging
An imaging system and method for dual polarization imaging is provided. In one implementation, an imaging system includes a field stop located at a first image plane for limiting an incident light...
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7286288 |
Method and system for flexible and cost effective dynamic tilt gain equalizer
Method and system for flattening tilt gain with a digital title gain equalizer (“DTGE”) constructed with a linear tilt optical filter (“LTOF”). In a first embodiment, a DTGE flattens tilt...
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7283302 |
Wavelength filter and wavelength monitor device
A wavelength filter includes a solid material that is optically transparent and including a pair of planar surfaces substantially parallel to each other; and a supporting member that supports the...
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7268944 |
Optical interleaver, filter cell, and component design with reduced chromatic dispersion
An optical interleaver for use in a range of telecommunications applications including optical multiplexers/demultiplexers and optical routers. The optical device includes an optical processing...
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7264852 |
Liquid crystal panel and liquid crystal display apparatus
A liquid crystal panel having improved contrast ratio in an oblique direction and good display evenness without causing shift or unevenness in retardation values due to shrinkage stress of a...
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7259914 |
Attenuator for high-power unpolarized laser beams
A method for attenuating an unpolarized laser beam includes separating the laser beam into two plane-polarized beams. The plane-polarized beams are polarization rotated. Each of the...
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7252865 |
Protective films containing compatible plasticizer compounds useful in polarizing plates for displays and their method of manufacture
Polymer films comprising plasticizer compounds represented by Structure 1 as described in the specification are useful as protective films in polarizing plates for display applications. Methods of...
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7239447 |
Objective with crystal lenses
An objective, in particular a projection objective for a microlithography projection-exposure installation, with at least one fluoride crystal lens is disclosed. A reduction in the detrimental...
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7239446 |
Optical reduction system with control of illumination polarization
An optical reduction system with polarization dose sensitive output for use in the photolithographic manufacture of semiconductor devices having variable compensation for reticle retardation before...
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7227686 |
Tunable PMD emulators and compensators
Tunable PMD emulators and compensators for producing different PMD profiles with an adjustable average DGD value.
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7223452 |
Optical film, method for producing the same, and image display device using the same
An optical film, which includes a laminate of a base and a birefringent layer, and which is excellent in adhesiveness between the base and the birefringent layer, is provided. The birefringent...
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7180667 |
Objective with fluoride crystal lenses
An objective for a microlithography projection system has at least one fluoride crystal lens. The effects of birefringence, which are detrimental to the image quality, are reduced if the lens axis...
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7169447 |
Achromatic quarter wave film
An achromatic quarter wave film (AQWF) comprising at least one quarter wave film (QWF) and at least one half wave film (HWF), each of said QWF and HWF comprising polymerized or vitrified...
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7165850 |
Phase-compensated cube corner in laser interferometry
A phase-compensating cube comer retroreflector includes three rear reflecting surfaces. All three rear reflecting surfaces can be coated with a phase-compensating film stack that induces 2nπ phase...
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7154669 |
Method and system for correction of intrinsic birefringence in UV microlithography
Systems and methods for improved correction of intrinsic birefringence are provided. Two pairs of optical elements correct for intrinsic birefringence of optical materials. A combination of design...
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7154667 |
Birefringent networks
A birefringent network can be formed from a pair of beam directing elements that sandwich a birefringent filter. One of the beam director elements can be a polarizing beam splitter and the other of...
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7154573 |
Electro-optical device and electronic apparatus including the same
To provide an electro-optical device displaying high-contrast images in all directions due to the orthogonality of the polarization axes of the polarizers by improving the structure of the...
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7145720 |
Objective with fluoride crystal lenses
An objective for a microlithography projection system has at least one fluoride crystal lens. The effects of birefringence, which are detrimental to the image quality, are reduced if the lens axis...
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7133619 |
Polarization mode dispersion compensation module
An operation unit of a PMD compensation module includes a PBS (polarization beam splitter), a compensating part and a combiner. The PBS separates an optical input into a first polarized signal and...
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7133202 |
Method and system for flexible and cost effective dynamic tilt gain equalizer
Method and system for flattening tilt gain with a digital title gain equalizer (“DTGE”) constructed with a linear tilt optical filter (“LTOF”). In a first embodiment, a DTGE flattens tilt...
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7128952 |
Optical film
An optical film including a transparent polymer film (b) and a birefringent layer (a) formed of a polymer and laminated above the transparent polymer film (b) is provided. The birefringent layer...
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7126765 |
Objective with fluoride crystal lenses
An objective for a microlithography projection system has at least one fluoride crystal lens. The effects of birefringence, which are detrimental to the image quality, are reduced if the lens axis...
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7099082 |
Method for producing optical compensating film, optical compensating film, circularly polarizing plate, and liquid crystal display
Provided is a method for producing an optical compensating film, which comprises stretching a cellulose acetate film, the cellulose acetate film having a water content of 2.0 to 20.0% by weight,...
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7099081 |
Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor
A small-spot imaging, spectrometry instrument for measuring properties of a sample has a polarization-scrambling element, such as a birefringent plate depolarizer, incorporated between the...
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7097306 |
Projection device and liquid crystal panel unit for use in the projection device
A projection device includes on a chassis a liquid crystal panel for irradiation with light from a light source, a polarizing plate opposing the liquid crystal panel, and an optical compensation...
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7090964 |
Lithographic printing with polarized light
The present invention provides systems and methods for improved lithographic printing with polarized light. In embodiments of the present invention, polarized light (radially or tangentially...
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7088511 |
Light polarizing film and method of making same
A light polarizing film and method of making same includes a linear polarizer having a first surface and a second surface and having a polarization direction, an optical retarder comprising a...
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7075721 |
Compensator for radially symmetric birefringence
A birefringence correction is incorporated into an optical imaging system for imaging with deep ultraviolet light. Optical elements which exhibit an intrinsic birefringence with deep ultraviolet...
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7075720 |
Structures and methods for reducing polarization aberration in optical systems
An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are...
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7075719 |
Optical filter and optical device provided with this optical filter
Light emitted from a taking lens 20 enters a first birefringent plate 1 a to be spatially divided along a first direction extending perpendicular to the direction in which the light advances to...
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7075696 |
Correction of birefringence in cubic crystalline optical systems
A lithographic apparatus includes a projection system, which includes a plurality of cubic crystalline optical elements that each impart retardance to a beam of radiation. The optical elements are...
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7072102 |
Methods for reducing polarization aberration in optical systems
An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are...
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7061671 |
Method for evaluating image formation performance
The present invention accomplishes an evaluation of image formation performance in which the influence of a coat is accurately reflected. According to the present invention, for the evaluation of...
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7053988 |
Optically polarizing retardation arrangement, and microlithography projection exposure machine
A retardation arrangement for converting an input radiation beam, incident from an input side of the retardation arrangement, into an output radiation beam which has over its cross section a...
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7046443 |
Anisotropic light scattering element, anisotropic light scattering polarizing plate using the same, and image display device using the same
The present invention provides an anisotropic light scattering element that is further improved in controlling of the viewing angle and also reduced in the thickness. The anisotropic light...
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7035009 |
Apparatus and method for controlling polarization in an optical communications medium
An exemplary polarization controller includes a first optical element having a first optical axis and configured to receive light having a first phase, a second optical element having a second...
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7031077 |
Optical reduction method with elimination of reticle diffraction induced bias
An optical reduction system for use in the photolithographic manufacture of semiconductor devices having one or more quarter-wave plates operating near the long conjugate end. A quarter-wave plate...
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7012748 |
Method for adjusting a wave plate for an imaging system
A compact mounting for a wave plate permits convenient rotational adjustment of the wave plate through an angle of at least one-half revolution to exploit asymmetry in the optical characteristics...
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7009769 |
Correction of birefringence in cubic crystalline optical systems
A photolithography tool including an optical system for transmitting a beam of radiation toward a substrate is presented. The optical system includes a plurality of calcium fluoride lens elements,...
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