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7450301 Reflective projection lens for EUV-photolithography  
A projection lens for imaging a pattern arranged in an object plane onto an image plane using electromagnetic radiation from the extreme-ultraviolet (EUV) spectral region has several imaging...
7450299 Broadband telescope  
The light of a broad energy band can be observed by reflecting the light of the broad energy band, for example, the light from the visible light region to the x-ray region at a high reflectance...
7436589 Reflective-type projection optical system and exposure apparatus equipped with said reflective-type projection optical system  
A reflective-type projection optical system has 8 reflective mirrors that form a reduced image of a first surface on a second surface. A first reflective imaging optical system (G 1 ) forms an...
7414781 Catoptric objectives and systems using catoptric objectives  
In general, in a first aspect, the invention features a system that includes a microlithography projection optical system. The microlithography projection optical system includes a plurality of...
7408703 Wide-angle imaging optical system and wide-angle imaging apparatus surveillance imaging apparatus vehicle-mounted imaging apparatus and projection apparatus using the wide-angle imaging optical system  
A wide-angle imaging optical system includes a refractive optical system ( 3 ), a reflective optical system, and an image-forming optical system ( 5 ). The reflective optical system includes a...
7390101 Off-axis two-mirror re-imaging infrared telescope  
An infrared telescope utilizes two mirrors in an off-axis, eccentric-pupil, re-imaging configuration. To improve the image quality of traditional two mirror telescopes, the reflective surfaces of...
7385756 Catadioptric projection objective  
A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part...
7385755 Adjustable mirror  
An adjustable mirror includes first and second fluids in contact over a meniscus extending transverse an optical axis. The fluids are substantially immiscible and have different indices of...
7372624 8-mirror microlithography projection objective  
A projection objective provides a light path for a light bundle from an object field in an object plane to an image field in an image plane. The projection objective includes eight mirrors. The...
7359115 Sample observation method, microscope, and solid immersion lens, optical contact liquid used in the method  
Optical contact liquid containing an amphipathic molecule is dripped onto a semiconductor device which is a sample as an inspection object (S 104 ), and a solid immersion lens is set thereon (S 105...
7348575 Projection optical system, exposure apparatus, and exposure method  
A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging...
7347566 Projection lens unit and rear projection type image display system  
An inexpensive projection lens unit in a rear projection type image display system, having a short focal distance (wide angle of viewing field), high focus and high contrast, and as well, including...
7344282 Optical sheet and backlight assembly of liquid crystal display with the same  
An optical sheet includes a substrate onto which light is incident, and a convex part protruded from the substrate by a predetermined thickness. A thickness of the convex part increases from an...
7333271 Dichroic mangin mirror  
An optical system having at least one dichroic Mangin mirror. The optical system has a front-end optical sub-system or a light source operative to emit an optical beam. The optical beam is...
7312463 Projection optical system, exposure apparatus, and exposure method  
A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging...
7309870 Projection optical system, exposure apparatus, and exposure method  
A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging...
7236297 Gregorian optical system with non-linear optical technology for protection against intense optical transients  
An optical system comprising a concave primary mirror reflects light through an intermediate focus to a secondary mirror. The secondary mirror re-focuses the image to a final image plane. Optical...
7199922 Reflective projection lens for EUV-photolithography  
A projection lens for imaging a pattern arranged in an object plane onto an image plane using electromagnetic radiation from the extreme-ultraviolet (EUV) spectral region has several imaging...
7186004 Homogenizing optical sheet, method of manufacture, and illumination system  
An optical sheet that accepts light transmitted at or within a specific entrance cone angle that then redirects and transmits the light within an exit cone that is substantially normal to the...
7180659 Multiple field cassegrain-type optical combination  
The invention is directed to multispectral multifield optical combinations that are intended to be integrated into an optical device. A Cassegrain-type multifield optical combination has an image...
7177076 8-mirror microlithography projection objective  
There is provided a microlithographic projector lens for EUV-lithography with a wavelegth in a range of 10–30 nm, an incident aperture diaphragm and an emergent aperture diaphragm for the...
7175289 Optical relay  
An optical relay comprising a first mirror and a second mirror is provided. The first mirror is configured to receive modulated light from a first spatial light modulator and reflect the modulated...
7172292 Projection lens unit and rear projection type image display system  
An inexpensive projection lens unit in a rear projection type image display system, having a short focal distance (wide angle of viewing field), high focus and high contrast, and as well, including...
7161735 Projection optical system, exposure apparatus and device fabricating method  
A projection optical system is provided for projecting a pattern on an object surface onto an image surface in a reduced size. The projection optical system has six reflective surfaces that...
7130114 Catoptric optical system  
There is provided a compact, strong and high-performance catoptric optical system. This catoptric optical system has plural optical curved reflective surfaces. A gap between a pair of reflective...
7130018 Catoptric projection optical system, exposure apparatus and device fabrication method  
A catoptric projection optical system for projecting a reduced size of a pattern on an object surface onto an image surface includes eight mirrors and forms an intermediate image between the sixth...
7102804 Optical data communication  
The present invention employs a method for transmitting and/or receiving high data bandwidths at reduced cost by employing a holographically corrected telescope for transmitting or receiving...
7099077 Optical system having three fields of view using two all-reflective optical modules  
An all-reflective optical system includes an all-reflective afocal module, an all-reflective imaging module and an all-reflective switching structure being operated to direct a light beam through...
7079314 Catadioptric optical system and exposure apparatus equipped with the same  
A catadioptric optical system comprising a first imaging optical system for forming an intermediate image of a first plane surface, a second imaging optical system for forming a final image of the...
7046338 EUV condenser with non-imaging optics  
An illumination system and condenser for use in photolithography in the extreme ultraviolet wavelength region has a first non-imaging optic element collecting electromagnetic radiation from a...
7038846 Solid catadioptric lens with a single viewpoint  
A solid catadioptric lens with a single viewpoint has a spherical refractive surface with a center C on an optical axis of the lens. An ellipsoidal reflective surface of the lens faces the...
7027219 Method and system for mirror telescope configuration  
The invention provides a telescope system for inputting an image and presenting the image to a user. The telescope system includes a first array of flat mirrors including a plurality of first...
7021778 Compact-depth spiral telescope and method of making and using the same  
The invention according to a first aspect may include an optical system. The optical system may have an axial axis. This optical system may have a number of primary mirror segments. A number of...
6985286 Catadioptric optical system and exposure apparatus having the same  
A projection exposure lens system has an object side catadioptric system, and intermediate image and a refractive lens system. The refractive lens system from its intermediate image side and in the...
6975443 Multi-beam pattern generator  
A scanning pattern generator and a method for microlithographic multi-beam writing of high precision patterns on a photosensitive substrate ( 11 ), the system comprising a light source ( 1 ),...
6954565 Coupling configuration for optically coupling an optical conductor to an opto-receiver  
A coupling configuration for connecting an optical conductor to an opto-receiver has a parabolic mirror or a spherical mirror that reflects light emerging from the optical conductor onto a...
6912042 6-mirror projection objective with few lenses  
There is provided a projection objective for wavelengths of ≦193 nm for imaging an object field in an object plane into an image field, in an image plane. The projection objective includes a...
6878407 Suede-like fabric  
The suede-like fabric according to the invention is produced by the process which comprises the steps of supplying aqueous chemical composed of acrylic resin, emulsifying agent and water to...
6850361 Wide-angle catoptric system  
A bright wide-angle catoptric system is provided which will not deteriorate the picture quality of images. The wide-angle catoptric system includes, successively from an object, a secondary...
6848794 Reflecting optical element, optical system and optical apparatus using reflecting optical element, projection type image display apparatus, and method for fabricating reflecting optical element  
A reflecting optical element is disclosed which includes the following articles. The reflecting optical element is constituted by: a base member having a continuous curved-surface portion,...
6842298 Broad band DUV, VUV long-working distance catadioptric imaging system  
A high performance objective having very small central obscuration, an external pupil for apertureing and Fourier filtering, loose manufacturing tolerances, large numerical aperture, long working...
6842280 Optical element and optical apparatus  
An optical element comprising an object-side imaging element for imaging an object on an intermediate image plane in an optical path before a final image plane and an image-side imaging element for...
6801357 Ultra-broadband UV microscope imaging system with wide range zoom capability  
An ultra-broadband ultraviolet (UV) catadioptric imaging microscope system with wide-range zoom capability. The microscope system, which comprises a catadioptric lens group and a zooming tube lens...
6775073 Real image type zoom finder  
The invention relates to a compact, high-performance yet wide-field real image type zoom finder comprising a positive objective optical system Ob and a positive eyepiece optical system Ep and...
6760095 EUV condenser with non-imaging optics  
An illumination system and condenser for use in photolithography in the extreme ultraviolet wavelength region has a first non-imaging optic element collecting electromagnetic radiation from a...
6757051 Projection optical system, manufacturing method thereof, and projection exposure apparatus  
A projection optical system forms an image of an object in a first plane onto a second plane. The projection optical system has an optical element group including at least one refractive member and...
6717722 Catadioptric optical system and exposure apparatus having the same  
A projection exposure lens system has an object side catadioptric system, and intermediate image and a refractive lens system. The refractive lens system from its intermediate image side and in the...
6710917 8-mirror microlithography projection objective  
A projection objective provides a light path for a light bundle from an object field in an object plane to an image field in an image plane. The projection objective comprises a first mirror (S 1...
6676265 Ellipsoidal mirror  
An optical system capable of providing a magnification which can be varied comprises a pair of ellipsoidal mirrors [( 20, 21 )]which are so mounted and arranged that the focus for radiation...
6674571 Optical architecture for an observation telescope, in particular a telescope for observing the earth from a satellite  
An optical architecture for observation telescopes, in particular for telescopes intended to be installed on board a vehicle, such as a space satellite, for observing terrestrial areas, includes a...
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