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7623288 |
High definition thin film reflective screen
A thin film reflective screen includes a surface layer, a transmission layer, a diffusion layer and reflection layers, which are formed in a single screen, which has functions such as an image...
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7623167 |
Wavelength component proportion detection apparatus and image-pickup apparatus
A wavelength component proportion detection apparatus is disclosed which is capable of detecting the proportions of the wavelength components under a light source including the visible and infrared...
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7599112 |
Multilayer-film mirrors, lithography systems comprising same, and methods for manufacturing same
Multilayer-film (MLF) reflective mirrors are disclosed that have a highly precise surface profile. An exemplary MLF reflective mirror includes multilayer film in which layers of molybdenum (Mo) and...
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7583443 |
Reflective optical element for ultraviolet radiation, projection optical system and projection exposure system therewith, and method for forming the same
A reflective optical element ( 1 ) for radiation with a wavelength λ in the ultraviolet wavelength range comprises a reflective surface ( 6 ), and a dielectric multilayer system ( 4 ) formed on...
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7575810 |
Reflector with non-uniform metal oxide layer surface
A reflector includes a non-uniform metal oxide layer surface.
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7570431 |
Optical arrangement of autofocus elements for use with immersion lithography
An autofocus unit is provided to an immersion lithography apparatus in which a fluid is disposed over a target surface of a workpiece and an image pattern is projected onto this target surface...
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7567386 |
Dichroic mirror
A dichroic mirror includes a substrate and a dielectric multilayered film formed on a surface of the substrate. The dielectric multilayered film includes a first period layer with a structure...
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7561611 |
Extended-lifetime elements for excimer lasers
The invention is directed to elements used in high power laser lithographic systems operating at below 250 nm, and in particular to elements that have a coating of selected materials to extend...
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7554736 |
Objective lens and optical pickup apparatus
An objective lens for converging a monochromatic light flux having a specific wavelength in a range of 350 to 450 nm on an optical information recording medium while the objective lens is placed...
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7540632 |
Spectrally controlled display backlight emissions for night vision imaging system compatibility
A lighting assembly topology that utilizes spectrum controlling materials to render the illumination compatible with night vision imaging systems. The lighting assembly can be used as either a...
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7538938 |
Optical filter for flash lamps in pulsed thermal imaging
An optical filter made from a borosilicate optical material is provided for flash lamps used in pulsed thermal imaging. The filter substantially eliminates the infrared radiation from flash lamps...
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7535643 |
Folding mirror
A folding mirror includes a substrate and a dielectric multilayered film formed on a surface of the substrate. The dielectric multilayered film includes a first period layer with a structure...
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7535566 |
Beam chromatic shifting and directing means
An electromagnetic beam chromatic shifting and directing means for use in reflectively directing a spectroscopic beam of electromagnetic radiation while simultaneously de-emphasizing intensity in a...
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7522335 |
Broad-angle multilayer mirror design
According to one embodiment a broad-angle multilayer (ML) mirror system is disclosed. The ML mirror includes a multiple layer structure configured to provide uniform reflectivity over a wide range...
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7521666 |
Multi-cavity Fabry-Perot ambient light filter apparatus
The present invention provides a multi-cavity Fabry-Perot ambient light filter apparatus. The multi-cavity Fabry-Perot ambient light filter apparatus comprises a plurality of Fabry-Perot cavities,...
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7521006 |
Diimmonium compound and use thereof
Disclosed is a near-infrared absorbing compound which does not contain antimony or arsenic, and has excellent stability, especially excellent heat resistance, light resistance and moist heat...
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7498071 |
Laminated material with imprinted information, article on which the same is attached, method for reading information code
It is an object of the present invention to provide a laminated member with an recorded information code, having a high reading accuracy, which do not detract from product design and which do not...
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7494702 |
Near-infrared ray shielding film
A near-infrared ray shielding film which has high adhesion between layers, is substantially transparent, can shield a wide near-infrared region at a high level and is free from electromagnetic...
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7494232 |
Passive broadband long wave and mid-wave infrared optical limiter device
Method for limiting amount of radiation impinging on a radiation-sensitive detector device by directing radiation toward the detector, permitting the radiation to impinge upon the detector device...
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7492510 |
Optical element having antireflection film, and exposure apparatus
An optical element includes a substrate that transmits a light having a central wavelength in a wave range between 150 nm and 250 nm, and an n-layer antireflection film that is formed on the...
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7491440 |
Interlayer film for laminate glass and laminate glass
The present invention aims to provide an interlayer film for a laminate glass to obtain a laminate glass which is excellent in transparency, heat-shielding property, and electromagnetic wave...
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7476887 |
EUV light source optical elements
Apparatus and methods are disclosed for forming plasma generated EUV light source optical elements, e.g., reflectors comprising MLM stacks employing various binary layer materials and capping...
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7474733 |
Optical element such as multilayer film reflection mirror, production method therefor and device using it
A multilayer film reflector capable of simply correcting a wavefront phase and a method of forming the reflector are disclosed. For this purpose, a reflector using reflection by a multilayer film...
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7463413 |
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
A multi-layer mirror includes on top of the multi-layer mirror a spectral purity enhancement layer, for example for application in an EUV lithographic apparatus. This spectral purity enhancement...
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7450306 |
Optical filter for blocking UV light and IR light
An exemplary optical filter includes a substrate, a plurality of contiguous identical lower filter cavities formed on the substrate, and a plurality of contiguous upper filter cavities formed on...
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7443577 |
Reflecting filtering cover
A filter for use with an array of ultra-small resonant structures that are producing encoded EMR wherein the filter is designed to either reflect encoded EMR beams or to permit certain frequencies...
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7440182 |
Multilayer mirror, method for manufacturing the same, and exposure equipment
A multilayer mirror aims to reduce incidence angle dependence of reflectivity. A substrate is made of low thermal polished expansion glass with 0.2 nm RMS or less roughness of the surface. On the...
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7405880 |
Multilayer optical filter
In one aspect, the invention features articles that include a substrate having a first surface and a second surface contiguous with the first surface. The first and second surfaces are...
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7405872 |
System and method for filtering electromagnetic transmissions
A combination of filters for filtering selected wavelengths of electromagnetic radiation is provided on a transparent substrate such as a plastic film or glazing of a window. The combination of...
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7403329 |
Electronic imaging apparatus
The electronic imaging apparatus comprises a first optical element A having a flat surface and a surface with refracting power, chemical substance which enables to change light transmittance by...
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7382527 |
EUV multilayer mirror with phase shifting layer
A multilayer mirror aims to reduce incidence angle dependence of reflectivity. A substrate is made of low thermal polished expansion glass with 0.2 nm RMS or less roughness of the surface. On the...
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7382526 |
Optical system
An optical system projecting onto an image plane an object that is disposed at infinity by an intermediate image. The optical system includes a front group and a relay optic, each including a...
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7381339 |
Increased yield of cubic crystalline optical elements by crystal orientation
Increased yield of optical elements from cubic crystal rods, such as made of calcium fluoride, is made possible by orienting the optical elements for supporting the propagation of light along one...
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7374822 |
Near-infrared ray-shielding paint, near-infrared ray-shielding laminate obtained therefrom and production method thereof
A near-infrared ray shielding paint capable of forming a coating that exhibits high light transmission coefficient in visible light region while having high shielding capability in near-infrared...
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7372623 |
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby
A multi-layered spectral purity filter improves the spectral purity of extreme ultra-violet (EUV) radiation and also collects debris emitted from a radiation source.
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7365851 |
Method of measuring a physical function using a composite function which includes the physical function and an arbitrary reference function
A method for measuring a physical function forms a symmetric composite function by combining the physical function with a reference function. The method obtains a Fourier transform of the symmetric...
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7349151 |
IR absorbing reflector
An infrared (IR) light absorbing reflector is formed with a substrate that supports a first IR absorptive multilayer part having multiple layers of partial IR absorbing thin films. The first IR...
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7342716 |
Multiple cavity low-emissivity coatings
Multiple cavity low-emissivity coatings. The coating includes three infrared-reflection film regions, which may each include silver.
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7342715 |
Multilayer film reflector for soft X-rays and manufacturing method thereof
A multilayer film reflector for X-rays has alternately stacked layers formed on a substrate and comprising a layer (high refractive index layer) comprising a material having a large difference...
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7339728 |
Low-emissivity coatings having high visible transmission and low solar heat gain coefficient
Low-emissivity coatings that are highly reflective to infrared radiation. The coating includes three infrared-reflection film regions, which may each include silver.
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7330309 |
System and method for increasing the contrast of an image produced by an epifluorescence microscope
The contrast of an image produced by epifluorescence microscopy may be increased by placing a high-pass dichroic reflecting film behind the sample. The reflecting film reflects the emission light...
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7321186 |
Front filter, and plasma display apparatus having the same
Disclosed is a plasma display apparatus having the same in which an electromagnetic wave is not only shielded, but also a transmission rate can be secured. The front filter including: an...
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7311407 |
Mirror unit, method of producing the same, and exposure apparatus and method using the mirror unit
Disclosed are a mirror unit and a method of producing the same. In one preferred embodiment, the mirror unit includes a mirror with a multilayered film formed on a substrate, the multilayered film...
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7303612 |
UV reflective cavity and method of providing same
A UV reflective cavity may be provided in a duct by attaching a plurality of tiles to the interior surface of the duct, each of the tiles having UV reflective surface.
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7301695 |
Anti-reflective film and optical element having anti-reflective film
In an anti-reflective film including alternating layers of high refractive-index layers and low refractive-index layers, by designing such that a designed central wavelength .lamda. 0 is within a...
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7297393 |
Optical film
Birefringent optical films have a Brewster angle (the angle at which reflectance of p-polarized light goes to zero) which is very large or is nonexistent. This allows for the construction of...
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7295368 |
System and methods for filtering electromagnetic visual, and minimizing acoustic transmissions
A combination of filters for filtering selected wavelengths of electromagnetic radiation is provided on a transparent substrate such as a plastic film or glazing of a window. The combination of...
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7295367 |
Optical element, optical apparatus, film forming method, film forming apparatus and device fabrication method
An optical element includes a multilayer film, and a substrate, wherein the multilayer film includes a first thin film that is formed on the substrate, and made of fluorine-doped oxide or nitride,...
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7289264 |
Passive broad long wave and mid-wave infrared optical limiting prism
Method for limiting the amount of radiation impinging on a radiation sensitive detector (RSD) responsive to signals having infrared wavelengths of approximately 3 to 14 microns. Method includes:...
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7286294 |
Beam-shaping element for optical radiation and a method for producing said element
A beam-shaping element comprises a carrier substrate ( 1 ) bearing a thin-layer metallization which is structured for shaping the beam of optical radiation. The thin-layer metallization includes at...
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