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7453624 |
Projection display system including a high fill ratio silicon spatial light modulator
A display system includes a light source and a first optical system coupled to the light source and adapted to provide an illumination beam along an illumination path. The display system also...
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7453621 |
Micro mirrors with piezoelectric release mechanism
A spatial light modulator includes a substrate; a hinge in connection with the substrate; a mirror plate that is connected with the hinge and is configured to tilt about the hinge; and a...
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7446928 |
Micro-electro-mechanical systems element array device and image forming apparatus
A micro-electro-mechanical systems element array device in which plural micro-electro-mechanical systems elements each having a movable portion are arranged in an array, said movable portion being...
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7446927 |
MEMS switch with set and latch electrodes
A MEMS device is electrically actuated with a voltage placed across a first electrode ( 702 ) and a moveable material ( 714 ). The device may be maintained in an actuated state by latch electrodes...
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7445723 |
Optical scanner and method of fabricating the same
An optical scanner and a fabricating method thereof are provided. The optical scanner includes a base substrate, a frame, a H-shaped stage, supporters, and a stage driving structure. An...
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7440160 |
Electro-optical light modulating element, electro-optical display and modulating medium
The invention relates to electrooptical light modulating elements, to electrooptical displays containing elements of this type, and to display systems, e.g. television screens and computer...
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7439948 |
Electrophoretic display device
In electrophoretic displays, grey values are realized using at least three electrodes for bistable operation.
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7436575 |
Small thin film movable element, small thin film movable element array and method of driving small thin film movable element array
A small thin film movable element comprises; a movable portion supported elastically deformably and having a movable electrode at at least a portion of the movable portion; and a fixed electrode...
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7436574 |
Frequency tunable resonant scanner
Provided is a one-axis driving optical scanner which includes a substrate, a stage separated from the substrate to a predetermined height and having an upper surface where an optical scanning...
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7436572 |
Micromirrors and hinge structures for micromirror arrays in projection displays
A spatial light modulator is disclosed, along with methods for making such a modulator. The spatial light modulator comprises an array of micromirrors each having a hinge and a micromirror plate...
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7436571 |
Micro-displays
A micro-display has a device chip with a transparent layer overlying one or more micro-electromechanical system devices. A transparent cover overlies the transparent layer. An...
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7428092 |
Fast-response micro-mechanical devices
A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface having a conductive surface portion, and a substrate portion having a first cavity having an...
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7423798 |
Addressing circuit and method for bi-directional micro-mirror array
A control substrate of spatial light modulator for a bi-directional micro mirror array includes a plurality of unit cells, each includes a common electrode at a fixed constant potential and an...
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7423794 |
Device and method for stacked multi-level uncoupled electrostatic actuators
A multi-level decoupled micro-actuator device comprising a first level substrate ( 410 ), a second level frame ( 420 ) stacked on said first level substrate ( 410 ), a third level frame ( 430 )...
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7420725 |
Device having a conductive light absorbing mask and method for fabricating same
A system and method for an optical component that masks non-active portions of a display and provides an electrical path for one or more display circuits. In one embodiment an optical device...
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7417778 |
Light deflector, light deflection array, image forming apparatus, and image projection display apparatus
A light deflector can be driven by a low voltage by reducing contact area with a plate shape member and other members. The light deflector can be driven by a low voltage by reducing a contact area...
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7411717 |
Micromirror device
A spatial light modulator comprises an array of micromirror devices each of which has a reflective and deflectable mirror plates. The mirror plates are moved between an ON and OFF state during...
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7405884 |
Optical apparatus
An optical apparatus uses a variable-optical-characteristic optical element whereby focusing, zooming or the like can be effected without moving a lens or the like and the whole optical apparatus...
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7405862 |
Spatial light modulator having a cantilever anti-stiction mechanism
A spatial light modulator includes a mirror plate comprising a reflective upper surface, a louver surface having a recess in the lower surface, a first cavity having an opening on the lower...
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7405860 |
Spatial light modulators with light blocking/absorbing areas
A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates...
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7403322 |
MEMS-based alignment of optical components
A MEMS device that enables an optical subsystem (e.g., an optical switch) having an optical component optically coupled to the MEMS device via free space to achieve optical alignment between the...
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7400438 |
Micro-electro mechanical device, micro-electro mechanical device array, light modulation device, micro-electro mechanical light modulation device, micro-electro mechanical light modulation device array and image forming apparatus using the same
A transition time is a time from a state where a movable portion has been rotationally displaced in the first direction and stopped to a state where driving portions apply the physical action...
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7400437 |
Discretely controlled micromirror with multi-level positions
This invention provides the two types of Discretely Controlled Micromirror (DCM), which can overcome disadvantages of the conventional electrostatic micromirrors. The first type micromirror is a...
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7397593 |
Deformable mirror
A deformable mirror includes a deformable section in which, a reflecting surface is formed, a fixing section which fixes an outer periphery of the deformable section, a GND electrode which is...
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7394586 |
Spatial light modulator
A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro-mirror array with a high electrostatic...
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7394140 |
Micromirror array device with electrostatically deflectable mirror plates
Disclosed herein is a micromirror array device that comprises an array of reflective deflectable mirror plates each being associated with one single addressing electrode to be deflected to an ON...
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7391554 |
High fill-ratio mirror-based spatial light modulator
A spatial light modulator includes a two-dimensional array of hexagonal mirror plates disposed in a honeycomb pattern over a substrate. Each of the hexagonal mirror plates is supported by one or...
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7388708 |
Spatial light modulator multi-layer mirror plate
A spatial light modulator having a multi-layer mirror is described.
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7388707 |
High-resolution spatial light modulation
Methods and apparatus for providing a high-resolution spatial light modulator. A spatial light modulator includes a cell that includes: a substrate portion; a first support post and a second...
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7385762 |
Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
Interferometric modulators having a separable modulator architecture are disclosed having a reflective layer suspended from a flexible layer over a cavity. The interferometric modulators have one...
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7385750 |
Spatial light modulator using an integrated circuit actuator
A spatial light modulator (SLM) includes an integrated circuit actuator that can be fabricated using photolithography or other similar techniques. The actuator includes actuator elements, which can...
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7382513 |
Spatial light modulator with multi-layer landing structures
A method of fabricating a spatial light modulator. The method includes providing a first substrate including a first bonding surface, forming a first layer coupled to the bonding surface, wherein...
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7382351 |
Color electrophoretic display device
An electrophoretic display device includes a substrate and unit cells. Each of the unit cells has one display electrode, two collection electrodes and two types of charged particles different from...
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7379227 |
Method and device for modulating light
“Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each...
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7375873 |
Method of repairing micromirrors in spatial light modulators
Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the...
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7375872 |
Methods and configurations for manufacturing hinges for micro-mirror devices
An image display system includes an improved hinge for a micro-mirror device composed of a conductive doped semiconductor and immune to plastic deformation at typical to extreme temperatures. The...
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7372620 |
Micromirror and micromirror device
There is provided a micromirror which includes a holding unit, a mirror that is held by the holding unit to be pivotable about a rotation axis of the mirror, a first fixed electrode group including...
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7372616 |
Complex microdevices and apparatus and methods for fabricating such devices
Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the...
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7372613 |
Method and device for multistate interferometric light modulation
A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and...
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7372607 |
Apparatus for reducing drops in a transmission spectrum due to inter-pixel gaps
The invention includes an apparatus for modulating an optical signal. The apparatus includes a spatial dispersion mechanism and a modulating mechanism. The spatial dispersion mechanism spatially...
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7369298 |
Optical scanner and laser image projector using the same
Provided are an optical scanner including a micro-mirror having an improved a driving angle by using a micro-electro-mechanical system (MEMS) technique and a laser image projector using the same...
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7365899 |
Micromirror with multi-axis rotation and translation
The present invention discloses a micromirror device with multi-axis rotational and translational motion. Newly introduced structure of the top electrode plate improves structural stability,...
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7365898 |
Sloping electrodes in a spatial light modulator
A method of tilting a micromirror includes forming a substrate, a micromirror outwardly from the substrate, and at least one electrode inwardly from the micromirror. The method further includes...
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7362495 |
Electrostatic fins for a MEMS device
A MEMS device includes a hinge that is disposed outwardly from a substrate and capable of at least partially supporting a conductor that is disposed outwardly from the hinge. The conductor being...
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7362493 |
Micromirror and post arrangements on substrates
A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the...
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7359110 |
Method and circuit for driving electrophoretic display and electronic device using same
An active matrix electrophoretic display is driven. In a reset period Tr a reset voltage is applied to each pixel electrode. Next, in a writing period an applied voltage is applied to each of said...
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7355781 |
Spatial light modulator with perforated hinge
A spatial light modulator (SLM) is disclosed that increases speed and efficiency of an SLM through the use of a perforated hinge. The hinge may take many forms, but generally includes an elongated...
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7349145 |
Optical deflection device and image projection display apparatus using the same
An optical deflection device includes a substrate; a plurality of regulating members including upper portions including stoppers; a fulcrum member serving as an electrode; a plate member; and a...
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7345808 |
Deformable mirror and device for observing retina of eye
A deformable mirror, in which the distance between an electrode substrate and a membrane can be accurately maintained and which can be produced at a low material cost, is provided. The deformable...
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7342709 |
Optical interference type of color display having optical diffusion layer between substrate and electrode
An optical interference color display comprising a transparent substrate, an inner-front optical diffusion layer, a plurality of first electrodes, a patterned support layer, a plurality of optical...
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