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7453623 |
Reflecting mirror and exposure apparatus using the same
A mirror apparatus including a reflecting mirror reflecting light, partition walls, the walls and the reflecting mirror defining a plurality of air chambers, and a regulator regulating air pressure...
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7446927 |
MEMS switch with set and latch electrodes
A MEMS device is electrically actuated with a voltage placed across a first electrode ( 702 ) and a moveable material ( 714 ). The device may be maintained in an actuated state by latch electrodes...
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7439984 |
Image signal processing method, image signal processing apparatus, and image displaying apparatus
An image signal processing method for performing nonlinear compensation on an image signal to be fed into a display device ( 103 ). The characteristics of nonlinear compensation are changed...
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7436575 |
Small thin film movable element, small thin film movable element array and method of driving small thin film movable element array
A small thin film movable element comprises; a movable portion supported elastically deformably and having a movable electrode at at least a portion of the movable portion; and a fixed electrode...
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7430072 |
System and method for increasing image quality in a display system
System and method for maximizing image quality by eliminating vias on a reflective surface. A preferred embodiment comprises depositing a first portion of a mirror surface over a support surface,...
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7428092 |
Fast-response micro-mechanical devices
A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface having a conductive surface portion, and a substrate portion having a first cavity having an...
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7411718 |
Variable focal length lens and lens array comprising discretely controlled micromirrors
A discretely controlled micromirror array lens (DCMAL) consists of many discretely controlled micromirrors (DCMs) and actuating components. The actuating components control the positions of DCMs...
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7411717 |
Micromirror device
A spatial light modulator comprises an array of micromirror devices each of which has a reflective and deflectable mirror plates. The mirror plates are moved between an ON and OFF state during...
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7405860 |
Spatial light modulators with light blocking/absorbing areas
A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates...
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7405414 |
Method and apparatus for patterning a workpiece
The present invention relates to a method for creating a pattern on a workpiece sensitive to electromagnetic radiation. Electromagnetic radiation is emitted onto a computer controlled reticle...
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7403320 |
2-channel display system comprising micro electro mechanical systems
The two channel stereo display system with micro electromechanical systems (MEMS, e.g. DMDs from Texas Instruments) simultaneously generates a right and a left image in two discrete modulation...
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7402255 |
MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation
A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more...
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7400438 |
Micro-electro mechanical device, micro-electro mechanical device array, light modulation device, micro-electro mechanical light modulation device, micro-electro mechanical light modulation device array and image forming apparatus using the same
A transition time is a time from a state where a movable portion has been rotationally displaced in the first direction and stopped to a state where driving portions apply the physical action...
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7400437 |
Discretely controlled micromirror with multi-level positions
This invention provides the two types of Discretely Controlled Micromirror (DCM), which can overcome disadvantages of the conventional electrostatic micromirrors. The first type micromirror is a...
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7391554 |
High fill-ratio mirror-based spatial light modulator
A spatial light modulator includes a two-dimensional array of hexagonal mirror plates disposed in a honeycomb pattern over a substrate. Each of the hexagonal mirror plates is supported by one or...
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7388707 |
High-resolution spatial light modulation
Methods and apparatus for providing a high-resolution spatial light modulator. A spatial light modulator includes a cell that includes: a substrate portion; a first support post and a second...
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7385762 |
Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
Interferometric modulators having a separable modulator architecture are disclosed having a reflective layer suspended from a flexible layer over a cavity. The interferometric modulators have one...
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7382517 |
Hybrid light modulator
The present invention provides a hybrid light modulator. The hybrid light modulator of the present invention includes an element having a protrusion to diffract incident light even at an early...
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7379227 |
Method and device for modulating light
“Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each...
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7372620 |
Micromirror and micromirror device
There is provided a micromirror which includes a holding unit, a mirror that is held by the holding unit to be pivotable about a rotation axis of the mirror, a first fixed electrode group including...
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7372617 |
Hidden hinge MEMS device
The present invention relates to a method for manufacturing a MEMS device, including the actions of: providing a substrate having a back and front surface essentially in parallel with each other,...
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7372615 |
Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant
One embodiment of an micromechanical device includes a first contact surface, a moveable component having a second contact surface, where the second contact surface interacts with the first contact...
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7372613 |
Method and device for multistate interferometric light modulation
A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and...
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7372547 |
Process and apparatus for achieving single exposure pattern transfer using maskless optical direct write lithography
The present invention provides methods and apparatus for accomplishing a phase shift lithography process using a off axis light to reduce the effect of zero order light to improve the process...
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7371804 |
Monomers and polymers for optical elements
Compositions comprising a matrix polymer and a mixture of monomers are used for making polymer mixtures containing the matrix polymer and a second polymer formed from the monomer mixture....
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7369297 |
Mirror structure with single crystal silicon cross-member
Hydrogen cleave silicon process for light modulating mirror structure using single crystal silicon as the base cross-member. Existing processes use two critical alignment steps that can contribute...
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7369294 |
Ornamental display device
An ornamental display device having an interferometric modulator for displaying an ornamental image. The ornamental device may have a patterned diffuser formed on a transparent substrate to provide...
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7365899 |
Micromirror with multi-axis rotation and translation
The present invention discloses a micromirror device with multi-axis rotational and translational motion. Newly introduced structure of the top electrode plate improves structural stability,...
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7362493 |
Micromirror and post arrangements on substrates
A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the...
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7355780 |
System and method of illuminating interferometric modulators using backlighting
An interferometric modulator array device with backlighting is disclosed. The interferometric modulator array device comprises a plurality of interferometric modulator elements, wherein each of the...
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7354167 |
Beam focusing and scanning system using micromirror array lens
A beam focusing and scanning system using a micromirror array lens (optical system) includes a light source configured to emit light and a micromirror array lens, including at least one...
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7352501 |
Electrophoretic caps prepared from encapsulated electrophoretic particles
Articles and methods for making capsules that include a cap of electrophoretic material suspended in a dielectric fluid are disclosed. The cap of electrophoretic material and dielectric fluid are...
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7350922 |
Three-dimensional display using variable focal length micromirror array lens
A three-dimensional display device includes a two-dimensional display displaying a depthwise image, and a variable focal length micromirror array lens receiving light from the two-dimensional...
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7349146 |
System and method for hinge memory mitigation
System and method for reducing failures due to hinge memory in a microdisplay display system. A preferred embodiment includes setting the state of each micromirror in a digital micromirror device...
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7345809 |
Mirror device with anti-reflective coating layer and method for manufacturing the same
The invention relates to a method for manufacturing a mirror device with anti-reflective coating layer. The method of the invention comprises: (a) forming an anti-reflective metal film on a first...
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7330298 |
Optical system and method for increasing image resolution and/or dithering in projection applications
An optical system for projecting an image having x and y axes onto a image plane is provided. The system includes an SLM device spaced from the image plane, the SLM device having a plurality of...
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7307775 |
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates...
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7304784 |
Reflective display device having viewable display on both sides
An interferometric light modulating device having two viewing surfaces is provided. In some embodiments, the device can generate two distinct images, one on each side of the device, simultaneously.
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7304783 |
Control of micromirrors with intermediate states
A micromirror device with at least one intermediate state is disclosed in this invention with the reflecting mirror placed at an angular position between a fully on angle and fully off angle. The...
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7304782 |
Driving method of spatial light modulator array, spatial light modulator array, and image forming apparatus
A driving method of a spatial light modulator array having plural spatial light modulators of micro-electro-mechanical system, the plural spatial light modulators each including: a movable part...
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7301690 |
Micro-optical arrangement
The invention relates to a micro-optical arrangement with which in particular optical properties of an optical element or its influencing of electromagnetic radiation may be changed. Thereby the...
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7298542 |
Microelectromechanical device with reset electrode
A microelectromechanical device having a reset electrode for use in various devices including display devices such as those employing spatial light modulators. The device includes an optically...
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7290886 |
Illuminating system and method for improving asymmetric projection
An illuminating system and method for improving asymmetric projection includes a light source producing a light beam to form a light path, a projection lens disposed in the light path, a light...
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7289258 |
Light modulator having variable blaze diffraction grating
The present invention relates, in general, to a light modulator having a variable blaze diffraction grating and, more particularly, to a light modulator having a variable blaze diffraction grating,...
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7289192 |
Projection exposure device
A magnification correction device 1 includes magnification correction optics 2 , a pressure adjustment device 3 and a controller 4 . The magnification correction optics 2 is formed in a...
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7286764 |
Reconfigurable modulator-based optical add-and-drop multiplexer
An optical add and drop multiplexer system comprising a first module for providing a first signal; a second module for providing a second signal; and a modulator for receiving a channel of the...
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7282706 |
Advanced optics for rapidly patterned laser profiles in analytical spectrometry
The present invention is directed to a novel arrangement of optical devices for the rapid patterning of laser profiles used for desorption and/or ionization sources in analytical mass spectrometry....
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7280265 |
Interferometric modulation of radiation
An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their...
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7271945 |
Methods and apparatus for actuating displays
The invention relates to mechanical actuators for forming images on a display. The actuators include two mechanically compliant electrodes.
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7268935 |
Projection system
An apparatus includes a mirror array to form a projected image that includes pixels. The apparatus also includes a circuit to, for each pixel, control the mirror array to selectively combine...
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