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7630123 |
Method and device for compensating for color shift as a function of angle of view
In one embodiment of the invention, a display is provided and includes a plurality of interferometric display elements. The display further includes at least one diffuser. Optical properties of the...
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7630121 |
Electromechanical device with optical function separated from mechanical and electrical function
In certain embodiments, a microelectromechanical (MEMS) device comprises a substrate having a top surface, a movable element over the substrate, and an actuation electrode disposed laterally from...
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7630119 |
Apparatus and method for reducing slippage between structures in an interferometric modulator
A support structure within an interferometric modulator device may contact various other structures within the device. Increased bond strengths between the support structure and the other...
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7630118 |
Spatial light modulator, method of spatially modulating a radiation beam, lithographic apparatus and device manufacturing method
Each pixel of a spatial light modulator comprises a movable mirror, a light sensitive element and control circuitry to drive an actuator set the movable mirror to a state determined by a signal...
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7626752 |
Microelectromechanical device array apparatus and method for driving same
A microelectromechanical device array apparatus is provided and includes: an device array one-dimensionally or two-dimensionally arranged with devices including a movable portion having movable...
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7626581 |
Device and method for display memory using manipulation of mechanical response
Embodiments of an exemplary MEMS interferometric modulator comprise a movable layer and a fixed layer separated by an air gap. A driving scheme employs row/column actuation protocols which maintain...
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7623287 |
Non-planar surface structures and process for microelectromechanical systems
Methods of making MEMS devices including interferometric modulators involve depositing various layers, including stationary layers, movable layers and sacrificial layers, on a substrate. A...
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7623286 |
System and method for displaying images
System and method for enhancing image quality in a display system. A preferred embodiment comprises a variable light source capable of producing a light of specified intensity and color, an array...
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7623142 |
Flexure
An apparatus includes a first member, a second member and a flexure. The flexure has a central portion connected to the first member, outer portions connected to the second member and an...
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7622710 |
Optical manipulation system using a plurality of optical traps
The present invention relates to an optical manipulation system ( 10 ) for generation of a plurality of optical traps for manipulation of micro-objects including nano-objects using electromagnetic...
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7619822 |
Systems and methods of providing a light guiding layer
Various embodiments of the invention include an interferometric optical modulator comprising a substrate layer and a light direction layer. Such an interferometric modulator may be integrated with...
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7619810 |
Systems and methods of testing micro-electromechanical devices
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of...
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7619809 |
Mirror assemblies incorporating variable index of refraction materials
A mirror assembly including an active lens and a reflective surface. The mirror assembly may change its refractive index when a voltage is applied to the active lens, thereby changing the field of...
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7619808 |
Light wave front construction
A method for producing a 3D image includes providing a pixel-by-pixel map over a preselected aperture of relative phases for coherent light scattered by or transmitted through a desired scene. The...
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7619805 |
Light modulator device
A light modulator device includes a bottom charge plate, a top charge plate, and a pixel plate supported by at least one flexure, wherein the flexure is a piece-wise linear flexure.
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7619614 |
Three-dimensional optical mouse system
A three-dimensional optical mouse device with a Micromirror Array Lens (MMAL) is provided. To have the three-dimensional optical mouse system, a three-dimensional imaging device is used for...
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7616372 |
Piano MEMS with hidden hinge
The micro-electro-mechanical mirror device according to the present invention includes a platform pivotable about two perpendicular axes, and a hinge structure disposed beneath the platform. The...
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7616371 |
Trimming a MEMS device to fine tune natural frequency
A mirror device includes a mirror, an anchor, and a spring coupling the mirror to the anchor. The anchor and/or mirror can define one or more rows of holes adjacent to the coupling location of the...
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7616370 |
Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
Embodiments of the present invention generally relate to a device that has an improved usable lifetime due to the presence of a lubricant that reduces the likelihood of stiction occurring between...
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7616369 |
Film stack for manufacturing micro-electromechanical systems (MEMS) devices
This invention provides a precursor film stack for use in the production of MEMS devices. The precursor film stack comprises a carrier substrate, a first layer formed on the carrier substrate, a...
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7612933 |
Microelectromechanical device with spacing layer
An interferometric modulating device is provided with a spacing layer positioned between the fixed reflector and the electrode. The spacing layer prevents shorting between the movable reflector and...
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7612931 |
MEMS control system gain normalization
A method and system for providing gain normalization in a MEMS control system and/or device includes moving a MEMS structure from a first position wherein light is redirected from a first input...
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7605971 |
Plurality of hidden hinges for mircromirror device
A mirror device comprises plural mirror elements, each of which comprises a mirror for reflecting illumination light emitted from a light source, a hinge for supporting the mirror placed on a...
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7605970 |
External cavity tunable laser system formed from MEMS corner mirror
A tunable laser system is provided. The tunable laser system includes a light source, a grating, a corner mirror array, and a receiver. In which, the light source emits a beam, and the grating is...
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7605969 |
Interferometric modulation of radiation
An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their...
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7605964 |
Array of micromirrors with non-fixed underlying structures
The present invention discloses an array of micromirrors with non-fixed underlying structures which can be oriented to have principal rotational axis with no structural and mechanical interference...
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7601486 |
Ultra dark polymer
A method and a material for creating an antireflective coating on an integrated circuit. A preferred embodiment comprises applying a dark polymer material on a reflective surface, curing the dark...
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7595927 |
Spatial light modulator with sub-wavelength structure
An image projection device receives a light emitted from a light source through an illumination optic for projecting to a spatial light modulator (SLM) having a plurality of deflectable...
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7595926 |
Integrated IMODS and solar cells on a substrate
Embodiments of the present invention relate to interferometric display devices comprising an interferometric modulator and a solar cell and methods of making thereof. In some embodiments, the solar...
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7595925 |
Actuating device having a flexible diaphragm controlled by electrowetting
An actuation device with several positions includes a support, at least one flexible membrane attached to the support forming at least one closed containment with the support with volume filled...
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7589885 |
Micromirror array device comprising encapsulated reflective metal layer and method of making the same
The present invention provides an optical micromirror device and their array device and method for making the same. By introducing a sub coating layer and an over coating layer with a high...
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7589884 |
Micromirror array lens with encapsulation of reflective metal layer and method of making the same
The present invention provides a micromirror array device specially Micromirror Array Lens device structure and method for making the same. By introducing a sub coating layer and an over coating...
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7580178 |
Image-guided microsurgery system and method
The present invention provides an image-guided microsurgery system comprising a real-time three-dimensional microscopic imaging device and a three-dimensional display device. The imaging device...
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7580174 |
Anti-stiction gas-phase lubricant for micromechanical systems
One embodiment of an micromechanical device includes a first contact surface, a moveable component having a second contact surface, where the second contact surface interacts with the first contact...
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7579746 |
Actuator with Alternating Steady Voltage Combs and Variable Voltage Combs
An actuator includes: a base section; an object having a body portion and a holding portion holding the body portion in a manner that the body portion is movable against the base section; a movable...
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7579592 |
Illumination and imaging devices and methods
A thermal torch ( 12 ) comprises an infrared camera ( 22 ) and a visible light emitter ( 28, 26 ) arranged so as to illuminate hot objects with visible light. This projection of visible light onto...
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7576902 |
Spatial light modulator mirror metal having enhanced reflectivity
In accordance with the teachings of the present invention, a spatial light modulator mirror metal having enhanced reflectivity is provided. In a particular embodiment of the present invention, a...
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7576901 |
Method and device for selective adjustment of hysteresis window
The width and location of a hysteresis window of an interferometric modulator may be altered by adjusting various physical characteristics of the interferometric modulator. Thus, depending on the...
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7570417 |
Micro-electro mechanical light modulator device
A micro-electro mechanical light modulator device includes a movable reflective plate, a fixed partial reflective plate, an optical gap defined between the reflective plate and the fixed plate, and...
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7570416 |
Method and apparatus for a reflective spatial light modulator with a flexible pedestal
An electromechanical system comprising a substrate including a surface region and a flexible member coupled at a first end to the surface region. The system further comprises a base region and a...
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7570415 |
MEMS device and interconnects for same
A microelectromechanical systems device having an electrical interconnect between circuitry outside the device and at least one of an electrode and a movable layer within the device. A layer of the...
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7567375 |
Hidden hinge MEMS device
The present invention relates to a method for manufacturing a MEMS device, including the actions of: providing a substrate having a back and front surface essentially in parallel with each other,...
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7567374 |
Deformable mirrors
The invention resides in the innovative use of deposition techniques in deformable mirrors. The use of deposition techniques allows contact pads for electrodes to be located wherever convenient....
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7567373 |
System and method for micro-electromechanical operation of an interferometric modulator
An interferometric modulator is formed by a stationary layer and a mirror facing the stationary layer. The mirror is movable between the undriven and driven positions. Landing pads, bumps or spring...
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7564613 |
Microelectromechanical device and method utilizing a porous surface
A microelectromechanical device (MEMS) utilizing a porous electrode surface for reducing stiction is disclosed. In one embodiment, a microelectromechanical device is an interferometric modulator...
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7564612 |
Photonic MEMS and structures
An optical device includes a non-transparent substrate. The optical device further includes a first optical layer which is at least partially transmissive and at least partially reflective to...
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7561340 |
Tunable micro-aspherical lens and manufacturing method thereof
A tunable micro-aspherical lens is disclosed, which employs two potential differences provided by two sets of electrodes to dynamically change the bottom area and the central height of the liquid...
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7561334 |
Method and apparatus for reducing back-glass deflection in an interferometric modulator display device
Methods and apparatus for reducing back-glass deflection in an interferometric modulator display device are provided. In one embodiment, an interferometric modulator display is provided that...
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7561323 |
Optical films for directing light towards active areas of displays
In various embodiments of the invention, an interferometric display device is provided having an external film with a plurality of structures that redirect light from an inactive area of the...
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7558000 |
Optical device
An optical device includes: a sealed container having edge walls facing each other in a thickness direction of the container and a side wall connecting both of the edge walls; a first liquid with...
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