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Match Document Document Title
7453624 Projection display system including a high fill ratio silicon spatial light modulator  
A display system includes a light source and a first optical system coupled to the light source and adapted to provide an illumination beam along an illumination path. The display system also...
7453623 Reflecting mirror and exposure apparatus using the same  
A mirror apparatus including a reflecting mirror reflecting light, partition walls, the walls and the reflecting mirror defining a plurality of air chambers, and a regulator regulating air pressure...
7450297 Unique method for manufacturing a digital micromirror device and a method for manufacturing a projection display system using the same  
The present invention provides a method for manufacturing a digital micromirror device and a method for manufacturing a projection display system. The method for manufacturing the digital...
7447891 Light modulator with concentric control-electrode structure  
An electronic device for at least partially displaying a pixel of an image, the device comprising first and second reflectors defining an optical cavity therebetween, the optical cavity being...
7446928 Micro-electro-mechanical systems element array device and image forming apparatus  
A micro-electro-mechanical systems element array device in which plural micro-electro-mechanical systems elements each having a movable portion are arranged in an array, said movable portion being...
7446927 MEMS switch with set and latch electrodes  
A MEMS device is electrically actuated with a voltage placed across a first electrode ( 702 ) and a moveable material ( 714 ). The device may be maintained in an actuated state by latch electrodes...
7446926 System and method of providing a regenerating protective coating in a MEMS device  
In various embodiments of the invention, a regenerating protective coating is formed on at least one surface of an interior cavity of a MEMS device. Particular embodiments provide a regenerating...
7445723 Optical scanner and method of fabricating the same  
An optical scanner and a fabricating method thereof are provided. The optical scanner includes a base substrate, a frame, a H-shaped stage, supporters, and a stage driving structure. An...
7443572 Fast-response spatial light modulator  
A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface, and a cavity having an opening on the lower surface; a substrate comprising an upper...
7443076 Diffractive thin-film piezoelectric light modulator and method of fabricating the same  
Disclosed herein is a diffractive thin-film piezoelectric light modulator, in which a lower protective layer is formed on a lower support to prevent the lower support from being over-etched when...
7436575 Small thin film movable element, small thin film movable element array and method of driving small thin film movable element array  
A small thin film movable element comprises; a movable portion supported elastically deformably and having a movable electrode at at least a portion of the movable portion; and a fixed electrode...
7436574 Frequency tunable resonant scanner  
Provided is a one-axis driving optical scanner which includes a substrate, a stage separated from the substrate to a predetermined height and having an upper surface where an optical scanning...
7436573 Electrical connections in microelectromechanical devices  
A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the...
7436572 Micromirrors and hinge structures for micromirror arrays in projection displays  
A spatial light modulator is disclosed, along with methods for making such a modulator. The spatial light modulator comprises an array of micromirrors each having a hinge and a micromirror plate...
7432498 Method and apparatus for optically detecting and identifying a threat  
An optical detection apparatus includes a housing having a circumferential opening therein. A primary mirror reflects light rays to form a first set of light rays to a secondary mirror that has a...
7430072 System and method for increasing image quality in a display system  
System and method for maximizing image quality by eliminating vias on a reflective surface. A preferred embodiment comprises depositing a first portion of a mirror surface over a support surface,...
7428094 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge  
A method of fabricating a spatial light modulator. The method includes forming cavities in a first substrate and fabricating electrodes on a second substrate. The method also includes bonding the...
7428093 Optical scanning system with correction  
A scanning system device has a predetermined aberration as it scans or switches light along selected optical paths. A deformable membrane receives the light and introduces an inverse...
7426073 Digital micromirror device and manufacturing method thereof  
Provided is a digital micromirror device (DMD). The DMD includes a first metal line, a second metal line, a third metal line, and a mirror. The first metal line is formed to have a predetermined...
7424330 Method and apparatus for controlling deformable actuators  
In order to prevent negative effects of imprinting an the addressing accuracy of deformable actuators, a method for controlling deformable actuators has, during an event period, driving the first...
7423799 Method for adjusting the resonant frequency of an oscillating device  
A method for increasing the resonant frequency of a torsional hinged device having a reduced attaching area between the torsional hinges and the supporting anchors. The resonant frequency is...
7423798 Addressing circuit and method for bi-directional micro-mirror array  
A control substrate of spatial light modulator for a bi-directional micro mirror array includes a plurality of unit cells, each includes a common electrode at a fixed constant potential and an...
7423795 Optical deflector and optical instrument using the same  
An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second...
7422920 Method and forming a micromirror array device with a small pitch size  
A spatial light modulator is disclosed, along with a method for making such a modulator that comprises an array of micromirror devices. The center-to-center distance and the gap between adjacent...
7420730 Spatial light modulator features  
An enhanced spatial light modulator (ESLM) array, a microelectronics patterning system and a projection display system using such an ESLM for heat-minimization and resolution enhancement during...
7420725 Device having a conductive light absorbing mask and method for fabricating same  
A system and method for an optical component that masks non-active portions of a display and provides an electrical path for one or more display circuits. In one embodiment an optical device...
7420135 Micro electro-mechanical system switch and method of manufacturing the same  
A micro electro-mechanical system (MEMS) switch and a method for manufacturing the same are provided. The MEMS switch includes a substrate; signal lines formed on the substrate; main electrodes...
7417787 Electrophoretic display device  
An electrophoretic display device includes a display layer of a multiplicity of individual microcapsules containing a display medium therein and conductive substrates, at least one of the...
7417784 Microelectromechanical device and method utilizing a porous surface  
A microelectromechanical device (MEMS) utilizing a porous electrode surface for reducing stiction is disclosed. In one embodiment, a microelectromechanical device is an interferometric modulator...
7417783 Mirror and mirror layer for optical modulator and method  
Described herein are systems, devices, and methods relating to packaging electronic devices, for example, microelectromechanical systems (MEMS) devices, including optical modulators such as...
7417315 Negative thermal expansion system (NTEs) device for TCE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging  
A Negative Thermal Expansion system (NTEs) device for TCE compensation or CTE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging. One aspect of...
7414775 Contrast enhancement in multichromal display by incorporating a highly absorptive layer  
A display member having improved optical contrast and brightness. The display member includes bichromal capsules, an absorptive layer, an adhesive layer, a substrate and a top layer. The bichromal...
7414774 Method of driving small electromechanical element and small electromechanical element array  
A method of driving a small electromechanical element, which includes: an elastic portion accumulating an elastic energy by being deformed elastically; a movable portion supported by the elastic...
7411722 Display system incorporating bilinear electromechanical grating device  
A line scanned display system includes at least three different colors of illumination provided by one or more light sources, and at least one directional illumination optical system for directing...
7411718 Variable focal length lens and lens array comprising discretely controlled micromirrors  
A discretely controlled micromirror array lens (DCMAL) consists of many discretely controlled micromirrors (DCMs) and actuating components. The actuating components control the positions of DCMs...
7411717 Micromirror device  
A spatial light modulator comprises an array of micromirror devices each of which has a reflective and deflectable mirror plates. The mirror plates are moved between an ON and OFF state during...
7411713 Yokeless hidden hinge digital micromirror device with double binge layer  
A micromirror array 110 fabricated on a semiconductor substrate 11 . The array 110 is comprised of four operating layers 12, 13, 14, 15 . An addressing layer 12 is fabricated on the...
7405884 Optical apparatus  
An optical apparatus uses a variable-optical-characteristic optical element whereby focusing, zooming or the like can be effected without moving a lens or the like and the whole optical apparatus...
7405863 Patterning of mechanical layer in MEMS to reduce stresses at supports  
A method of fabricating a MEMS device includes the formation of support posts having horizontal wing portions at the edges of the post. A mechanical layer is deposited over the support posts and...
7405862 Spatial light modulator having a cantilever anti-stiction mechanism  
A spatial light modulator includes a mirror plate comprising a reflective upper surface, a louver surface having a recess in the lower surface, a first cavity having an opening on the lower...
7405860 Spatial light modulators with light blocking/absorbing areas  
A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates...
7405506 Driving mechanism and micro-mirror device provided with the same  
A driving mechanism configured to turn a plate member with respect to a frame member around a predetermined turning axis includes a pair of supporting members supporting the plate member, a pair of...
7405414 Method and apparatus for patterning a workpiece  
The present invention relates to a method for creating a pattern on a workpiece sensitive to electromagnetic radiation. Electromagnetic radiation is emitted onto a computer controlled reticle...
7403324 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements  
A spatial light modulator has an array of reflective surfaces of deflectable mirror plates. For improving the reflectivity of the mirror plates, layers that are preferably transmissive to visible...
7403323 Process control monitors for interferometric modulators  
Process control monitors are disclosed that are produced using at least some of the same process steps used to manufacture a MEMS device. Analysis of the process control monitors can provide...
7403322 MEMS-based alignment of optical components  
A MEMS device that enables an optical subsystem (e.g., an optical switch) having an optical component optically coupled to the MEMS device via free space to achieve optical alignment between the...
7403321 Optical microelectromechanical device  
An optical microelectromechanical systems (MEMS) device includes a transparent substrate with a plurality of discrete conductive lines, an dielectric layer disposed on the substrate and the...
7403320 2-channel display system comprising micro electro mechanical systems  
The two channel stereo display system with micro electromechanical systems (MEMS, e.g. DMDs from Texas Instruments) simultaneously generates a right and a left image in two discrete modulation...
7403180 Hybrid color synthesis for multistate reflective modulator displays  
A display device including a plurality of optical modulators and a plurality of filter elements on a reflective side of the plurality of optical modulators is provided. The plurality of optical...
7402255 MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation  
A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more...
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