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7630123 |
Method and device for compensating for color shift as a function of angle of view
In one embodiment of the invention, a display is provided and includes a plurality of interferometric display elements. The display further includes at least one diffuser. Optical properties of the...
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7630121 |
Electromechanical device with optical function separated from mechanical and electrical function
In certain embodiments, a microelectromechanical (MEMS) device comprises a substrate having a top surface, a movable element over the substrate, and an actuation electrode disposed laterally from...
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7630120 |
Non-contacting electrostatically driven MEMS device
A microelectromechanical device has a movable first electrode and stationary second and third electrodes oriented parallel with the substrate. The first electrode is separated from the substrate...
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7630119 |
Apparatus and method for reducing slippage between structures in an interferometric modulator
A support structure within an interferometric modulator device may contact various other structures within the device. Increased bond strengths between the support structure and the other...
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7630118 |
Spatial light modulator, method of spatially modulating a radiation beam, lithographic apparatus and device manufacturing method
Each pixel of a spatial light modulator comprises a movable mirror, a light sensitive element and control circuitry to drive an actuator set the movable mirror to a state determined by a signal...
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7629725 |
Micromechanical actuator with asymmetrically shaped electrodes
A micromachined actuator including a body or platform mounted to a suspension system anchored to a substrate. In one embodiment, the suspension system is comprised of a set of one or more spring...
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7626752 |
Microelectromechanical device array apparatus and method for driving same
A microelectromechanical device array apparatus is provided and includes: an device array one-dimensionally or two-dimensionally arranged with devices including a movable portion having movable...
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7626751 |
Display device having an array of spatial light modulators with integrated color filters
By selectively placing color filters with different transmittance spectrums on an array of modulator elements each having the same reflectance spectrum, a resultant reflectance spectrum for each...
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7626581 |
Device and method for display memory using manipulation of mechanical response
Embodiments of an exemplary MEMS interferometric modulator comprise a movable layer and a fixed layer separated by an air gap. A driving scheme employs row/column actuation protocols which maintain...
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7623287 |
Non-planar surface structures and process for microelectromechanical systems
Methods of making MEMS devices including interferometric modulators involve depositing various layers, including stationary layers, movable layers and sacrificial layers, on a substrate. A...
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7623286 |
System and method for displaying images
System and method for enhancing image quality in a display system. A preferred embodiment comprises a variable light source capable of producing a light of specified intensity and color, an array...
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7619810 |
Systems and methods of testing micro-electromechanical devices
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of...
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7619809 |
Mirror assemblies incorporating variable index of refraction materials
A mirror assembly including an active lens and a reflective surface. The mirror assembly may change its refractive index when a voltage is applied to the active lens, thereby changing the field of...
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7619808 |
Light wave front construction
A method for producing a 3D image includes providing a pixel-by-pixel map over a preselected aperture of relative phases for coherent light scattered by or transmitted through a desired scene. The...
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7619807 |
Micromirror array lens with optical surface profiles
A Micromirror Array Lens comprises a plurality of micromirrors arranged on a flat or a curved surface to reflect incident light. Each micromirror in the Micromirror Array Lens is configured to have...
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7619806 |
Methods and apparatus for spatial light modulation
Improved apparatus and methods for spatial light modulation are disclosed which utilize optical cavities having both front and rear reflective surfaces. Light-transmissive regions are formed in the...
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7619805 |
Light modulator device
A light modulator device includes a bottom charge plate, a top charge plate, and a pixel plate supported by at least one flexure, wherein the flexure is a piece-wise linear flexure.
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7619614 |
Three-dimensional optical mouse system
A three-dimensional optical mouse device with a Micromirror Array Lens (MMAL) is provided. To have the three-dimensional optical mouse system, a three-dimensional imaging device is used for...
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7616372 |
Piano MEMS with hidden hinge
The micro-electro-mechanical mirror device according to the present invention includes a platform pivotable about two perpendicular axes, and a hinge structure disposed beneath the platform. The...
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7616371 |
Trimming a MEMS device to fine tune natural frequency
A mirror device includes a mirror, an anchor, and a spring coupling the mirror to the anchor. The anchor and/or mirror can define one or more rows of holes adjacent to the coupling location of the...
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7616370 |
Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
Embodiments of the present invention generally relate to a device that has an improved usable lifetime due to the presence of a lubricant that reduces the likelihood of stiction occurring between...
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7616369 |
Film stack for manufacturing micro-electromechanical systems (MEMS) devices
This invention provides a precursor film stack for use in the production of MEMS devices. The precursor film stack comprises a carrier substrate, a first layer formed on the carrier substrate, a...
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7616368 |
Light concentrating reflective display methods and apparatus
Improved apparatus and methods for displays are disclosed that utilize light concentration array between mechanical light modulators and the viewing surface of the display. The light concentration...
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7613098 |
Objective optical system for optical recording media and optical pickup device using it
An objective optical system focuses light from a light source onto at least two different types of optical recording media having different substrate thicknesses in order to record or reproduce...
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7612933 |
Microelectromechanical device with spacing layer
An interferometric modulating device is provided with a spacing layer positioned between the fixed reflector and the electrode. The spacing layer prevents shorting between the movable reflector and...
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7612932 |
Microelectromechanical device with optical function separated from mechanical and electrical function
A microelectromechanical (MEMS) device includes a first reflective layer, a movable element, and an actuation electrode. The movable element is over the first reflective layer. The movable element...
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7612931 |
MEMS control system gain normalization
A method and system for providing gain normalization in a MEMS control system and/or device includes moving a MEMS structure from a first position wherein light is redirected from a first input...
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7609362 |
Scanning lithographic apparatus and device manufacturing method
A lithographic apparatus and method for exposing a substrate. An illumination system supplies a series of beams of radiation that are patterned by an array of individually controllable elements....
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7605971 |
Plurality of hidden hinges for mircromirror device
A mirror device comprises plural mirror elements, each of which comprises a mirror for reflecting illumination light emitted from a light source, a hinge for supporting the mirror placed on a...
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7605969 |
Interferometric modulation of radiation
An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their...
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7603001 |
Method and apparatus for providing back-lighting in an interferometric modulator display device
Methods and apparatus for providing light in an interferometric modulator device are provided. In one embodiment, a microelectromechanical system (MEMS) is provided that includes a transparent...
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7601486 |
Ultra dark polymer
A method and a material for creating an antireflective coating on an integrated circuit. A preferred embodiment comprises applying a dark polymer material on a reflective surface, curing the dark...
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7595927 |
Spatial light modulator with sub-wavelength structure
An image projection device receives a light emitted from a light source through an illumination optic for projecting to a spatial light modulator (SLM) having a plurality of deflectable...
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7595926 |
Integrated IMODS and solar cells on a substrate
Embodiments of the present invention relate to interferometric display devices comprising an interferometric modulator and a solar cell and methods of making thereof. In some embodiments, the solar...
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7595925 |
Actuating device having a flexible diaphragm controlled by electrowetting
An actuation device with several positions includes a support, at least one flexible membrane attached to the support forming at least one closed containment with the support with volume filled...
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7589916 |
Micromirror array with iris function
The present invention provides a micromirror array with iris function that comprises a plurality of micromirrors and is configured to provide an adjustable aperture having a plurality of aperture...
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7586669 |
Non-contact micro mirrors
A micro mirror device includes a hinge supported by a substrate and a mirror plate tiltable around the hinge. The hinge is configured to produce an elastic restoring force on the mirror plate when...
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7586668 |
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
A method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS device from contamination, physical contact, or other...
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7582231 |
Essentially water-free polymerized crystalline colloidal array composites having tunable radiation diffracting properties
The present invention is directed to a composite having tunable radiation diffracting properties which includes a flexible, water-free polymeric matrix and a crystalline colloidal array of...
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7580559 |
System and method for calibrating a spatial light modulator
A method and system as used to calibrate a reflective SLM. The system can include the SLM having an array of pixels and a projection optical system resolving individual pixels and having an...
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7580178 |
Image-guided microsurgery system and method
The present invention provides an image-guided microsurgery system comprising a real-time three-dimensional microscopic imaging device and a three-dimensional display device. The imaging device...
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7580176 |
Electrical characterization of interferometric modulators
Disclosed herein are methods and systems for testing the electrical characteristics of reflective displays, including interferometric modulator displays. In one embodiment, a controlled voltage is...
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7580175 |
Detector of infrared radiation having a bi-material transducer
A representative embodiment of the invention provides an infrared (IR) detector having a movable plate supported at an offset distance from a substrate by a suspension arm. In response to a...
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7580174 |
Anti-stiction gas-phase lubricant for micromechanical systems
One embodiment of an micromechanical device includes a first contact surface, a moveable component having a second contact surface, where the second contact surface interacts with the first contact...
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7580172 |
MEMS device and interconnects for same
A microelectromechanical systems device having an electrical interconnect between circuitry outside the device and at least one of an electrode and a movable layer within the device. At least a...
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7576905 |
Electrostatically-controlled diffraction gratings using ionic electrophoresis
A diffraction grating for which the intensity and/or direction of the diffracted light is electronically modulated using the electrophoresis of an index-modifying species. Index-modifying dye ions...
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7576901 |
Method and device for selective adjustment of hysteresis window
The width and location of a hysteresis window of an interferometric modulator may be altered by adjusting various physical characteristics of the interferometric modulator. Thus, depending on the...
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7573631 |
Hybrid analog/digital spatial light modulator
One embodiment relates to a hybrid micro electromechanical systems (MEMS) based spatial light modulator (SLM) capable of operating in both analog and digital modes. The hybrid SLM includes a...
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7570417 |
Micro-electro mechanical light modulator device
A micro-electro mechanical light modulator device includes a movable reflective plate, a fixed partial reflective plate, an optical gap defined between the reflective plate and the fixed plate, and...
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7570416 |
Method and apparatus for a reflective spatial light modulator with a flexible pedestal
An electromechanical system comprising a substrate including a surface region and a flexible member coupled at a first end to the surface region. The system further comprises a base region and a...
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