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7616370 |
Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
Embodiments of the present invention generally relate to a device that has an improved usable lifetime due to the presence of a lubricant that reduces the likelihood of stiction occurring between...
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7593153 |
Electrowetting optical device and method of controlling voltage of the same
An electrowetting optical device includes a cell surrounded by a light-incident surface, a light-exit surface, and a plurality of side surfaces, an electrode portion formed along the light-incident...
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7573629 |
Blade actuating apparatus for optical instruments
A base plate is provided with four guide pins and a rotor has four output pins so that each of four blades is provided with a plurality of slots. Individual slots provided to the blades are...
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7561321 |
Process and structure for fabrication of MEMS device having isolated edge posts
A method of fabricating an array of MEMS devices includes the formation of support structures located at the edge of upper strip electrodes. A support structure is etched to form a pair of...
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7561014 |
Fast insertion means and method
Methods and apparatus are provided for rapidly moving a filter into and out of an optical beam. A shuttle carries the filter at a first end and first and second spaced apart pieces of magnetic...
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7535611 |
Electromechanical dynamic force profile articulating mechanism
An electromechanical dynamic force profile articulating mechanism for recovering or emulating true parallel plate capacitor actuation behaviors from deformable membranes used in MEMS systems. The...
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7484857 |
Light modulating mirror device and array
A deformable reflector includes a plurality of MEMS devices, each having an electrode membrane having a reflective surface thereon, a flat surface, and a pulldown electrode formed in the flat...
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7471439 |
Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant
Embodiments of the present invention generally relate to a process of forming a device that has an improved usable lifetime due to the addition of a gas-phase lubricant that reduces the likelihood...
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7447891 |
Light modulator with concentric control-electrode structure
An electronic device for at least partially displaying a pixel of an image, the device comprising first and second reflectors defining an optical cavity therebetween, the optical cavity being...
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7417782 |
Methods and apparatus for spatial light modulation
Improved apparatus and methods for spatial light modulation are disclosed which utilize optical cavities having both front and rear reflective surfaces. Light-transmissive regions are formed in the...
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7393793 |
Tunable-wavelength optical filter and method of manufacturing the same
A method of manufacturing a tunable wavelength optical filter. The method includes steps of forming a first sacrificial oxide film for floating a lower mirror on a semiconductor substrate;...
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7375867 |
Transmissive electromechanical light valve and system
An apparatus, system, and method for a transmissive electromechanical light valve including a gate pivotable between a first position to allow light to pass through a valvelet and a second position...
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7283703 |
Movable lens beam steerer
An apparatus and system having an optoelectronic module, as well as a method of positioning the lens of the optoelectronic module in order to adjust the steering of a light beam are described herein.
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7227618 |
Pattern generating systems
A pattern generating system for generating two-dimensional images on a surface includes a light source and one or more Zone Plate Modulator (ZPM) arrays. The ZPM arrays comprise diffractive zone...
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7218364 |
Dual mode liquid crystal displays (LCDs) with electromechanical reflective array
Liquid crystal displays and devices including the same are provided that include a micro-electromechanical reflective array; and a plurality of plates associated with the micro-electromechanical...
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7210795 |
Light quantity adjusting device and projector apparatus using the same
A light quantity adjusting device for adjusting light quantity of a projector apparatus. The adjusting device includes a substrate having an optical path opening and a blade guide surface having...
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7209290 |
Diffractive thin-film piezoelectric micromirror and method of producing the same
Disclosed is a diffractive micromirror and a method of producing the same. More particularly, the present invention pertains to a diffractive micromirror, in which a recess having a desired depth...
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7113318 |
Light amount control apparatus, photographing apparatus, and filter
It is an object of this invention to independently control the F-number and the number of light attenuation steps of a multi-density ND filter by using a light amount control apparatus using an...
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7099084 |
Diffractive wave modulating devices
A zone plate modulator modulates an incident wave by changing the relative distance between a pair of complementary reflective zone plates. The modulator acts to reflect the incident wave as a...
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7085032 |
Light regulator and image pickup system
A light regulator includes a substrate having an optical aperture, an even number of blade members (six or more) arranged substantially uniformly around the optical aperture, and spindles provided...
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6972889 |
Mems electrostatically actuated optical display device and associated arrays
A simplified MEMS optical display device driven by electrostatic forces and associated arrays are provided for. The optical display device includes an optically transparent substrate, an optically...
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6968258 |
Residual feedback to improve estimator prediction
A system and method 100 of using residual feedback in a control loop in a manner that substantially eliminates the steady state error in the predicted states that results from the mismatch in...
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6958850 |
Pointing angle control of electrostatic micro mirrors with modified sliding mode control algorithm for precision control
The present invention is directed to a control system for a MEMS device, such as a MEMS mirror, that uses sliding mode analysis to accurately and predictably control the position of the mirrors in...
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6906849 |
Micro-mirror element
A micro-mirror element includes a micro-mirror substrate, a wiring substrate and an electroconductive spacer disposed between the two substrates. The micro-mirror substrate is formed integral with...
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6903860 |
Vacuum packaged micromirror arrays and methods of manufacturing the same
A vacuum packaged electromechanical micromirror array comprises a 1st packaging substrate, a 2nd packaging substrate, a device substrate with a 1st surface and a 2nd surface, control circuitry on...
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6901204 |
Microelectromechanical system (MEMS) variable optical attenuator
Disclosed is an MEMS variable optical attenuator comprising a substrate having a planar surface, optical fibers having an optical signal transmitting end and an optical signal receiving end,...
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6891657 |
Damped control of a micromechanical device
Device and method for a damping function to reduce undesirable mechanical transient responses to control signals. In one aspect of the present invention, the damping function may be used to reduce...
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6864977 |
Spectrophotometer with electrostatic-film shutter
Described herein is a spectrophotometer having an inlet slit associated to which is at least one electrostatic-film shutter.
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6856448 |
Spatial light modulator
A deformable mirror element with a high natural frequency has elongate ribbons attached along a longitudinal portion thereof to a support. The ribbon is transversely slit to divide each ribbon into...
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6836352 |
High frequency deformable mirror device
A deformable mirror element with a high natural frequency has elongate ribbons attached along a longitudinal portion thereof to a support. A reflective wing portion extends laterally from the...
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6822779 |
Method of finding drive values for an actuation mechanism
A method of finding drive values for an actuation mechanism having three degrees of freedom is provided, that will optimize a predetermined parameter of a system that utilizes the actuation...
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6816295 |
MEMS variable optical attenuator
Disclosed is a MEMS (Micro Electro Mechanical System) variable optical attenuator. The MEMS variable optical attenuator comprises a substrate having a flat upper surface; an electrostatic...
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6812979 |
Color-separating apparatus for liquid crystal projector of single panel type
A color-separating apparatus for a liquid crystal projector of single panel type that is capable of improving light efficiency and color revival property. In the apparatus, a color filter has red,...
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6806985 |
Optical system with shutter assembly having an integral shutter-mounted actuator
An optical system includes a shutter assembly with a stationary support, a shutter pivotably mounted upon and movable with respect to the support; and a shutter drive mechanism. The shutter drive...
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6785032 |
Laser countermeasure system and method
A laser countermeasure system uses a fluence trigger along an optical path between an entrance and a detector at an output. The fluence trigger detects laser radiation and blocks the passage...
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6762873 |
Methods of driving an array of optical elements
Relates to writing an array of optical elements which are each switched between two states according to input data sets. In a first method, data is written in two steps in which different selected...
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6750999 |
Reconfigurable quasi-optical unit cells
A quasi-optical system is provided. More specifically, a quasi-optical system is provided comprising various embodiments of quasi-optical grids (such as arrays or layers and the like) with...
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6750998 |
Electro-mechanical grating device having a continuously controllable diffraction efficiency
An electro-mechanical grating device including: a base having a surface; a bottom conductive layer provided above said base; a spacer layer is provided and a longitudinal channel is formed in said...
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6727672 |
Driving device and light amount controller
There is provided a small-sized and slim driving device which is easy to manufacture and capable of producing high output. A magnet has a cylindrical shape, and at least the outer peripheral...
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6704132 |
Micromirror truss structure and fabrication method
A micromirror ( 110 ) includes a frame portion ( 112 ), a gimbal portion ( 114 ) and a mirror portion ( 116 ) formed from a single piece of material. A plurality of truss members ( 140/142 ) are...
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6700690 |
Tunable variable bandpass optical filter
A variable bandwidth tunable optical filters comprised of two transparent optical substrates, upon each of which is deposited a linearly variable multilayer interference filter coating which varies...
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6643065 |
Variable spacing diffraction grating
A variable spacing diffraction grating is fabricated using micro-electromechanical (MEMS) technology. An array of interconnected beam elements is fabricated into a diffraction grating and mounted...
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6639710 |
Method and apparatus for the correction of optical signal wave front distortion using adaptive optics
An adaptive optics system is disclosed whereby at least one mirror in the system is manipulated using electrostatic force to selectively attract or repel a portion of the mirror to or from a...
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6633426 |
Optical-electrical MEMS devices and method
A novel optical-electrical MEMS device overlaid or covered with an optically transmissive substrate held spaced in inverted preferably flip-chip bonded fashion to the device, with transparent...
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6624944 |
Fluorinated coating for an optical element
A protective cover ( 10 ) for an optical device, such as a spatial light modulator or an infrared detector or receiver. The cover ( 10 ) has an optically transmissive window ( 11 ), which has a...
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6618184 |
Device for use with a micro-electro-mechanical system (MEMS) optical device and a method of manufacture therefor
A device for use in a micro-electro-mechanical system (MEMS) optical system. The device includes a substrate having opposing first and second sides, wherein the first side has a light reflective...
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6614581 |
Methods and apparatus for providing a multi-stop micromirror
A microstructure is provided which facilitates alignment by allowing movement of the microstructure between one of a plurality of positions. The microstructure is included in an electromechanical...
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6614570 |
Shutter for fiber optic systems
A light shutter for controlling a light signal between occluded and uninterrupted states. The shutter has a frame which mounts a beam under compression so that it assumes either of two bi-stable...
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6594060 |
Electromechanical conformal grating device with improved optical efficiency and contrast
An electromechanical conformal grating device having a period Λ, that includes: an elongated ribbon element including a light reflective surface; a pair of end supports for supporting the...
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6594059 |
Tilt mirror fabry-perot filter system, fabrication process therefor, and method of operation thereof
A tilt mirror Fabry-Perot tunable filter comprises a frame and a first mirror structure. A tether system connects the first mirror structure to this frame. The tether system is designed to enable...
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