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7612330 |
Optical scanning probe, optical scanning probe device and method for controlling the optical scanning probe
An optical scanning probe is provided and includes an optical scanning element which scans a subject with light, and a signal switching section for switching a drive signal for making the optical...
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7593152 |
Optical device
An optical device includes a movable portion having a light reflection portion formed thereon, a drive mechanism operable to pivot the movable portion so as to scan light reflected from the light...
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7586669 |
Non-contact micro mirrors
A micro mirror device includes a hinge supported by a substrate and a mirror plate tiltable around the hinge. The hinge is configured to produce an elastic restoring force on the mirror plate when...
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7586668 |
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
A method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS device from contamination, physical contact, or other...
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7579746 |
Actuator with Alternating Steady Voltage Combs and Variable Voltage Combs
An actuator includes: a base section; an object having a body portion and a holding portion holding the body portion in a manner that the body portion is movable against the base section; a movable...
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7556389 |
Pointable optical system with coude optics having a short on-gimbal path length
A coude gimbal structure includes a two-axis gimbal system having an outer gimbal pivotable about a first rotational axis, and an inner gimbal supported on the outer gimbal and pivotable about a...
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7550895 |
Method for driving micro-oscillating element having comb-teeth electrodes
A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines...
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7542199 |
DMD comprising nonparallel mirror deflection axes
The digital mirror device (DMD) is an array of single mirrors, which are deflectable on mirror deflection axes (MDAs, as e.g. characterized by their orientation with the array raster). In the state...
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7538928 |
MEMS mirror with parallel springs and arched support for beams
A micro-electro-mechanical system (MEMS) mirror device includes (1) a mirror, (2) spring elements coupled to the mirror, (3) a beam coupled to the group of spring elements, (4) a spring coupled to...
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7538927 |
MEMS mirror with short vertical comb teeth and long in-plane comb teeth
A process for constructing a micro-electro-mechanical system (MEMS) device includes etching the topside of a wafer to form a first support layer having short stationary comb teeth extending from...
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7538922 |
Encapsulated spatial light modulator having improved performance
Devices and methods for forming a spatial light modulator with high contrast are described. Light absorbing materials are used within a chamber that houses a spatial light modulator. The light...
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7535620 |
Micro-electro-mechanical system micro mirror
A micro-electro-mechanical system (MEMS) micro mirror and a method of making the same. The micro mirror includes a body having a mirror support, opposed anchor s and flexible hinges which connect...
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7532376 |
Forming an actuating mechanism for a micro-scanning device
Forming an actuating mechanism for a micro-scanning device includes forming a scanner chip having a scan table mounting cavity, first and second coil mounting cavities and first and second pivoting...
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7522789 |
Optical switches and actuators
An optical switch comprises one or more input ports for directing an optical beam into the switch; dispersive means configured to receive said optical beam and which spatially separate the optical...
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7508111 |
Biaxial actuators with comb electrodes having separated vertical positions
Provided are a biaxial actuator and a method of manufacturing the same. The biaxial actuator includes: a stage unit seesawing in a first direction; a first support unit supporting the stage unit; a...
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7496118 |
External cavity resonator type tunable light source which can be easily manufactured and which is capable of wavelength sweeping at high speed
A collimator lens converts light beams emitted from a low reflectance facet of a semiconductor laser into parallel light beams. A diffraction grating receives and diffracts the light beams at a...
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7489434 |
Hybrid micromirror array lens for reducing chromatic aberration
This invention provides a Hybrid Micromirror Array Lens with reduced chromatic aberration over a broadband wavelength range of light. Conventional micromirror array lens uses phase matching...
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7486425 |
Mirror device for projection system having plurality of tiltable mirrors tilted
A mirror device of one embodiment of the invention is for a projection system corresponding to one of a pixel and a sub-pixel of image data to be projected by the projection system. The mirror...
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7480099 |
Variable focus system
A variable focus system that includes an electrovariable optic (EVO) and a controller operatively configured for changing the focal configuration of the EVO. The EVO includes a plurality of movable...
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7468829 |
Microelectromechanical modulation device and microelectromechanical modulation device array, and image forming apparatus
A microelectromechanical modulation device comprising: a movable portion, which is supported to be elastically and bi-directionally displaced and which has a modulation function; and a plurality of...
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7468572 |
Versatile digitally controlled micro-mechanical actuator
A micro-mechanical actuator includes a partially cylindrical rotatable rotor assembly, a stationary stator structure, rotatable connectors, connecting the rotor assembly and the stator structure,...
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7466476 |
Sloped cantilever beam electrode for a MEMS device
A method of tilting a micromirror includes providing a substrate, a sloped electrode outwardly from the substrate, and a sloped electrode positioning system outwardly from the substrate. The method...
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7453618 |
Miniature single actuator scanner for angle multiplexing with circularizing and pitch correction capability
The present invention provides a scanner comprising: a reflector component; means supporting the reflector component for pivoting with respect to the MCR to provide a scan which is stationary with...
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7453617 |
Scanning device and fabrication method thereof
A scanning device includes a mirror unit formed on a substrate so as to be pivotable centering around one axis for adjusting the direction of reflected light; a support frame formed at one surface...
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7453182 |
Micro oscillating element
A micro oscillating element is formed integrally from a material substrate made up of a first conductive layer, a second conductive layer and an insulating layer disposed between the first...
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7452085 |
Dynamically adjustable fold-mirror assembly for projection device
An apparatus, system, and method for a fold-mirror assembly with a dynamically adjustable mirror element for use in a projection device are disclosed herein.
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7443586 |
Display device using single-panel diffractive light modulator
Disclosed herein is a display device using a single-panel diffractive light modulator. The display device includes a light source unit, a condensing unit, an illumination unit, a diffractive light...
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7436574 |
Frequency tunable resonant scanner
Provided is a one-axis driving optical scanner which includes a substrate, a stage separated from the substrate to a predetermined height and having an upper surface where an optical scanning...
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7408695 |
Electrically rotationally actuatable micro-mirror or micro lens
Micro-mirror or micro-lens made up of a moving part ( 10 ) with a reflective or refringent zone ( 17 ), a fixed part ( 14 ), means of connection ( 13 ) of the moving part ( 10 ) to the fixed part (...
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7405506 |
Driving mechanism and micro-mirror device provided with the same
A driving mechanism configured to turn a plate member with respect to a frame member around a predetermined turning axis includes a pair of supporting members supporting the plate member, a pair of...
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7365613 |
Method of determining resonant frequency
A method for operating a torsion oscillator at its resonant frequency. The method performs an open-loop frequency sweep starting with nominal operation parameters saved from the factory or from a...
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7355317 |
Rocker-arm actuator for a segmented mirror
A MEMS device having a movable plate supported on a substrate by a support structure that is hidden under the plate and yet which can be implemented to enable rotation of the plate with respect to...
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7338705 |
Static dissipation treatments for optical package windows
An optically transparent conductive material is disposed directly or indirectly on an inside surface of a cover material for static dissipation in an optical switching device. The optically...
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7336409 |
Miniature flexure based scanners for angle multiplexing
The present invention provides a spatial flexure comprising: a base section; an end section; and an intermediate laterally contracting and expanding section connecting the base and end sections,...
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7333121 |
System and method for scaling data to compensate for slanted scanning in a bidirectional scanning laser printer
A scanning system is adapted to scan an image beam across a photoconductive surface. The scanning system includes an oscillating mirror and is operable to generate an image beam and to reflect the...
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7330297 |
Fine control of rotation and translation of discretely controlled micromirror
A micromirror control system includes a bottom layer configured to support the micromirror control system including a stopper plate coupled to the bottom layer at a first end, configured to rotate...
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7321379 |
Galvonometric scanning and imaging with multiple beams reflected from an oscillator
Multiple light beams are reflected by a resonant oscillator through an optical system onto light sensitive drums of a printing system. Information is encoded onto the beams, and an image is printed...
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7312915 |
Microelectromechanical devices with low inertia movable elements
A microelectromechanical device having a movable element with low mass inertia is disclosed herein. The movable element is held on a substrate such that the element is capable of rotating relative...
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7307771 |
Gimbal with orbiting mirror
A gimbal for a gimbaled mirror optical sensor system includes a mirror support rotatable about a first axis along which an optical sensor suite lies, the first axis being spaced apart from a...
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7300157 |
Pixel-shifting projection lens assembly to provide optical interlacing for increased addressability
A projection display system includes a projection lens assembly that has multiple projection lens elements that are configured to receive light imparted with display information by a pixelated...
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7273289 |
Vacuum compatible, high-speed, 2-D mirror tilt stage
A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive...
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7262541 |
Micro-oscillation element incorporating springs
A micro-oscillation element includes an oscillation section and a frame. The oscillation section is provided with a mirror surface and is connected to the frame via trapezoidal first and second...
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7257286 |
Dual comb electrode structure with spacing for increasing a driving angle of a microscanner, and the microscanner adopting the same
A dual comb electrode structure with spacing for increasing a driving angle of a micro mirror provided by MEMS (Micro-Electro-Mechanical system) structure and a microscanner adopting the same are...
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7256919 |
Rotational micro mirror
A rotational micro mirror is rapidly driven, has a large driving angle, and is structurally stable. The rotational micro mirror includes: a substrate; a reflection plate which is rotatable and...
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7253550 |
Torsional electrostatic actuator
Multiple drives are coupled together to cause rotation about a single axis by an arrangement in which two moveable electrode plates flank a fixed electrode plate such that the opposite direction...
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7245412 |
On-the-fly laser beam path error correction for specimen target location processing
A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such...
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7239437 |
Reduction of open loop jitter and control loop stabilization of a torsional hinged device by structural optimization
Apparatus and methods for removing jitter and stabilizing the feed back system of a torsional hinged device with minimal changes to the system. The stabilization is accomplished by spatially...
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7233424 |
Steering assembly with electromagnetic actuators
A laser cutting system, including a steering mirror assembly for directing a laser beam through a predetermined cutting path along a workpiece or substrate material. The steering mirror assembly...
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7230743 |
Optical deflector array
An optical deflector array has a first board, second board, and magnetic field generator. The first board has movable plates respectively having reflecting surfaces, wirings passing through the...
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7224512 |
Microelectromechanical system optical apparatus and method
A microelectromechanical systems (MEMS) apparatus ( 100 ) having a footprint of about 1 to 10 millimeters by about 1 to 10 millimeters comprises a movable member ( 101 ) that can be stopped at...
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