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7224097 |
Comb-shaped actuator with off centered electrodes
A comb shaped actuator having off centered electrodes to the fixed electrode and the movable electrode comprise a plurality of electrode finger units containing two fixed electrode fingers next to...
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7224512 |
Microelectromechanical system optical apparatus and method
A microelectromechanical systems (MEMS) apparatus ( 100 ) having a footprint of about 1 to 10 millimeters by about 1 to 10 millimeters comprises a movable member ( 101 ) that can be stopped at...
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7221494 |
Scanning device and method of scanning an optical beam over a surface
An optical scanning device ( 1 ) to scan an optical beam over a surface (S). The optical scanning device ( 1 ) uses a piezoelectric actuator ( 10 ) acting on a platform ( 2 ) that carries a mirror...
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7203426 |
Optical subassembly of optical transceiver
A transceiver module comprised of a multiplexing/demultiplexing optical subassembly is provided. The optical subassembly includes either a transmitter module or a receiver module or both. The...
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7197815 |
Method of manufacturing the electromagnetic actuator
An electromagnetic actuator comprises a core with a coil wound around a stator magnetically coupled to each end of the cored a movable element that can be displaced relative to the stator, and a...
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7196449 |
Two-axis device and manufacturing method therefor
A two-axis device is provided. The two-axis device includes a first substrate having a plurality of electrodes, a first connecting layer located on the first substrate, an actuating layer, a second...
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7187100 |
Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth
A micro-electro-mechanical system (MEMS) mirror device includes an mirror, bonding pads, springs, and beams connected to the mirror. The mirror has a width greater than 1000 and less than 1200...
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7167613 |
Interlaced array of piano MEMs micromirrors
A micro-electro-mechanical (MEMS) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle...
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7167297 |
Micromirror array
In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention,...
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7164522 |
Spatial light modulator, spatial light modulator array, and exposure apparatus
A spatial light modulator has a substrate; a movable member which is disposed so as to hang across the substrate in a displaceable manner and has a conductive section provided in at least a portion...
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7161274 |
Micro-oscillation element having two rotational axes that are non-orthogonal to each other
A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines...
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7158280 |
Methods and systems for improved boundary contrast
The present invention relates to methods and systems that define feature boundaries in a radiation sensitive medium on a workpiece using a diffraction-type micromirror array, extending to...
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7148603 |
Mechanically latchable tiltable platform for forming micromirrors and micromirror arrays
A microelectromechanical (MEM) apparatus is disclosed which includes a platform that can be electrostatically tilted from being parallel to a substrate on which the platform to being tilted at an...
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7130099 |
Micromirror unit with torsion connector having nonconstant width
A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror...
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7119474 |
Systems and methods for overcoming stiction
An electromechanical system includes a structural plate in contact with a stop and an actuator activated by a force for creating a movement of the stop relative to the structural plate, wherein the...
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7110637 |
Two-step electrode for MEMs micromirrors
A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a...
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7110635 |
Electrical x-talk shield for MEMS micromirrors
A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle...
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7106490 |
Methods and systems for improved boundary contrast
The present invention relates to methods and systems that define feature boundaries in a radiation sensitive medium on a workpiece using a diffraction-type micromirror array, extending to...
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7098570 |
Charge screening in electrostatically driven devices
In an electrostatic driving structure for a MEMS device or other electrostatically-driven device, non-insulating material is disposed on or adjacent a gap on the surface of a dielectric between...
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7095156 |
Actuator
An actuator 100 of the type employing a two-degree-of-freedom vibration system includes: a pair of first mass portions 1, 11 ; a second mass portion 2 provided between the pair of first mass...
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7071594 |
MEMS scanner with dual magnetic and capacitive drive
A MEMS scanning device includes more than one type of actuation. In one approach capacitive and magnetic drives combine to move a portion of the device along a common path. In one such structure,...
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7068410 |
Optical scanning apparatus and image forming apparatus
A light beam L from a laser source 62 impinges upon a deflection mirror surface 651 from the direction of a pivot axis (sub scanning direction Y) at an acute angle γ with respect to the...
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7055975 |
Microelectromechanical system with non-collinear force compensation
A microelectromechanical system is disclosed that constrains the direction of a force acting on a first load, where the force originates from the interaction of the first load and a second load. In...
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7047097 |
High performance controller for shifting resonance in micro-electro-mechanical systems (MEMS) devices
Devices being controlled electronically via physical manipulation often display a resonance. In many circumstances, the frequency range of operation is not close to the resonance frequency. In...
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7042609 |
Two-dimensional stepwise-controlled microstructure
A microstructure for steering light is provided that may be stepwise controlled to provide tilt positions in two dimensions. The arrangement is two-dimensional since a tilt axis may be defined as...
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7030537 |
Movable MEMS-based noncontacting device
A microstructure for steering light that mitigates stiction problems is provided. A first tiltable assembly that includes a reflective coating is connected with a substrate. A second tiltable...
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7030708 |
Torsion oscillator stabilization
A torsion oscillator (FIG. 1 ) is stabilized in operation by determining the current resonant frequency ( 62 ); in a first procedure, observing the oscillator for change in resonant frequency ( 64...
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7023606 |
Micromirror array for projection TV
In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention,...
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7012731 |
Packaged micromirror array for a projection display
In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention,...
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7010188 |
Electrode configuration for piano MEMs micromirror
A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle...
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7006268 |
Bracket for supporting a torsional hinge mirror with reduced hinge stress
The present invention provides methods and apparatus for combining a pivoting mirror and support bracket such that the support bracket transmits little or no stresses to the torsional hinges of the...
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6972885 |
Precision mirror displacement assembly
A precision mirror displacement assembly for controlling rotation of a mirror about a rotational axis to obtain a precise mirror orientation includes a mirror having an enhanced backside and a...
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6972886 |
Variable blazed grating
In one aspect of the invention, an apparatus operable to provide optical signal processing includes an inner conductive layer including an at least substantially conductive material and a plurality...
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6970280 |
High angle micro-mirrors and processes
A micro-mirror that comprises a substrate, a hinge structure formed on the substrate and a mirror plate attached to the hinge structure is provided for use in display systems. The mirror plate is...
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6968258 |
Residual feedback to improve estimator prediction
A system and method 100 of using residual feedback in a control loop in a manner that substantially eliminates the steady state error in the predicted states that results from the mismatch in...
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6954301 |
Low-voltage electromechanical device including a tiltable microplatform, method of tilting same, array of such devices and method of setting dimple-to-substrate spacing
A low-voltage electromechanical device including a tiltable microplatform, method of tilting same and array of such devices are provided. The tiltable or steerable microplatform utilizes a...
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6949866 |
Systems and methods for overcoming stiction
A number of methods and systems for overcoming stiction are provided. The systems include electro-mechanical systems capable of exerting a variety of forces upon areas prone to stiction. The...
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6947191 |
Angle-adjusting apparatus for a reflection mirror in a rear-projection TV
An adjustment apparatus of a reflection mirror is disclosed, the apparatus comprising a holding base plate, an affixing block affixed on the holding base plate, at least one adjusting set, and a...
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6934432 |
Switch for the optical switching of a light path
A switch for the optical switching of a light path, particularly for switching the entering of light into a fiber-optical light guide is provided. The switch dial has at least one mirror surface...
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6934063 |
MEMS mirror
A MEMS mirror and method for fabricating the mirror is provided. The mirror has a plurality of structures that operatively rotate around a support structure. The mirror is fabricated, such that the...
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6909735 |
System and method for generating and controlling multiple independently steerable laser beam for material processing
A laser process system with multiple, independently steerable laser beamlets and including a laser and beam shaper for generating a shaped source beam, a splitter stage for generating a plurality...
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6906511 |
Magnetic position detection for micro machined optical element
A property of a magnetic sensor, deployed on a micro machined optical element and exposed to a magnetic field, changes as the position of the micro machined optical element changes with respect to...
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6903486 |
Balanced microdevice
A balanced microdevice comprising a substrate, a movable structure overlying the substrate, an element and a lever assembly having a pivot and a lever coupled to and pivotable about the pivot. The...
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6891988 |
Magnetic position detection apparatus for micro machined optical element
An apparatus having magnetic detection sensor deployed on a micro machined optical element is exposed to a magnetic field to sense change in property as the micro machined optical element is...
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6873447 |
Two-dimensional free-space optical wavelength routing element based on stepwise controlled tilting mirrors
A microstructure for steering light is provided that may be stepwise controlled to provide tilt positions in two dimensions. The arrangement is two-dimensional since a tilt axis may be defined as...
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6859578 |
Fault-tolerant fiber-optical multiwavelength processor
Multi-wavelength fiber-optic processors based on a fault-tolerant scheme using a macro-pixel to control an optical beam are described. The macro-pixel system uses multiple device pixels per beam to...
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6847152 |
Microelectromechnical system for tilting a platform
The present invention provides a MEM system ( 10 ) having a platform ( 14 ) that is both elevatable from the substrate ( 12 ) on which it is fabricated and tiltable with one, two or more degrees of...
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6843576 |
Continuously variable analog micro-mirror device
A micro-mirror device includes a substrate, a reflective element spaced from the surface of the substrate, a pair of electrodes disposed adjacent to the surface of the substrate, spaced apart from...
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6831391 |
Microelectromechanical system for tilting a platform
The present invention provides a MEM system ( 10 ) having a platform ( 14 ) that is both elevatable from the substrate ( 12 ) on which it is fabricated and tiltable with one, two or more degrees of...
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6820988 |
Bulk silicon mirrors with hinges underneath
This invention provides method and apparatus for fabricating a MEMS apparatus having a bulk element with hinges underneath. The bulk element may comprise single-crystal silicon, fabricated by way...
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