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7453618 |
Miniature single actuator scanner for angle multiplexing with circularizing and pitch correction capability
The present invention provides a scanner comprising: a reflector component; means supporting the reflector component for pivoting with respect to the MCR to provide a scan which is stationary with...
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7446928 |
Micro-electro-mechanical systems element array device and image forming apparatus
A micro-electro-mechanical systems element array device in which plural micro-electro-mechanical systems elements each having a movable portion are arranged in an array, said movable portion being...
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7446921 |
Image forming apparatus
An image forming apparatus detects a oscillating state of a oscillation system with a oscillation detector and controls oscillation of the oscillation system such that the oscillation system...
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7446920 |
Optical deflector and optical instrument using the same
An optical deflector arranged to be relatively stably driven regardless of any environmental disturbance such as temperature, includes an oscillating system 160 having plural natural oscillation...
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7446919 |
Piezoelectric actuated scanning mirror
A scanning mirror useful in laser projection devices (LPDs) is provided. The scanning mirror is comprised of a substantially planar member having a movable reflective region and a base region...
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7446911 |
Optical scanning apparatus and image forming apparatus
An optical scanning apparatus for optical scan that oscillates at least partially an oscillating body having a reflective mirror portion, to thereby modulate a direction in which the reflective...
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7443586 |
Display device using single-panel diffractive light modulator
Disclosed herein is a display device using a single-panel diffractive light modulator. The display device includes a light source unit, a condensing unit, an illumination unit, a diffractive light...
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7443569 |
Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
The invention provides a micro-electro-mechanical-system (MEMS) mirror device, comprising: a mirror having a 2-dimensional rotational T-shaped hinge at a first end, and having a flexible connection...
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7436573 |
Electrical connections in microelectromechanical devices
A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the...
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7436572 |
Micromirrors and hinge structures for micromirror arrays in projection displays
A spatial light modulator is disclosed, along with methods for making such a modulator. The spatial light modulator comprises an array of micromirrors each having a hinge and a micromirror plate...
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7436567 |
Optical scanner and scanning type projector
An optical scanner is provided with a mirror section; a movable frame positioned to surround the mirror section and to support the mirror section with a pair of torsion bars to hold the mirror...
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7436566 |
Oscillating device, optical deflector and method of controlling the same
An oscillating device such as an optical deflector, by which a resonance frequency of an oscillating system can be adjusted and controlled. In one preferred embodiment, the oscillating device...
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7423798 |
Addressing circuit and method for bi-directional micro-mirror array
A control substrate of spatial light modulator for a bi-directional micro mirror array includes a plurality of unit cells, each includes a common electrode at a fixed constant potential and an...
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7423795 |
Optical deflector and optical instrument using the same
An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second...
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7423794 |
Device and method for stacked multi-level uncoupled electrostatic actuators
A multi-level decoupled micro-actuator device comprising a first level substrate ( 410 ), a second level frame ( 420 ) stacked on said first level substrate ( 410 ), a third level frame ( 430 )...
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7420724 |
Scanner apparatus having electromagnetic radiation devices coupled to MEMS actuators
A disclosed scanner apparatus includes a member having spaced apart proximal and distal portions. An electromagnetic radiation device is configured to direct electromagnetic radiation therefrom and...
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7420135 |
Micro electro-mechanical system switch and method of manufacturing the same
A micro electro-mechanical system (MEMS) switch and a method for manufacturing the same are provided. The MEMS switch includes a substrate; signal lines formed on the substrate; main electrodes...
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7417783 |
Mirror and mirror layer for optical modulator and method
Described herein are systems, devices, and methods relating to packaging electronic devices, for example, microelectromechanical systems (MEMS) devices, including optical modulators such as...
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7417780 |
Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image
A vibration mirror is reciprocatively vibrated by an electrostatic force to reflect an incident light beam. The vibration mirror comprises a reflection means for reflecting the incident light beam;...
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7417779 |
Single piece torsional hinged device with central spines and perimeter ridges to reduce flexing
A torsional hinged device having an optical surface, such as a mirror or refractive surface, formed from a single piece of silicon with reduced flexing. In addition to central spines to prevent or...
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7414503 |
Torsional hinged device with improved coupling between a magnet mounted to said device and an electrical coil
A pivoting device such as a MEMS mirror provides improved coupling between a permanent magnet on the device and an adjacent electrical coil that may provide a drive force or position sensing. The...
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7411722 |
Display system incorporating bilinear electromechanical grating device
A line scanned display system includes at least three different colors of illumination provided by one or more light sources, and at least one directional illumination optical system for directing...
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7411717 |
Micromirror device
A spatial light modulator comprises an array of micromirror devices each of which has a reflective and deflectable mirror plates. The mirror plates are moved between an ON and OFF state during...
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7411713 |
Yokeless hidden hinge digital micromirror device with double binge layer
A micromirror array 110 fabricated on a semiconductor substrate 11 . The array 110 is comprised of four operating layers 12, 13, 14, 15 . An addressing layer 12 is fabricated on the...
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7408690 |
Actuator, optical scanner, and image forming apparatus
An actuator includes a frame-shaped first mass portion; a supporting portion that supports the first mass portion and takes the shape of a frame so as to surround a perimeter of the first mass...
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7405860 |
Spatial light modulators with light blocking/absorbing areas
A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates...
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7405854 |
Fibrous micro-composite material
Fibrous micro-composite materials are formed from micro fibers. The fibrous micro-composite materials are utilized as the basis for a new class of MEMS. In addition to simple fiber composites and...
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7403317 |
Optical scanning device and method of manufacturing the same
An optical scanning device is disclosed that is manufactured through a simple mounting process and is provided with a hermetically sealed oscillation space for an oscillation mirror. The optical...
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7402255 |
MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation
A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more...
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7400438 |
Micro-electro mechanical device, micro-electro mechanical device array, light modulation device, micro-electro mechanical light modulation device, micro-electro mechanical light modulation device array and image forming apparatus using the same
A transition time is a time from a state where a movable portion has been rotationally displaced in the first direction and stopped to a state where driving portions apply the physical action...
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7400432 |
Scanning-mirror structure having a cut or a composite design to reduce deformation of the mirror face, and related system and method
A mirror structure includes a mirror, a reflective face, a cut in the mirror under the face, and a torsion arm attached to the mirror. Such a mirror structure often distorts a scanned image less...
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7397593 |
Deformable mirror
A deformable mirror includes a deformable section in which, a reflecting surface is formed, a fixing section which fixes an outer periphery of the deformable section, a GND electrode which is...
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7388708 |
Spatial light modulator multi-layer mirror plate
A spatial light modulator having a multi-layer mirror is described.
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7388706 |
Photonic MEMS and structures
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of...
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7388702 |
Micro-oscillating member, light-deflector, and image-forming apparatus
The present invention provides a resonance type micro-oscillating member capable of retraining a fluctuation of angular velocity, and specifically provides a micro-oscillating member, which is a...
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7388701 |
Optical modulator
An optical modulator having a junction layer is disclosed. An optical modulator may be provided which includes a substrate, an insulation layer positioned on the substrate, a ribbon layer...
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7388700 |
Ball joint gimbal mirror with actuator assembly
Compact scanning techniques that can scan a large degree optical solid angle are disclosed. One particular embodiment is a processor controlled scanner that is capable of a large degree optical...
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7385750 |
Spatial light modulator using an integrated circuit actuator
A spatial light modulator (SLM) includes an integrated circuit actuator that can be fabricated using photolithography or other similar techniques. The actuator includes actuator elements, which can...
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7385268 |
Method for linearizing deflection of a MEMS device using binary electrodes and voltage modulation
A micromechanical device comprising one or more electronically movable structure sets comprising for each set a first electrode supported on a substrate and a second electrode supported...
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7382516 |
Discretely controlled micromirror with multi-level positions
This invention provides the two types of Discretely Controlled Micromirror (DCM), which can overcome disadvantages of the conventional electrostatic micromirrors. The first type micromirror is a...
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7382510 |
Actuator
An actuator of the type employing a two-degree-of-freedom vibration system includes a first mass portion, a second mass portion, a pair of supporting portions, as least a pair of first elastic...
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7380950 |
Hybrid high-bandwidth deformable fast steering mirror
A high-bandwidth deformable fast steering mirror (“HDFSM”) system, including an electromechanical fast steering mirror (“FSM”) apparatus, and a deformable mirror (“DM”) apparatus...
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7379227 |
Method and device for modulating light
“Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each...
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7377659 |
Deformable system comprising a parallelepiped-shaped part and an actuator
The invention relates to a deformable system comprising a part of a rectangular block shape, such as a beam, coupled to an actuator enabling the part to be deformed by generating curvature in the...
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7372620 |
Micromirror and micromirror device
There is provided a micromirror which includes a holding unit, a mirror that is held by the holding unit to be pivotable about a rotation axis of the mirror, a first fixed electrode group including...
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7369296 |
Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
By varying the spacing between a partially-reflective, partially-transmissive surface and a highly reflective surface positioned behind the partially-reflective, partially-transmissive surface, an...
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7369288 |
Micromechanical optical element having a reflective surface as well as its use
By way of example, it would also be possible to dispense in a manner which is not illustrated with the spring elements 2 , and then for the element 1 to carry out an oscillating translational...
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7368846 |
Microactuator with displacement sensing function and deformable mirror including the microactuator
According to the present invention, a moving element Ai such as an electrostatically driven actuator is displaced by supplying a drive signal thereto. Meanwhile, a displacement sensing section 6 ...
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7362495 |
Electrostatic fins for a MEMS device
A MEMS device includes a hinge that is disposed outwardly from a substrate and capable of at least partially supporting a conductor that is disposed outwardly from the hinge. The conductor being...
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7362488 |
Tiltable-body apparatus, and method of fabricating the same
The tiltable-body apparatus including a frame member, a tiltable body, and a pair of torsion springs having a twisting longitudinal axis. The torsion springs are disposed along the twisting...
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