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7619802 |
Suspension for maintaining mirror flatness of a MEMS device in a scanner system or the like
Briefly, in accordance with one or more embodiments, a MEMS device may comprise a coil frame having a drive coil disposed thereon and being supported by one or more suspension arms disposed along...
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7619801 |
Two-element f-θ lens used for micro-electro mechanical system (MEMS) laser scanning unit
A two-element f-θ lens used for a micro-electro mechanical system (MEMS) laser scanning unit includes a first lens and a second lens, the first lens is a biconvex lens and the second lens is a...
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7619798 |
Optical deflector and light beam scanning apparatus having a control mechanism utilizing electromechanical transducers for adjusting resonant frequency for stable scanning
An optical deflector and a light beam scanning apparatus characterized by stable amplitude and speed wherein the fluctuation of the resonant frequency resulting from various factors such as a...
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7618751 |
RET for optical maskless lithography
The present invention relates to Optical Maskless Lithography (OML). In particular, it relates to providing OML with a recognizable relationship to mask and phase-shift mask techniques.
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7616367 |
Fiber based MEMS
MEMS can be fabricated from fibers without the use of a matrix material. Devices can be built where fibers are attached only at a substrate edge (e.g. cantilevers, bridges). Motions can be...
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7616366 |
MEMS device having a drive coil with curved segments
Briefly, in accordance with one or more embodiments, a coil for a MEMS device, and/or a structure on which the coil is disposed, may have one or more linear segments and one or more non-linear...
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7616365 |
Electromagnetic micro actuator and method of manufacturing the same
A micro actuator and a method of manufacturing the micro actuator. A micro actuator includes a base frame, a first movable part, a second movable part, at least one pair of permanent magnets, a...
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7612932 |
Microelectromechanical device with optical function separated from mechanical and electrical function
A microelectromechanical (MEMS) device includes a first reflective layer, a movable element, and an actuation electrode. The movable element is over the first reflective layer. The movable element...
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7605966 |
Optical deflector
An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from an end of said mirror; a support surrounding said mirror; a first piezoelectric element, one...
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7605965 |
Optical deflector
An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever...
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7599105 |
Optical scanning device and image forming apparatus wherein the position of the rotational axis of the oscillating mirror is fixed in the plane orthogonal to the torsion beam such that the rotational axis of the oscillating mirror meets the intersection point of a light beam from a light source unit and a light axis of the focusing optical system
A disclosed optical scanning device includes an oscillating mirror supported by a torsion beam for deflecting light beams from a light source unit to scan an object surface backward and forward. A...
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7599011 |
Method for synchronizing an image data source and a resonant mirror system to generate images
System and method for synchronizing the low speed mirror movement of a mirror display system with incoming frame or video signals, and synchronizing buffered lines of video data to the...
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7595924 |
Bracket for piezoelectric drive torsional hinge mirror
A combination pivoting mirror and support bracket has a bracket for supporting a pivoting mirror assembly and for attaching the combination to a using device. The bracket has first and second...
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7593091 |
Imaging or exposure device, in particular for making an electronic microcircuit
The imaging or exposure device comprises a radiation source ( 1 ), a reticle ( 3 ) mounted between the radiation source and an optical projection system ( 4 ) for shaping the radiation downstream...
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7587104 |
MEMS device fabricated on a pre-patterned substrate
A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated by an orthogonal upper...
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7586659 |
Audio MEMS mirror feedback
A mirror device and a method for audio feedback of a MEMS mirror device are presented. The mirror device includes a mirror with a reflective surface located to intercept a modulated beam of light...
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7579746 |
Actuator with Alternating Steady Voltage Combs and Variable Voltage Combs
An actuator includes: a base section; an object having a body portion and a holding portion holding the body portion in a manner that the body portion is movable against the base section; a movable...
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7573634 |
Micromechanical mirrors with a high-reflection coating, method for production thereof and use thereof
The invention relates to micromechanical mirrors with a high-reflection coating for the deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) spectral range, based on a substrate which is coated with...
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7573628 |
Actuator comprising mechanic filter
An actuator which is actuated by an external input and also can remove noise caused by a high frequency by providing a low pass filter capable of preventing a particular high frequency through its...
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7573627 |
Amplified bimorph scanning mirror, optical system and method of scanning
An amplified bimorph scanning mirror for use in various optical systems, an optical coherence tomography scanner incorporating the amplified bimorph scanning mirror, and a method for manufacturing...
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7573626 |
Optical scanner and image display apparatus having the same
Provided is an optical scanner for observing an image that is formed by performing two-dimensional scanning with the aid of a swinging movable mirror, using light beams modulated on the basis of...
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7567367 |
Micro-mirror device and array thereof
A micro mirror device and an array thereof are disclosed wherein an outer frame is formed at a position distanced from a mirror plate, thereby reducing a dynamic deformation of the mirror plate,...
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7564612 |
Photonic MEMS and structures
An optical device includes a non-transparent substrate. The optical device further includes a first optical layer which is at least partially transmissive and at least partially reflective to...
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7564535 |
Seamless exposure with projection system comprises array of micromirrors with predefined reflectivity variations
A lithographic scanning apparatus includes a light projection device for seamlessly and uniformly projecting a scanning light onto a light exposing area. The light projecting device further...
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7561334 |
Method and apparatus for reducing back-glass deflection in an interferometric modulator display device
Methods and apparatus for reducing back-glass deflection in an interferometric modulator display device are provided. In one embodiment, an interferometric modulator display is provided that...
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7561317 |
Resonant Fourier scanning
A scanning beam assembly comprising: a beam generator to generate a beam of radiation, and two or more oscillating reflectors configured to deflect the beam in sequence, each reflector being driven...
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7554711 |
MEMS devices with stiction bumps
An interferometric modulator comprising a substrate, a movable membrane and one or more stiction bumps disposed between the substrate and the movable membrane. The stiction bumps are configured to...
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7551339 |
Optical scanning apparatus, optical writing apparatus, image forming apparatus, and method of driving vibration mirror
An optical scanning apparatus includes a vibration mirror having a mirror surface that reflects an optical beam. A pair of torsion beams swingably support the mirror. The mirror is vibrated in a...
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7548362 |
Optical deflecting device and image forming apparatus using the same
An optical deflecting device including a supporting member, an oscillating member, and a driving member for driving the oscillating member, wherein the oscillating member includes a first movable...
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7545552 |
Sacrificial spacer process and resultant structure for MEMS support structure
Disclosed is a microelectromechanical systems (MEMS) device and method of manufacturing the same. MEMS such as an interferometric modulator include a sidewall spacer formed adjacent to a movable...
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7545446 |
Offner relay for projection system
A projection system includes a modulator and an Offner relay. The modulator is to modulate light in accordance with sub-frames of a frame of image data. The Offner relay is to differently aim, in...
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7536068 |
Micro movable element and optical switching device
A micro movable element includes a micro movable substrate, a package base and an electroconductive connector. The micro movable substrate is provided with a micro movable unit that includes a...
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7532378 |
Laser irradiation apparatus, method of laser irradiation, and method for manufacturing semiconductor device
A laser irradiation apparatus and a method of laser irradiation which can improve use efficiency of a laser beam, eliminate an influence of stray light at a DMD, and form an irradiation pattern...
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7532377 |
Movable micro-electromechanical device
Improvements in an interferometric modulator that has a cavity defined by two walls.
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7532375 |
Tuning-fork-type scanning apparatus with a counterweight
A scanning method and apparatus, the apparatus comprising a fork with first and second forwardly extending tines and a rearwardly extending counterweight member, a mount for supporting the fork at...
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7529016 |
Extended-range tiltable micromirror
A tiltable micromirror device is disclosed in which a micromirror is suspended by a progressive linkage with an electrostatic actuator (e.g. a vertical comb actuator or a capacitive plate...
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7529011 |
Deflector mirror with regions of different flexural rigidity
A deflector mirror is disclosed that includes a mirror substrate configured to vibrate in a reciprocating manner on beams as a torsional rotary shaft so as to deflect a light beam emitted from a...
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7528933 |
Lithographic apparatus and device manufacturing method utilizing a MEMS mirror with large deflection using a non-linear spring arrangement
An array of individually controllable elements for a lithographic apparatus comprise reflectors that can be actuated by an actuator and are biased to return to a given position by a force that...
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7525730 |
Method and device for generating white in an interferometric modulator display
Various embodiments of the invention relate to methods and systems for generating the color white in displays created from interferometric modulators and more specifically, to the generation of the...
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7525718 |
Spatial light modulator using an integrated circuit actuator and method of making and using same
A spatial light modulator (SLM) includes an integrated circuit actuator that can be fabricated using photolithography or other similar techniques. The actuator includes actuator elements, which can...
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7522789 |
Optical switches and actuators
An optical switch comprises one or more input ports for directing an optical beam into the switch; dispersive means configured to receive said optical beam and which spatially separate the optical...
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7522325 |
Light scanning device
A light scanning device includes: a light source; a lens which converts a light emitted from the light source to a parallel light flux; an oscillating mirror which oscillates rotationally; a mirror...
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7518774 |
Optical deflector and optical instrument using the same
An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second...
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7508561 |
Deformable mirrors
A deformable mirror (DM) embodying the invention includes a reflective layer attached to the front surface of a solid monolithic block of a ceramic material. A plurality of holes is drilled from...
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7508111 |
Biaxial actuators with comb electrodes having separated vertical positions
Provided are a biaxial actuator and a method of manufacturing the same. The biaxial actuator includes: a stage unit seesawing in a first direction; a first support unit supporting the stage unit; a...
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7504757 |
Multi-finger z-actuator
Multi-level structures are formed in a semiconductor substrate by first forming a pattern of lines or structures of different widths. Width information on the pattern is decoded by processing steps...
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7502160 |
Speckle reduction in laser-projector images
A laser projector having a configurable spatial light modulator (SLM) adapted to display various spatial modulation patterns and redirect illumination from a laser to form an image on the viewing...
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7502158 |
Method and structure for high fill factor spatial light modulator with integrated spacer layer
A high fill factor spatial light modulator. The spatial light modulator includes a device layer coupled to a support base. The device layer includes a mirror plate and a coplanar flexible member....
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7496118 |
External cavity resonator type tunable light source which can be easily manufactured and which is capable of wavelength sweeping at high speed
A collimator lens converts light beams emitted from a low reflectance facet of a semiconductor laser into parallel light beams. A diffraction grating receives and diffracts the light beams at a...
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7486430 |
Single-crystal-silicon 3D micromirror
In a 3D free space micromirror device, a mirror plate is joined with actuators through flexible springs where the other ends of the actuators have fixed support on the substrate. Single crystal...
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