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7623283 |
Actuator
An actuator includes a movable plate, at least one elastic member supporting the movable plate to allow the movable plate to rock, a support holding the elastic member, a wiring layer extending on...
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7619614 |
Three-dimensional optical mouse system
A three-dimensional optical mouse device with a Micromirror Array Lens (MMAL) is provided. To have the three-dimensional optical mouse system, a three-dimensional imaging device is used for...
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7616365 |
Electromagnetic micro actuator and method of manufacturing the same
A micro actuator and a method of manufacturing the micro actuator. A micro actuator includes a base frame, a first movable part, a second movable part, at least one pair of permanent magnets, a...
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7609432 |
Nanowire-based device and method of making same
A nanoelectromechanical (NEM) device and a method of making same employ a laterally extending nanowire. The nanowire is grown in place from a vertical side of a vertically extending support block...
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7605964 |
Array of micromirrors with non-fixed underlying structures
The present invention discloses an array of micromirrors with non-fixed underlying structures which can be oriented to have principal rotational axis with no structural and mechanical interference...
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7599075 |
Automatic optical inspection using multiple objectives
Apparatus and techniques for automated optical inspection (AOI) utilizing image scanning modules with multiple objectives for each camera are provided. A scanning mechanism includes optical...
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7572015 |
Displaying optical system and image projection apparatus
A displaying optical system is disclosed, which is capable of reducing a speckle noise. The displaying optical system comprises a light source emitting coherent light, a scanning device scanning...
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7553686 |
Al2O3 atomic layer deposition to enhance the deposition of hydrophobic or hydrophilic coatings on micro-electromechanical devices
Micro-mechanical devices, such as MEMS, having layers thereon, and methods of forming the layers, are disclosed. In one aspect, a method may include forming a layer including an oxide of aluminum...
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7538927 |
MEMS mirror with short vertical comb teeth and long in-plane comb teeth
A process for constructing a micro-electro-mechanical system (MEMS) device includes etching the topside of a wafer to form a first support layer having short stationary comb teeth extending from...
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7538471 |
Microactuator having increased rigidity with reduced mass
There has been a trade-off between the rigidity and the mass of a movable section of a microactuator, and also between the rigidity of the movable section and the electrostatic force. A...
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7536068 |
Micro movable element and optical switching device
A micro movable element includes a micro movable substrate, a package base and an electroconductive connector. The micro movable substrate is provided with a micro movable unit that includes a...
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7528933 |
Lithographic apparatus and device manufacturing method utilizing a MEMS mirror with large deflection using a non-linear spring arrangement
An array of individually controllable elements for a lithographic apparatus comprise reflectors that can be actuated by an actuator and are biased to return to a given position by a force that...
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7528932 |
SLM direct writer
The present invention relates to an apparatus ( 100 ) for patterning a workpiece arranged at an image plane and sensitive to electromagnetic radiation, comprising a source emitting electromagnetic...
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7525730 |
Method and device for generating white in an interferometric modulator display
Various embodiments of the invention relate to methods and systems for generating the color white in displays created from interferometric modulators and more specifically, to the generation of the...
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7525637 |
Assembly
An assembly includes a first element having a predetermined functionality that is to be positioned with respect to a second element. The elements are arranged in a spaced relationship on a support...
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7522789 |
Optical switches and actuators
An optical switch comprises one or more input ports for directing an optical beam into the switch; dispersive means configured to receive said optical beam and which spatially separate the optical...
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7496118 |
External cavity resonator type tunable light source which can be easily manufactured and which is capable of wavelength sweeping at high speed
A collimator lens converts light beams emitted from a low reflectance facet of a semiconductor laser into parallel light beams. A diffraction grating receives and diffracts the light beams at a...
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7486429 |
Method and device for multistate interferometric light modulation
A multi-state light modulator comprises a first reflector 104 . A first electrode 142 is positioned at a distance from the first reflector 104 . A second reflector 14 is positioned between...
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7482573 |
Optical head, optical reproduction apparatus and optical record and reproduction apparatus
Beams of light emitted from a light source are incident on a polarizer. The direction of a transmission axis of the polarizer can be adjusted in advance such that the polarizer transmits P...
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7480099 |
Variable focus system
A variable focus system that includes an electrovariable optic (EVO) and a controller operatively configured for changing the focal configuration of the EVO. The EVO includes a plurality of movable...
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7480089 |
Micromirror system with electrothermal actuator mechanism
The disclosed embodiments combine an electrothermal actuator system with an electrostatic attraction system, in order to orient bistable micromirrors in digital micromirror devices (DMDs). The...
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7477440 |
Reflective spatial light modulator having dual layer electrodes and method of fabricating same
A reflective spatial light modulator device features two pairs of electrodes formed on different metallization layers. Elevation of the upper electrode pair reduces its distance from the overlying...
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7477438 |
Optical imaging system for imaging at least two planes of a light beam spaced apart in the beam direction
An optical imaging system for imaging at least two planes of a light beam spaced apart in the beam direction, in particular of a laser light beam, onto a common target site, for example a detector,...
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7474454 |
Programmable micromirror motion control system
A multi-motion programmable micromirror control method is provided with the multiple supports in a stepper plate to upholding the micromirror structure. The control system has advantages such that...
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7474378 |
Assembly, a lithographic apparatus, and a device manufacturing method
A lithographic apparatus includes a projection optics assembly for projecting a patterned beam onto a target portion of a substrate. The projection optics assembly includes a first element having a...
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7471443 |
Piezoelectric flexures for light modulator
A device includes a micro-display that includes at least one light modulator. The light modulator includes a first reflector plate, a second reflector plate, and at least one piezoelectric flexure,...
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7468829 |
Microelectromechanical modulation device and microelectromechanical modulation device array, and image forming apparatus
A microelectromechanical modulation device comprising: a movable portion, which is supported to be elastically and bi-directionally displaced and which has a modulation function; and a plurality of...
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7468826 |
Silicon mirrors having reduced hinge stress from temperature variations
A device such as a mirror assembly comprises a movable structure ( 41 ) having a first movable portion ( 45 ) hinged to a frame portion ( 43 ) by a first pair of torsional hinges ( 47 A and 47 B)...
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7463403 |
High impedance drive circuit for a micro-electromechanical system device
A driver is provided for use with a MEMS device. Generally, the driver includes: (i) a high voltage circuit electrically coupled to a movable actuator of the MEMS to apply a HV pulse thereto; and...
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7460292 |
Interferometric modulator with internal polarization and drive method
A method of creating an internal dipole moment in an interferometric light modulating device is disclosed. In certain embodiments, the method includes applying heat and an electrical field to a...
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7457022 |
Vibration type tilting device
A vibration type tilting device, according to an embodiment of the invention, which comprises a mirror holder, supporting a mirror on one side, which tilts together with the mirror such that the...
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7457021 |
Fiber based MEMS
MEMS can be fabricated from fibers without the use of a matrix material. Devices can be built where fibers are attached only at a substrate edge (e.g. cantilevers, bridges). Motions can be...
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7453508 |
Camera having optical viewfinder
In a camera system of this invention, a light beam coming from a photographing lens is reflected by a quick return mirror in the widthwise direction of a body unit, and is reflected by a second...
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7450296 |
Method and system for patterning alignment marks on a transparent substrate
Disclosed is a method and a system for forming alignment marks on a transparent substrate. A light reflective layer is deposited over an optically transparent substrate of a wafer. A region is...
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7446927 |
MEMS switch with set and latch electrodes
A MEMS device is electrically actuated with a voltage placed across a first electrode ( 702 ) and a moveable material ( 714 ). The device may be maintained in an actuated state by latch electrodes...
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7446911 |
Optical scanning apparatus and image forming apparatus
An optical scanning apparatus for optical scan that oscillates at least partially an oscillating body having a reflective mirror portion, to thereby modulate a direction in which the reflective...
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7441897 |
Optical imaging apparatus
An optical imaging apparatus, in particular an ophthalmoscope or microscope or transillumination microscope, comprising a light source arrangement ( 20 ) and an illumination beam path ( 3 ) which...
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7426073 |
Digital micromirror device and manufacturing method thereof
Provided is a digital micromirror device (DMD). The DMD includes a first metal line, a second metal line, a third metal line, and a mirror. The first metal line is formed to have a predetermined...
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7426067 |
Atomic layer deposition on micro-mechanical devices
A micro-electromechanical device or MEMS having a conformal layer of material deposited by atomic layer deposition is discussed. The layer may provide physical protection to moving components of...
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7422928 |
Process for fabricating a micro-electro-mechanical system with movable components
A process for fabricating a micro-electro-mechanical system (MEMS) composed of fixed components fixedly supported on a lower substrate and movable components movably supported on the lower...
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7417783 |
Mirror and mirror layer for optical modulator and method
Described herein are systems, devices, and methods relating to packaging electronic devices, for example, microelectromechanical systems (MEMS) devices, including optical modulators such as...
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7417778 |
Light deflector, light deflection array, image forming apparatus, and image projection display apparatus
A light deflector can be driven by a low voltage by reducing contact area with a plate shape member and other members. The light deflector can be driven by a low voltage by reducing a contact area...
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7414503 |
Torsional hinged device with improved coupling between a magnet mounted to said device and an electrical coil
A pivoting device such as a MEMS mirror provides improved coupling between a permanent magnet on the device and an adjacent electrical coil that may provide a drive force or position sensing. The...
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7411717 |
Micromirror device
A spatial light modulator comprises an array of micromirror devices each of which has a reflective and deflectable mirror plates. The mirror plates are moved between an ON and OFF state during...
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7411714 |
Micromirror unit with torsion connector having nonconstant width
A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror...
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7408688 |
Method for driving optical deflecting device array, optical deflecting device array, optical deflecting device, and image projection displaying apparatus
A method for driving an optical deflecting device array is disclosed, including in a series of processes for the light deflection operation, at least, a state of a first stage writing and recording...
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7405854 |
Fibrous micro-composite material
Fibrous micro-composite materials are formed from micro fibers. The fibrous micro-composite materials are utilized as the basis for a new class of MEMS. In addition to simple fiber composites and...
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7404909 |
Mirror including dielectric portions and a method of manufacturing the same
The invention provides a method for manufacturing a microelectronic device and a microelectronic device. The method for manufacturing the microelectronic device, without limitation, may include...
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7403321 |
Optical microelectromechanical device
An optical microelectromechanical systems (MEMS) device includes a transparent substrate with a plurality of discrete conductive lines, an dielectric layer disposed on the substrate and the...
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7402255 |
MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation
A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more...
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