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7453508 Camera having optical viewfinder  
In a camera system of this invention, a light beam coming from a photographing lens is reflected by a quick return mirror in the widthwise direction of a body unit, and is reflected by a second...
7450296 Method and system for patterning alignment marks on a transparent substrate  
Disclosed is a method and a system for forming alignment marks on a transparent substrate. A light reflective layer is deposited over an optically transparent substrate of a wafer. A region is...
7446927 MEMS switch with set and latch electrodes  
A MEMS device is electrically actuated with a voltage placed across a first electrode ( 702 ) and a moveable material ( 714 ). The device may be maintained in an actuated state by latch electrodes...
7446911 Optical scanning apparatus and image forming apparatus  
An optical scanning apparatus for optical scan that oscillates at least partially an oscillating body having a reflective mirror portion, to thereby modulate a direction in which the reflective...
7441897 Optical imaging apparatus  
An optical imaging apparatus, in particular an ophthalmoscope or microscope or transillumination microscope, comprising a light source arrangement ( 20 ) and an illumination beam path ( 3 ) which...
7426073 Digital micromirror device and manufacturing method thereof  
Provided is a digital micromirror device (DMD). The DMD includes a first metal line, a second metal line, a third metal line, and a mirror. The first metal line is formed to have a predetermined...
7426067 Atomic layer deposition on micro-mechanical devices  
A micro-electromechanical device or MEMS having a conformal layer of material deposited by atomic layer deposition is discussed. The layer may provide physical protection to moving components of...
7422928 Process for fabricating a micro-electro-mechanical system with movable components  
A process for fabricating a micro-electro-mechanical system (MEMS) composed of fixed components fixedly supported on a lower substrate and movable components movably supported on the lower...
7420729 Small thin film movable element, small thin film movable element array and method of driving small thin film movable element  
A small thin film movable element comprises: a movable portion supported elastically deformably and having a movable electrode at least a portion of the movable portion; and a fixed electrode...
7420725 Device having a conductive light absorbing mask and method for fabricating same  
A system and method for an optical component that masks non-active portions of a display and provides an electrical path for one or more display circuits. In one embodiment an optical device...
7417783 Mirror and mirror layer for optical modulator and method  
Described herein are systems, devices, and methods relating to packaging electronic devices, for example, microelectromechanical systems (MEMS) devices, including optical modulators such as...
7417778 Light deflector, light deflection array, image forming apparatus, and image projection display apparatus  
A light deflector can be driven by a low voltage by reducing contact area with a plate shape member and other members. The light deflector can be driven by a low voltage by reducing a contact area...
7414503 Torsional hinged device with improved coupling between a magnet mounted to said device and an electrical coil  
A pivoting device such as a MEMS mirror provides improved coupling between a permanent magnet on the device and an adjacent electrical coil that may provide a drive force or position sensing. The...
7411717 Micromirror device  
A spatial light modulator comprises an array of micromirror devices each of which has a reflective and deflectable mirror plates. The mirror plates are moved between an ON and OFF state during...
7411714 Micromirror unit with torsion connector having nonconstant width  
A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror...
7408688 Method for driving optical deflecting device array, optical deflecting device array, optical deflecting device, and image projection displaying apparatus  
A method for driving an optical deflecting device array is disclosed, including in a series of processes for the light deflection operation, at least, a state of a first stage writing and recording...
7405854 Fibrous micro-composite material  
Fibrous micro-composite materials are formed from micro fibers. The fibrous micro-composite materials are utilized as the basis for a new class of MEMS. In addition to simple fiber composites and...
7404909 Mirror including dielectric portions and a method of manufacturing the same  
The invention provides a method for manufacturing a microelectronic device and a microelectronic device. The method for manufacturing the microelectronic device, without limitation, may include...
7403321 Optical microelectromechanical device  
An optical microelectromechanical systems (MEMS) device includes a transparent substrate with a plurality of discrete conductive lines, an dielectric layer disposed on the substrate and the...
7402255 MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation  
A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more...
7400792 Methods and apparatus to make substantially uniform losses in optical cross connects  
A method for cross connecting optical signals includes using a common beam steerer to direct a set of optical signals from a set of input ports to a set of output ports. The method further includes...
7394583 Light-beam scanning device  
A light-beam scanning device includes a base plate having a torsion beam portion formed therein, and a mirror portion supported by the torsion beam portion and adapted to be oscillated. The...
7393793 Tunable-wavelength optical filter and method of manufacturing the same  
A method of manufacturing a tunable wavelength optical filter. The method includes steps of forming a first sacrificial oxide film for floating a lower mirror on a semiconductor substrate;...
7391553 Low cost torsional hinge mirror package with non-rotating magnetic drive  
A torsional hinge structure for supporting a functional surface such as a mirror is disclosed. The structure includes at least one torsional hinge extending between a functional surface such as for...
7388706 Photonic MEMS and structures  
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of...
7388191 Mirror positioning unit of laser scanning unit and laser scanning unit employing the same  
A mirror positioning structure of a reflection mirror for correcting skew and bow and a laser scanning unit employing the same are provided. The mirror positioning structure includes a mirror...
7385762 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator  
Interferometric modulators having a separable modulator architecture are disclosed having a reflective layer suspended from a flexible layer over a cavity. The interferometric modulators have one...
7385744 Support structure for free-standing MEMS device and methods for forming the same  
A microelectromechanical (MEMS) device includes a functional layer including a first material and a deformable layer including a second material. The second material is different from the first...
7385268 Method for linearizing deflection of a MEMS device using binary electrodes and voltage modulation  
A micromechanical device comprising one or more electronically movable structure sets comprising for each set a first electrode supported on a substrate and a second electrode supported...
7379230 Electronically controlled stage lighting system  
A lighting system operating using a digital mirror as its operative device. The digital mirror is used to shape the light which is a passed through advanced optical devices in order to produce an...
7379227 Method and device for modulating light  
“Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each...
7378632 Image display apparatus and image pickup apparatus using the same  
Provided is an image display apparatus, including: a light source for emitting a modulated light beam based on image information; a conversion optical system for converting the light beam from the...
7375873 Method of repairing micromirrors in spatial light modulators  
Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the...
7375867 Transmissive electromechanical light valve and system  
An apparatus, system, and method for a transmissive electromechanical light valve including a gate pivotable between a first position to allow light to pass through a valvelet and a second position...
7372620 Micromirror and micromirror device  
There is provided a micromirror which includes a holding unit, a mirror that is held by the holding unit to be pivotable about a rotation axis of the mirror, a first fixed electrode group including...
7372613 Method and device for multistate interferometric light modulation  
A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and...
7369296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator  
By varying the spacing between a partially-reflective, partially-transmissive surface and a highly reflective surface positioned behind the partially-reflective, partially-transmissive surface, an...
7362494 Micromirror devices and methods of making the same  
A method for making a micromirror device comprises is disclosed herein.
7358966 Selective update of micro-electromechanical device  
The present invention provides a data controller for controlling an electrostatically-controlled micro-electromechanical system (MEMS) device having a variable operating characteristic based on...
7354169 Pattern generator using a dual phase step element and method of using same  
A system and method are used to pattern light using an illumination system, an array of individually controllable components, and a projection system. The illumination system supplies a beam of...
7345816 Optical microscope  
An optical microscope includes a light source which irradiates a sample with illuminating light. A mirror, which has a variable reflection surface, reflects the illuminating light. A correction...
7345802 Laser and fiber coupling control  
One or more single mode waveguide devices are fiber coupled such that signals to an optical element affect the coupling of the waveguide device to an optical fiber. A number of systems and methods...
7342702 Light deflecting method and apparatus efficiently using a floating mirror  
Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the...
7336431 Image reading device and image forming device  
A device includes a light source; a first guiding unit that guides the light from the light source to an object at prescribed incident angles including a first incident angle and a second incident...
7330312 Image blur compensation device  
An image blur compensation device for use with an image capture device including an imaging optical system and an imaging unit which converts a subject image captured on a light receiving surface...
7327508 Display device using light modulator and having improved numerical aperture of after-edge lens system  
A display device using a light modulator and having an improved numerical aperture (NA) of an after-edge lens system is disclosed. The display device includes an illumination lens, a diffractive...
7321456 Method and device for corner interferometric modulation  
A display is described, wherein the display includes surfaces arranged at a non-zero angle to one another. A least one of the surfaces may include an interferometric modulator. Compensation for...
7320899 Micro-displays and their manufacture  
A method of forming a micro-display includes forming a device that includes forming a partially reflecting layer on a first substrate and forming a plate overlying the partially reflecting layer,...
7319552 Micro-electro mechanical light modulator device  
A micro-electro mechanical light modulator device includes a movable reflective plate, a fixed partial reflective plate, an optical gap defined between the reflective plate and the fixed plate, and...
7316356 Optical scanner having a balanced mirrored spinner  
An optical scanner having a balanced mirrored spinner. The optical scanner includes a laser for producing a laser beam, a mirrored spinner for directing the laser beam to produce scanning light...