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8184351 |
Amplified bimorph scanning mirror, optical system and method of scanning
An amplified bimorph scanning mirror for use in various optical systems, an optical coherence tomography scanner incorporating the amplified bimorph scanning mirror, and a method for manufacturing...
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8149489 |
Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate...
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8130436 |
Flexure actuator
Implementations of actuators that use flexures to provide support to the actuators and pivoting mechanisms to the actuators. Such actuators can be electromagnetically activated actuators that...
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8107146 |
Three-dimensional space scanner
A Three Dimensional (3D) space scanner can obtain spatial data by scanning a mobile object not only in the horizontal direction but also in the vertical direction using a mirror that is driven to...
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8094351 |
Fibrous micro-composite material
Fibrous micro-composite materials are formed from micro fibers. The fibrous micro-composite materials are utilized as the basis for a new class of MEMS. In addition to simple fiber composites and...
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8085454 |
Mirror device drive control apparatus and projector
A mirror device drive control apparatus adapted to perform drive control of a mirror device having a hysteresis characteristic.
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8072662 |
Beam irradiation apparatus
A beam irradiation apparatus includes: an actuator which scans a target region with a laser beam; a photodetector which receives a servo beam and outputs a signal according to a beam reception...
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8052286 |
System and method for utilizing a scanning beam to display an image
A method includes generating a plurality of beams that each illuminate a separate portion of a spatial light modulator. The spatial light modulator has a first dimension of a first length and a...
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8035876 |
Systems, methods and devices for actuating a moveable miniature platform
Presented herein are systems, methods and devices relating to miniature actuatable platform systems. According to one embodiment, the systems, methods, and devices relate to controllably actuated...
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8031386 |
Galvano motor and galvano motor system
A galvano motor 10 includes a motor shaft 1, a coil 5 which rotationally drives the motor shaft 1, and an encoder scale 6 which is joined to one end of the rotating shaft, the motor shaft 1 is...
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8014058 |
Method for driving optical deflecting device array, optical deflecting device array, optical deflecting device, and image projection displaying apparatus
A method for driving an optical deflecting device array is disclosed, including in a series of processes for the light deflection operation, at least, a state of a first stage writing and recording...
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8009342 |
Optical scanning device, image forming apparatus, and controlling method
An optical scanning device includes a vertical cavity surface emitting laser, a driving unit that controls modulation driving, a coupling optical system that couples a beam, an aperture that is...
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8009347 |
MEMS display
A displaying apparatus that includes a plurality of electromechanical system elements arranged in rows. The electromechanical system elements of each of the rows are further arranged in subrows....
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7999986 |
Mirror device drive control apparatus and projector
A mirror device drive control apparatus adapted to perform drive control of a mirror device having a hysteresis characteristic, includes: a drive section adapted to drive the mirror device with a...
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7990596 |
Mirror device drive control apparatus and projector
A mirror device drive control apparatus adapted to perform drive control of a mirror device having a hysteresis characteristic, includes: a drive section adapted to drive the mirror device with a...
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7990595 |
Optical multi-ring scanner
An optical multi-ring scanner is disclosed, which comprises: a substrate; an outer ring driving element, disposed inside the substrate and configured symmetrically at two sides thereof with a pair...
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7982853 |
Lithographic method for maskless pattern transfer onto a photosensitive substrate
The invention proposes a Subpixel Scroll method, which optically shifts the position of the mirror elements to the projection axis by one subpixel size each, with an additional 45° mirror between ...
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7982933 |
Drive control method for galvano-scanner
A galvano-scanner system (1) has a position-controlling microcomputer (31) mounted on a scanner driver (3) of a galvano scanner (2), wherein a position detection signals outputted from a positional...
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7978387 |
Laser projector
A laser projector including a laser light source, a scan unit to scan the laser beam, a scan signal generation unit to generate a pulse signal, a drive unit to drive the scan unit and a pulse...
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7965431 |
Optical deflecting device
An optical deflecting device including a mirror member having a light reflective area. The optical deflecting device includes a plurality of electrodes that are formed on a substrate, a fulcrum...
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7952778 |
Biaxial MEMS mirror with hidden hinge
A multi-layer hidden hinge and actuator design for high fill factor biaxial MEMS mirror array for wavelength selective switches (WSS) based on a silicon-on-insulator (SOI) process with wafer...
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7940440 |
Laser scanning device and image forming apparatus
A laser scanning device having a light emitting element, an optical element for shaping a laser beam emitted from the light emitting element, a radiator which holds the light emitting element, and...
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7940439 |
Method for generating a micromechanical structure
In a method for manufacturing a micromechanical structure, first a two-dimensional structure is formed in a substrate. The two-dimensional structure is deflected from the substrate plane by action...
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7913376 |
Method of forming an actuating mechanism for a probe storage system
A method of forming an actuating mechanism for a probe storage system includes providing a scanner chip having a main body including first and second outer surfaces and first and second coil...
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7916371 |
Actuator for holographic information storing apparatus
An actuator to drive a mirror of a holographic information storing apparatus, the actuator including: piezoelectric cells; support members mounted on the piezoelectric cells; a hinge member mounted...
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7901086 |
Optical unit, light processing unit, light processing method, illumination unit and image generation unit
For displaying a color image by recombination of several single color images, parasitic noise like speckles due to scattering within the system, in particular when laser light is involved, with the...
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7894113 |
Actuator, optical scanner, and image forming device
An actuator includes: a first oscillatory system including a frame-shaped driving member and a pair of first axial members holding the driving member from both ends so as to allow the driving...
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7869101 |
Image processing apparatus having enhanced controlling process for optical scanning unit
An optical scanning unit of an image forming apparatus may include: an optical housing configured to include at least one optical part and to have a light-beam emitting aperture through which a...
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7866831 |
Image projector
An image projector realizing image projection with high image quality by reducing speckle noise. An image projector comprising a coherent light source, a collimation lens for transforming coherent...
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7848002 |
Method for aligning die to substrate
A method for aligning a micro-mirror device die having a plurality of micro-mirror devices formed on a semiconductor substrate and fixing the micro-mirror device die on the semiconductor substrate...
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7829871 |
Sheet beam-type testing apparatus
An electron beam apparatus such as a sheet beam based testing apparatus has an electron-optical system for irradiating an object under testing with a primary electron beam from an electron beam...
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7817331 |
MEMS device with an angular vertical comb actuator
A vertical comb electro-static actuator for rotating a micro-electro-mechanical micro-mirror device about a tilt axis or rotation. The rotor comb fingers of the comb drive extend from a sub-frame...
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7798955 |
Image generating device for generating a fluorescence image
Excitation light λex is two-dimensionally scanned onto the living body tissue in the form of condensed light using an x-axis scanning mirror, a y-axis scanning mirror, and a condenser lens, ...
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7800804 |
Optical scanner and image forming apparatus
A disclosed optical scanner includes a light source, a deflector that deflects a light beam emitted by the light source, a scanning imaging element that images and scans the deflected light beam as...
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7800819 |
Laser amplifier power extraction enhancement system and method
A high extraction efficiency laser system. The novel laser system includes a laser amplifier and a laser source adapted to provide a laser beam to the amplifier such that polarization states for...
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7796314 |
Method and apparatus for two-axis, high-speed beam steering
Dual axis, beam-steering devices are disclosed. An exemplary device includes a support platform having a top surface. A reflective surface is coupled to the top surface of the support platform....
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7773282 |
Optical deflector
An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever...
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7768225 |
Servo control system for movable body, and laser drilling machine
A difference between each position command data outputted in a form of a step signal from a high-level controller and its corresponding detected position data of a movable body is integrated by an...
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7751108 |
Micro-actuation element provided with torsion bars
The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material...
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7733558 |
Display device with an addressable movable electrode
A display device implemented with a spatial light modulator (SLM) comprising a plurality of pixel elements arranged in array to modulate incident light and display an image, wherein each of the...
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7733365 |
Imaging apparatus having print engine that includes MEMS device
An imaging apparatus includes a controller executing instructions to form a latent image, and a print engine. The print engine includes a laser source, a micro-electromechanical system (MEMS)...
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7729028 |
Method to reduce RF noise generation and required peak laser output in raster scan portable projectors
A method and apparatus that projects a two-dimensional image is disclosed. The method may include emitting a laser beam, sweeping the laser beam with a first scan mirror along a first scan...
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7724411 |
2-axis driving electromagnetic scanner
A 2-axis driving electromagnetic scanner, having a structure in which a mirror is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer...
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7719742 |
MEMS device package and method of manufacturing the same
A MEMS device package and a method of manufacturing the same. The MEMS device package includes a device substrate having a surface on which a MEMS active device is formed, and multiple sealing pads...
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7715077 |
Micro mirrors having a mirror plate with interdigitated arms
A micro mirror device includes a first hinge supported by a substrate, a mirror plate tiltable around the first hinge and having a first set of arms facing the substrate, and a second set of arms...
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7715076 |
Micromirror device with a hybrid actuator
A hybrid electro-static actuator for rotating a two-dimensional micro-electro-mechanical micro-mirror device about two perpendicular axes includes a vertical comb drive for rotating the...
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7710633 |
Optical scanning and imaging applications using deformable mirrors
A deformable mirror changes configuration in response to a change of the configuration of a shape memory material. In some examples, the deformable mirror is formed of the shape memory material. In...
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7706039 |
Scanner apparatus having electromagnetic radiation devices coupled to MEMS actuators
A disclosed scanner apparatus includes a member having spaced apart proximal and distal portions. An electromagnetic radiation device is configured to direct electromagnetic radiation therefrom and...
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7697179 |
Light deflecting method and apparatus efficiently using a floating mirror
Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the...
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7697185 |
Actuator, optical scanner and image forming device
An actuator includes a movable plate having a plate shape, a pair of axial parts that is elastically deformable and supporting the movable plate rotatable, and a tension adjuster adjusting tension...
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