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7643142 |
Apparatus for analyzing and sorting biological particles
The invention provides an apparatus including (a) a frame having a boundary plane; (b) a flow chamber supported by the frame, the flow chamber placed a distance from the boundary plane; (c) a...
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7636153 |
Gas sensor
A combined gas sensor device allowing the measuring of the concentration of a gas by tunable diode laser spectrometry as well as by resonant photo-acoustics within one housing. A laser beam used...
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7633635 |
Method and system for automatically identifying non-labeled, manufactured parts
A method and system are provided for automatically identifying non-labeled, manufactured parts. The system includes an electronic storage device to store templates of a plurality of known good,...
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7630064 |
Prediction method and apparatus for substrate processing apparatus
A prediction method for a substrate processing apparatus is to predict processing results from operation data on the substrate processing apparatus during a procedure for processing a target...
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7616297 |
Detachable detection window and detecting system
A detachable detection window suitable for being disposed on a sidewall of a plasma chamber is disclosed. The detachable detection window includes a base and a cannular tube. The base herein has a...
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7602479 |
Light emission measuring apparatus and light emission measuring method
A light fluctuation measuring apparatus, comprising a parameter setting unit 2 which sets parameters of a microscopic image obtaining unit and/or parameters of a light emission measuring unit...
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7599058 |
Methods for plasma diagnostics and the measurement of thin films
Methods for obtaining and analyzing data from a spectral source is provided. The method includes identifying an environment that is capable of generating spectral information, and obtaining the...
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7599048 |
Optical emission spectroscopy process monitoring and material characterization
Methods and systems for control and monitoring processing of semiconductor materials with a focused laser beam. Laser light may be focused on a sample to excite optical emission at the sample...
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7589829 |
Laser measuring system
A laser measuring system, which comprises a laser rotary irradiation device for forming a laser reference plane by projecting a laser beam in rotary irradiation, and a photodetection device for...
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7583369 |
Fluorescence spectrophotometer
The present invention compensates a fluctuation of a light-emitting intensity of a light source. First splitting portions ( 12, 13 ) in the present invention are used to split lights emitted from...
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7583382 |
Optical measurement apparatus
An object of the present invention is to provide an optical measurement apparatus equipped with an ion-exchange resin for pretreating a sample, thereby enabling the concentration of component in...
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7580119 |
Method and apparatus for chemical monitoring
The present invention relates to monitoring chemicals in a process chamber using a spectrometer having a plasma generator, based on patterns over time of chemical consumption. The relevant patterns...
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7561259 |
Lamination status inspecting apparatus, lamination status inspecting method, and recording medium storing lamination status detecting program
A lamination status inspecting apparatus inspects a lamination status of adjacent sheets, and includes a first illumination unit that irradiates a portion where sheets are adjacent to each other...
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7561258 |
Wafer tilt detection apparatus and method
An exemplary embodiment providing one or more improvements includes a wafer tilt detection apparatus for use with a wafer processing or manufacturing device that applies a process to the wafer and...
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7557926 |
Apparatus for measuring semiconductor physical characteristics
A reflectometry method and apparatus for gathering meaningful reflectance data indicative of one or more characteristics of a substance being grown on a horizontal substrate within a reaction...
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7542132 |
Raman spectroscopy as integrated chemical metrology
A method for measuring the concentration of the metal solution and reducing agent solution within the electroless plating solution is disclosed. Raman spectroscopy is used to measure the...
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7532325 |
Method and apparatus for the separation of fluoroscence and elastic scattering produced by broadband illumination using polarization discrimination techniques
An apparatus for separating fluorescent light from light elastically scattered/reflected from a material illuminated with a broadband illumination source includes a polarization discriminator,...
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7532313 |
Fluorescence detector and liquid chromatograph having the fluorescence detector
The fluorescence detector includes: a flow cell provided on a flow passage for flowing a sample; a sample temperature control block for keeping the flow cell and the flow passage located on the...
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7532320 |
Multimodal method for identifying hazardous agents
The invention relates to apparatus and methods for assessing occurrence of a hazardous agent in a sample by performing multimodal spectral analysis of the sample. Methods of employing Raman...
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7522270 |
Method for determination of irreversible radiation damage of optical materials
The method determines the extent of irreversible radiation damage of an optical material. The method includes the following three tests to determine the extent of irreversible radiation damage: 1)...
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7522271 |
Microarray detector and synthesizer
The present invention relates to novel systems, devices, and methods comprising spatial light modulators for use in the reading and synthesis of microarrays. For example, the present invention...
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7511802 |
Measuring trace components of complex gases using gas chromatography/absorption spectrometry
Low concentrations of complex gas mixture components may be detected and quantified using a gas-chromatograph to separate a gas mixture prior to analysis of one or more eluting components using an...
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7508500 |
Characterizing organic materials in a thin film
A process for characterizing the phase of an organic material in a thin film comprises employing a reference spectrum library for potential phases, subjecting the film to a vibrational spectroscopy...
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7502099 |
Measuring method and apparatus for measuring an optical property of a fluorescent sample
The method and the apparatus measures the total spectral radiance factor Bxs (λ) of a fluorescent sample illuminated by a specified illumination for testing Is without a fluorescent standard and a...
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7489397 |
Instrument, system and method for automated low cost atmospheric measurements
An apparatus and method for measuring ozone in the atmosphere. The apparatus utilizes a fiber optic cable connected to a collimating lens located outdoors and a spectrometer that is located...
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7486388 |
Method and apparatus for standardization of a measuring instrument
A method, a portable device and a measuring instrument for standardization of a satellite measuring instrument to a corresponding master measuring instrument are disclosed. The portable device...
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7468796 |
Multiple-color monochromatic light absorption and quantification of light absorption in a stained sample
An absorption detection system is provided. The system includes a plurality of monochromatic light sources and a separator for separating the light from the plurality of monochromatic light sources...
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7463344 |
Arrangement for the optical detection of light radiation which is excited and/or backscattered in a specimen with a double-objective arrangement
Arrangement and method for the optical detection of light radiation which is excited and/or backscattered in a specimen, wherein the illumination of the specimen and/or the detection of the...
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7456939 |
Method and apparatus for chemical monitoring
The present invention relates to monitoring chemicals in a process chamber using a spectrometer having a plasma generator, based on patterns over time of chemical consumption. The relevant patterns...
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7453556 |
Process for determining the particle size distribution of an aerosol and apparatus for carrying out such a process
The measurement of the particle size distribution of an aerosol is of crucial importance in pharmaceutical development. A prerequisite for this is a valid method, e.g. the cascade impactor method...
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7443491 |
System for collecting information on biological particles
A system ( 1 ) for collecting biological information on a dyed biological particle (cell or chromosome) by irradiating light onto liquid containing the dyed biological particles and for detecting...
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7440086 |
Methods and systems for creating a recipe for a defect review process
Methods and systems for creating a recipe for a defect review process are provided. One method includes determining an identity of a specimen on which the defect review process will be performed....
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7440085 |
Apparatus and methods for simultaneous surface acoustic wave and surface plasmon resonance measurements
The invention relates to a method and apparatus for obtaining and analysing physical properties of a substance. Optical data and acoustical data are obtained for the substance and the data are used...
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7430039 |
Sensor
Sensors are provided which enable detection with a high sensitivity in microchemistry and biochemical analysis by using devices integrated into a compact configuration and can be freely disposed on...
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7420664 |
System and method for robot mounted sensor
An apparatus and method for the remote analysis and identification of unknown compounds. A robotic arm positions a sensor on a surface. The sensor unit has a monitoring mechanism to monitor...
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7420663 |
Spectroscopic sensor on mobile phone
This invention discloses a spectroscopic sensor that is integrated with a mobile communication device, such as a mobile phone. The spectroscopic sensor is capable of measuring the optical spectra...
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7420662 |
Optical diagnostics integrated with laser spark delivery system
A spark delivery system for generating a spark using a laser beam is provided, and includes a laser light source and a laser delivery assembly. The laser delivery assembly includes a hollow fiber...
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7391508 |
Arc/spark optical emission spectroscopy correlated with spark location
Two or more high-frequency microphones are used to determine where an individual spark or other excitation beam strikes a sample in an optical emission spectroscopy (OES) instrument. The position...
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7362432 |
Method and systems for dynamic range expansion
Methods and systems for expanding the dynamic range of a system are provided. One method includes splitting fluorescent light emitted by a particle into multiple light paths having different...
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7350476 |
Method and apparatus to determine consumable part condition
A system for monitoring a condition of a consumable component in a substrate processing system that includes a tapered plug having a first axis, a second axis that intersects the first axis, a top...
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7349076 |
Video tracking-based real-time hyperspectral data acquisition
A spectroscopy system for high-accuracy, highly automated spectral imaging of a target is provided. Video and spectrometry information are obtained via an integrated video, spectrometry and...
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7345758 |
Apparatus for analyzing and sorting biological particles
The invention provides an apparatus including (a) a frame having a boundary plane; (b) a flow chamber supported by the frame, the flow chamber placed a distance from the boundary plane; (c) a...
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7333188 |
Method and apparatus for real-time measurement of trace metal concentration in chemical mechanical polishing (CMP) slurry
A system (and method) for real-time measurement of trace metal concentration in a chemical mechanical polishing (CMP) slurry, includes an electromagnetic radiation flow cell carrying a CMP slurry,...
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7330244 |
Method and apparatus for performing limited area spectral analysis
A method and apparatus for obtaining in-situ data of a substrate in a semiconductor substrate processing chamber is provided. The apparatus includes an optics assembly for acquiring data regarding...
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7330243 |
Method for monitoring the production of biomolecule crystals
The invention relates to a method for monitoring the production of macromolecule crystals containing at least one fluorescence emitter, comprising the following steps: a) a solution volume with...
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7317515 |
Method of localizing fluorescent markers
The invention describes a method of determining the position of fluorescent markers in a sample ( 4 ), with a high spatial resolution. To this end, the sample ( 4 ) is illuminated with an exciting...
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7312857 |
Method and system for monitoring plasma using optical emission spectrometry
A method and system are presented for monitoring the optical emissions associated with a plasma used in integrated circuit fabrication. The optical emissions may be processed by an optical...
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7312865 |
Method for in situ monitoring of chamber peeling
A method for in situ monitoring of particles generated by a reaction by-product film peeling from an interior wall of a reaction chamber of a semiconductor fabrication apparatus to determine...
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7307703 |
Methods of determining an etching end point based on compensation for etching disturbances
An etching end point of a plasma etch is determined by defining an etch-stop condition. A layer formed on a substrate is etched using a plasma. A luminous intensity of the plasma is measured to...
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7304722 |
Apparatus for performing twin entangled co-incident photon enhanced Raman spectroscopy and an inspection apparatus using the same
A method and apparatus to perform non-invasive molecular detection and analysis are disclosed. The apparatus incorporates co-incident biphotons as the Raman backscattering excitation source and the...
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