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7570373 |
System and method to measure parameters distribution in sheet-like objects
A measuring device and method are disclosed for parameter distribution measurement over the entire surface of sheet-like objects. The parameters of primary interest are thickness and permeability...
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7554678 |
Device and method for measuring the thickness of a transparent sample
The invention relates to device for measuring the thickness of a transparent sample ( 2 ), particularly a glass strip or a glass pane, involving the use of: a first light beam (L 1 ), particularly...
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7542152 |
Method for measuring thickness of thin film, method for forming polycrystal semiconductor thin film, method for manufacturing semiconductor device, apparatus for manufacturing the same, and method for manufacturing image display device
A laser light is projected to a thin film deposited on a transparent substrate, and measurement is performed on the entire measurement area of the substrate, and transmission intensity is measured...
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7511795 |
Apparatus for detecting cell gap of a liquid crystal display panel
An apparatus for detecting non-uniform cell gap in a liquid crystal display panel is disclosed, which comprises a first plate, an axle, and a cell gap detecting unit. A surface of the first plate...
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7495762 |
High-density channels detecting device
A high-density channels detecting device for detecting a sample is provided. The high density detecting-device has a light source for emitting a light beam, a collimator, a beam splitter, and a...
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7456964 |
Detector configurations for optical metrology
An apparatus is disclosed for obtaining ellipsometric measurements from a sample. A probe beam is focused onto the sample to create a spread of angles of incidence. The beam is passed through a...
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7443518 |
Measuring instrument, in particular for transmission measurement in vacuum system
A measuring instrument, in particular for transmission measurement with transparent substrates, comprises a measuring head with a light emitting element for emitting a light beam and a light...
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7433027 |
Apparatus and method for detecting lens thickness
The present invention relates to a non-contact/non-destructive method and apparatus for measuring the thickness of an ophthalmic lens. The present invention also provides a method for inspecting or...
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7420691 |
Method and apparatus for measuring interfacial positions, method and apparatus for measuring layer thickness, and method and apparatus for manufacturing optical discs
An interfacial position measuring method for a substrate internally having a plurality of interfaces parallel to one another. A light-convergent line which has converged in only a one-axis...
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7417749 |
Method and apparatus for protecting an optical transmission measurement when sensing transparent materials
A method and apparatus for protecting an optical transmission measurement when sensing transparent materials. Sensing apparatus located in a housing directs a light beam at an upward angle to a...
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7414740 |
Method and apparatus for contactless optical measurement of the thickness of a hot glass body by optical dispersion
The method measures the thickness of a hot glass body without direct contact with the glass body and is based on chromatic aberration. This method includes focusing a light beam from a light source...
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7385710 |
Measuring device
A method is provided for measuring the wall thickness of transparent articles using uniform diverging light in the form of a small point source or elongated narrow line of light, measuring the...
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7385174 |
Apparatus and method for measuring sidewall thickness of non-round transparent containers
An apparatus for inspecting sidewall thickness of non-round transparent containers includes a conveyor for holding a container in stationary position and rotating the container around an axis. A...
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7382456 |
Spectroscopic sensor for measuring sheet properties
A spectroscopic sensor for measuring flat sheet product is disclosed. The disclosed sensor uses a combination of spectrometers and single-channel detectors and filters together with a broadband...
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7372584 |
Dual photo-acoustic and resistivity measurement system
A measurement system for measuring aspects of a wafer combines an apparatus for performing a conductivity measurement, such as a four-point probe system, with apparatus for performing an optical...
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7372579 |
Apparatus and method for monitoring trench profiles and for spectrometrologic analysis
An apparatus for monitoring a trench profile of a substrate includes a radiation-emitting unit for irradiating the substrate with infrared radiation. The intensity and/or polarization state of the...
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7369255 |
Apparatus and method for capacitive measurement of materials
Method for measuring thicknesses of a film, a foil or a material layer with a measuring head which is spaced away from the film and with which a capacitive thickness measurement is performed, in...
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7362454 |
Method and system for measuring overcoat layer thickness on a thin film disk
A method for measuring the thickness of a thin film disk overcoat layer includes radiating x-rays on a thin film disk comprising at least one base layer and an overcoat layer, collecting...
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7355711 |
Method for detecting an end-point for polishing a material
An optical surface analysis system for scanning the surface of a (silicon) wafer and detect if any residual material is still on the wafer surface in order to determine an appropriate end-point in...
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7333022 |
Safety monitoring mechanism of a wafer fabrication platform
A safety monitoring mechanism of a wafer fabrication platform is disclosed. The mechanism comprises a vibration sensor mounted at the loading apparatus of the wafer fabrication platform for...
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7307740 |
Method for measurement of three-dimensional objects by single-view backlit shadowgraphy
A method for measuring three-dimensional objects by single view backlit shadowgraphy. To measure at least one geometrical parameter of such an object, for example the thickness of a hollow sphere,...
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7292349 |
Method for biomolecular sensing and system thereof
A sensing system and method for biomolecular sensing. The system includes: a receptor for the at least one target, the receptor including a substrate and a transparent coating on the substrate...
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7262867 |
Device to determine the thickness of a conductive layer
The device comprises at least a measuring head ( 7 ) with a transmitter ( 7 A) and a receiver ( 7 B). The head comprises means to measure the thickness through surface resistivity and optical means...
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7253892 |
Method and apparatus for measuring a characteristic of a plastic container
A method for measuring the wall thickness of plastic containers during a container manufacturing process includes providing a plastic container, the plastic container having a longitudinal axis and...
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7251043 |
Method and system for measuring thin films
An optical system is presented for use in a measurement system ( 100 ) for use in measurements of thin films of a workpiece (W), the system comprising an optical assembly ( 14 ), comprising...
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7233401 |
Method and apparatus for measuring thickness of a material
A method and apparatus for measuring wafers, thin films, or other planar layers are disclosed. This invention utilizes a tunable, monochromatic light source reflected from or transmitted through...
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7230713 |
Method for measuring gap of liquid crystal cell
The polarization angle θ 1 of a polarizer ( 14 ) is set, and the reflection intensity S 1 in a cross Nicol state and the reference reflection intensity Ref 1 of a liquid crystal cell ( 15 ) are...
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7206074 |
Apparatus and method for measuring spectral reflectance and apparatus for measuring film thickness
A film thickness measurement apparatus has an image pickup part ( 32 ) for acquiring a plurality of single-band images corresponding to a plurality of wavelengths, and the image pickup part ( 32 )...
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7202954 |
Target detecting apparatus, target detection method and target detection substrate
A target detection apparatus is provided which can detect and quantitatively measure various detection targets such as pathogens. For this purpose, the apparatus comprises an optical irradiation...
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7199884 |
Thin thickness measurement method and apparatus
Techniques for non-contacting thickness or caliper measurements of moving webs or sheets employ a sensor device that includes a first sensor head and a second sensor head that are spaced apart to...
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7187456 |
Method and apparatus for measurements of patterned structures
A method for measuring at least one desired parameter of a patterned structure having a plurality of features defined by a certain process of its manufacturing. The structure represents a grid...
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7164481 |
Coefficient of linear expansion measuring apparatus and coefficient of linear expansion measuring method
A coefficient of linear expansion measuring apparatus includes: two reflection plates between which a sample is put, a container to house them, which is filled with a gas having known rate of a...
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7142315 |
Slit confocal autofocus system
A technique for focusing and maintaining the focus of an inspection or review system upon a specific layer of a multi-layered specimen is described. In one embodiment, a confocal autofocus system...
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7130062 |
Rapid-response electron-beam deposition system having a controller utilizing leading and trailing deposition indicators
An electron-beam deposition system includes an evaporation source having a source target with a target location at which a deposition material may be positioned, and a controllable electron-beam...
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7126677 |
Bearing with oil film thickness measuring device
A bearing with an oil film thickness measuring device in which sensor portions at distal ends of four common optical fibers are connected to sensor mounting portions formed at four positions in an...
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7123366 |
Method and apparatus for measurements of patterned structures
An apparatus and a method are disclosed for measuring at least one desired parameter of a patterned structure having a plurality of features defined by a certain process of its manufacturing,...
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7071480 |
Sensor with alignment self compensation
A material web attribute detection system with the material web having a first side and a second side. The system includes a radiation source located proximate to the first side of the material web...
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7057744 |
Method and apparatus for measuring thickness of thin film and device manufacturing method using same
A method for high-precision measurement of film thickness and the distribution of film thickness of a transparent film is disclosed. The method is performed during a CMP process, without being...
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7046379 |
Method for characterizing or controlling the production of a thin-layered component using optical methods
A method for characterizing or controlling the production of a thin-layered component using optical methods. Acquired signals S 1 and S 2 are processed in order to obtain parameters x, ∈ of the...
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7012699 |
Method of and apparatus for measuring thickness of thin film or thin layer
The present invention provides a method of measuring the thickness of a thin film or thin layer by a spectroscopic measurement, which is applicable to the measurement of a multiple layered film...
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6985221 |
Method and apparatus for measuring wall thickness of plastic container
A method for measuring the wall thickness of plastic containers ( 16 ) during a container manufacturing process includes providing a plastic container ( 16 ), the plastic container ( 16 ) having a...
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6946394 |
Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process
Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The...
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6943902 |
Method for the quality control of material layers
Disclosed is a method for quality control of a material layer, which involves providing the material of the layer with an agent for absorbing an electromagnetic radiation, irradiating the surface...
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6879407 |
Displacement sensor
A displacement sensor includes a light emitter for emitting light towards a target object, a detector for receiving reflected light from the target object and generating a detection signal which...
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6819438 |
Technique for fabricating high quality optical components
To determine the uniformity of an optical component, a light beam is directed to impinge on a surface of an optical component at each of multiple points. A characteristic of the light beam...
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6806970 |
Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same
This invention aims to measure film thickness and film thickness distribution to high precision in a wide range of transparent films. As one example, in a CMP process, the film thickness of an...
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6806969 |
Optical measurement for measuring a small space through a transparent surface
The invention provides a system and method for reliably and accurately measuring the gap between two materials when the depth of gap is less than the smallest distance that an optical thickness...
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6806949 |
Monitoring material buildup on system components by optical emission
A method and system are provided for monitoring material buildup on system components in a plasma processing system. The system components contain emitters that are capable of producing...
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6762838 |
Method and apparatus for production line screening
The use of an intensity spectrum as a fingerprint to determine the layer structure of a semiconductor wafer product or partial product, thereby to determine the routing history of the product...
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6750977 |
Apparatus for monitoring thickness of deposited layer in reactor and dry processing method
A dry processing apparatus includes a processing chamber provided with a measurement window having a reflection portion which totally reflects light on the side of an inner surface thereof and a...
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