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7348544 Optical encoder with discontinuous optical grating  
An optical encoder includes a light-emitting unit, a scale with a discontinuous part, and a plurality of light-receiving elements arranged in relationship to a pitch of the scale. In the optical...
7289229 Optical displacement-measuring instrument  
An optical displacement-measuring instrument of a reflection type includes a sensor head movable above a scale in a direction of measurement. This instrument is of a three-grating type that...
7286246 Method and apparatus for non-contact three-dimensional surface measurement  
A non-contact three-dimensional surface measurement method is provided in which a grating pattern projected onto an object being measured, while the phase of the pattern is being shifted, is...
7214928 Scanning unit for an optical position measuring device  
A scanning unit for an optical position measuring device, the scanning unit having a structured optoelectronic photodetector that includes: a semiconductor substrate, a plurality of...
6580066 Measurement signal generating circuit for linear scale  
A measurement signal generating circuit for a linear scale capable of increasing an Signal-to-Noise (S/N) ratio, wherein S stands for Corona signal strength, and N for noise strength ratio of a...
6528783 Position sensor and circuit for optical encoder  
An electronic circuit for measuring the position of a spatially periodic intensity pattern of incident radiation includes an array of detectors ( 1 ); two or more correlator units ( 2, 3 ) each...
6291817 Moire apparatus having projection optical system and observation optical system which have optical axes parallel to each other  
In a moire apparatus having a projection grating 40, three-dimensional data of an object to be measured 2 is computed from the moire fringe observed while the projection grating 40 is moved, a...
5859707 Position detection apparatus and aligner comprising same  
Position-detection apparatus (alignment sensors) are disclosed for determining the position of an object (e.g., wafer, bearing a position-detection mark) as required in microlithography processes...
5636025 System for optically measuring the surface contour of a part using more fringe techniques  
An optical measuring system comprises an illumination arrangement including a light source, grating, and lens, and an image acquisition arrangement, including a lens, grating, and camera. A...
5576537 Photoelectric position measuring system using gratings having specified dimensions to suppress harmonics  
A light source which emits light in strips is provided for illuminating a scale of a photoelectric position measuring system. The light modulated by the scale is converted into a sinusoidal...
5515730 Apparatus for detecting the amplitude, frequency or modes of vibration of a vibrating panel  
Apparatus for detecting at least one of the amplitude, frequency and modes of vibration of a panel is described. Detection is achieved using Moire fringes by employing two diffraction gratings (33...
5493399 Position measuring system with compensation for variable distance between light source and index disk  
A position measuring system with compensation for variable distance between the light source and the index disk. The index disk has a plurality of index lines separated by masked areas. The light...
5456021 Apparatus and method for measuring linear and angular displacements  
An apparatus and method for measuring displacement by determining the relative speed between a scale and a scanning plate from reading out a first track twice at different times. From this,...
5448358 Optical apparatus and displacement-information measuring apparatus using the same  
In an optical apparatus, a light beam from a light-emitting device is divided into a plurality of light beams by a first diffraction grating provided on a transparent substrate. The plurality of...
5414516 Position measuring apparatus  
A position measuring apparatus for obtaining position information by processing a first and second sinusoidal signals with the phase difference of 90° obtained by a detecting device in accordance...
5260769 Position detector  
The amount of relative in-surface rotation between two scales of a position detector is precisely detected to thereby determine the deviation in longitudinal phase between tracks in one scale....
5253531 System and method for monitoring torsional vibrations and operating parameters of rotating shafts  
An optical system for monitor vibration, particularly applicable to power shafts in rotating power systems such as those found in trucks, naval vessels, turbogenerators, hydroelectric and nuclear...
5235405 Detector apparatus for detecing coherent monohromatic point-source radiation  
Detector apparatus includes a dispersive prism (10) and a diffraction grating (11) of the type which produces only zero and first order diffraction patterns. Located behind the diffraction grating...
5233407 Displacement signal output device  
The invention provides a thin-profile displacement signal output device. The device comprises a first member having a periodic pattern consisting of alternating high-transmittance and...
5182613 Position detecting apparatus generating periodic detection signals having equal third and fifth harmonic components  
A displacement detecting device generates first and second periodic signals in accordance with a displacement of a relatively movable object. The first and second periodic signals have differing...
5138154 Shaft angle encoder with rotating off-axis interference pattern  
A shaft angle encoder adapted for use in a hand-held gyroscope has a motor at the core of the gyroscope suspended by two pairs of orthogonal gimbals to provide two-degrees-of-freedom for the inner...
5068530 Optical encoder  
An optical encoder of the present invention includes a first diffraction grating and a second diffraction grating which is displaceable relative to the first diffraction grating to detect the...
5067816 Optical encoder  
In an optical encoder of a three grating system, a pitch P2 of a second grating for illuminating a first grating is set at a value larger than a pitch P1 of the first grating and a length of a...
5066129 Optical linear encoder with light quantity calabration  
In an averaged diffraction moire position detector of the present invention, diffracted lights which have passed through the same places as those through which measuring diffracted lights have...
5061073 Photoelectric position measuring arrangement  
A position measuring arrangement is provided which presents a graduation carrier with graduation and reference mark fields to a scanning plate. A prism is allocated to one of the measuring...
4979827 Optical linear encoder  
An averaged diffraction moire position detector has a pair of diffraction gratings. One of the gratings has two grating portions arranged with an offset of half a pitch of the transit portions and...
4912322 Optical type displacement detecting device  
An optical type displacement detecting device including a main scale and an index scale, wherein a pitch of a first optical grating formed on the main scale is set at P and a pitch of a second...
4867568 Optoelectronic measuring system  
A scanning unit is movable relative to a scale member and is connected to a fiber optical system for illuminating a reading unit with light that has been emitted by at least one light source and...
4840488 Photoelectric type displacement detecting instrument  
A photoelectric type displacement detecting instrument comprising: a main optical lattice formed on a first member; an auxiliary optical lattice formed on a second member; a light emitter for...
4836681 Fringe pattern phase detection system  
Electro-optical apparatus measures the average relative phase of an incident wave fringe pattern. The subject fringe, e.g., an interferometric pattern, passes through three sections of an optical...
4793067 Position measuring instrument with plurality of reference  
An instrument for measuring the relative position of two objects comprises a scale with an incremental graduation defining a measuring direction X. A plurality of identical reference marks are...
4778273 Photoelectric measuring system  
In a photoelectric measuring arrangement two grids operating as a scale and a scanning plate are built up of several component phase grids which define periodic graduations having differing grid...
4678948 Measuring device error monitoring system  
A system for error monitoring in a photoelectric incremental length measuring device for the measurement of the relative position of two objects is described. The measuring device generates at...
4672201 Phase controlled incremental distance measuring system  
A device for detecting alternating light and dark areas of a Vernier or Moire interference pattern. The device comprises a plurality of paired light sources and light detectors. The detector of...
4650332 Optical position detecting apparatus for positioning an actuator  
In an optical position detecting apparatus using moire, two light receiving elements are associated with a single light emitting element, and moire or grating portions of an auxiliary moire i.e.,...
4636079 Optoelectronic method of measuring the extent of a movement and optoelectronic measuring instrument for carrying out the method  
A scanning unit comprises offset scanning gratings and light receivers disposed behind respective gratings. The scanning unit is moved past an incremental scale and the receivers are illuminated...
4630928 Length measuring device  
In a length measuring device with a measuring transducer system, the curve of two sinusoidal test signals is dependent on the longitudinal movement of the measuring transducer system. An...
4628201 Scanning signal balancing circuit  
A digital electric length or angle measuring system includes a scanning unit for scanning a measuring scale and an evaluating circuit for evaluating scanning units generated by a plurality of...
4606642 Measuring arrangement for the clear scanning of at least one reference mark allocated to a graduation  
A measuring system for measuring the relative position of two objects is provided with a scale which defines reference marks absolutely allocated to a graduation. The graduation and the reference...
4561846 Dental pantograph  
A dental pantograph capable of measuring mandibulary movement includes right and left side housings have orthogonally located X, Y and Z scales. The housing further includes X, Y and Z scale...
4519709 Photoelectric incremental length or angle measuring device  
A photoelectric incremental length or angle measuring device capable of alternate embodiments using transillumination or reflected-light arrangements and having a scanning grid slidable with...
4490914 Error correction system for position measuring instruments  
An error correction system for correcting machine errors or division errors in a position measuring instrument for precision machines is disclosed. The system is usable, for example, in conjunction...
4479716 Incremental measuring instrument  
An incremental length or angle measuring instrument includes a scale having a line grid and a plurality of reference marks. A scanning unit is provided with a plurality of photosensors to scan both...
4477189 Photoelectric incremental measuring device  
An incremental measuring device is described which includes a measuring scale and a scanning unit. The measuring scale includes a division grid, a reference track which includes a plurality of...
4462159 Reference mark selection system for measuring apparatus  
A measuring system is described which includes a scale which defines both a measuring graduation and an array of reference marks positioned at predetermined positions with respect to the measuring...
4461083 Length or angle measuring instrument  
In a measuring apparatus of the type having a measuring graduation which is scanned by a scanning unit that includes a scanning plate, the scanning plate is provided with at least two phase shifted...
4459751 Selection element housing for incremental measuring apparatus  
An improvement is disclosed for an incremental measuring apparatus of the type which includes a graduation and a plurality of reference marks on a scale, in which selection elements are provided to...
4444504 Displacement measuring instrument  
A displacement measuring instrument wherein the instrument comprises a main scale and a carriage movable along the main scale having thereon mounted an index scale whose graduated surface is...
4403859 Photoelectric incremental measuring apparatus  
An improved photoelectric incremental measuring apparatus for measuring the relative displacement of two objects is disclosed, the apparatus including a measuring scale and a scanning unit for...
4399358 Photoelectric digital measuring instrument having multiple light sources  
A photoelectric measuring apparatus includes a measuring scale and a scanning unit including at least one photosensitive element for generating a scanning signal in response to light incident on...
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