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7623250 |
Enhanced shape characterization device and method
The shape and orientation of rigid or nearly rigid moveable bodies are determined using a shape characterization. Sensors capture a plurality of representations of different perspectives of the...
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7616325 |
Optical metrology optimization for repetitive structures
An optical metrology model for a structure to be formed on a wafer is developed by characterizing a top-view profile and a cross-sectional view profile of the structure using profile parameters....
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7602507 |
Sensor for measuring the surface of an object
The invention relates to a sensor for measuring the surface of an object, having a contrasting unit ( 3 ) for projecting a pattern onto the surface of the object, and having a camera ( 4 ) for...
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7595894 |
Profilometry apparatus and method of operation
A profilometry apparatus is provided. The profilometry apparatus includes a fringe projection device configured to project a fringe pattern on an object and an optical unit configured to capture an...
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7570370 |
Method and an apparatus for the determination of the 3D coordinates of an object
A method serves for the determination of the 3D coordinates of an object ( 2 ). A fringe pattern is projected onto the object ( 2 ) in the method. The light reflected by the object ( 2 ) is...
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7545516 |
Full-field three-dimensional measurement method
A method and system for full-field fringe-projection for 3-D surface-geometry measurement, referred to as “triangular-pattern phase-shifting” is disclosed. A triangular grey-scale-level-coded...
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7502125 |
Measuring technology and computer numerical control technology
A measuring apparatus of this invention comprises: a projector; a camera; a generator that generates, from a photographed image of a fringe pattern projected by the projector at a time of...
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7499183 |
Method of measuring sub-micron trench structures
The present invention uses ISTS to measure trenches with near- or sub-micron width. The trenches can be etched in a thin film on in a silicon substrate. One step of the method is exciting the...
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7489820 |
System for measuring the surface geometry and surface evenness of flat products
The invention relates to a device for producing a pattern on a surface for measuring, using a projector and a slide. The invention also relates to various advantageous embodiments of the measuring...
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7474415 |
Measurement method of three-dimensional profiles and reconstruction system thereof using subpixel localization with color gratings and picture-in-picture switching on single display
The present invention is a measurement method of three-dimensional profiles and a reconstruction system thereof using subpixel localization with color gratings and picture-in-picture switching on a...
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7463367 |
Estimating overlay error and optical aberrations
Aberration marks, which may be used in conjunction with lenses in optical photolithography systems, may assist in estimating overlay errors and optical aberrations. Aberration marks may include an...
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7460216 |
Surface strain measuring device
The device enables strains of at least one surface ( 1 ) of a sample ( 2 ) to be measured versus temperature. Strains in a direction perpendicular to a predetermined plane, for example the plane of...
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7436525 |
Three-dimensional shape measuring method, three-dimensional shape measuring apparatus, and focus adjusting method
An operation of projecting slit light onto an object to be measured and receiving light reflected thereon, and an operation of acquiring a two-dimensional image concerning the object to be measured...
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7388678 |
Method and device for three-dimensionally detecting objects and the use of this device and method
In order to determine three-dimensional coordinates of a surface ( 2 ) of an object ( 3 ) to be detected, the changes in color of a color pattern ( 5 ), which is projected by a projector ( 4 ) onto...
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7388677 |
Optical metrology optimization for repetitive structures
The top-view profiles of repeating structures in a wafer are characterized and parameters to represent variations in the top-view profile of the repeating structures are selected. An optical...
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7385709 |
Microscopy imaging apparatus and method for generating an image
A method and a microscopy imaging apparatus for generating an optically sectioned image of a specimen are provided. The method comprises the steps of: illuminating the specimen with a modulating,...
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7382471 |
Non-contact apparatus and method for measuring surface profile
Embodiments of the invention provide a non-contact method for measuring the surface profile of an object that can include generating a point-type optical signal and projecting it on a rotatable...
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7372580 |
Three-dimensional shape detecting device, three-dimensional shape detecting system, and three-dimensional shape detecting program
In a three-dimensional shape detecting system comprising a three-dimensional shape detecting device and an external calculating device, the three-dimensional shape detecting device includes:...
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7336375 |
Wireless methods and systems for three-dimensional non-contact shape sensing
Systems for acquiring an approximation of the surface geometry of a 3-dimensional object include a self-powered wireless, non-contact optical scanner, the location and orientation of which may be...
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7336374 |
Methods and apparatus for generating a mask
A method for generating a mask for use with a light measurement system that includes a light source for projecting light onto a surface of an object, and an imaging system for receiving light...
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7317542 |
Method and device for optically measuring the surface shape and for the optical surface inspection of moving strips in rolling and processing installations
The invention relates to a method and a device for optically measuring the surface shape and for the optical surface inspection of moving elongated bodies, according to which surface shape...
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RE39978 |
Scanning phase measuring method and system for an object at a vision station
A method and system are provided including an optical head which moves relative to an object at a vision station to scan a projected pattern of imagable electromagnetic radiation across the surface...
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7286246 |
Method and apparatus for non-contact three-dimensional surface measurement
A non-contact three-dimensional surface measurement method is provided in which a grating pattern projected onto an object being measured, while the phase of the pattern is being shifted, is...
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7274470 |
Optical 3D digitizer with enlarged no-ambiguity zone
An optical 3D digitizer with an enlarged non-ambiguity zone, comprising a structured light projector for projecting a fringe pattern over a target area, the fringe pattern having a shiftable...
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7256897 |
Three-dimensional measurement apparatus and three-dimensional measurement method
There is provided an apparatus and method for three-dimensional measurements by shining an object to be measured with plural laser beams while scanning. Even if the optical intensity of laser beams...
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7245387 |
Three-dimensional measuring instrument
For measuring the three-dimensional shape of an object of measurement using a phase shift method, a three-dimensional shortening the measurement time. A printed state inspection device 1 includes...
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7242484 |
Apparatus and methods for surface contour measurement
Apparatus and methods of measuring three-dimensional position information of a onto a surface of an object including two sources of radiation separated by a distance, each source having a spectral...
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7193727 |
Apparatus and method for mounting or wiring semiconductor chips
An apparatus for mounting semiconductor chips onto a substrate contains a measuring station for the contactless measurement of the height of the surface of the mounted semiconductor chip facing...
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7182465 |
Methods, systems, and computer program products for imperceptibly embedding structured light patterns in projected color images for display on planar and non-planar surfaces
Methods, systems, and computer program products for imperceptibly embedding structured light patterns in projected color images for display on planar and non-planar surfaces are disclosed....
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7164118 |
Method and system for obstacle detection
A method and system for detecting the presence of an object or the distance between the system and an object supports the provision of rapid and reliable obstacle detection. A transmitter emits...
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7075662 |
Method for three-dimensional inspection using patterned light projection
A three-dimensional inspection system and method is used to obtain information about three-dimensional articles with specular surfaces having a shape and positive or negative height by projecting a...
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7075661 |
Apparatus and method for obtaining three-dimensional positional data from a two-dimensional captured image
Methods and apparatus for introducing a plurality of optical markers to a field of view, capturing a two-dimensional image of said field of view on an image plate comprising a pixel array,...
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7009718 |
Grating pattern projection apparatus using liquid crystal grating
A lattice pattern projector for measuring a three-dimensional shape with enhanced accuracy while shortening the measuring time using a lattice pattern projection method, characterized by comprising...
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6867871 |
Moiré grating noise eliminating method
A moving distance of a moiré grating in y direction is set with respect to a grating pitch of a moiré grating, whereas an imaging magnification of imaging means is set according to the...
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6853458 |
Three-dimensional measuring method and device, and computer program
In order to reproduce a three-dimensional shape of an object accurately while maintaining measuring accuracy and high speed, in a three-dimensional measuring method of projecting a stripe pattern...
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6819415 |
Assembly for increasing the depth discrimination of an optical imaging system
A method and arrangement are disclosed for increasing the depth contrast in microscope imaging. The method and implementation described can be designated as structured illumination for generating...
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6809824 |
Alignment process for integrated circuit structures on semiconductor substrate using scatterometry measurements of latent images in spaced apart test fields on substrate
A process for measuring alignment of latent images in a photoresist layer of an integrated circuit structure on a semiconductor substrate with a test pattern formed in a lower layer on the...
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6768551 |
Contactless wheel measurement system and method
The present invention provides a wheel measurement method and system to measure an attribute of a wheel. Light illumination devices and light sensing devices provide wheel data. A computer then...
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6750975 |
Three-dimensional shape measuring method
A three-dimensional shape measuring method by which measurement of a three-dimensional shape is realized with an improved precision. Grid patterns comprising a plurality of one-dimensional grids ...
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6731390 |
Process and apparatus for determining surface information using a projected structure with a periodically changing brightness curve
A process is disclosed for determining surface information by a projected structure with periodically changing brightness curve which is shifted by 1/n, n=whole number greater than two, of the...
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6714304 |
Fourier transformation infrared spectrophotometer
A method of obtaining a spectrum in a Fourier transformation infrared spectrophotometer includes the following steps: sampling a set of data while a movable mirror of the Fourier transformation...
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6639685 |
Image processing method using phase-shifted fringe patterns and curve fitting
A contour measurement system determines three dimensional surface information of an object using a projection moiré technique to obtain a single fringe pattern that is analyzed using a phase-shift...
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6577405 |
Phase profilometry system with telecentric projector
An optical system for computing a height of a target on a surface includes a light projector for projecting light. The light passes through a patterned reticle and a projector lens so as to...
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6559954 |
Method and device for measuring the shape of a three dimensional object
A 3D shape measurement method and a device using the method eliminate harmful influences of periodic inconstancy in the phase shift method. Optical intensity patterns following periodic functions...
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6459491 |
Non-intrusive pellicle height measurement system
A method to monitor a dimension of a pellicle includes projecting a first light signal against a surface of the pellicle. A second light signal reflected from the surface of the pellicle is...
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6441909 |
Pattern projection measurement grating
In a pattern projection measurement grating, each cycle of the total amplitude of a sine wave is divided into eight sections, and each of thus divided sections is divided into white regions W and...
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6411391 |
Crystal section shape measuring method
A method of measuring a crystal section shape of a crystal being pulled from a crystal melt while rotating, including taking an image of the base of the crystal in horizontal and vertical...
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6369899 |
Camera with projector for selectively projecting pattern lights
A mechanism, employed for a camera, which obtains precise information upon a three-dimensional configuration of an object, without its being affected by nature of the object and/or by nature of a...
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6195164 |
Systems and methods for calibrating laser ablations
Improved systems, methods, and apparatus for calibrating a laser ablation system by measuring the optical power and shape of a test surface that has been ablated by energy delivered from a laser....
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5852672 |
Image system for three dimensional, 360 DEGREE, time sequence surface mapping of moving objects
A three-dimensional motion camera system comprises a light projector placed between two synchronous video cameras all focused on an object-of-interest. The light projector shines a sharp pattern of...
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