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7627170 |
Process for the identification of objects
The invention is a process for identifying an unknown object. In detail, the process includes the steps of: 1) compiling data on selected features on a plurality of segments of a plurality of known...
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7623249 |
Automated product profiling apparatus and product slicing system using same
A system, suitable for high-speed operation, by which raw product ( 45 ), such as a slab of meat, can be accurately processed, such as by slicing into segments of desired weight, comprises a...
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7623248 |
Automatic asset detection, location measurement and recognition
From a survey vehicle, two types of data are obtained: images from a camera and reflections from a laser. The laser data is filtered in order to detect assets. The detected assets are then...
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7619751 |
High-accuracy pattern shape evaluating method and apparatus
A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this...
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7619750 |
Measurement method and device for bead cutting shape in electric resistance welded pipes
To precisely measure bead cutting shapes of electric resistance welded pipes without being affected by difference in luminance level between cut and uncut portions in optical cutting images, an...
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7619749 |
Methods and apparatus of aligning surfaces
Ultra-precision freeform surfaces are important to the development of complex and micro-optical-electro-mechanical devices used in many photonics and telecommunication products such as F-theta...
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7619740 |
Microgloss measurement of paper and board
Microgloss is a novel two-dimensional representation of how light is reflected from a target surface area. Systems and methods for measuring the microgloss can yield data for characterizing the...
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7617068 |
Method for determining relative mobility or regions of an object
A method for determining a mobility of foot comprising: measuring at least a portion of a shape of the foot under a first weight load; measuring the at least the portion of the shape of the foot...
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7616330 |
Geometric measurement system and method of measuring a geometric characteristic of an object
A geometric measurement system is adapted to precisely measure one or more surfaces of objects such as corneas, molds, contact lenses in molds, contact lenses, or other objects in a fixture. The...
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7616325 |
Optical metrology optimization for repetitive structures
An optical metrology model for a structure to be formed on a wafer is developed by characterizing a top-view profile and a cross-sectional view profile of the structure using profile parameters....
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7609374 |
Method and system for determining the properties of a surface of revolution
The invention relates to a method and system for determining the direction and location of the symmetry axis of a revolution-shaped article. Furthermore, the invention enables one to determine the...
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7605927 |
Apparatus for optically determining the profile and/or upper surface properties of flat workpieces in a wide belt abrading machine
An elongated bar shaped housing contains an optical sensing apparatus with at least one light source to create a sensing beam and a deflecting arrangement which moves the sensing beam back and...
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7602506 |
Method for contactlessly and dynamically detecting the profile of a solid body
The invention relates to a method for contactlessly and dynamically detecting the profile of a solid body. At least one light beam is generated by a laser device and expanded to form a linear light...
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7602505 |
Method for the automatic parameterization of measuring systems
A method for the automatic parameterization of measuring systems for the measurement of objects transported by means of a transport device, in particular volume measurement systems, wherein at...
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7599072 |
Method for determining physical properties of a multilayered periodic structure
There is provided a method of calculating physical properties of a periodic structure. At least one physical property related to reflectivity or transmittance of a periodic structure is measured,...
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7599064 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method, substrate for use in the methods
An overlay marker for use with a scatterometer includes two overlying two-dimensional gratings. The two gratings have the same pitch but the upper grating has a lower duty ratio. Cross-talk between...
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7595893 |
Shape measurement method and shape measurement apparatus
A shape measurement method for measuring a shape of an object to be measured, which has a substantially rotating symmetric shape, includes: placing an aperture having an opening larger than an...
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7595878 |
Spectroscopic methods for component particle analysis
The invention relates to methods of assessing one or more geometric properties of a particle of a substance using an infrared spectroscopic property of the substance. The method is useful, for...
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7595869 |
Optical metrology system optimized with a plurality of design goals
Provided is a method of designing an optical metrology system for measuring structures on a workpiece where the optical metrology system is configured to meet a plurality of design goals. Primary...
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7593099 |
Method and device for configuration examination
A method of examining a configuration of a sample includes the step of irradiating a terahertz pulsed light, which possesses a wavelength to transmit through the sample, to at least two different...
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7589845 |
Process control using an optical metrology system optimized with signal criteria
Provided is system and method for controlling a fabrication cluster using at least one parameter of a structure measured with an optical metrology system designed and configured to meet one or more...
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7589844 |
Shape inspection method and apparatus
Shape inspection is carried out without preparing an inspection apparatus for each model of product. There is provided a shape inspection method comprising a first step of placing an object to be...
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7583392 |
Surface profile measuring apparatus
A surface profile measuring apparatus includes a light source assembly, a spatial light modulator, a spectroscope, a wave-front sensor, and a control-processing device. The light source assembly...
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7583391 |
Three-dimensional measuring apparatus, three-dimensional measuring method, and three-dimensional measuring program
A three-dimensional measuring apparatus, method, and program for acquiring many pieces of information on a pattern of light by a single projection and highly accurate three-dimensional information...
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7582855 |
High-speed measuring device and method based on a confocal microscopy principle
The invention relates to a measuring device and a method based on a confocal microscopy principle. The inventive device comprises a light source ( 1 ), a diaphragm unit ( 3 ) for limiting a beam,...
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7573569 |
System for 2-D and 3-D vision inspection
There is disclosed an inspection system that combines 2-D inspection and 3-D inspection of the components of an electronic device into one compact module. The inspection system of the present...
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7570369 |
Method and a device for measurement of edges
In a method for measuring the size or shape of an edge of a machined work piece or of a cutting edge of a tool, the surface of the edge is illuminated by diffused radiation from several positions...
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7570368 |
Method and apparatus for measuring the curvature of reflective surfaces
A method for monitoring the curvature of a surface of a body such as a semiconductor wafer ( 22 ) includes directing a beam of light along an impingement axis ( 36 ) onto the surface so that a beam...
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7567353 |
Automated process control using optical metrology and photoresist parameters
To control a photolithography cluster using optical metrology, a structure is fabricated on a wafer using the photolithography cluster. A measured diffraction signal off the structure is obtained....
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7567352 |
Controlling a fabrication tool using support vector machine
A fabrication tool can be controlled using a support vector machine. A profile model of the structure is obtained. The profile model is defined by profile parameters that characterize the geometric...
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7567350 |
Apparatus and method for measuring displacement, surface profile and inner radius
An apparatus and a method are proposed for measuring displacement, surface profile and roughness of a moving object or an inner radius of a hollow cylinder. The apparatus includes a light emitting...
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7566894 |
Device and method for the quantified evaluation of surface characteristics
A device for the quantified evaluation of surface characteristics including a first radiation structure which is arranged in a first predetermined angle with respect to a surface to be analyzed and...
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7564571 |
Method for calibrating a camera-laser-unit in respect to a calibration-object
The invention refers to a method for calibrating a camera-laser-unit ( 1 ) with respect to at least one calibration-object ( 12 ) disposed at a given position and orientation in a three-dimensional...
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7564569 |
Optical wheel evaluation
A solution for optically evaluating a wheel along at least one circumference of the wheel is provided. Image data is obtained while the wheel moves along a path having a length of at least one...
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7561282 |
Techniques for determining overlay and critical dimension using a single metrology tool
Disclosed are semiconductor targets for measuring with a metrology tool having at least two incident beam modules and techniques for measuring the same. In one embodiment, the target includes an...
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7557934 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
In a scatterometer, an aperture plate comprising an array of transmissive apertures is inserted into a plane in the illumination optical system that is conjugate with the pupil plane of the...
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7557933 |
Measuring probe, sample surface measuring apparatus and sample surface measuring method
A measurement probe 1 for measuring a surface of sample S comprises a base section 10 , a head section 30 having a probe tip 31 , and a support structure section 15 which supports the head...
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7557910 |
System and method for controlling a beam source in a workpiece surface inspection system
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement...
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7555163 |
Systems and methods for representing signed distance functions
A system and method for implicitly computing signed distance values in a graphics application. In one embodiment, rather than storing numerous distance values along a given raster scan line, only...
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7548305 |
Shallow angle shape sensor
A system for providing shape determination of a planar or quasi-planar surface is disclosed. The system includes a number of targets located on the surface and one or more sensor devices. The...
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7545515 |
Object shaping device
A device for shaping objects by removal of material from the surface thereof with a pulsed laser beam and a deflecting device through which the laser beam is guided over the surface of the object....
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7545514 |
Pick and place machine with improved component pick image processing
A pick and place machine includes a sensor disposed to acquire an image of a nozzle before a pick operation, and one or more images after the pick operation. Image analytics based upon these images...
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7542135 |
Device for inspecting countersunk holes
The invention is a non contact laser inspection self centering device to inspect the counter sink portion of a counter sunk fastener hole on a surface. In detail, the self centering and seating...
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7541974 |
Managed traverse system and method to acquire accurate survey data in absence of precise GPS data
A method and system obtains precise survey-grade position data of target points in zones where precise GPS data cannot be obtained, due to natural or man-made objects such as foliage and buildings....
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7538893 |
Method of microscopically examining a spatial finestructure
A method of microscopically examining a spatial fine structure comprises the steps of selecting a luminophore from the group of luminophores which have two physical states, the two states differing...
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7532333 |
Method and apparatus for determining the shape and the local surface normals of specular surfaces
A method teaches how to measure—even strongly curved—specular surfaces with an apparatus that measures a shape as well as local surface normals absolutely. This is achieved by the observation...
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7532331 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
In target shape reconstruction, in order to determine efficiently and quickly the profile of complex targets on a substrate, the various degrees of freedom or variable parameters of the various...
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7532317 |
Scatterometry method with characteristic signatures matching
A system and method for efficiently and accurately determining grating profiles uses characteristic signature matching in a discrepancy enhanced library generation process. Using light scattering...
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7528968 |
Optical measuring machine
An optical measuring machine includes a screen having a reference line, a movable stage, a detector for detecting a displacement of the stage, the first and second image-forming units for forming...
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7525673 |
Optimizing selected variables of an optical metrology system
A system for examining a patterned structure formed on a semiconductor wafer using an optical metrology model includes a first fabrication cluster, a metrology cluster, an optical metrology model...
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