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7623227 |
System and method for inspecting a workpiece surface using polarization of scattered light
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement...
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7619751 |
High-accuracy pattern shape evaluating method and apparatus
A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this...
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7617075 |
Library accuracy enhancment and evaluation
The accuracy of a library of simulated-diffraction signals for use in optical metrology of a structure formed on a wafer is evaluated by utilizing an identity relationship inherent to simulated...
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7617068 |
Method for determining relative mobility or regions of an object
A method for determining a mobility of foot comprising: measuring at least a portion of a shape of the foot under a first weight load; measuring the at least the portion of the shape of the foot...
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7605913 |
System and method for inspecting a workpiece surface by analyzing scattered light in a front quartersphere region above the workpiece
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement...
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7602508 |
Method and apparatus for measuring pitch, rake and squareness of a boat propeller
The present invention provides a method of determining certain propeller parameters for a boat propeller that has a hub, a central axis and a plurality of propeller blades attached to the hub. The...
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7599813 |
Method and machine for determining a space coordinate of a measurement point on a measurement object
For determining a space coordinate of a measurement point on a measuring object, the measurement point is approached with a probe head arranged on a displacement mechanism having at least two...
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7596468 |
Method for measuring a selected portion of a curved surface of an object
A computer-implemented method for measuring a selected portion of a curved surface of an object is disclosed. The method includes the blocks of displaying a straight-line across an object,...
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7593115 |
Determining a length of a carrier line deployed into a well based on an optical signal
A component is deployed into a well on a carrier line having an optical cable. An optical signal is transmitted into the optical cable, and a travel time of the optical signal in the optical cable...
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7582888 |
Reflection type optical sensor and method for detecting surface roughness
A reflection type optical sensor can include a light emitting and receiving unit. The light emitting and receiving unit can include both a light emitting unit and a light receiving unit having...
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7557933 |
Measuring probe, sample surface measuring apparatus and sample surface measuring method
A measurement probe 1 for measuring a surface of sample S comprises a base section 10 , a head section 30 having a probe tip 31 , and a support structure section 15 which supports the head...
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7557910 |
System and method for controlling a beam source in a workpiece surface inspection system
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement...
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7548323 |
Displacement and flatness measurements by use of a laser with diffractive optic beam shaping and a multiple point sensor array using the back reflection of an illuminating laser beam
A laser beam system for measuring an aspect of a surface wherein a laser beam is reshaped into a corrected shaped laser beam having a corrected energy profile and subsequently reshaped into a...
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7542136 |
Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughput
A sample stage for performing measurements using an optical metrology system includes at least one sample section for retention of a sample, and components for controlling orientation of the sample...
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7538892 |
Method and apparatus for examining end faces of light guides
In order to provide light guides, in particular in the form of glass rod portions, with improved end faces, the invention provides a method for examining glass rods, in particular light guides, in...
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7528964 |
Method and apparatus for examining surfaces containing effect pigments
The present invention describes a method for an apparatus for examining surface properties. Properties of effect pigments are to be examined in particular. A surface ( 9 ) to be examined is...
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7528941 |
Order selected overlay metrology
Disclosed are apparatus and methods for measuring a characteristic, such as overlay, of a semiconductor target. In general, order-selected imaging and/or illumination is performed while collecting...
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7511835 |
Optical metrology using a support vector machine with simulated diffraction signal inputs
A structure formed on a semiconductor wafer can be examined using a support vector machine. A profile model of the structure is obtained. The profile model is defined by profile parameters that...
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7505619 |
System and method for conducting adaptive fourier filtering to detect defects in dense logic areas of an inspection surface
A dark field surface inspection tool and system are disclosed herein. The tool includes an illumination source capable of scanning a light beam onto an inspection surface. Light scattered by each...
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7499183 |
Method of measuring sub-micron trench structures
The present invention uses ISTS to measure trenches with near- or sub-micron width. The trenches can be etched in a thin film on in a silicon substrate. One step of the method is exciting the...
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7440118 |
Apparatus and method for color filter inspection
The present invention provides an apparatus and method for detecting flatness and/or unevenness of a surface of an overcoat layer on a colored pixel layer of a color filter with a high degree of...
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7433055 |
Device for the examination of optical properties of surfaces
A device for examining the optical properties of surfaces includes at least one first radiation device which emits radiation to a surface to be examined at a first predetermined spatial angle; at...
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7430052 |
Method for correlating the line width roughness of gratings and method for measurement
A method for correlating line width roughness of gratings first performs a step (a) generating a characteristic curve of a predetermined grating having a known line width, and a step (b) performing...
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7428060 |
Optimization of diffraction order selection for two-dimensional structures
The number of diffraction orders to use in generating simulated diffraction signals for a two-dimensional structure in optical metrology is selected by generating a first simulated diffraction...
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7427747 |
Optical image pickup apparatus for imaging living body tissue
A control portion of an optical image pickup apparatus includes a scan driver, a lock-in amplifier, and an A/D converter. The scan driver outputs a predetermined drive signal to a Y-scanning mirror...
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7417722 |
System and method for controlling light scattered from a workpiece surface in a surface inspection system
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement...
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7405835 |
High-accuracy pattern shape evaluating method and apparatus
A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this...
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7397565 |
Device and method for obtaining appearance information
A device has first and second units that lights an object at first or second incident angles; a unit that generates image signals according to the intensity of the received light; units that guides...
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7394531 |
Apparatus and method for automatic optical inspection
An automated optical inspection system, comprising at least one camera having a field of view; and at least one image scanning module comprising a plurality of objective modules arranged to have...
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7391518 |
Device and method for the determination of the quality of surfaces
The present invention relates to a device and method for making quantified determinations of the quality of surfaces and wherein the device comprises an optical system with a first optical means...
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7369253 |
Systems and methods for measuring sample surface flatness of continuously moving samples
Measurement of sample surface flatness of a continuously moving sample. A conveyor continuously conveys a sample beneath a grating disposed at a non-zero angle with respect to the plane of...
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7362450 |
Specular surface flaw detection
An apparatus and a method for detecting low frequency specular surface flaws on coated substrates is disclosed. A method for detecting low frequency specular surface flaws may comprise: impinging...
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7355711 |
Method for detecting an end-point for polishing a material
An optical surface analysis system for scanning the surface of a (silicon) wafer and detect if any residual material is still on the wafer surface in order to determine an appropriate end-point in...
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7349096 |
Scatterometer and a method for observing a surface
A scatterometer comprising light source means ( 11 ) for providing an incident light beam ( 8 ) at different angles in the direction of a sample ( 5 ) to be analyzed, and a concave screen ( 1,2 )...
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7336810 |
Skin evaluation method and image simulation method
A skin beauty evaluation method for imaging an object such as human face to obtain digital image data, extracting data on a mirror reflection light component of each pixel from the digital image...
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7335280 |
Method and equipment in the measurement of the flatness of the flow surface of the headbox of a paper machine
A method in the measurement of the flatness of the flow surface of a headbox of a paper machine is disclosed. The flatness is determined by placing a measuring tool on the flat surface formed by...
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7327473 |
Flatness tester for optical components
Disclosed herein is a method comprising capturing an image of a grating formed on a surface of a brightness enhancing display film; measuring a displacement Δd of a fringe from the image of the...
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7319528 |
Surface texture measuring instrument
A surface texture measuring instrument provided with a near-field measuring unit ( 30 ) including a near-field probe ( 33 ) that forms a near-field light at a tip end thereof when a laser beam is...
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7315379 |
Evaluating method and apparatus thereof
A measurement apparatus measures the spatial distributed characteristic of reflection of an object. Evaluate parameters used to evaluate the gloss character of the object are extracted based on the...
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7289216 |
Station for inspecting the painting of motor vehicle parts
A station for inspecting the painting of motor vehicle bodywork parts, the station including an optical measuring apparatus and means for attenuating vibration of the moving parts.
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7286218 |
System and method for inspecting a workpiece surface using surface structure spatial frequencies
A method for inspecting a surface of a workpiece comprises scanning an incident beam on the surface of the workpiece to impinge thereon to create reflected light and scattered light comprising...
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7256896 |
Method for verifying scan precision of a laser measurement machine
A method for verifying scan precision of a laser measurement machine includes the steps of: preparing a transparent flat, of which the flatness of each plane is regarded as a flatness conventional...
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7253901 |
Laser-based cleaning device for film analysis tool
A system for analyzing a thin film uses an energy beam, such as a laser beam, to remove a portion of a contaminant layer formed on the thin film surface. This cleaning operation removes only enough...
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7248368 |
Scatterometer and a method for inspecting a surface
A scatterometer comprising a source ( 2 ) for providing an incident radiation beam ( 1 ) to be directed to the surface of a sample ( 4 ), and means for directing said incident radiation beam ( 1 )...
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7227647 |
Method for measuring surface properties and co-ordinate measuring device
A method and apparatus for measuring surface properties of a workpiece in an extremely precise manner by means of a co-ordinate measuring device ( 10 ), independently from the material properties...
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7221445 |
Methods and apparatus for detecting and quantifying surface characteristics and material conditions using light scattering
A system for quantifying surface characteristics detects and quantifies characteristics of a surface of an object. For example, the system may quantify changes in surface roughness without...
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7213447 |
Method and apparatus for detecting topographical features of microelectronic substrates
An apparatus and method for detecting characteristics of a microelectronic substrate. The microelectronic substrate can have a first surface with first topographical features, such as roughness...
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7205529 |
Laser mirror vision
The present invention relates to a method and an apparatus for determining a three dimensional image of the a moving object by means of reflecting means such as mirrors and a planar beam of light...
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7185647 |
Determination of smoothness of canisters containing inhalable medicaments
Disclosed are methods for determining the smoothness index of the interior of a metered dose container.
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7184152 |
Optical measurements of line edge roughness
A method and system for optical measurements of line edge roughness (LER) of patterned structures based on illuminating the structure with incident radiation and detecting a spectral response of...
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