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7213447 |
Method and apparatus for detecting topographical features of microelectronic substrates
An apparatus and method for detecting characteristics of a microelectronic substrate. The microelectronic substrate can have a first surface with first topographical features, such as roughness...
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7205529 |
Laser mirror vision
The present invention relates to a method and an apparatus for determining a three dimensional image of the a moving object by means of reflecting means such as mirrors and a planar beam of light...
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7185647 |
Determination of smoothness of canisters containing inhalable medicaments
Disclosed are methods for determining the smoothness index of the interior of a metered dose container.
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7184138 |
Spatial filter for sample inspection system
Spatial filtering is disclosed that improves the signal to noise ration of a sample inspection system of the type having a detector and collection optics that receive radiation scattered from a...
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7184152 |
Optical measurements of line edge roughness
A method and system for optical measurements of line edge roughness (LER) of patterned structures based on illuminating the structure with incident radiation and detecting a spectral response of...
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7177032 |
Device and method for determining the properties of surfaces
A method for determining the properties of surfaces wherein a first process step specified radiation emits from at least one radiation source to a measuring surface, in further process steps the...
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7162069 |
Objectification of surface test methods through image processing
The invention relates to the objectification of surface test methods through image processing. Information z(x, y) is measured and recorded for each image point (x, y) of the measuring field of an...
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7127280 |
Apparatus and process for examining a surface
An apparatus designed to examine a surface includes a polarization analyser element, or analyser, placed in the path of a light beam reflected by the surface, a device configured to take digital...
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7088442 |
Device and method for a quality test of a body
A device for quality testing of a body comprising a surface comprising a structuring bounded by edges and a substantially edge-free unevenness, wherein the structuring illustrates a quality...
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7084981 |
Method for determining the paper quality for halftone printing
The invention relates to a method for determining the paper quality for halftone printing, according to which a finely distributed pattern of geometric figures is applied to the paper, said paper...
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7068378 |
Apparatus and method for measuring amount of projection of abrasive grain on grinding tool
A camera unit is arranged opposite a grinding surface. While moving the focal position of the camera unit in a direction perpendicular to the grinding surface relative to the grinding surface of...
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7046375 |
Edge roughness measurement in optical metrology
Edge roughness and deterministic profile of a structure formed on a semiconductor wafer are measured using optical metrology by directing an incident beam on the structure using a source and...
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7038773 |
Apparatus and methods for enabling robust separation between signals of interest and noise
Disclosed are methods and apparatus for analyzing the Raze data provided by an optical inspection tool. The Haze data is analyzed so as to detect defects associated with the specimen surface. In...
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7027165 |
Method and device for surface evaluation
Device and method for recording the visual properties of a surface, comprising an imaging device for recording light interaction (reflection or transmission) with a surface, a light source, and a...
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7018121 |
Combined paper and transparency sensor for an image forming apparatus
A media sensor for an image forming apparatus is operative to sense and distinguish opaque, transparent or no media in a media path. In one embodiment, an optical source and detector are positioned...
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7006235 |
Methods and systems for determining overlay and flatness of a specimen
Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The...
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7006229 |
Means for illuminating a measurement surface and device and method for determining the visual properties of objects
Illuminating means for illuminating a measurement surface and device for determining the properties of reflective objects. The illuminating means comprises a radiating means having radiation...
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6992316 |
Angled sensors for detecting substrates
In a first aspect, an apparatus is provided for detecting substrates. The apparatus includes (1) a transmitter/receiver unit adapted to transmit a light beam through a substrate located within a...
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6987568 |
Apparatus and method for measuring spatially varying bidirectional reflectance distribution function
An apparatus and method for measuring spatially varying bidirectional reflectance distribution function and method are provided. The apparatus and method provide means to illuminate different areas...
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6987571 |
Sensor head, luminance distribution measurement apparatus having the sensor head, and unevenness inspection/evaluation apparatus
A sensor head has a multiplicity of linear image sensors in correspondence with different radial directions of light emitted from a pixel in a pixel line of an LCD panel. The linear image sensors...
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6956658 |
System and method for measuring object characteristics using phase differences in polarized light reflections
A system and method for performing a magnetic imaging, optical profiling, and measuring lubricant thickness and degradation, carbon wear, carbon thickness, and surface roughness of thin film...
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6954557 |
Foot measurement system and method
There are disclosed foot measurement systems and methods to scan someone's foot from the bottom and/or oblique topside directions for generating pixel data for the foot shape, and then to calculate...
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6947150 |
Method and apparatus for determining out-of-plane defects in a paper sample
A method and apparatus for determining out-of-plane defects in a paper sample are described. One embodiment of the method includes providing a paper sample, illuminating the sample with light,...
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6946394 |
Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process
Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The...
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6943968 |
Adjustable focusing composite for use in an optical profilometer system and method
An adjustable lens is disclosed for use in an optical profilometer system. The adjustable lens includes a plurality of elements that are mutually spaced from another in a first position and...
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6943874 |
Apparatus for inspecting a surface
The invention concerns an apparatus for inspecting a surface, in particular the surface of a mill roll, comprising a housing wherein are arranged means for transmitting and receiving a light beam,...
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6929604 |
Optic for industrial endoscope/borescope with narrow field of view and low distortion
An optic for the imaging optics on the distal end of a flexible fiberoptic endoscope or rigid borescope inspection tool. The image coverage is over a narrow (<20 degrees) field of view with very...
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6914683 |
Measurement of small, periodic undulations in surfaces
In a method and apparatus for detecting small periodic wave patterns in technical surfaces, monochromatic coherent primary light is directed onto a workpiece surface approximately at right angles...
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6914684 |
Method and apparatus for detecting media type
Media manipulation and sensing apparatuses having a media type detector and method for media type detection, wherein non-linear characteristics of light sensors used for measuring a media type are...
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6870949 |
Coaxial narrow angle dark field lighting
A coaxial narrow angle dark field imaging system is provided. The system utilizes a telecentric lens to illuminate objects with symmetric coaxial narrow angle dark field illumination. The...
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6862096 |
Defect detection system
Scattered radiation from a sample surface is collected by means of a collector that collects radiation substantially symmetrically about a line normal to the surface. The collected radiation is...
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6816250 |
Method and apparatus for measuring irregularities on an outer surface of a rotatable cylindrical shaft
A method for measuring irregularities on the outer surface of an article employs an apparatus to obtain qualitative information regarding a first portion of the outer surface of the article, which...
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6801875 |
Methods, systems, and software for performing measurements
Methods of measuring widths of illumination spots and distances between two points, and predicting detected signal widths are provided. Systems, software, and kits for performing the methods of the...
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6798525 |
System for inspecting matt, flat and/or slightly curved surfaces
A system for inspecting matt, flat and/or slightly curved surfaces in order to identify defects includes an illumination device which irradiates the surface to be inspected at flat angles and has...
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6798526 |
Methods and apparatus for predicting oxygen-induced stacking fault density in wafers
Methods and apparatus for predicting the density of oxygen-induced stacking faults (OSF) on a surface of a wafer by measuring the surface roughness before and after a surface damaging process is...
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6785433 |
Waveguide grid array and optical measurement arrangement
A (bio)chemo-functional waveguide grating structure consisting of at least one (bio)chemo-functional waveguide grating structure unit or at least one (bio)chemo-functional sensor location with beam...
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6781684 |
Workpiece levitation using alternating positive and negative pressure flows
A support structure utilizes a combination of positive pressure openings and negative pressure openings to precisely position a workpiece, such as a sheet of float glass. The positive pressure...
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6775004 |
Measuring surface roughness to calculate filler dispersion in a polymer sample
This invention contemplates the preparation of a cut surface of a polymer compounded with fillers, while leaving dispersed filler agglomerates substantially undisturbed and apparent from surface...
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6753970 |
Transducer for generating optical contrasts
A transducer in an imaging optical system for generating optical contrasts in the near-field representation of topographies of an object by outcoupling evanescent waves from the underside of the...
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6727993 |
Surface inspection instrument and surface inspection method
Apparatus for inspecting a surface of an object to be measured. The light source applies light to the surface. An objective lens opposite the surface receives reflected light. A light detector...
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6700670 |
Method of measuring dishing using relative height measurements
A metrology process, in accordance with the present invention, measures the dishing of a feature, such as a copper, aluminum, or tungsten metal line, with respect to another feature, such as a...
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6700657 |
System and method for detecting surface roughness
A method for characterizing a surface are disclosed. The system includes a light source optic which direct a beam of light toward the surface. Scattered light and a spectacular beam are reflected...
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6687002 |
Method and apparatus for ellipsometric metrology for a sample contained in a chamber or the like
An ellipsometric metrology apparatus for a sample contained in a chamber. A light source outside the chamber produces the illuminating beam. A polarizing device outside the chamber polarizes the...
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6673640 |
Method of manufacturing semiconductor device for evaluation capable of evaluating crystal defect using in-line test by avoiding using preferential etching process
In order to obtain a method of evaluating a crystal defect which allows crystal defects generated in a thin film SOI layer or a thin film surface layer to be evaluated using an in-line test, an SOI...
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6665078 |
System and method for simultaneously measuring thin film layer thickness, reflectivity, roughness, surface profile and magnetic pattern in thin film magnetic disks and silicon wafers
A system and method for performing a magnetic imaging, optical profiling, and measuring lubricant thickness and degradation, carbon wear, carbon thickness, and surface roughness of thin film...
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6654130 |
Method and apparatus for determining temperature and temperature distribution in a slider
A method for in-situ measuring a temperature and/or temperature distribution within a slider due to local heat transfer is provided, whereby the slider is positioned above the surface of a rotating...
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6624896 |
System and method for metrology of surface flatness and surface nanotopology of materials
A metrology system and method uses pulsed light to allow continuous movement of a target relative to the sensor. A metrology system and method uses dynamic adjustment of tilt in a system. A...
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6611331 |
Method of measuring surface form of semiconductor thin film
The surface form of a semiconductor thin film such as a polysilicon film formed on a semiconductor substrate is measured through spectro-ellipsometry or measured by performing an IPA quantitative...
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6600566 |
High-order high-frequency rough surface scattering solver
The present invention provides a rough surface scattering method and solver for efficiently computing electromagnetic scattered fields resulting from an incident wave ( 12 ) being reflected from a...
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6577397 |
Scatterometer
A scatterometer for the investigation of surface quality causes a radiation beam ( 15 ) with a well-defined direction to fall upon a sample under test ( 12 ). The radiation scattered by the sample...
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