Matches 1 - 50 out of 331 1 2 3 4 5 6 7 >
Match Document Document Title
7430036 Maskless exposure apparatus using optical modulator, and method for monitoring pattern generating performance by the optical modulator  
A pattern monitoring method for an exposure apparatus that includes an optical modulator having at least one element that provides incident light with plural phase differences, and a projection...
7428059 Measurement method and apparatus, exposure apparatus, and device manufacturing method  
A measurement method measures a wavefront aberration of a target optical system using an interference pattern formed by lights from first and second image side slits. The first image side slit has...
7428058 Apparatus and method for in situ and ex situ measurements of optical system flare  
Apparatus and methods for in situ and ex situ measurements of spatial profiles of the modulus of the complex amplitude and intensity of flare generated by an optical system. The in situ and ex situ...
7426038 Detection device, optical path length measurement device, measurement instrument, optical member evaluation method, and temperature change detection method  
An object of the invention is to provide a detection apparatus, an optical path length measuring apparatus, a method for evaluating an optical member, and the like, which can evaluate optical...
7426037 Diffraction grating based interferometric systems and methods  
Diffraction grating based fiber optic interferometric systems for use in optical coherence tomography, wherein sample and reference light beams are formed by a first beam splitter and the sample...
7423766 Interferometric optical profiler  
An imaging-type interferometric optical profiler splits a beam reflected from a sample into two beam portions. One portion is a reference beam and the other a sample beam. The reference and sample...
7422891 Label-free high-throughput optical technique for detecting biomolecular interactions  
Methods and compositions are provided for detecting biomolecular interactions. The use of labels is not required and the methods can be performed in a high-throughput manner. The invention also...
7420687 Condition assessment system for a structure including a semiconductor material  
An improved condition testing system and method includes a structure including a semiconductor material with a target portion and a second portion. The target portion has a first feature when at...
7417745 Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry  
Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry, having a mask structure ( 6 a ) to be arranged on the object side, and/or a...
7414731 Microscope and interferometer thereof  
An interferometer comprises a light source unit, a first splitter, a reference beam unit and a detection unit. The light source unit provides a laser beam. The first splitter receives the laser...
7414730 High precision interferometer apparatus employing a grating beamsplitter  
Measurement of a distance change between a reference surface and a target is provided. A substrate has a first surface facing the target and including a grating. The grating and target combine to...
7411687 Speckle reduction method and system for EUV interferometry  
A wavefront measurement system has a source of electromagnetic radiation. An imaging system focuses the electromagnetic radiation at an object plane. A first grating is positioned in the object...
7405834 Compensated coherent imaging for improved imaging and directed energy weapons applications  
An imaging method and associated system for producing high-resolution images. The method includes illuminating an object or scene with coherent radiation such as beams from a laser and then,...
7403293 Metrology apparatus, lithographic apparatus, process apparatus metrology method and device manufacturing method  
A metrology apparatus for measuring a parameter of a microscopic structure on a substrate, the apparatus comprising a supercontinuum light source arranged to generate a measurement beam, an optical...
7394550 Displacement detector  
The displacement detector includes: a light source 140 ; a beam splitter 170 for dividing the light, which is sent from the light source 140 , into two beams of light; reflection mirrors 181,...
7379613 Optimized image processing for wavefront coded imaging systems  
An image processing method includes the steps of wavefront coding a wavefront that forms an optical image, converting the optical image to a data stream, and processing the data stream with a...
7369253 Systems and methods for measuring sample surface flatness of continuously moving samples  
Measurement of sample surface flatness of a continuously moving sample. A conveyor continuously conveys a sample beneath a grating disposed at a non-zero angle with respect to the plane of...
7365861 Method and apparatus for determining telecentricity and microlithography projection exposure apparatus  
An apparatus having a wavefront measuring device ( 1, 2, 7 ), which is designed to determine a wavefront tilt in one or more non-parallel transverse directions perpendicular to an optical axis of...
7352475 Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method  
A measuring apparatus for irradiating measuring light and for measuring optical performance of a target optical system includes a barrel for housing the target optical system, the barrel being...
7349102 Methods and apparatus for reducing error in interferometric imaging measurements  
Described is a fringe generator for an interferometric measurement system having improved fringe stability and reproducibility. The fringe generator includes a light source at a characteristic...
7333216 Apparatus for wavefront detection  
An apparatus for wavefront detection includes a wavefront source for the production of a wavefront, an optical system transforming the wavefront, a diffraction grating through which the transformed...
7327468 Opto-acoustic apparatus with optical heterodyning for measuring solid surfaces and thin films  
In an opto-acoustic measuring device for thin films and solid surfaces, the probe beam is split into a first probe beam portion and a second reference beam portion. The splitting of the probe beam...
7327467 Phase measuring method and apparatus for measuring characterization of optical thin films  
A phase measuring apparatus for measuring phase characteristics of a film applied onto an object to be measured includes a shearing interference system for providing incident light onto the object...
7324212 Optical encoder having slanted optical detector elements for harmonic suppression  
An optical encoder includes a source of a light beam, an optical grating that generates a spatial pattern of interference fringes, and an optical detector which includes generally elongated...
7304749 Point diffraction interferometer and exposure apparatus and method using the same  
A point diffraction interferometer measures optical performance of a target optical system based on a light intensity distribution of an interference fringe through an interference between a wave...
7304746 Common-path point-diffraction phase-shifting interferometer  
A common-path, point-diffraction, phase-shifting interferometer uses a half wave plate having a diffractive element, such as pin hole. A coherent, polarized light source simultaneously generates a...
7301646 Device and method for the determination of imaging errors and microlithography projection exposure system  
A device, a microlithography projection exposure system, and a method for the determination of imaging errors of an optical imaging system using a radiation-superposition measuring technique which...
7298498 Optical property measuring apparatus and optical property measuring method, exposure apparatus and exposure method, and device manufacturing method  
By an insertion/withdrawal mechanism, a wavefront division optical element is inserted to an optical path of a light via an optical system to be examined, or the inserted wavefront division optical...
7298497 Methods and apparatus for splitting, imaging, and measuring wavefronts in interferometry  
Apparatus for splitting, imaging, and measuring wavefronts with a reference wavefront and an object wavefront. A wavefront-combining element receives and combines into a combined wavefront an...
7295327 Measuring apparatus and exposure apparatus having the same  
A measuring apparatus for measuring optical performance of a test optics by using light includes a first member for generating a first ideal wave front, a second member for generating a second...
7286245 Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser  
A method and an apparatus for determining the influencing of the state of polarization of optical radiation by an optical system under test, wherein radiation with a defined entrance state of...
7283252 Measuring method and apparatus using interference, exposure method and apparatus using the same, and device fabrication method  
A measuring method for measuring an interference fringe includes the steps of generating a reference wave as a result of transmission through a slit or pinhole in a mask of a portion of light that...
7280187 Method for resolving phase in electronic speckle interferometry  
The invention is a method of determining the phase difference between two interferometric images. The method includes the steps of measuring the intensities of the two beam arms, and measuring the...
7274465 Optical metrology of a structure formed on a semiconductor wafer using optical pulses  
A structure formed on a wafer can be examined by directing an incident pulse at the structure, the incident pulse being a sub-picosecond optical pulse. A diffraction pulse resulting from the...
7268891 Transmission shear grating in checkerboard configuration for EUV wavefront sensor  
A wavefront measurement system includes a source of electromagnetic radiation. An imaging system directs the electromagnetic radiation at an object plane that it uniformly illuminates. A first...
7253907 Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method  
A measuring method for measuring a wave front of light, which has passed through a target optical system. The method includes the steps of dividing the light that passes the target optical system...
7230719 High sensitivity scanning probe system  
The present invention provides a hybrid optical and interferometric atomic force microscope system ( 40 ) for monitoring a cantilever probe ( 46 ). A light source ( 42 ) provides a light beam which...
7230717 Pixelated phase-mask interferometer  
A phase-difference sensor measures the spatially resolved difference in phase between orthogonally polarized reference and test wavefronts. The sensor is constructed as a pixelated phase-mask...
7224469 Optical system alignment system and method with high accuracy and simple operation  
A system for aligning of optical components includes an interferometer and a first diffractive alignment element. A housing is used for positioning a first optical element being aligned. A detector...
7187451 Apparatus for measuring two-dimensional displacement  
An apparatus for measuring a two-dimensional displacement is disclosed and includes a laser light source, a collimator lens, a beam splitter, a plurality of staggered conjugate optic lens and a...
7184149 Methods and apparatus for reducing error in interferometric imaging measurements  
The present invention provides a method and apparatus for reducing error in interferometric fringe stability and reproducibility in an interference fringe generator. In one aspect, the method for...
7177031 Grating array systems having a plurality of gratings operative in a coherently additive mode and methods for making such grating array systems  
A plurality of gratings (G 1 , G 2 ) are arranged together with a wavefront sensor, actuators, and feedback system to align the gratings in such a manner, that they operate like a single, large,...
7173715 Reduced coherence symmetric grazing incidence differential interferometer  
A system for inspecting specimens such as semiconductor wafers is provided. The system provides scanning of dual-sided specimens using a diffraction grating that widens and passes nth order...
7173272 Quantum optical CNOT gate  
A nondeterministic quantum CNOT gate ( 10 ) for photon qubits, with success probability 1/9, uses beamsplitters (B 1 –B 5 ) with selected reflectivities to mix control and target input modes. It...
7161684 Apparatus for optical system coherence testing  
The present invention is directed at a coherence test reticle or lithographic plate, and a method for testing the coherence of a laser beam using the test reticle. The quality or coherence of the...
7161683 Polarization-dependent grating interferometer for measuring optical profile depth and spectral properties of a sample  
The present invention relates to a spectrally dispersive interferometric optical apparatus having a light source, generating a phase shift, measuring the intensity of the interference signals,...
7158237 Interferometric measuring device and projection exposure installation comprising such measuring device  
A measuring device for interferometric measurement of an optical imaging system that is provided for projecting a useful pattern, provided on a mask, into the image plane of the imaging system,...
7154612 Method for calibrating a radius test bench  
In a method for calibrating a radius test bench for measuring radii of optical elements, in particular of lenses and spherical mirrors, there are provided an illuminating system 1 that generates...
7133139 Longitudinal differential interferometric confocal microscopy  
A differential interferometric confocal microscope for measuring an object, the microscope including a source-side pinhole array; a detector-side pinhole array; and an interferometer that images...
7130054 Diffraction grating based interferometric systems and methods  
Diffraction grating based fiber optic interferometric systems for use in optical coherence tomography, wherein sample and reference light beams are formed by a first beam splitter and the sample...
Matches 1 - 50 out of 331 1 2 3 4 5 6 7 >