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8184300 |
Method and apparatus for reducing probe wavelength in laser excited surface acoustic wave spectroscopy
The penetration depth of surface acoustic wave scales with wavelength. To measure thinner films using impulse stimulated thermal scattering (ISTS) it is advantageous to reduce the measurement...
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8184263 |
Measurement apparatus and exposure apparatus
A measurement apparatus which measures spatial coherence in an illuminated plane illuminated by an illumination system, comprises a measurement mask which has at least three pinholes and is...
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8158917 |
Optical wavefront sensor and optical wavefront sensing method
An optical wavefront sensor comprising a light manipulation device; a detector for detecting light signals having been subjected to the light manipulation device; and a controller coupled to the...
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8159678 |
***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST***
Method of measuring a deviation of an optical surface from a target shape
A method of aligning at least two wave shaping elements, a method of measuring a deviation of an optical surface from a target shape and a measuring apparatus for interferometrically measuring a...
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8134716 |
Methods and apparatus for measuring wavefronts and for determining scattered light, and related devices and manufacturing methods
A method and apparatus for spatially resolved wavefront measurement on a test specimen, a method and apparatus for spatially resolved scattered light determination, a diffraction structure support...
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8120763 |
Device and method for the optical measurement of an optical system by using an immersion fluid
A device for the optical measurement of an optical system, in particular an optical imaging system, is provided. The device includes at least one test optics component arranged on an object side or...
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8120783 |
Biosensing apparatus and method using optical interference
A label-free interferometric biosensor is disclosed which is based on the self-mixing optical interferometer. Inside the biosensor, an incoming beam is divided into two beam portions which pass...
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8120765 |
Observation device
An observation device 1 comprises a light source unit 10, a biaxial scanning system 20, a wavefront modulation unit 30, an optical branching unit 40, a light detection unit 50, a wavefront...
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8111404 |
Method for determining the dynamic range of volume holographic
A method for measuring a saturated photorefractive index and a recording time constant to correct the precision includes measuring the diffraction efficiency as a function of time for both phase...
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8101423 |
Label-free high-throughput optical technique for detecting biomolecular interactions
Methods and compositions are provided for detecting biomolecular interactions. The use of labels is not required and the methods can be performed in a high-throughput manner. The invention also...
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8089634 |
Optical element and method of calibrating a measuring apparatus comprising a wave shaping structure
Optical element having an optical surface, which optical surface is adapted to a non-spherical target shape, such that a long wave variation of the actual shape of the optical surface with respect...
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8081318 |
Non-periodic wavefront dividing interferometer
A non-periodic reflection beamsplitter or reflector for use in an interferometer. The interferometer employs non-periodic reflectors or a non-periodic beamsplitter in order to produce interference...
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8081319 |
Adjustable two dimensional lamellar grating
An adjustable two-dimensional lamellar grating system including a lamellar grating and a movable mirror disposed substantially parallel to one another, and an interferometer using the adjustable...
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8077324 |
Surface characteristic determining apparatus
Light from the first and second different wavelength light sources is combined and supplied to a director that directs zeroth order light to a reference surface and other order, generally first...
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8072611 |
Interferometric analysis of under-resolved features
In certain aspects, disclosed methods include directing test light reflected from an object to form an image of the object on a detector, where the object includes a diffractive structure. The test...
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8045178 |
Interferometric tracking device
An interferometric tracking device is disclosed. A first grating is optically coupled to a second grading such that the second grating is rotationally offset from the first grating. Imaging optics...
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8045253 |
Sub-diffraction-limited imaging systems and methods
Various embodiments of the present invention are directed to systems and methods for obtaining images of objects with higher resolution than the diffraction limit. In one aspect, a method for...
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8040521 |
Holographic condition assessment system for a structure including a semiconductor material
An improved condition testing system and method integrated into microelectronic circuits includes a structure including a semiconductor material with a target portion and a second portion for...
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8025425 |
Beaconless adaptive optics system
An improved beaconless adaptive optics system and process. A target is illuminated with a high energy laser beam of a directed energy laser. Wave front measurements are made of high energy laser...
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8004691 |
Measuring apparatus, exposure apparatus and method, and device manufacturing method
A measuring apparatus includes a pinhole mask, located on an object plane of an optical system to be measured, and having a plurality of pinholes for generating a spherical wave from a measuring...
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8004690 |
Device and method for the optical measurement of an optical system, measurement structure support, and microlithographic projection exposure apparatus
A device for the optical measurement of an optical system which, in a useful operating mode, receives useful radiation on a useful radiation entrance side and emits it on a useful radiation exit...
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8004692 |
Optical interferometer and method
Disclosed are compact optical interferometer array, miniature optical interferometer array, and miniature optical interferometer. The interferometer arrays contain a spatial phase modulator array...
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7995853 |
Optimized image processing for wavefront coded imaging systems
An image processing system includes a wavefront coding element that codes a wavefront forming an optical image, a detector for converting the optical image to a data stream and an image processor...
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7990543 |
Surface characterization based on optical phase shifting interferometry
Apparatus, techniques and systems for implementing an optical interferometer to measure surfaces, including mapping of instantaneous curvature or in-plane and out-of-plane displacement field...
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7982883 |
On-chip phase microscope/beam profiler based on differential interference contrast and/or surface plasmon assisted interference
A differential interference contrast (DIC) determination device and method utilizes an illumination source, a layer having a pair of two apertures that receive illumination from the illumination...
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7978342 |
Method and apparatus for measuring expansion of materials
Methods for measuring expansion of a test sample. One method includes establishing a diffraction slit between two blades, with the position of at least one of the blades being dependent upon the...
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7961333 |
Method for scanning optical interference patterns with line sensors
A method is provided for the electronic scanning of the intensity distribution of an optical interference pattern by means of a linear image sensor, wherein the interference pattern is produced by...
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7952726 |
Measurement apparatus, exposure apparatus having the same, and device manufacturing method
A measurement apparatus includes a first mask that is arranged on an object plane of a target optical system, and has a window that transmits measurement light, a second mask that has a reflection...
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7948630 |
Auto focus of a workpiece using two or more focus parameters
Provided is a method for focusing a workpiece in the Z-axis for optical metrology. The auto focusing subsystem includes a focus detector having a tilt angle, a capture range, and a plurality of...
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7928351 |
Near field diversity method for estimation and correction of aberrations
System and method for estimating and correcting an aberration of an optical system. The method includes capturing a first plurality of images on a first plurality of planes. The first plurality of...
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7924433 |
Displacement measurement system and method of use
A measurement displacement system and method are described. The measurement displacement system comprises a sensor head configured to transmit input optical beams and to receive measurement beams....
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7907263 |
Apparatuses and methods using measurement of a flare generated in an optical system
The present invention provides a method including measuring a wavefront aberration of the optical system to be measured on a measurement surface, measuring a pupil transmittance distribution of the...
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7903336 |
Optical metrological scale and laser-based manufacturing method therefor
A reflective metrological scale has a metal tape substrate and a scale pattern of elongated side-by-side marks surrounded by reflective surface areas of the substrate. Each mark has a furrowed...
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7894077 |
Multi-directional projection type moire interferometer and inspection method of using the same
A multi-directional projection type moiré interferometer includes a stage, an image formation part, rotating mirrors, fixed mirrors, and a pattern illumination generating part. The stage moves a ...
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7889356 |
Two grating lateral shearing wavefront sensor
Methods include simultaneously diffracting a beam in a first direction and a second direction orthogonal to the first direction to form a once-diffracted beam, where the beam comprises a wavefront...
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7872762 |
Optical position measuring arrangement
An arrangement for generating phase-shifted incremental signals characterizing relative positions of two objects moving with respect to each other along a measuring direction. The measuring...
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7864340 |
Wavefront analysis method involving multilateral interferometry with frequency difference
The method comprises positioning a diffraction grating with a two-dimensional meshing on the path of the beam to be analyzed and processing at least two interferograms of at least two different...
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7826066 |
Compact achromatic optical interferometer of the three-wave lateral shearing type
A method and a system for analyzing the wavefront of a light beam, wherein a diffraction grating is arranged in a plane perpendicular to the light beam to be analyzed and optically conjugated to...
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7826065 |
Tuned optical cavity magnetometer
An atomic magnetometer is disclosed which utilizes an optical cavity formed from a grating and a mirror, with a vapor cell containing an alkali metal vapor located inside the optical cavity. Lasers...
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7820106 |
Sensor platform, apparatus incorporating the platform and process using the platform
A sensor platform for use in sample analysis comprises a substrate (30) of refractive index (n1) and a thin, optically transparent layer (32) of refractive index (n2) on the substrate, (n2) is...
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7812968 |
Fringe projection system and method for a probe using a coherent fiber bundle
A probe is presented that includes a light source, a coherent fiber bundle, and a pattern selector. The pattern selector is disposed between the light source and the proximal end of the coherent...
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7804601 |
Methods for making holographic reticles for characterizing optical systems
Characterization of an optical system is quickly and easily obtained in a single acquisition step by obtaining image data within a volume of image space. A reticle and image plane are positioned...
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7791737 |
Method and apparatus for interferometrically measuring the shape of a test object
Electromagnetic illumination radiation is produced and provided as an input wave. The input wave passes through a diffractive optical element and leaves as an incoming measuring wave, the wave...
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7791727 |
Method and apparatus for angular-resolved spectroscopic lithography characterization
An apparatus and method to determine a property of a substrate by measuring, in the pupil plane of a high numerical aperture lens, an angle-resolved spectrum as a result of radiation being...
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7782468 |
Method and device for measuring heights of patterns
A method for measuring the heights of patterns of an object, including: a light emission, the light includes a propagation mode of interest for at least one wavelength of interest, an illumination...
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7777895 |
Linear-carrier phase-mask interferometer
A phase-difference sensor measures the spatially resolved difference in phase between orthogonally polarized reference and test wavefronts. The sensor is constructed as a linear-carrier phase-mask...
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7777872 |
Method of measuring diffractive lenses
A method for measuring the optical properties of multifocal ophthalmic lenses. Collimated light is passed through an ophthalmic lens and onto an array of lenslets. Light exiting the array of...
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7773230 |
Interferometric condition assessment system for a microelectronic structure including a semiconductor or free-metal material
An improved condition testing system and method includes a structure including a semiconductor material with a target portion and a second portion. The target portion has a first feature when at...
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7768654 |
On-chip phase microscope/beam profiler based on differential interference contrast and/or surface plasmon assisted interference
A differential interference contrast (DIC) determination device and method utilizes an illumination source, a layer having a pair of two apertures that receive illumination from the illumination...
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7760366 |
System for measuring the image quality of an optical imaging system
A measuring system for the optical measurement of an optical imaging system, which is provided to image a pattern arranged in an object surface of the imaging system in an image surface of the...
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