Matches 151 - 200 out of 337 < 1 2 3 4 5 6 7 >
Match Document Document Title
6473184 Interferometer which divides light beams into a plurality of beams with different optical paths  
An interferometer has a semiconductor laser which oscillates in multiple modes, an optical member for providing a beam from the semiconductor laser with a substantial optical path difference...
6473187 High-sensitivity interferometric accelerometer  
An accelerometer facilitates optical, interferometric measurement of acceleration. The device includes a proof mass having a first set of spaced-apart, elongated fingers projecting therefrom, and a...
6469793 Multi-channel grating interference alignment sensor  
An alignment sensor having a fixed reference grating and a movable wafer grating receiving electromagnetic radiation from a coherent illumination source. The illumination source is split into two...
6437321 Method and apparatus to correct for thermally-induced wavefront distortion in crystal rods  
An optical correction system for correcting thermally-induced wavefront distortions in an optical signal emanating from a crystal or other form of optical device/system. An optical output signal...
6437867 Performing selected optical measurements with optical coherence domain reflectometry  
A system and method for performing selected optical measurements on a sample is provided utilizing an optical coherence domain reflectometer which includes a diffraction grating. A broad band light...
6400457 Ferrofluid 3-D gyroscope and light modulator  
Apparatus and methods for passing a focused laser beam through a thin ferrofluid cell creates a spatial distribution in the refractive index of the ferrofluid and generates a diffraction ring...
6392752 Phase-measuring microlens microscopy  
A scanning microlens array functions in a manner analogous to an array of interference microscopes to provide phase-sensitive, confocal micro-imaging capability. Moreover, the scanning mechanism...
6344898 Interferometric apparatus and methods for measuring surface topography of a test surface  
Apparatus and methods are disclosed for measuring the surface topography of a test surface, such as a spherical or aspherical surface of a refractive or reflective optical element. The test surface...
6323949 Optical measurement method and apparatus which determine a condition based on quasi-elastic-interaction  
A method and an apparatus are provided for the determination of a condition or state of an object based on quasi-elastic interaction between the object and light transmitted to the object. This...
6307635 Phase-shifting point diffraction interferometer mask designs  
In a phase-shifting point diffraction interferometer, different image-plane mask designs can improve the operation of the interferometer. By keeping the test beam window of the mask small compared...
6304332 Precision grating period measurement arrangement  
A precision grating period measurement system uses a pair of properly positioned photodetectors to provide sub-Angstrom resolution. That is, the absolute position of a first detector with respect...
6271925 Apparatus and method for measuring two opposite surfaces of a body  
An apparatus and a method are provided which allow two opposite plane surfaces of a body to be interferometrically measured simultaneously using light from a single light source. From a parallel...
6266147 Phase-shifting point diffraction interferometer phase grating designs  
Diffraction phase gratings are employed in phase-shifting point diffraction interferometers to improve the interferometric fringe contrast. The diffraction phase grating diffracts a zeroth-order...
6249351 Grazing incidence interferometer and method  
A two-beam interferometer illuminates a sample surface with light at grazing incidence angles for the purpose of analyzing a surface characteristic such as surface topography. The interferometer...
6239878 Fourier-transform and global contrast interferometer alignment methods  
Interferometric methods are presented to facilitate alignment of image-plane components within an interferometer and for the magnified viewing of interferometer masks in situ. Fourier-transforms...
6233056 Interferometric at-wavelength flare characterization of EUV optical systems  
The extreme ultraviolet (EUV) phase-shifting point diffraction interferometer (PS/PDI) provides the high-accuracy wavefront characterization critical to the development of EUV lithography systems....
6204926 Methods and system for optically correlating ultrashort optical waveforms  
The invention features methods and systems for optical correlation of ultrashort optical waveforms, e.g., pulses. The optical waveform passes through a diffractive optic, e.g., a mask or grating,...
6163381 Dual sensor atmospheric correction system  
A dual sensor wavefront correction system is adaptable to correcting wavefronts including wavefronts that are severely scintillated. The system includes a Hartmann wavefront sensor as well as a...
6122056 Direct phase shift measurement between interference patterns using aerial image measurement tool  
A method of measuring the phase shift between two regions of a phase shift mask. A workpiece is provided including a first pair of slits each having a substantially similar phase shift...
6118535 In Situ alignment system for phase-shifting point-diffraction interferometry  
A device and method to facilitate the gross alignment of patterned object- and image-plane masks in optical systems such as the phase-shifting point diffraction interferometer are provided. When an...
6072581 Geometrically-desensitized interferometer incorporating an optical assembly with high stray-beam management capability  
The optical assembly of a GDI instrument is configured to deviate or steer stray beams away from the pupil of the instrument's imaging device and/or to suppress stray beams. Stray beam deviation is...
6061135 Efficient spatial image separator  
A spatial image separator includes a separating arrangement that separates an incident image pattern into a plurality of segments. The spatial image separator additionally includes a manner of...
6057913 Compact shearing wavefront sensor and method  
A compact wavefront sensor includes an array of microlenses supported above a microchip. The microchip includes an array of gratings and photodetectors, which correspond to a particular microlens....
6049383 Aligner detector including an electrooptic modulator for each diffraction order  
An improved aligner detector is provided. The improved aligner detector includes, a detector, several electrooptic modulators, and a refractor set, which includes several wedge patterns. Each of...
6043885 Fringe deflectometry apparatus and method  
A fringe deflectometry apparatus illuminates an optical component to be measured using radiation with a known wavefront, deflects the radiation after it has been reflected or transmitted by the...
6040566 Device to control the aiming and focusing of laser systems on a target  
A device to control the aiming and focusing of laser systems on a target comprises at least one reflecting false target (21) positioned and oriented substantially identically to the target (3), a...
6016196 Multiple beam pair optical imaging  
A multiple beam pair optical imaging apparatus includes a multiple beam pair generator and an illuminator. The illuminator is provided for illuminating an object with a first illumination...
6005667 Optical displacement measurement apparatus and information recording apparatus  
This invention relates to an apparatus for optically measuring the relative displacement of an object with a diffraction grating, and the apparatus has a light projection system for spot-projecting...
5995224 Full-field geometrically-desensitized interferometer employing diffractive and conventional optics  
A full-field, geometrically-desensitized interferometer (GDI) instrument incorporates a combination of diffractive optics and conventional optics to perform beam splitting and recombining...
5978085 Apparatus method of measurement and method of data analysis for correction of optical system  
A reticle consisting of a multiplicity of small openings corresponding to separate and distinguishable points is put in the reticle plane. This reticle is imaged down through an opening O in...
5973785 Method of forming light beam, apparatus therefor, method of measuring sizes using the same, method of inspecting appearance, method of measuring height, method of exposure, and method of fabricating semiconductor integrated circuits  
Technology for forming a fine light beam having a size smaller than the theoretical limit determined by the wavelength of light and characteristics of an objective lens. A beam distribution shifter...
5973786 Method for absolutely measuring the diffraction grating spacing and apparatus thereof  
A method of absolutely measuring the diffraction grating spacing and apparatus thereof, which solves the disadvantages of conventional techniques for measuring the diffraction grating spacing, and...
5933236 Phase shifting interferometer  
An interferometer which has the capability of measuring optical elements and systems with an accuracy of λ/1000 where λ is the wavelength of visible light. Whereas current interferometers employ...
5926276 Apparatus having an afocal lens system used in optical measurement of displacement  
An optical displacement measuring apparatus including an afocal optical system within a plane containing paths of at least two light beams. The afocal optical system includes a first lens optical...
5847830 Method for measuring retarded light through very long baseline interferometry and natural or artifical diffraction effects  
Methods are provided for measuring retarded light that takes longer than x/c time to travel through a vacuum to a detector x distance from the source. The method exploits the frame invariance of in...
5835217 Phase-shifting point diffraction interferometer  
Disclosed is a point diffraction interferometer for evaluating the quality of a test optic. In operation, the point diffraction interferometer includes a source of radiation, the test optic, a beam...
5835218 Moire interferometry system and method with extended imaging depth  
A moire interferometry system and method are provided for achieving full field surface contouring with an extended depth of view of image. The moire interferometry system includes a projection...
5822066 Point diffraction interferometer and pin mirror for use therewith  
This invention includes a pin mirror arranged to receive light, preferably from a laser source. The pin mirror has a reflective surface that diffracts and reflects the received light to generate a...
5771095 Optical test system including interferometer with micromirror and piezoelectric translator for controlling test path mirror  
An optical system for determining aberration in a source beam by comparison of a test beam with a reference beam. The optical system includes a test source for producing a source beam having a...
5754295 Non-contacting torque sensor and displacement measuring apparatus and method  
A displacement measuring apparatus is disclosed, one embodiment of which employs two diffractive code disks, attached to a shaft, and a sensing head which need not contact the shaft. The head...
5729383 Oblique viewing microscope system  
An improved oblique viewing microscope system including a diffraction grating that oscillates in the plane of the grating and/or an illuminator that oscillates the light rays directed to the object...
5724137 Fringe pattern discriminator for interferometer using diffraction gratings  
An object fringe pattern is distinguished from other fringe patterns in an interferogram produced by an interferometer using a pair of diffraction gratings for separating and recombining test and...
5712705 Arrangement for analysis of substances at the surface of an optical sensor  
Arrangement for analysis of substances at or near the surface of an optical sensor with at least one wave-guiding film and at least one multidiffraction grating coupler for in-coupling and...
5696584 Phase grating having an unprotected relief structure with a grating structure that causes destructive interference of reflections  
An uncovered unprotected phase grating includes a substrate which has a relief structure. The relief structure includes a high-refraction material so that even if soiled with impeding ambient media...
5696373 Optical encoder with dual diffraction grating  
An optical encoder including a light source and a first grating plate having a first diffraction grating for diffracting a light beam emitted from the light source. The optical encoder further...
5696374 Optical encoder using doubled diffraction angle based on first and second diffraction gratings  
An optical encoder includes: a light source; a first grating plate having a first diffraction grating for diffracting a light beam emitted from the light source; a second grating plate having a...
5694218 Optical encoder including a plurality of phase adjusting gratings  
An optical encoder has a light source and a diffracted light interference device including at least first and second diffraction gratings confronting each other, producing diffracted light beams in...
5689314 Common path point diffraction interferometer using liquid crystal phase shifting  
A common path point diffraction interferometer uses dyed, parallel nematic liquid crystals which surround an optically transparent microsphere. Coherent, collimated and polarized light is focused...
5684594 Object fixturing in interferometer  
An object fixturing system applies to an interferometer having a pair of diffraction gratings arranged to produce and recombine test and reference beams. The fixturing system positions an object...
5680213 Optics method and fixture for assembling and testing a magnetic head  
A method for optically testing a magnetic head having a slider and a suspension includes the steps of separately mounting the slider and the suspension in a test fixture. The slider is mounted in a...
Matches 151 - 200 out of 337 < 1 2 3 4 5 6 7 >