Matches 101 - 150 out of 337 < 1 2 3 4 5 6 7 >
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7023562 Characterization of period variations in diffraction gratings  
Methods and systems for interferometrically characterizing diffractive elements are disclosed.
7009712 Leaky guided wave modes used in interferometric confocal microscopy to measure properties of trenches  
A method of using an interferometric confocal microscope to measure features of a trench or via in a substrate, wherein the interferometric confocal microscope produces a measurement beam, the...
6999179 Optical encoder  
A light beam emitted from a semiconductor-laser light source is projected onto a diffraction-grating scale after passing through a collimator lens, a beam splitter and a central portion of an...
6992778 Method and apparatus for self-calibration of a tunable-source phase shifting interferometer  
A conventional phase shifting interferometer that is used for measuring distances (e.g., in the micron range) typically provides two orthogonal, or quadrature, signals. The output signals typically...
6982796 Wavefront splitting element for EUV light and phase measuring apparatus using the same  
A wavefront splitting element includes a diffraction grating for splitting light into multiple beams including transmitting light and reflected light.
6963408 Method and apparatus for point diffraction interferometry  
A point diffraction interference measuring method comprises forming a substantially ideal spherical wave by using a point light source-generating unit 101, 102 , allowing a light flux composed of...
6943870 Deformation measuring method and apparatus using electronic speckle pattern interferometry  
A deformation measuring method using electronic speckle pattern interferometry comprises the steps of subtracting an average intensity from the intensity in a time domain at each point of a speckle...
6940607 Method for absolute calibration of an interferometer  
In the case of a method for absolute calibration of an interferometer with the aid of a spherical output wave, comprising an optical element which retroflects the incident spherical wave itself or...
6934038 Method for optical system coherence testing  
The present invention is directed at a coherence test reticle or lithographic plate, and a method for testing the coherence of a laser beam using the test reticle. The quality or coherence of the...
6924899 System for measuring wavefront tilt in optical systems and method of calibrating wavefront sensors  
A wavefront tilt measurement system for measuring the wavefront tilt of light passing through transmitting or receiving optical systems, the optical systems including a primary aperture and...
6909512 Method and apparatus for estimating piston using a grism  
A method is provided for reducing the piston of neighboring first and second surfaces illuminated by polychromatic light transmitted from an unresolved-light source such that light transmitted or...
6876456 Absolute calibration of optical flats  
The invention uses the phase shifting diffraction interferometer (PSDI) to provide a true point-by-point measurement of absolute flatness over the surface of optical flats. Beams exiting the fiber...
6870630 Sensor platform, apparatus incorporating the platform, and process using the same  
A sensor platform for use in sample analysis comprises a substrate ( 30 ) of refractive index (n 1 ) and a thin, optically transparent layer ( 32 ) of refractive index (n 2 ) on the substrate, (n 2...
6850325 Temperature compensated optical system based on a diffractive optical element  
The present invention relates to an apparatus for the determination of a condition or state of an object based on quasi-elastic interaction between the object and light transmitted to the object,...
6809829 Method and apparatus for evaluating aberrations of optical element and method and apparatus for adjusting optical unit and lens  
A lens evaluation method includes diffracting light derived from a lens so that two diffracted rays of different orders (e.g., a 0th-order diffracted ray and a +1st-order diffracted ray) interfere...
6806964 Optical recording and/or reproduction apparatus, tracking method, and optical recording medium  
An optical recording and/or reproduction apparatus includes: a light source for emitting a first light beam; an optical system for outputting first and second diffracted light beams and a second...
6804009 Wollaston prism phase-stepping point diffraction interferometer and method  
A Wollaston prism phase-stepping point diffraction interferometer for testing a test optic. The Wollaston prism shears light into reference and signal beams, and provides phase stepping at...
6795198 Method and device for measuring thin films and semiconductor substrates using reflection mode geometry  
The invention provides both a method and apparatus that measures a property of a structure that includes at least one layer. The apparatus features a laser (e.g., a microchip laser, described...
6785001 Method and apparatus for measuring wavelength jitter of light signal  
An apparatus for detecting wavelength change of a first light signal comprises an amplitude splitting interferometer and a detector. The amplitude splitting interferometer comprises first and...
6781702 Determining large deformations and stresses of layered and graded structures to include effects of body forces  
Techniques for determining large deformation of layered or graded structures to include effects of body forces such as gravity, electrostatic or electromagnetic forces, and other forces that...
6781701 Method and apparatus for measuring optical phase and amplitude  
A method, apparatus, and system for measuring optical phase and amplitude properties of an output optical field to characterize diffractive, refractive, and other optical elements to estimate,...
6778275 Aberration mark and method for estimating overlay error and optical aberrations  
An aberration mark for use in an optical photolithography system, and a method for estimating overlay errors and optical aberrations. The aberration mark includes an inner polygon pattern and an...
6775008 Opto-electronic scale reading apparatus  
A scale ( 10 ) is illuminated by a light source ( 18 ). After interaction with an index grating ( 12 ), fringes (F) are formed in a Talbot plane and analyzed by an analyzer grating ( 14 ). To...
6765681 Measuring optical phase  
The phase (and amplitude) of a wave front may be accurately measured using knowledge of the wave front of an optical field generated by an optical element, permitting the determination of the...
6765683 Interferometer system and method of manufacturing projection optical system using same  
A method of manufacturing a projection optical system ( 37 ) for projecting a pattern from a reticle to a photosensitive substrate, comprising a surface-shape-measuring step wherein the shape of an...
6762839 System and method for performing selected optical measurements utilizing a position changeable aperture  
A system and method for performing selected optical measurements on a sample is provided utilizing an optical coherence domain reflectometer which includes a diffraction grating. A broad band light...
6753969 Microinterferometer for measuring distance with improved sensitivity  
The present invention relates to microinterferometers. An embodiment of a microinterferometer for accurately measuring the distance to an object surface includes a substrate and a tunable,...
6744520 Method for measuring two-dimensional displacement using conjugate optics  
A method for measuring two-dimensional displacement using conjugate optics comprises the steps of emitting an incident beam onto a diffraction element to generate many firstly diffracted beams,...
6717682 Non-etalon wavelength locking optical sub-assembly and associated methods  
A wavelength detector includes an optical structure receiving an input beam, the optical structure outputting at least three wavelength dependent two-beam interference signals. Each wavelength...
6707560 Dual-domain lateral shearing interferometer  
The phase-shifting point diffraction interferometer (PS/PDI) was developed to address the problem of at-wavelength metrology of extreme ultraviolet (EUV) optical systems. Although extremely...
6671054 Interferometric patterning for lithography  
Production of interference patterns from incoherent light sources by using an optical filter, a field mirror, and a plane mirror. The optical filter is designed to filter incoherent light waves and...
6650421 Method and apparatus for inspecting optical device  
In an interferometer for detecting interference light between light flux passed through an object to be inspected and reference light to be generated from a portion of the light flux passed...
6641268 Interferometric projection system  
An interference projection system for use with lithography using quasi-coherent sources, which has a non-diffractive beam splitting module and a non-diffractive module to cause interference of two...
6643025 Microinterferometer for distance measurements  
Several embodiments of a microinterferometer are disclosed. A first embodiment of a microinterferometer for measuring the absolute distance to an object surface includes a substrate. The...
6639683 Interferometric sensor and method to detect optical fields  
A method and device is capable of amplitude, phase, polarization shear, wavelength, and diversity measurement along a common path by using a sampling device to get a sparse sampled optical field....
6631047 Interference device, position detecting device, positioning device and information recording apparatus using the same  
An apparatus having a first system for forming a composite light beam of two light beams to be made to interfere with each other, a splitting member for amplitude-splitting the composite light beam...
6618218 Displacement detecting apparatus and information recording apparatus  
An apparatus for detecting the relative displacement of a surface to be detected, and an apparatus and method for recording information on a hard disc of a hard disk drive using such a detecting...
6600565 Real-time evaluation of stress fields and properties in line features formed on substrates  
Methods and systems for evaluating stresses in line features formed on substrates. Stresses may be computed from measured curvature information based on simple analytical functions. The curvature...
6580509 High speed high resolution hyperspectral sensor  
A high speed high resolution spectral sensor is formed by placing a cascade of chained wide field-of-view Mach-Zender interferometers inside a dispersive sensor between the sensor's grating and the...
6577403 Achromatic optical interferometer with continuously adjustable sensitivity  
In a process for analyzing the wavefront of a light beam, a diffraction grating with rectangular meshing is placed in a plane perpendicular to the light beam to be analyzed and optically conjugate...
6576430 Detection of ligands by refractive surface methods  
Methods for detection and analysis of allosteric receptor/ligand binding by changes in surface refractive index are provided. When analyzed by surface plasmon resonance, binding of such allosteric...
6573997 Hybrid shearing and phase-shifting point diffraction interferometer  
A new interferometry configuration combines the strengths of two existing interferometry methods, improving the quality and extending the dynamic range of both. On the same patterned mask, placed...
6570660 Measuring instrument  
A light wave measuring instrument has a small optical system. Beams from a laser light source illuminate a grating scale and plus-first-order-diffracted and minus-first-order-diffracted beams from...
6567174 Optical accelerometer and its use to measure acceleration  
A method for measuring acceleration uses an accelerometer apparatus having an optically transparent, stress-birefringent material, a source of polarized light positioned to direct a polarized beam...
6559953 Point diffraction interferometric mask inspection tool and method  
The present invention comprises a tool for and a method of inspecting a mask used in photolithography to determine errors in phase, amplitude, and pattern edges. An embodiment of the tool comprises...
6538791 Method and apparatus for real time optical correlation  
A system for performing real time optical comparisons using an optical correlator permits comparing a sampled image to a wide variety of reference images through the utilization of a multiple...
6532074 Free-space diffraction measurement of a phase mask for fabrication of a waveguide Bragg grating  
Techniques for optically evaluating phase masks for fabricating waveguide Bragg gratings by measuring diffraction orders.
6498650 Adaptive optics system using wavefront selection  
An optical system ( 10 ) for correcting wavefront aberrations of an optical beam ( 12 ). The beam ( 12 ) is received by an entrance pupil ( 14 ), where a portion of the beam ( 12 ) at the entrance...
6493094 Method and apparatus for beam directing  
Focusing means to focus a beam upon a reflective-transmissive surface. Reflecting means to reflect a central portion of the beam from the reflective-transmissive surface. Transmitting means to...
6490028 Variable pitch grating for diffraction range finding system  
A means for overcoming perspective foreshortening in the receiver of a diffraction range finder by use of chirp diffraction grating 121 . In a diffraction range finder, a diffraction grating with...
Matches 101 - 150 out of 337 < 1 2 3 4 5 6 7 >