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7609392 |
Harmonically matched diffraction grating pair
A method and device realize shallow gratings-based planar beam splitter/combiner. Non-trivial phase shifts between different ports of resulting interferometers are used to acquire full-field phase...
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7593114 |
Device and method for focusing a laser light beam
A device for focusing a laser light beam includes an emission source of a laser light beam along an optical emission path, first focusing means of the laser light beam in a focusing point (F)...
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7538891 |
Surface characterization based on lateral shearing of diffracted wave fronts to measure in-plane and out-of-plane displacement gradient fields
Apparatus and techniques for using an optical shearing interferometry to obtain full field mapping of in-plane and out-of-plane displacement field gradients of a sample surface of a sample.
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7511826 |
Symmetrical illumination forming system and method
An embodiment of a symmetry forming device for an alignment system can include an interferometer, a compensator, and an analyzer. The interferometer can be configured to receive a light beam, where...
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7495770 |
Beam shear reduction in interferometry systems
In certain aspects, the invention features interferometry systems that include an input assembly positioned to receive a beam emitted from a light source comprising a first component beam and a...
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7474413 |
Method and apparatus for analyzing interference fringe
Disclosed is a method of analyzing an interference fringe, with which method the optical characteristics of an optical system to be examined can be analyzed very precisely. In one preferred form of...
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7463366 |
Digital holographic microscope
A method and device for obtaining a sample with three-dimensional microscopy, in particular a thick biological sample and the fluorescence field emitted by the sample. One embodiment includes...
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7446883 |
Method and apparatus for tilt corrected lateral shear in a lateral shear plus rotational shear absolute flat test
A Fizeau or other interferometer is used to provide high resolution, in-situ calibration of an external angle measurement system such as widely spaced high stability plane mirror interferometers...
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7433043 |
Two-dimensional spectral shearing interferometry for ultrafast pulse characterization
The phase spectrum of an ultrashort pulse is measured based on two-dimensional spectral shearing interferometry with zero delay. The measurement is performed utilizing an optical source pulse from...
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7420542 |
Apparatus for capturing and analyzing light and method embodied therein
An apparatus including an image sensor is disclosed. The apparatus includes a polarization filter, an image sensor, and a processor connected to the image sensor. The polarization filter is adapted...
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7397571 |
Methods and systems for laser mode stabilization
Systems and methods are provided or use with a light source which generates a light beam. These systems may include a detector which detects light beam information and which determines whether...
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7369251 |
Full-field optical measurements of surface properties of panels, substrates and wafers
Techniques and systems for using optical interferometers to obtain full-field optical measurements of surfaces, such as surfaces of flat panels, patterned surfaces of wafers and substrates....
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7352475 |
Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method
A measuring apparatus for irradiating measuring light and for measuring optical performance of a target optical system includes a barrel for housing the target optical system, the barrel being...
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7333215 |
Adaptive optics control system
An improved, adaptive optics control system is disclosed. The system comprises a wavefront corrector, a wavefront sensor, a wavefront reconstructor and a wavefront controller. The wavefront...
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7327467 |
Phase measuring method and apparatus for measuring characterization of optical thin films
A phase measuring apparatus for measuring phase characteristics of a film applied onto an object to be measured includes a shearing interference system for providing incident light onto the object...
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7315013 |
Optical navigation using one-dimensional correlation
A technique for optical navigation involves summing intensity values from a photodetector array on a per-column and a per-row basis for both reference image data and sample image data and then...
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7286245 |
Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser
A method and an apparatus for determining the influencing of the state of polarization of optical radiation by an optical system under test, wherein radiation with a defined entrance state of...
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7274468 |
Optical beam shearing apparatus
Beam shearing apparatus for introducing a lateral shear between the components of a light beam. The apparatus is an optical assembly having a polarizing interface and input and output facets and...
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7253907 |
Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method
A measuring method for measuring a wave front of light, which has passed through a target optical system. The method includes the steps of dividing the light that passes the target optical system...
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7236254 |
Exposure apparatus with interferometer
A projection exposure apparatus includes an exposure light source, an illumination system for illuminating a pattern, formed on a first object, with light from the exposure light source and passing...
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7209241 |
Method for determining wavefront aberrations
In a method for manufacturing an optical imaging system, wavefront aberrations caused by an optical imaging system are determined before and after transporting the optical imaging system. At least...
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7193726 |
Optical interferometry
An interferometry system includes an interferometer to split an input beam into a measurement beam and at least one other beam. The interferometer directs the measurement beam along a measurement...
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7187437 |
Plurality of light sources for inspection apparatus and method
Described is an anomaly detector apparatus 10 for detecting an anomaly in a substrate, e.g., a tire comprising: a source of coherent light 20 to shine the light 27 directly onto the tire...
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7167249 |
High efficiency spectral imager
Optical instruments having, inter alia, optics to process wavelengths of electromagnetic radiation to produce an interferogram. The instruments include at least one optical path and optical...
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7158238 |
System and method for calibrating a spatial light modulator array using shearing interferometry
A system for calibrating a spatial light modulator array includes an illumination system and a spatial light modulator array that reflects or transmits light from the illumination system. A...
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7038791 |
Signal-to-noise ratio tuned adaptive optics control system
An improved, adaptive optics control system having a signal-to-noise ratio-tuned wavefront corrector is disclosed. The system comprises a wavefront corrector, a wavefront sensor, a wavefront...
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7019846 |
Method for determining wavefront aberrations
In a method for determining wavefront aberrations for the characterization of imaging characteristics in an optical imaging system, the measurement results from two different measurement methods,...
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6950195 |
Interference measuring device
In an interference measuring device, which includes: a coherent beam generating source; a sample to be measured; a lens system for forming an image of the sample to be measured on an observing...
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6940606 |
Non-etalon reflective wavelength locking optical sub-assembly and associated methods
A wavelength detector includes an optical structure receiving an input beam, the optical structure outputting at least two wavelength dependent two-beam interference signals. Each wavelength...
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6937347 |
Small-beam lateral-shear interferometer
A lateral-shear interferometer utilizes two relatively thick glass plates bonded together in a single block with a tilted air gap between opposing inner surfaces. The thickness of the glass plates...
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6934018 |
Tire inspection apparatus and method
Described is an anomaly detector apparatus 10 for detecting an anomaly in a tire comprising: a source of coherent light 18 to shine the light 27 directly onto the tire surface 24 and the...
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6917432 |
Interferometers for measuring changes in optical beam direction
Apparatus for measuring angular changes in the direction of travel of a light beam comprising at least one beam shearing assembly for separating, preferably orthogonally polarized, components of...
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6894789 |
Method of extending the capture range of a wavelength monitor and a wavelength monitor and laser system therefor
The invention relates to a method of extending the capture range (CR) of a wavelength monitor for the lasers of a wavelength division multiplex (WDM) transmission system wherein the capture range...
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6879427 |
Shear inducing beamsplitter for interferometric image processing
A shearing generator comprising: an input light source; an image generator that generates two images of the input light source at an output plane, the image generator comprising a beam splitter...
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6809829 |
Method and apparatus for evaluating aberrations of optical element and method and apparatus for adjusting optical unit and lens
A lens evaluation method includes diffracting light derived from a lens so that two diffracted rays of different orders (e.g., a 0th-order diffracted ray and a +1st-order diffracted ray) interfere...
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6801325 |
Method and devices for inspecting and calibrating of stereoscopic endoscopes
Methods and devices for inspecting and calibrating a stereoscopic imaging device, such as a binocular endoscope. In one exemplary embodiment, the method of the present invention measures a fringe...
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6791693 |
Multiple-pass interferometry
Interferometry system including a multiple-pass interferometer having reflectors to reflect at least two beams along multiple passes through the interferometer. The multiple passes include a first...
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6791695 |
Shearographic imaging machine with archive memory for animation data and air handling system
The invention relates to an apparatus for performing electronic shearography on a test object, especially a tire or retread tire. The apparatus uses a laser light source to illuminate the test...
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6721057 |
Spatially modulated interferometer and beam shearing device therefor
A spatially modulated interferometer incorporates a beam shearing system having a plurality of reflective surfaces defining separate light paths of equal optical path length for two separate output...
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6717681 |
Portable real-time high-resolution digital phase-stepping shearography with integrated excitation mechanisms
A portable nondestructive testing instrument uses high-speed phase-stepping shearography, and vacuum stressing, to produce images of disbonds, impact damage, or delaminations, in metal or composite...
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6683679 |
Optical flow monitor
An optical flow monitor. Fluid flow is determined by correlating two interference signals produced by coherent laser beams passing through a flowing fluid at two spaced-apart paths. The distance...
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6606160 |
Nondestructive testing of diffusely reflective objects
An electronic shearography system can measure deformation of an object and/or test the object for defects. Two laterally sheared images of the same object are produced by reflecting coherent light...
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6590668 |
Imaging optical system for direct phase-angle measurement of radiation
A method serves the direct phase-angle measurement of radiation, in particular of light radiation which is reflected from a body. The body is exposed to coherent radiation. The radiation reflected...
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6587215 |
Low signal-to-noise ratio branch-point-capable adaptive optics sensor
A lateral shearing interferometer wavefront sensor system ( 10 ) that employs a double-shear/full aperture approach to correct for branch points in the wavefront of an optical beam ( 24 ) that has...
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6559952 |
System for interferometric distortion measurements that define an optical path
An improved phase-shifting point diffraction interferometer can measure both distortion and wavefront aberration. In the preferred embodiment, the interferometer employs an object-plane pinhole...
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6459490 |
Dual field of view optical system for microscope, and microscope and interferometer containing the same
A dual field of view optical system and a single, lower cost detector are utilized, rather than using a large CCD camera or multiple CCD cameras, to view a sample that has two or more small areas...
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6433874 |
Electronic shearography apparatus for producing animation of shearogram images
The invention relates to an apparatus for performing electronic shearography on a test object, especially a tire or retread tire. The apparatus uses a laser light source to illuminate the test...
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6433876 |
Multiple wavelength or multiple shear distance quantitative differential interference contrast microscopy
A differential interference contrast (DIC) microscope system is provided comprising: (a) an illumination source for illuminating a sample; (b) a lens system for viewing the illuminated sample,...
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6411389 |
Optical monitor for real time thickness change measurements via lateral-translation induced phase-stepping interferometry
An optical monitoring instrument monitors etch depth and etch rate for controlling a wet-etching process. The instrument provides means for viewing through the back side of a thick optic onto a...
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6373578 |
Lens inspection system
A lens inspection system for evaluating an objective lens system of an optical data recording/reproducing device by measuring a wave front of a light beam emerged from the objective lens system is...
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