Matches 151 - 163 out of 163 < 1 2 3 4
Match Document Document Title
3869211 Instrument for measuring thickness of thin film  
A light emitted from a light source is split into a plurality of light beams of different wavelengths. The plurality of light beams are alternately transmitted to a substrate upon which is...
3861804 INFEROMETRY READOUT OF PHASE INFORMATION  
Phase information recorded in the form of thickness or refractive index variations in a transparent member is detected by directing converging, temporally coherent light onto the transparent...
3824017 METHOD OF DETERMINING THE THICKNESS OF CONTIGUOUS THIN FILMS ON A SUBSTRATE  
A method of determining the thickness of each of a plurality of contiguous films on a substrate, the films having known indices of refraction and being transparent to at least some portions of the...
3804532 TRANSPARENT FILM UNIFORMITY GAUGE  
Apparatus for checking the uniformity of thickness of a thin film during deposition process comprising means for separating a narrowband light beam into two separate beams and alternately blocking...
3720471 METHOD FOR MEASURING PLATE THICKNESS  
A method for measuring an increase or decrease in the thickness of a transparent glass or plastic plate, by differentiating between the convergence and divergence of an interference fringe pattern...
3623813 METHOD FOR MONITORING TEMPERATURE VARIATIONS OF RADIATION-PERMEABLE SUBSTRATES FOR SUPPORTING THIN COATINGS APPLIED BY VACUUM DEPOSITION  
The temperature variations of radiation-permeable substrates, for supporting thin coatings applied by vacuum deposition, are monitored by illuminating the substrate with light having a sufficient...
3612692 DIELECTRIC FILM THICKNESS MONITORING AND CONTROL SYSTEM AND METHOD  
An automatic thickness monitoring and control system and method for monitoring the growth of a dielectric film on a reflective substrate such as a silicon wafer during an RF sputtering deposition...
3601492 APPARATUS FOR MEASURING FILM THICKNESS  
Improved means and method for measuring film thickness by rapidly forming and portraying optical interference fringe spectra and interpreting the same directly in terms of film thickness. An...
3551056 APPARATUS FOR AUTOMATICALLY MEASURING THE THICKNESS OF TRANSPARENT FILMS ON SILICON WAFERS  
3348446 Interferometer with pivot means located between a mirror and a transparent plate having totally reflective and semi-reflective light dividing means located thereon  
3319515 Interferometric optical phase discrimination apparatus  
3238839 Optical thickness gauge  
3059611 Monitoring apparatus  
Matches 151 - 163 out of 163 < 1 2 3 4