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7612890 |
System and method for controlling wafer temperature
The invention is directed to a system and method for implementing process control for temperature of a semiconductor wafer using sonic NDE techniques. The system may, for example, generate...
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7605924 |
Laser-ultrasound inspection using infrared thermography
An inspection system is provided to examine internal structures of a target material. This inspection system combines an ultrasonic inspection system and a thermographic inspection system. The...
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7564567 |
Sensor for measuring a vibrating surface obscured from view
Described are a sensor and a method for measuring a vibration of a surface obscured from view. The sensor includes a narrowband source of a terahertz beam, a beamsplitter, a beam combiner and a...
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7561281 |
System and method for controlling tube thickness
The invention is directed to a system and method for implementing process control for tubing thickness using sonic NDE techniques. The system may, for example, generate ultrasound waves in a test...
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7545509 |
System and method for online control of paper elasticity and thickness
The invention is directed to a system and method for implementing process control for paper elasticity and thickness using sonic NDE techniques. The system may, for example, generate ultrasound...
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7525661 |
Laser photo-thermo-acoustic (PTA) frequency swept heterodyned lock-in depth profilometry imaging system
A method and apparatus for biomedical subsurface imaging and measurement of thickness, elastic and optical properties of industrial and biomedical materials based on laser Photo-Thermo-Acoustic...
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7474411 |
System and method to reduce laser noise for improved interferometric laser ultrasound detection
The present invention provides an optical filter assembly that reduces the phase and amplitude noise of a detection laser used to detect ultrasonic displacements. The filtered detection laser is...
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7463364 |
Electro-optic sensor
A sensor comprises an optical modulator that generates a modulation signal, an interferometer that mixes an acoustic signal evoked by a pulsed laser with the modulation signal to down-convert the...
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7463363 |
Method and apparatus for ultrasonic laser testing
The present invention for detecting ultasonic displacements includes a detection laser to generate a first pulsed laser beam to generate the ultrasonic surface displacements on a surface of the...
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7387027 |
Characterization of materials with optically shaped acoustic waveforms
A method for characterizing one or more properties of a sample using acoustic waveforms is disclosed, and comprises directing a sequence of at least three optical pulses to the sample to generate...
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7369250 |
System and method to inspect components having non-parallel surfaces
The present invention provides a method to detect and generate ultrasonic displacements at a remote target for ultrasonic inspection. This method involves generating an ultrasonic wave at a first...
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7342665 |
System and method for control of paint thickness
The invention is directed to a system and method for implementing process control for paint thickness using sonic NDE techniques. The system may, for example, generate ultrasound waves in a test...
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7327448 |
Laser-ultrasonic detection of flip chip attachment defects
Underfill voids and solder ball defects are detected via laser generation and laser detection of an ultrasonic wave at the top surface of flip chips. High resolution is provided by using small...
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7295325 |
Time-resolved measurement technique using radiation pulses
In one embodiment, a probe pulse is first stretched into a pulse of longer duration. The probe pulse comprises a plurality of wavelength components in a bandwidth, so that each temporal portion of...
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7286241 |
System and method for high-speed laser detection of ultrasound
A system and method for laser light amplification provides amplification of a laser light beam emitted from a laser light source as low-amplification seed laser light signal. The low-amplification...
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7262861 |
Ultrasound single-element non-contacting inspection system
A laser ultrasonic inspection apparatus and method which enables remote sensing of thickness, hardness, temperature and/or internal defect detection is disclosed. A laser generator impinges a...
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7259864 |
Optical underwater acoustic sensor
An acoustic sensor used in underwater applications. The sensor includes a reflective material adhered to a structure, such as an outer submarine hull or any marine vessel hull. A laser...
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7242481 |
Laser vibrometry with coherent detection
An optical system provides information about tangential vibration components of a surface at remote location. The optical system includes a light source assembly that emits first and second beams,...
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7170612 |
Scanning ultrasound detection device using two-wave mixing in photorefractive crystal interferometry
This invention relates to a scanning ultrasound detection device using two-wave mixing in photorefractive crystal interferometry. An interferometer with two-wave mixing in photorefractive crystal,...
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7130054 |
Diffraction grating based interferometric systems and methods
Diffraction grating based fiber optic interferometric systems for use in optical coherence tomography, wherein sample and reference light beams are formed by a first beam splitter and the sample...
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7123364 |
Acoustic imaging microscope
An imaging system includes: an object wavefront source and an optical microscope objective all positioned to direct an object wavefront onto an area of a vibrating subject surface encompassed by a...
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7116428 |
Method and device for measuring wall thickness of a pipe in a pipe-rolling mill
A method and device for measuring the wall thickness of a pipe in a pipe-rolling mill wherein a Fabry-Pérot interfero-meter has its mirror spacing set by providing an input to a linear activity...
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7105358 |
Apparatus and method for visually identifying micro-forces with a palette of cantilever array blocks
An apparatus to measure micro-forces includes a cantilever palette with a set of cantilever array blocks. Each cantilever array block includes a set of cantilevers, with each cantilever including a...
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7095505 |
Optical interferometer sensor array
An interferometer sensor has a two-dimensional sensor head ( 1 ) comprising a polymer film ( 4 ) of substantially uniform thickness. An interrogating signal ( 12 ) is provided to the sensor head,...
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7088455 |
Methods and apparatus for material evaluation using laser speckle
Methods for measuring strains in biological and other samples include illuminating a specimen with substantially collimated laser flux. An electro-acoustic transducer is activated to generate...
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7079258 |
Measurement device for non-contact detection of oscillations of an object
A measurement device for oscillation measurement, as well as a corresponding method, is proposed, wherein the oscillation measurement is performed by at least one laser interferometer ( 2, 3 ),...
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7079257 |
Methods and apparatus for evaluating mechanical and thermal strains in electronic materials, semiconductor materials, and other structures
Methods for measuring strains in circuit substrates such as circuit boards and semiconductor wafers include illuminating a specimen with a substantially collimated laser flux. A temperature change...
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7072044 |
Apparatus for acoustic detection of particles in a flow using a fiber optic interferometer
Fiber optic particle detector for measurements in a fluid flow, comprising an optical fiber ( 2,3,12 ) being acoustically coupled to a mechanical element ( 11,13,14 ) adapted to be acoustically...
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7050174 |
Ultra high frequency imaging acoustic microscope
An imaging system includes: an object wavefront source and an optical microscope objective all positioned to direct an object wavefront onto an area of a vibrating subject surface encompassed by a...
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7038790 |
Method and apparatus for detecting ultrasonic surface displacements using post-collection optical amplification
The present invention detects ultrasonic displacements includes a detection laser to generate a first pulsed laser beam to detect the ultrasonic surface displacements on a surface of the target....
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7019845 |
Measuring elastic moduli of dielectric thin films using an optical metrology system
An optical metrology system is provided with a data analysis method to determine the elastic moduli of optically transparent dielectric films such as silicon dioxide, other carbon doped oxides over...
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6958817 |
Method of interferometry with modulated optical path-length difference and interferometer
An interferometer has a source for generating a first beam and a second beam of a coherent monochromatic light having a wavelength λ, optical elements for directing the beams through two different...
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6885458 |
Apparatus and method for determining the active dopant profile in a semiconductor wafer
A method (1) creates charge carriers in a concentration that changes in a periodic manner (also called “modulation”) only with respect to time, and (2) determines the number of charge carriers...
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6847454 |
Systems and methods for processing signals from an interferometer by an ultrasound console
An imaging system comprises an interferometer and an ultrasound console that processes signals from the interferometer into an image for display. The interferometer may include one or more...
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6837109 |
Material thickness measurement method and apparatus
Longitudinal and shear ultrasonic waves are generated inside a material by irradiating a laser beam onto a first surface, e.g., incident surface, of the material. An ultrasonic longitudinal wave...
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6836336 |
Inspection system calibration methods
An inspection system calibration method includes producing two sideband signals of a first wavefront; interfering the two sideband signals in a photorefractive material, producing an output signal...
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6819432 |
Coherent detecting receiver using a time delay interferometer and adaptive beam combiner
An optical apparatus for coherent detection of an input optical beam. The apparatus includes a beam splitter for splitting the input optical beam into a first component and a second component; an...
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6810742 |
Method of and an apparatus for determining the speed of sound in a material
The speed of sound c is determined in a material as a function of the temperature T by heating an end of an elongated sample body of the material of the temperature and determining the time...
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6700666 |
Ultrasonic vibration detection using frequency matching
In order to probe an object in motion subject to surface displacement, for example, caused by ultrasonic wave propagation, a laser beam is split into a first portion and a second portion. The first...
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6668654 |
Method and apparatus for generating specific frequency response for ultrasound testing
A system and method for testing a physical attribute of a manufactured object that includes a laser generator and pulse generator that generate a plurality of Dirac-like pulses. The pulses,...
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6657732 |
Vibrometer system using a two input beam phase conjugate mirror
A vibrometer for probing an object to determine its vibratory signature and a method of probing same. The vibrometer includes a laser for generating a laser beam for probing the object; a detector...
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6628404 |
Acoustic sensor for real-time control for the inductive heating process
Disclosed is a system and method for providing closed-loop control of the heating of a workpiece by an induction heating machine, including generating an acoustic wave in the workpiece with a...
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6587213 |
Nondestruction coating adhesion evaluation using surface ultrasonic waves and wavelet analysis
The present invention is a nondestructive and quantitative laser ultrasonic laser apparatus and associated method for determining adhesion quality of a coating on a substrate. The apparatus of the...
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6587212 |
Method and apparatus for studying vibrational modes of an electro-acoustic device
A method for studying vibrational modes of an electro-acoustic device includes driving the electro-acoustic device to produce at least one vibrational mode therein, collecting phase and amplitude...
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6563591 |
Optical method for the determination of grain orientation in films
A method for the determination of grain orientation in a film sample is provided comprising the steps of measuring a first transient optical response of the film and determining the contribution to...
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6563588 |
Apparatus and method for measurement of fluid viscosity
A non-contact apparatus and method for mapping the wave profile of capillary waves on a fluid surface to determine viscosity of the fluid. Two conducting blades coupled to a sine wave generator are...
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6552803 |
Detection of film thickness through induced acoustic pulse-echos
Thickness of a film in a sample may be detected by directing pump laser pulses to the surface of a sample to generate an acoustic pulse in a sample. The acoustic pulse propagates downwards until it...
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6552800 |
Single-arm sagnac interferometer with two beam splitters
The invention provides an apparatus for measuring the physical properties of a sample by optically monitoring the response of the sample to illumination by ultrashort optical pulses. The apparatus...
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6552799 |
Two-arm sagnac interferometer with two beam splitters
The invention provides an apparatus for measuring the physical properties of a sample by optically monitoring the response of the sample to illumination by ultrashort optical pulses. The apparatus...
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6545762 |
Method of investigating vibrations and an apparatus therefor
In order to investigate and analyse vibrations of any object, light from a laser is split with part being emitted to an object and part being mixed with the light reflected from the object to...
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