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8089631 Displacement measurement system and method thereof  
A displacement measurement system including a coherent light source, a two-dimensional grating, a photo sensor, and a signal processing apparatus is provided. After the coherent light beam enters...
8077391 Wavefront aberration measuring method, mask, wavefront aberration measuring device, exposure apparatus, and device manufacturing method  
A wavefront aberration measuring device includes a mask placed in an object plane of a to-be-tested optical system and having a pattern including a pinhole producing a spherical wave and adjoining...
8022931 Self-calibrating optical feedback system in a laser mouse  
A self-calibrating optical feedback system for an optical navigation device. The self-calibrating optical feedback system includes a light source, an illumination lens, a beam splitter, and an...
7995212 Optical displacement measuring device  
An optical displacement measuring device includes a diffraction grating, a reflecting optical system configured to irradiate two one-time diffracted beams diffracted at the diffraction grating on...
7973941 Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels  
A reference mark configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels is provided. The readhead may include primary fibers that provide...
7969579 Rotary encoder apparatus  
Rotary encoder apparatus is described that comprises one or more readheads and a radial scale. Each of the one or more readheads includes a light emitting portion for illuminating the radial scale...
7965393 Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels  
A reference mark configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels is provided. The readhead includes primary fibers that provide reference...
7961333 Method for scanning optical interference patterns with line sensors  
A method is provided for the electronic scanning of the intensity distribution of an optical interference pattern by means of a linear image sensor, wherein the interference pattern is produced by...
7948630 Auto focus of a workpiece using two or more focus parameters  
Provided is a method for focusing a workpiece in the Z-axis for optical metrology. The auto focusing subsystem includes a focus detector having a tilt angle, a capture range, and a plurality of...
7924433 Displacement measurement system and method of use  
A measurement displacement system and method are described. The measurement displacement system comprises a sensor head configured to transmit input optical beams and to receive measurement beams....
7916305 Surface reflection encoder scale and surface reflection encoder using the same  
A surface reflection encoder scale is used with a surface reflection encoder for detecting a relative movement amount of a member for making a relative move. The surface reflection encoder scale...
7907286 Optical position-measuring device  
An optical position-measuring device is arranged for recording the relative position of a scanning unit and a scale movable to it in at least one measuring direction. The scale is configured as a...
7903336 Optical metrological scale and laser-based manufacturing method therefor  
A reflective metrological scale has a metal tape substrate and a scale pattern of elongated side-by-side marks surrounded by reflective surface areas of the substrate. Each mark has a furrowed...
7880896 Interferometer using vertical-cavity surface-emitting lasers  
An interferometer which incorporates a single mode VCSEL to facilitate miniaturization through integration of parts. The interferometer includes a beam splitter for partially reflecting and...
7876451 Position-measuring device with movable deflection device and grating and with stationary grating, light source, and detector  
A position-measuring device includes a light source, a first grating, a second grating and photodetectors, light from the light source, which is split into partial beams of different directions at...
7872762 Optical position measuring arrangement  
An arrangement for generating phase-shifted incremental signals characterizing relative positions of two objects moving with respect to each other along a measuring direction. The measuring...
7864336 Compact Littrow encoder  
A Littrow encoder is disclosed. The encoder includes first and second interferometers and a beam splitter assembly that splits a first instrument light beam into first and second interferometer...
7812964 Distance measuring interferometer and encoder metrology systems for use in lithography tools  
In general, in one aspect, the invention features a system that includes a moveable stage, an interferometer configured to provide information about a first degree of freedom of the stage, an...
7808650 Displacement measuring apparatus  
Disclosed is a displacement measuring apparatus that includes a composite scale having a magnetic pattern and a diffraction grating each aligned in a direction of measuring axis, and a detector...
7808649 Fixed-point detector and displacement-measuring apparatus  
A fixed-point detector is provided. The fixed-point detector includes a plurality of fixed-point detecting patterns, a fixed-point detecting light source, and a plurality of photoelectric...
7777722 Multi-mode optical navigation  
A system and method is provided for selecting a light source in a pointing device such as a mouse. The selection of the light source may be based on attributes of a received image, which are in...
7751058 Optical rotation counter  
Optical rotation counter associated with a rotary disc of an angle sensor provided with means for coding the angular position of the disc, including at least one fixed source of coherent light...
7738112 Displacement detection apparatus, polarization beam splitter, and diffraction grating  
A displacement detection apparatus, polarization beam splitter, and diffraction grating are provided. A displacement detection apparatus configured to detect a displacement includes a light source,...
7710578 Position measuring arrangement  
A position measuring arrangement for detecting a relative position is disclosed. The position measuring arrangement includes a reflection scale graduation and a scanning unit having a plurality of...
7659992 Scale reading apparatus  
Apparatus for measuring displacement between two members. A scale is provided on one member and has an incremental pattern with at least one reference mark embedded in it. A read head is provided...
7636165 Displacement measurement systems lithographic apparatus and device manufacturing method  
A displacement measurement system configured to provide measurement of the relative displacement of two components in six degrees of freedom with improved consistency and without requiring...
7619745 Optical encoder including aperture with diffusion element and collimator lens  
An optical encoder which is designed to convert light generated from a light source into parallel light rays by using a collimator lens, thereby allowing the collimated light to radiate to gratings...
7599071 Determining positional error of an optical component using structured light patterns  
Described is an interferometric surface contour measurement system for projecting structured light patterns onto an object. The measurement system includes an interferometric projector, an imager,...
7573580 Optical position measuring system and method using a low coherence light source  
An optical position measuring system (e.g., an interferometer) includes a superluminescent device (SLD) (e.g., a laser diode having at least one anti-reflective coated surface) and a detector. The...
7573581 Position-measuring device  
A position-measuring device is for measuring the position of two objects that are movable relative to one another. The device includes a measuring graduation, which is connected to one of the two...
7561280 Displacement measurement sensor head and system having measurement sub-beams comprising zeroth order and first order diffraction components  
A sensor head for use with a measurement grating is described. The sensor head comprises: a splitter grating configured to split a light beam into first and second measurement beams; a first...
7545507 Displacement measurement system  
A displacement measurement apparatus includes a light source, a splitter grating, a measurement grating, and first a second detector arrays. The splitter grating splits a light beam into first and...
7528965 Lithographic apparatus and method for calibrating the same  
A measurement system configured to measure a position of an object in a lithographic apparatus, includes at least three position detectors configured to detect the position of the object, the at...
7505121 Multi-beam optical range sensor and self-propelled cleaner and air-conditioner equipped with the same  
In this multi-beam optical range sensor, since the diffraction grating splits output light of the light-emitting element into a plurality of beams, a plurality of beams can be outputted from the...
7502122 Fiber-optic miniature encoder for fine pitch scales  
An ultra-miniature interferometric fiber-optic encoder readhead for sensing displacement of a very fine pitch scale grating is disclosed. The readhead includes a source grating that diffracts...
7485847 Displacement sensor employing discrete light pulse detection  
Optical sensors, and methods for operating optical sensors, are disclosed. One such sensor may include: a reflector positioned a distance from a reflective diffraction grating and a light source...
7460231 Alignment tool for a lithographic apparatus  
An alignment tool for a lithographic apparatus illuminates an alignment mark on a substrate with an alignment beam and measures the reflected spectrum. The reflected spectrum is compared with a...
7443518 Measuring instrument, in particular for transmission measurement in vacuum system  
A measuring instrument, in particular for transmission measurement with transparent substrates, comprises a measuring head with a light emitting element for emitting a light beam and a light...
RE40551 Device for measuring translation, rotation or velocity via light beam interference  
The device for measuring translation, rotation or velocity includes at least a light source, a light detector, a first grating and a second grating, the first grating being mobile relative to the...
7440113 Littrow interferometer  
An apparatus and method for measuring displacement includes a light beam directed to an interferometer core that splits the light beam into first and second component beams. The first component...
7433048 Interferometer systems for measuring displacement and exposure systems using the same  
Interferometer systems for measuring displacement include a displacement interferometer. This interferometer includes a displacement converter responsive to a measuring beam of light. The...
7414730 High precision interferometer apparatus employing a grating beamsplitter  
Measurement of a distance change between a reference surface and a target is provided. A substrate has a first surface facing the target and including a grating. The grating and target combine to...
7394550 Displacement detector  
The displacement detector includes: a light source 140; a beam splitter 170 for dividing the light, which is sent from the light source 140, into two beams of light; reflection mirrors 181, 182...
7362446 Position measurement unit, measurement system and lithographic apparatus comprising such position measurement unit  
A measurement unit to determine a position in a first and second dimension includes a diffraction type encoder and an interferometer. The diffraction type encoder determines by means of a...
7324212 Optical encoder having slanted optical detector elements for harmonic suppression  
An optical encoder includes a source of a light beam, an optical grating that generates a spatial pattern of interference fringes, and an optical detector which includes generally elongated...
7319526 Apparatus for detecting displacement  
A displacement detection apparatus (100) includes a main scale (110) and a detection head (120). The detection head (120) includes a light emission/reception unit (130) and an optical device unit...
7304749 Point diffraction interferometer and exposure apparatus and method using the same  
A point diffraction interferometer measures optical performance of a target optical system based on a light intensity distribution of an interference fringe through an interference between a wave...
7293463 Acoustoelectric conversion device  
In an acoustoelectric converter element, a light wave from a light source is introduced into a first optical waveguide of a vibration substrate, and diffracted by a diffraction grating disposed on...
7274464 Position measuring device  
A position measuring device for detecting the spatial position of a movable element in relation to a base body, the device including a linear measuring device that measures a distance between a...
7271920 Position-measuring device  
A position-measuring device includes: a measuring graduation provided on a material measure going around in ring-like fashion; a scanning unit for optically scanning the measuring graduation using...
Matches 1 - 50 out of 246 1 2 3 4 5 >