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7414730 High precision interferometer apparatus employing a grating beamsplitter  
Measurement of a distance change between a reference surface and a target is provided. A substrate has a first surface facing the target and including a grating. The grating and target combine to...
7394550 Displacement detector  
The displacement detector includes: a light source 140 ; a beam splitter 170 for dividing the light, which is sent from the light source 140 , into two beams of light; reflection mirrors 181,...
7362446 Position measurement unit, measurement system and lithographic apparatus comprising such position measurement unit  
A measurement unit to determine a position in a first and second dimension includes a diffraction type encoder and an interferometer. The diffraction type encoder determines by means of a...
7355720 Optical displacement sensor  
An optical displacement sensor is disclosed which uses a vertical-cavity surface-emitting laser (VCSEL) coupled to an optical cavity formed by a moveable membrane and an output mirror of the VCSEL....
7324212 Optical encoder having slanted optical detector elements for harmonic suppression  
An optical encoder includes a source of a light beam, an optical grating that generates a spatial pattern of interference fringes, and an optical detector which includes generally elongated...
7319526 Apparatus for detecting displacement  
A displacement detection apparatus ( 100 ) includes a main scale ( 110 ) and a detection head ( 120 ). The detection head ( 120 ) includes a light emission/reception unit ( 130 ) and an optical...
7304749 Point diffraction interferometer and exposure apparatus and method using the same  
A point diffraction interferometer measures optical performance of a target optical system based on a light intensity distribution of an interference fringe through an interference between a wave...
7293463 Acoustoelectric conversion device  
In an acoustoelectric converter element, a light wave from a light source is introduced into a first optical waveguide of a vibration substrate, and diffracted by a diffraction grating disposed on...
7274464 Position measuring device  
A position measuring device for detecting the spatial position of a movable element in relation to a base body, the device including a linear measuring device that measures a distance between a...
7271920 Position-measuring device  
A position-measuring device includes: a measuring graduation provided on a material measure going around in ring-like fashion; a scanning unit for optically scanning the measuring graduation using...
7268883 Optoelectronic harmonically filtered detector system for a scanning unit  
An optoelectronic detector system is for generating a plurality of periodic, phase-shifted scanning signals from the scanning of a periodic fringe pattern. The fringe pattern extends in a detection...
7259863 Grating interference type optical encoder  
A grating interference type optical encoder has a scale board, a diffraction grating located on the scale board, a light receiving element, an illumination optical system for emitting a coherent...
7196780 Velocimeter, displacement meter, vibrometer and electronic device  
A first luminous flux emitted from the front end face of a LD is reflected by a mirror to be made incident on a detection point on the surface of a measuring object, and a second luminous flux...
7193766 Differential interferometric light modulator and image display device  
A light modulator incorporates a polarization sensitive prism and a novel MEMS ribbon device to impart a relative phase shift to polarization components of an incident light beam. A linear array of...
7187451 Apparatus for measuring two-dimensional displacement  
An apparatus for measuring a two-dimensional displacement is disclosed and includes a laser light source, a collimator lens, a beam splitter, a plurality of staggered conjugate optic lens and a...
7170047 Opto-electronic encoder with three-dimensional scales  
A single-, two- or three-axis opto-electronic encoder, or error-inputting device, with an optical scale which is overall cylindrical, spherical or volumetric, as opposed to extant planar, circular...
7154609 Interferential position measuring arrangement  
An interferential position measuring arrangement including a light source, which emits a beam of rays and an optical element, which converts the beam of rays emitted by the light source into an...
7134343 Opto-acoustoelectric device and methods for analyzing mechanical vibration and sound  
An opto-acoustoelectric device encompasses a diaphragm having a diffraction grating, the diaphragm is susceptible to a vibration driven by an external force; a light source oriented to irradiate...
7130054 Diffraction grating based interferometric systems and methods  
Diffraction grating based fiber optic interferometric systems for use in optical coherence tomography, wherein sample and reference light beams are formed by a first beam splitter and the sample...
7126696 Interferometric miniature grating encoder readhead using fiber optic receiver channels  
An interferometric fiber optic encoder readhead for sensing the displacement of a scale grating is disclosed. The detector channels of the readhead are fiber optic detector channels having...
7102760 Optical displacement sensor and optical encoder  
An optical displacement sensor comprises a surface emitting laser light source, a scale and a photosensor. The surface emitting laser light source emits a light beam having a predetermined shape....
7102759 Optical displacement sensor and optical encoder  
An optical displacement sensor comprises a surface emitting laser light source, a scale and a photosensor. The surface emitting laser light source emits a light beam having a predetermined shape....
7064842 Optical displacement sensor and optical encoder  
An optical displacement sensor comprises a surface emitting laser light source, a scale and a photosensor. The surface emitting laser light source emits a light beam having a predetermined shape....
7061624 Grating interference type optical encoder  
Provided is a grating interference type optical encoder including a scale board, a diffraction grating located on the scale board, a light receiving element, an illumination optical system for...
7046368 Position measuring arrangement  
A position measuring arrangement for determining a relative position between a first object and a second object. The arrangement includes a light source having a single-mode laser light source that...
7034948 Displacement pickup  
A displacement pickup is provided which includes a displaceable scale ( 12 ) having defined therein a first area ( 12 a ) where positional information is recorded with a predetermined pitch and a...
7019842 Position measuring device  
A position measuring device for detecting the relative position of a scanning unit and a scale. The position measuring device includes a scale and a scanning unit that is displaced with respect to...
7006693 Object recognition method  
The object of the present invention is to quickly and easily recognize the position, quantity, and kind of the object, which takes unspecified forms according to the angle in which the object is...
7006231 Diffraction grating based interferometric systems and methods  
Diffraction grating based fiber optic interferometric systems for use in optical coherence tomography, wherein sample and reference light beams are formed by a first beam splitter and the sample...
6999179 Optical encoder  
A light beam emitted from a semiconductor-laser light source is projected onto a diffraction-grating scale after passing through a collimator lens, a beam splitter and a central portion of an...
6940607 Method for absolute calibration of an interferometer  
In the case of a method for absolute calibration of an interferometer with the aid of a spherical output wave, comprising an optical element which retroflects the incident spherical wave itself or...
6940603 Optical encoder  
A surface-emitting laser is disposed on a photodetector disposed in parallel with a scale, so that an optical pattern surface of the scale can be irradiated with a light beam having a desired...
6922248 Optoelectronic component for contactless measurement of movements between a measurement object and the optoelectronic component  
An optoelectronic component has a carrier body as well as an optoelectronic transmitter for emitting a coherent light beam and an optoelectronic receiver, which are applied on the carrier body. An...
6906315 High accuracy miniature grating encoder readhead using fiber optic receiver channels  
A fiber optic encoder readhead for sensing the displacement of a scale grating is disclosed. The detector channels of the readhead are fiber optic detector channels having respective phase grating...
6897961 Heterodyne lateral grating interferometric encoder  
A heterodyne lateral grating interferometer having a laser signal received by an AOM which generates several defracted order beams including a zero order beam and higher order beams. A lens system...
6888639 In-situ film thickness measurement using spectral interference at grazing incidence  
A method and system using spectral interference of light from plasma emissions collected at near grazing incidence to in-situ monitor and control the film thickness of a non-opaque film....
6885457 Rotary position measuring system  
A rotary position measuring system having a housing connected with a scanning unit having a light source that emits beams of light and a detector element. A reflection scanning graduation structure...
6853942 Metrology hardware adaptation with universal library  
To generate sets of coefficients for use in optical metrology of semiconductor structures, at least three optical metrology signals for a set of parameters are obtained. The optical metrology...
6813030 Optical interference tomographic image observing apparatus  
An optical interference tomographic image observing apparatus is provided so as to detect the static or dynamic structure at a deep portion of a living body or the like and provide a...
6806964 Optical recording and/or reproduction apparatus, tracking method, and optical recording medium  
An optical recording and/or reproduction apparatus includes: a light source for emitting a first light beam; an optical system for outputting first and second diffracted light beams and a second...
6775008 Opto-electronic scale reading apparatus  
A scale ( 10 ) is illuminated by a light source ( 18 ). After interaction with an index grating ( 12 ), fringes (F) are formed in a Talbot plane and analyzed by an analyzer grating ( 14 ). To...
6771377 Optical displacement sensing device with reduced sensitivity to misalignment  
An optical displacement sensing device is provided for determining the relative displacement of a diffraction scale grating that may have a grating pitch less than the wavelength of the light of...
6744520 Method for measuring two-dimensional displacement using conjugate optics  
A method for measuring two-dimensional displacement using conjugate optics comprises the steps of emitting an incident beam onto a diffraction element to generate many firstly diffracted beams,...
6654128 Displacement information detecting apparatus  
This invention relates to a displacement information detecting apparatus which has a light beam illuminating system for making a light beam enter a first area of the grating portion of a relatively...
6643025 Microinterferometer for distance measurements  
Several embodiments of a microinterferometer are disclosed. A first embodiment of a microinterferometer for measuring the absolute distance to an object surface includes a substrate. The...
6631047 Interference device, position detecting device, positioning device and information recording apparatus using the same  
An apparatus having a first system for forming a composite light beam of two light beams to be made to interfere with each other, a splitting member for amplitude-splitting the composite light beam...
6631005 Optical displacement sensor having a semiconductor laser light source using an optical element which can control beam angle and a beam shape  
An optical displacement sensor includes a laser light source, a scale, a photodetector, and an optical element which refracts light beams to the scale. The scale is displaced in a fashion...
6587211 Interferometric torque and power sensor  
An interferometric optical torque sensor senses the torque transmitted by a rotating shaft without requiring physical contact with the shaft. A diffraction grating is provided on the shaft with its...
6577401 Encoder displacement measuring apparatus with liquid crystal  
In a displacement measuring apparatus for detecting a displacement of a measured object by using a scale that moves with the measured object, the cost of this apparatus is reduced by decreasing the...
6570660 Measuring instrument  
A light wave measuring instrument has a small optical system. Beams from a laser light source illuminate a grating scale and plus-first-order-diffracted and minus-first-order-diffracted beams from...
Matches 1 - 50 out of 224 1 2 3 4 5 >