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7636165 Displacement measurement systems lithographic apparatus and device manufacturing method  
A displacement measurement system configured to provide measurement of the relative displacement of two components in six degrees of freedom with improved consistency and without requiring...
7619745 Optical encoder including aperture with diffusion element and collimator lens  
An optical encoder which is designed to convert light generated from a light source into parallel light rays by using a collimator lens, thereby allowing the collimated light to radiate to gratings...
7599071 Determining positional error of an optical component using structured light patterns  
Described is an interferometric surface contour measurement system for projecting structured light patterns onto an object. The measurement system includes an interferometric projector, an imager,...
7586621 Displacement-measuring optical scale and optical encoder using same  
When a convex lens 13 comes close to 0-th order transmitted light T 0 with rotation of an optical scale 11 , the 0-th order transmitted light T 0 derived from a light beam L emitted from a...
7573581 Position-measuring device  
A position-measuring device is for measuring the position of two objects that are movable relative to one another. The device includes a measuring graduation, which is connected to one of the two...
7573580 Optical position measuring system and method using a low coherence light source  
An optical position measuring system (e.g., an interferometer) includes a superluminescent device (SLD) (e.g., a laser diode having at least one anti-reflective coated surface) and a detector. The...
7561280 Displacement measurement sensor head and system having measurement sub-beams comprising zeroth order and first order diffraction components  
A sensor head for use with a measurement grating is described. The sensor head comprises: a splitter grating configured to split a light beam into first and second measurement beams; a first...
7545507 Displacement measurement system  
A displacement measurement apparatus includes a light source, a splitter grating, a measurement grating, and first a second detector arrays. The splitter grating splits a light beam into first and...
7528965 Lithographic apparatus and method for calibrating the same  
A measurement system configured to measure a position of an object in a lithographic apparatus, includes at least three position detectors configured to detect the position of the object, the at...
7505121 Multi-beam optical range sensor and self-propelled cleaner and air-conditioner equipped with the same  
In this multi-beam optical range sensor, since the diffraction grating splits output light of the light-emitting element into a plurality of beams, a plurality of beams can be outputted from the...
7502122 Fiber-optic miniature encoder for fine pitch scales  
An ultra-miniature interferometric fiber-optic encoder readhead for sensing displacement of a very fine pitch scale grating is disclosed. The readhead includes a source grating that diffracts...
7485847 Displacement sensor employing discrete light pulse detection  
Optical sensors, and methods for operating optical sensors, are disclosed. One such sensor may include: a reflector positioned a distance from a reflective diffraction grating and a light source...
7460231 Alignment tool for a lithographic apparatus  
An alignment tool for a lithographic apparatus illuminates an alignment mark on a substrate with an alignment beam and measures the reflected spectrum. The reflected spectrum is compared with a...
RE40551 Device for measuring translation, rotation or velocity via light beam interference  
The device for measuring translation, rotation or velocity includes at least a light source, a light detector, a first grating and a second grating, the first grating being mobile relative to the...
7443518 Measuring instrument, in particular for transmission measurement in vacuum system  
A measuring instrument, in particular for transmission measurement with transparent substrates, comprises a measuring head with a light emitting element for emitting a light beam and a light...
7440113 Littrow interferometer  
An apparatus and method for measuring displacement includes a light beam directed to an interferometer core that splits the light beam into first and second component beams. The first component...
7440117 Highly-sensitive displacement-measuring optical device  
Micron-scale displacement measurement devices having enhanced performance characteristics are disclosed. One embodiment of a micron-scale displacement measurement device includes a phase-sensitive...
7433048 Interferometer systems for measuring displacement and exposure systems using the same  
Interferometer systems for measuring displacement include a displacement interferometer. This interferometer includes a displacement converter responsive to a measuring beam of light. The...
7414730 High precision interferometer apparatus employing a grating beamsplitter  
Measurement of a distance change between a reference surface and a target is provided. A substrate has a first surface facing the target and including a grating. The grating and target combine to...
7394550 Displacement detector  
The displacement detector includes: a light source 140 ; a beam splitter 170 for dividing the light, which is sent from the light source 140 , into two beams of light; reflection mirrors 181,...
7362446 Position measurement unit, measurement system and lithographic apparatus comprising such position measurement unit  
A measurement unit to determine a position in a first and second dimension includes a diffraction type encoder and an interferometer. The diffraction type encoder determines by means of a...
7324212 Optical encoder having slanted optical detector elements for harmonic suppression  
An optical encoder includes a source of a light beam, an optical grating that generates a spatial pattern of interference fringes, and an optical detector which includes generally elongated...
7319526 Apparatus for detecting displacement  
A displacement detection apparatus ( 100 ) includes a main scale ( 110 ) and a detection head ( 120 ). The detection head ( 120 ) includes a light emission/reception unit ( 130 ) and an optical...
7304749 Point diffraction interferometer and exposure apparatus and method using the same  
A point diffraction interferometer measures optical performance of a target optical system based on a light intensity distribution of an interference fringe through an interference between a wave...
7293463 Acoustoelectric conversion device  
In an acoustoelectric converter element, a light wave from a light source is introduced into a first optical waveguide of a vibration substrate, and diffracted by a diffraction grating disposed on...
7274464 Position measuring device  
A position measuring device for detecting the spatial position of a movable element in relation to a base body, the device including a linear measuring device that measures a distance between a...
7271920 Position-measuring device  
A position-measuring device includes: a measuring graduation provided on a material measure going around in ring-like fashion; a scanning unit for optically scanning the measuring graduation using...
7268883 Optoelectronic harmonically filtered detector system for a scanning unit  
An optoelectronic detector system is for generating a plurality of periodic, phase-shifted scanning signals from the scanning of a periodic fringe pattern. The fringe pattern extends in a detection...
7259863 Grating interference type optical encoder  
A grating interference type optical encoder has a scale board, a diffraction grating located on the scale board, a light receiving element, an illumination optical system for emitting a coherent...
7196780 Velocimeter, displacement meter, vibrometer and electronic device  
A first luminous flux emitted from the front end face of a LD is reflected by a mirror to be made incident on a detection point on the surface of a measuring object, and a second luminous flux...
7187451 Apparatus for measuring two-dimensional displacement  
An apparatus for measuring a two-dimensional displacement is disclosed and includes a laser light source, a collimator lens, a beam splitter, a plurality of staggered conjugate optic lens and a...
7170047 Opto-electronic encoder with three-dimensional scales  
A single-, two- or three-axis opto-electronic encoder, or error-inputting device, with an optical scale which is overall cylindrical, spherical or volumetric, as opposed to extant planar, circular...
7154609 Interferential position measuring arrangement  
An interferential position measuring arrangement including a light source, which emits a beam of rays and an optical element, which converts the beam of rays emitted by the light source into an...
7134343 Opto-acoustoelectric device and methods for analyzing mechanical vibration and sound  
An opto-acoustoelectric device encompasses a diaphragm having a diffraction grating, the diaphragm is susceptible to a vibration driven by an external force; a light source oriented to irradiate...
7130054 Diffraction grating based interferometric systems and methods  
Diffraction grating based fiber optic interferometric systems for use in optical coherence tomography, wherein sample and reference light beams are formed by a first beam splitter and the sample...
7126696 Interferometric miniature grating encoder readhead using fiber optic receiver channels  
An interferometric fiber optic encoder readhead for sensing the displacement of a scale grating is disclosed. The detector channels of the readhead are fiber optic detector channels having...
7102760 Optical displacement sensor and optical encoder  
An optical displacement sensor comprises a surface emitting laser light source, a scale and a photosensor. The surface emitting laser light source emits a light beam having a predetermined shape....
7102759 Optical displacement sensor and optical encoder  
An optical displacement sensor comprises a surface emitting laser light source, a scale and a photosensor. The surface emitting laser light source emits a light beam having a predetermined shape....
7064842 Optical displacement sensor and optical encoder  
An optical displacement sensor comprises a surface emitting laser light source, a scale and a photosensor. The surface emitting laser light source emits a light beam having a predetermined shape....
7061624 Grating interference type optical encoder  
Provided is a grating interference type optical encoder including a scale board, a diffraction grating located on the scale board, a light receiving element, an illumination optical system for...
7046368 Position measuring arrangement  
A position measuring arrangement for determining a relative position between a first object and a second object. The arrangement includes a light source having a single-mode laser light source that...
7034948 Displacement pickup  
A displacement pickup is provided which includes a displaceable scale ( 12 ) having defined therein a first area ( 12 a ) where positional information is recorded with a predetermined pitch and a...
7006693 Object recognition method  
The object of the present invention is to quickly and easily recognize the position, quantity, and kind of the object, which takes unspecified forms according to the angle in which the object is...
6999179 Optical encoder  
A light beam emitted from a semiconductor-laser light source is projected onto a diffraction-grating scale after passing through a collimator lens, a beam splitter and a central portion of an...
6940607 Method for absolute calibration of an interferometer  
In the case of a method for absolute calibration of an interferometer with the aid of a spherical output wave, comprising an optical element which retroflects the incident spherical wave itself or...
6940603 Optical encoder  
A surface-emitting laser is disposed on a photodetector disposed in parallel with a scale, so that an optical pattern surface of the scale can be irradiated with a light beam having a desired...
6922248 Optoelectronic component for contactless measurement of movements between a measurement object and the optoelectronic component  
An optoelectronic component has a carrier body as well as an optoelectronic transmitter for emitting a coherent light beam and an optoelectronic receiver, which are applied on the carrier body. An...
6906315 High accuracy miniature grating encoder readhead using fiber optic receiver channels  
A fiber optic encoder readhead for sensing the displacement of a scale grating is disclosed. The detector channels of the readhead are fiber optic detector channels having respective phase grating...
6897961 Heterodyne lateral grating interferometric encoder  
A heterodyne lateral grating interferometer having a laser signal received by an AOM which generates several defracted order beams including a zero order beam and higher order beams. A lens system...
6888639 In-situ film thickness measurement using spectral interference at grazing incidence  
A method and system using spectral interference of light from plasma emissions collected at near grazing incidence to in-situ monitor and control the film thickness of a non-opaque film....
Matches 1 - 50 out of 227 1 2 3 4 5 >