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7557930 |
Bessel beam interferometer and measurement method
A measurement method and apparatus rely upon the coherent optical interference between a reference beam and a diffractionless sensing beam having an optical path length that has been disturbed. The...
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7555190 |
Optical fiber ferrule retainer
An optical fiber ferrule retainer, for retaining a ferrule in a state in which the ferrule is inserted into a ferrule insertion hole in an axial direction of the ferrule insertion hole, comprises:...
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7528962 |
Apparatus and methods for reducing non-cyclic non-linear errors in interferometry
In general, in one aspect, the invention features interferometry systems that include an interferometer configured to direct a first beam and a second beam derived from common light source along...
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7528959 |
Apparatus and method for sizing nanoparticles based on interferometric field detection
Light from a laser source is split into a reference arm and a detection arm. The light in the detection arm is focused into a channel containing particles to be detected and is backscattered by the...
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7486404 |
Size difference measuring method and size difference measuring apparatus
A size difference measuring method comprising: an optical interference measuring step without wringing, of obtaining, through simultaneous measurement of interference fringes, size information...
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7486403 |
Droplet shape measuring method and apparatus
In order to accurately measure a shape feature of a minute droplet arranged on a substrate by a simple method, with respect to the droplet, the substrate is perpendicularly irradiated with laser...
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7457721 |
Method and apparatus for measuring small displacement
Without using an interferometer, small displacement and/or three-dimensional shape of an object is detected in a noncontact way with high accuracy using pseudo-phase information calculated from...
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7424144 |
Method for checking periodic structures on lithography masks
The invention, which relates to a method for checking periodic structures on lithography masks, in which an image of the structure of the lithography mask is generated by an imaging optic of a...
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7420688 |
Scanning, self-referencing interferometer
A scanning, self-referencing interferometer may include a scanning mechanism to scan a path length of a test beam portion of a laser beam. The scanning, self-referencing interferometer may also...
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7359064 |
Quantum positioning systems and methods
Included in this disclosure is a quantum positioning system (QPS) that includes a corner cube reflector and a plurality of baselines. Each baseline may include an interferometer, which may include...
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7345771 |
Apparatus and method for measurement of critical dimensions of features and detection of defects in UV, VUV, and EUV lithography masks
Methods and apparatus are disclosed for measurement of critical dimensions (CD) of features and detection of defects in reflecting UV, VUV, and EUV lithography masks and in transmitting UV and VUV...
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7319531 |
Method for measuring a thickness of a coating
A method for measuring a thickness of a coating of a constructional unit, in particular a heat-compatible coating on a component of a gas turbine, includes measuring coordinates of the...
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7319528 |
Surface texture measuring instrument
A surface texture measuring instrument provided with a near-field measuring unit ( 30 ) including a near-field probe ( 33 ) that forms a near-field light at a tip end thereof when a laser beam is...
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7312877 |
Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy
A method of measuring properties of a substrate, the method involving: illuminating a spot on the substrate with a standing wave measurement beam to generate a return measurement beam, the standing...
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7292346 |
Triangulation methods and systems for profiling surfaces through a thin film coating
An optical system includes a photolithography system, a low coherence interferometer, and a detector. The photolithography system is configured to illuminate a portion of an object with a light...
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7268887 |
Overlapping common-path interferometers for two-sided measurement
Two common-path interferometers share a measuring cavity for measuring opposite sides of opaque test parts. Interference patterns are formed between one side of the test parts and the reference...
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7227464 |
Auto wake-up method from sleep mode of an optical motion sensing device
There is described a method for waking up an optical sensing device from a sleep mode to a motion detection mode, the optical motion sensing device comprising a light source, a photodetector...
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7224467 |
System for rotation measurement with laser interferometry
An apparatus for use in rotational measurement. A rotational assembly is provided that is rotationally movable about a rotational axis. At least two interferometers are provided that are each able...
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7209238 |
Interferometer arrangement and interferometric measuring method
The invention relates to an interferometer arrangement ( 1000 ) having at least one measuring beam path for providing light in an object area, at least one reference beam path and at least one unit...
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7173714 |
Apparatus for parallel detection of the behaviour of mechanical micro-oscillators
The invention concerns an apparatus for parallel detection of the behaviour of mechanical micro-oscillators interacting with the sample ( 21 ). The amplitude and the phase of resonance of...
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7164481 |
Coefficient of linear expansion measuring apparatus and coefficient of linear expansion measuring method
A coefficient of linear expansion measuring apparatus includes: two reflection plates between which a sample is put, a container to house them, which is filled with a gas having known rate of a...
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7126586 |
Data input devices and methods for detecting movement of a tracking surface by detecting laser doppler self-mixing effects of a frequency modulated laser light beam
A data input device for use with a tracking surface having light-scattering properties with respect to the device. The device comprising a single laser having a modulated light beam. A beam...
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7049578 |
Optical movement information detector, movement information detection system, electronic equipment and encoder
Two different phase components obtained by splitting interference light of light from an object by a diffraction grating are guided to first and second PD's by a second optical system. A first...
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7009712 |
Leaky guided wave modes used in interferometric confocal microscopy to measure properties of trenches
A method of using an interferometric confocal microscope to measure features of a trench or via in a substrate, wherein the interferometric confocal microscope produces a measurement beam, the...
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6998570 |
Beam welding apparatus and methods
An apparatus and method may be used for welding a first panel to a second panel, the first panel having an inboard side partially contacting the second panel and an opposite outboard side. The...
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6977730 |
Method and apparatus for alignment of a precision optical assembly
Interferometric apparatus and methods for assembling and measuring highly precise optical assemblies such as triple corner cubes, and the like. The apparatus and methods use one or more...
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6975405 |
Method and apparatus for measuring flatness and/or relative angle between top and bottom surfaces of a chip
A system and method for obtaining metrics of a semiconductor chip are provided. A first surface of a chip is positioned on a substantially flat receiving surface. A topography of the receiving...
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6970789 |
Method of determining a best initial focal position estimate
The invention provides a method for a method for determining a best initial focal position estimate for a current sample location on a substrate comprising multiple sample locations, comprising...
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6970251 |
Method for vibration measurement and interferometer
A Method for measuring vibrations in small and microscopic objects is disclosed. The method includes the steps of vibrating the object at a frequency, illuminating the object with a light source...
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6959103 |
Displacement sensor having a display data output
Provided is a displacement sensor which allows at least part of the data used from the time of obtaining an image until the time of computing the displacement can be readily verified. In a...
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6958469 |
Diffraction grating interference system encoder for detecting displacement information
A displacement information detector in which a coherent luminous flux from a light source is applied to a diffraction grating scale adapted to be relatively moved to generate two diffracted rays of...
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6950193 |
System for monitoring substrate conditions
A system for determining at least one condition of a substrate includes an optical waveguide for transmitting light from a light source. The optical waveguide can be embedded in the substrate and...
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6947149 |
Method of assisting sample inclination error adjustment
While a ferrule held by a clamping apparatus is rotated by a predetermined angle, respective interference fringe images of a spherical leading end part of the ferrule are obtained at three or more...
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6922249 |
Beam masking to reduce cyclic error in beam launcher of interferometer
Embodiments of the present invention are directed to reducing cyclic error in the beam launcher of an interferometer. In one embodiment, an interferometry apparatus comprises a reference beam...
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6922248 |
Optoelectronic component for contactless measurement of movements between a measurement object and the optoelectronic component
An optoelectronic component has a carrier body as well as an optoelectronic transmitter for emitting a coherent light beam and an optoelectronic receiver, which are applied on the carrier body. An...
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6888639 |
In-situ film thickness measurement using spectral interference at grazing incidence
A method and system using spectral interference of light from plasma emissions collected at near grazing incidence to in-situ monitor and control the film thickness of a non-opaque film....
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6878301 |
Methods and apparatuses for trench depth detection and control
A method for optically detecting a trench depth includes detecting a first maxima in an intensity of multi-wavelength light. A portion of the multi-wavelength light is reflected from a top trench...
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6873416 |
Medical scanning system and related method of scanning
The present invention is directed to a scanning system that uses uniform rotary motion of an optical reflector to create reciprocal linear scanning. The system converts uniform rotation into...
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6864988 |
Optical system with isolated measuring structure
An optical system, in particular an exposure lens for semiconductor lithography, with a plurality of optical elements has at least one load-dissipating structure. The load-dissipating structure...
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6822745 |
Optical systems for measuring form and geometric dimensions of precision engineered parts
The invention features a method for determining a geometric property of a test object, the method including: interferometrically profiling a first surface of the test object in a first coordinate...
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6806008 |
Method for adjusting a temperature in a resist process
A test reticle having a pad and antenna structures with varying critical dimensions is provided to measure sidewall angles developing in the resist sidewalls of clear lines. These sidewall angles...
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6776543 |
Fiber optic print media thickness sensor and method
The present invention is directed to a fiber optic media thickness sensor used in a print media or document processing device. The invention is further directed to a method for measuring media...
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6772078 |
Linear scale reader
A length measuring apparatus is provided that combines upper data with lower data and then outputs the composite data. The apparatus monitors taking down or up a digit of upper data or lower data...
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6738146 |
Method for measuring the spin in an optical fibre
The invention relates to a method for measuring the spin in an optical fibre by irradiating an optical fibre with light so as to form an interference pattern, wherein the ovality of the optical...
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6707027 |
Method of measuring the movement of an input device
An optical input device for an apparatus generates input signals by moving the device and an object ( 15 ) relative to each other and measures the movement by the effects of self-mixing in a diode...
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6674533 |
Anodizing system with a coating thickness monitor and an anodized product
An anodizing system for forming a anodized coating on at least a portion of a substrate thereby creating an anodized substrate is disclosed. The anodizing system includes a bath, a coating...
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6671057 |
Gravity and differential gravity sensor, and system and method for monitoring reservoirs using same
A gravity sensor is disclosed which includes a first mass adapted to free fall when selectively released from an initial position. The mass has optical elements adapted to change a length of an...
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6650426 |
Endpoint determination for recess etching to a precise depth
A method for plasma etching a shallow recess or shallow trench at a predetermined depth by illuminating a wafer with a light source and using a spectrometer to receive the light reflected from the...
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6643025 |
Microinterferometer for distance measurements
Several embodiments of a microinterferometer are disclosed. A first embodiment of a microinterferometer for measuring the absolute distance to an object surface includes a substrate. The...
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6643024 |
Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometer
Interferometric apparatus and methods for reducing the effects of coherent artifacts in interferometers. Fringe contrast in interferograms is preserved while coherent artifacts that would otherwise...
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